System-level modeling of MEMS:
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| Format: | Book |
| Language: | English |
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Weinheim
Wiley-VCH-Verl.
[2013]
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| Series: | Advanced micro & nanosystems
10 |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XXXII, 530 S. Ill., graph. Darst. |
| ISBN: | 9783527319039 9783527647132 |
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| 245 | 1 | 0 | |a System-level modeling of MEMS |c edited by Tamara Bechtold .... |
| 246 | 1 | 3 | |a System-level modeling of MEMS |
| 264 | 1 | |a Weinheim |b Wiley-VCH-Verl. |c [2013] | |
| 264 | 4 | |c © 2013 | |
| 300 | |a XXXII, 530 S. |b Ill., graph. Darst. | ||
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IMAGE 1
CONTENTS
ABOUT T H E EDITORS XIX
SERIES EDITOR PREFACE XXI
VOLUME EDITORS PREFACE XXIII
LIST O F CONTRIBUTORS XXVII
PART I PHYSICAL AND MATHEMATICAL FUNDAMENTALS 1
1 INTRODUCTION: ISSUES IN MICROSYSTEMS MODELING 3
GARY K. FEDDER AND TAMAL MUKHETJEE 1.1 THE NEED FOR SYSTEM-LEVEL MODELS
FOR MICROSYSTEMS 3 1.2 COUPLED MULTIPHYSICS MICROSYSTEMS 4 1.3
MULTISCALE MODELING A N D SIMULATION 6
1.4 SYSTEM-LEVEL MODEL TERMINOLOGY 7 1.5 AUTOMATED MODEL ORDER REDUCTION
METHODS 9
1.6 HANDLING COMPLEXITY: FOLLOWING THE VLSI PARADIGM 10 1.7 ANALOG
HARDWARE DESCRIPTION LANGUAGES 11 1.8 GENERAL ATTRIBUTES O F
SYSTEM-LEVEL MODELS 12 1.9 AHDL SIMULATION CAPABILITIES 13
1.10 COMPOSABLE MODEL LIBRARIES 14 1.11 PARAMETER EXTRACTION, MODEL
VERIFICATION, A N D MODEL VALIDATION 15 1.12 CONCLUSIONS 16
REFERENCES 17
2 SYSTEM-LEVEL MODELING O F MEMS USING GENERALIZED KIRCHHOFFIAN NETWORKS
- BASIC PRINCIPLES 19 GABRIELE SCHRAG AND GERHARD WACHUTKA 2.1
INTRODUCTION A N D MOTIVATION 19
2.2 GENERALIZED KIRCHHOFFIAN NETWORKS FOR THE TAILORED SYSTEM-LEVEL
MODELING O F MICROSYSTEMS 20
HTTP://D-NB.INFO/1017774811
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V I I I | CONTENTS
2.2.1 GENERIC MODELING APPROACH FOR MICRODEVICES A N D SYSTEMS 21
2.2.2 F R O M CONTINUOUS-FIELD LEVEL TO COMPACT MODELS 23 2.2.3
APPROACHES TO COMPACT MODEL DERIVATION 29 2.2.3.1 FINITE NETWORK (FN)
MODELS 29 2.2.3.2 COMPACT MODELING O F MEMS 3 0 2.2.3.3 MIXED-LEVEL
MODELING (MLM) 31 2.2.3.4 MATHEMATICAL MODEL ORDER REDUCTION (MOR) 3 2
2.3 APPLICATION 1: PHYSICS-BASED ELECTROFLUIDIC COMPACT MODEL O F A N
ELECTROSTATICALLY ACTUATED MICROPUMP 32 2.3.1 COMPACT MODEL O F THE
MEMBRANE DRIVE 34 2.3.2 COMPACT MODEL O F THE VALVES 36
2.3.3 SYSTEM-LEVEL MODEL O F THE TUBES 38 2.3.4 PHYSICS-BASED
