Reliability of MEMS: testing of materials and devices
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Weinheim
Wiley-VCH
2013
|
| Series: | Advanced micro & nanosystems
[6] |
| Subjects: | |
| Physical Description: | XX, 303 S. Ill., graph. Darst. |
| ISBN: | 9783527335015 |
Staff View
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Record in the Search Index
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| id | DE-604.BV040990357 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:36:56Z |
| institution | BVB |
| isbn | 9783527335015 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-025968172 |
| oclc_num | 844103560 |
| open_access_boolean | |
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| owner_facet | DE-1050 DE-83 DE-634 DE-92 |
| physical | XX, 303 S. Ill., graph. Darst. |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Wiley-VCH |
| record_format | marc |
| series | Advanced micro & nanosystems |
| series2 | Advanced micro & nanosystems |
| spelling | Reliability of MEMS testing of materials and devices ed. by Osamu Tabata ... Weinheim Wiley-VCH 2013 XX, 303 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Advanced micro & nanosystems [6] Microelectromechanical systems Reliability Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s DE-604 Mikrosystemtechnik (DE-588)4221617-5 s Tabata, Osamu edt Erscheint auch als Online-Ausgabe, PDF 978-3-527-67503-6 Advanced micro & nanosystems [6] (DE-604)BV019371555 6 |
| spellingShingle | Reliability of MEMS testing of materials and devices Advanced micro & nanosystems Microelectromechanical systems Reliability Nanotechnologie (DE-588)4327470-5 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4327470-5 (DE-588)4221617-5 |
| title | Reliability of MEMS testing of materials and devices |
| title_auth | Reliability of MEMS testing of materials and devices |
| title_exact_search | Reliability of MEMS testing of materials and devices |
| title_full | Reliability of MEMS testing of materials and devices ed. by Osamu Tabata ... |
| title_fullStr | Reliability of MEMS testing of materials and devices ed. by Osamu Tabata ... |
| title_full_unstemmed | Reliability of MEMS testing of materials and devices ed. by Osamu Tabata ... |
| title_short | Reliability of MEMS |
| title_sort | reliability of mems testing of materials and devices |
| title_sub | testing of materials and devices |
| topic | Microelectromechanical systems Reliability Nanotechnologie (DE-588)4327470-5 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Microelectromechanical systems Reliability Nanotechnologie Mikrosystemtechnik |
| volume_link | (DE-604)BV019371555 |
| work_keys_str_mv | AT tabataosamu reliabilityofmemstestingofmaterialsanddevices |