Introduction to semiconductor manufacturing technology:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE Press
2012
|
| Edition: | 2. ed. |
| Subjects: | |
| Physical Description: | 664 S. Ill., graph. Darst. |
| ISBN: | 9780819490926 |
Staff View
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Record in the Search Index
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| author | Xiao, Hong |
| author_facet | Xiao, Hong |
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| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
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| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2. ed. |
| format | Book |
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| id | DE-604.BV040987790 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:36:53Z |
| institution | BVB |
| isbn | 9780819490926 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-025965644 |
| oclc_num | 841758999 |
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| owner_facet | DE-20 DE-83 DE-898 DE-BY-UBR |
| physical | 664 S. Ill., graph. Darst. |
| publishDate | 2012 |
| publishDateSearch | 2012 |
| publishDateSort | 2012 |
| publisher | SPIE Press |
| record_format | marc |
| spelling | Xiao, Hong Verfasser aut Introduction to semiconductor manufacturing technology Hong Xiao 2. ed. Bellingham, Wash. SPIE Press 2012 664 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Semiconductor industry Semiconductors Design and construction Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s DE-604 Halbleiter (DE-588)4022993-2 s Fertigung (DE-588)4016899-2 s |
| spellingShingle | Xiao, Hong Introduction to semiconductor manufacturing technology Semiconductor industry Semiconductors Design and construction Fertigung (DE-588)4016899-2 gnd Halbleiter (DE-588)4022993-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4016899-2 (DE-588)4022993-2 (DE-588)4158814-9 |
| title | Introduction to semiconductor manufacturing technology |
| title_auth | Introduction to semiconductor manufacturing technology |
| title_exact_search | Introduction to semiconductor manufacturing technology |
| title_full | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_fullStr | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_full_unstemmed | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_short | Introduction to semiconductor manufacturing technology |
| title_sort | introduction to semiconductor manufacturing technology |
| topic | Semiconductor industry Semiconductors Design and construction Fertigung (DE-588)4016899-2 gnd Halbleiter (DE-588)4022993-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Semiconductor industry Semiconductors Design and construction Fertigung Halbleiter Halbleitertechnologie |
| work_keys_str_mv | AT xiaohong introductiontosemiconductormanufacturingtechnology |