SYSTEM-LEVEL MODEL O F THE MICROPUMP 39 2.3.5 MODEL CALIBRATION A N D
PARAMETER EXTRACTION 40 2.4 APPLICATION 2: ELECTROSTATICALLY ACTUATED RF
MEMS SWITCH 41 2.4.1 CONCLUSIONS 46
REFERENCES 48
3 SYSTEM-LEVEL MODELING O F MEMS BY MEANS O F MODEL ORDER REDUCTION
(MATHEMATICAL APPROXIMATIONS) - MATHEMATICAL BACKGROUND 53 LIHONG FENG,
PETER BENNER, AND J A N G. KORVINK 3.1 INTRODUCTION 53
3.2 BRIEF OVERVIEW 5 5
3.3 MATHEMATICAL PRELIMINARIES 56
3.3.1 SCALAR, VECTOR, A N D MATRIX 5 7
3.3.2 VECTOR SPACE, SUBSPACE, LINEAR INDEPENDENCE, A N D BASIS 5 7 3.3.3
LAPLACE TRANSFORM 60
3.3.4 RATIONAL FUNCTION 60
3.3.5 NORMS 61
3.3.5.1 VECTOR A N D MATRIX NORMS 61 3.3.5.2 VECTOR FUNCTION NORMS A N D
MATRIX FUNCTION NORMS 62 3.4 NUMERICAL ALGORITHMS 63
3.5 LINEAR SYSTEM THEORY 66
3.5.1 TRANSFER FUNCTION 66
3.5.2 MEASURE O F THE DIFFERENCE BETWEEN ANY TWO DIFFERENT LTI SYSTEMS 6
7
3.5.3 CONTROLLABILITY A N D OBSERVABILITY 68 3.5.4 REALIZATION THEORY 69
3.5.5 STABILITY A N D PASSIVITY O F A SYSTEM 70 3.6 BASIC IDEA O F MODEL
ORDER REDUCTION 71
3.7 MOMENT-MATCHING MODEL ORDER REDUCTION 73 3.7.1 MOMENTS A N D M O M E
N T VECTORS 73
3.7.2 COMPUTATION O F THE PROJECTION MATRICES W A N D V 74 3.7.3
DIFFERENT CHOICES O F THE EXPANSION POINTS 75 3.7.4 DEVELOPMENT O F
MOMENT-MATCHING MOR 76
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CONTENTS I I X
3.8 GRAMIAN-BASED MODEL ORDER REDUCTION 7 7
3.8.1 MOTIVATION O F BALANCED TRUNCATION 78 3.8.2 BALANCING
TRANSFORMATION 78 3.8.3 TRUNCATION 80
3.8.4 COMPUTATION O F THE BALANCING TRANSFORMATION 81 3.8.5 ACCELERATION
METHODS O F COMPUTING THE GRAMIANS 82 3.8.6 EXTENSION TO MORE GENERAL
SYSTEMS 83 3.9 STABILITY, PASSIVITY, A N D ERROR ESTIMATION O F THE
REDUCED
MODEL 84
3.9.1 STABILITY, PASSIVITY, AND ERROR BOUND O F MOMENT-MATCHING MOR 84
3.9.2 STABILITY, PASSIVITY, A N D ERROR BOUND O F THE GRAMIAN-BASED MOR
84
3.10 DEALING WITH NONZERO INITIAL CONDITION 85 3.11 MOR FOR
SECOND-ORDER, NONLINEAR, PARAMETRIC SYSTEMS 86 3.12 CONCLUSION A N D
OUTLOOK 86
REFERENCES 87
4 ALGORITHMIC APPROACHES FOR SYSTEM-LEVEL SIMULATION O F MEMS AND
ASPECTS O F COSIMULATION 95 PETER SCHNEIDER, CHRISTOPH CLAUJI, ULRICH
DONATH, GTTNTER ELST, OLAF ENGE-ROSENBLATT, AND THOMAS UHLE
4.1 INTRODUCTION 95
4.2 MATHEMATICAL STRUCTURE O F MEMS MODELS 96 4.2.1 DIFFERENTIAL A N D
ALGEBRAIC EQUATIONS 9 7 4.2.1.1 MULTIBODY SYSTEMS 98 4.2.1.2 FLUIDIC
SYSTEMS 99 4.2.1.3 NETWORKS 101 4.2.2 BOOLEAN EQUATIONS AND FINITE STATE
MACHINES 102 4.3 GENERAL APPROACHES FOR SYSTEM-LEVEL MODEL
DESCRIPTION 104
4.3.1 SPICE A N D MACROMODELING 104 4.3.2 MODEL DESCRIPTION LANGUAGES
105 4.4 NUMERICAL METHODS FOR SYSTEM-LEVEL SIMULATION 107 4.4.1 SOLUTION
O F NONLINEAR DAES 107 4.4.2 MIXED-SIGNAL SIMULATION CYCLE 109 4.4.3
COSIMULATION 110
4.4.3.1 COUPLING ALGORITHMS 111 4.4.3.2 COSIMULATION INTERFACE 112 4.5
EMERGING PROBLEMS A N D ADVANCED SIMULATION TECHNIQUES 113
4.5.1 DISCONTINUOUS FORCING FUNCTIONS 114 4.5.2 STRUCTURAL CHANGES I N
MODEL EQUATIONS 117 4.6 CONCLUSION 118
REFERENCES 118
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X | CONTENTS
PART II LUMPED ELEMENT MODELING METHOD FOR MEMS DEVICES 123
5 SYSTEM-LEVEL MODELING O F SURFACE MICROMACHINED BEAMLIKE
ELECTROTHERMAL MICROACTUATORS 125 REN-GANG LI AND QING-AN HUANG 5.1
INTRODUCTION 125
5.2 CLASSIFICATION A N D PROBLEM DESCRIPTION 127 5.2.1 IN-PLANE 127
5.2.1.1 U-SHAPED ACTUATOR 127 5.2.1.2 BENT-BEAM ACTUATORS 128 5.2.1.3
LONG-SHORT BEAM ACTUATOR 128 5.2.2 O U T O F PLANE 129
5.2.3 MATERIAL PROPERTIES 129
5.2.3.1 THERMAL CONDUCTIVITY 129 5.2.3.2 SPECIFIC HEAT 130
5.2.3.3 RESISTIVITY 130
5.2.3.4 COEFFICIENT O F THERMAL EXPANSION 130 5.3 MODELING 131
5.3.1 ELECTROTHERMAL MODEL O F A BEAM 131 5.3.2 THERMOMECHANICAL MODEL O
F THE BEAM 134 5.4 SOLVING 136
5.4.1 EQUIVALENT CIRCUIT O F A COUPLED ELECTROTHERMAL MODEL 137 5.4.2
EQUIVALENT CIRCUIT O F THE THERMOMECHANICAL MODEL O F A BEAM 138 5.5
CASE STUDY 139
5.6 CONCLUSION A N D OUTLOOK 142
REFERENCES 143
6 SYSTEM-LEVEL MODELING O F PACKAGING EFFECTS O F MEMS DEVICES 147 JING
SONG AND QING-AN HUANG 6.1 INTRODUCTION 147
6.2 PACKAGING EFFECTS O F MEMS A N D THEIR IMPACT O N TYPICAL MEMS
DEVICES 148 6.2.1 ACCELEROMETERS 148
6.2.2 GYROS 149
6.2.3 PRESSURE SENSORS 149
6.2.4 THERMAL ACTUATORS 149
6.2.5 HALL SENSORS 150
6.3 SYSTEM-LEVEL MODELING 150
6.3.1 SYSTEM PARTITIONING 151
6.3.2 BEHAVIORAL MODELING O F SINGLE SUBSTRUCTURES 152 6.3.2.1 MICROBEAM
MODEL 152 6.3.2.2 CHIP/ADHESIVE/PACKAGE MODEL 153 6.3.2.3 SUPPORT MODEL
155
6.3.3 ELEMENT INTEGRATION 156
6.3.4 FEM A N D EXPERIMENTAL VALIDATION 157
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CONTENTS | X I
6.4 CONCLUSION A N D OUTLOOK 160
REFERENCES 160
7 MIXED-LEVEL APPROACH FOR T H E MODELING O F DISTRIBUTED EFFECTS IN
MICROSYSTEMS 163 MARTIN NIESSNER AND GABRIELE SCHRAG
7.1 GENERAL CONCEPT O F FINITE NETWORKS A N D MIXED-LEVEL MODELS 163 7.2
APPROACHES FOR THE MODELING O F SQUEEZE FILM DAMPING IN MEMS 165 7.2.1
REYNOLDS EQUATION-BASED MODELING STRATEGIES 166 7.2.2 MOTIVATION FOR
USING MIXED-LEVEL MODELING 168
7.3 MIXED-LEVEL MODELING O F SQUEEZE FILM DAMPING IN MEMS 169 7.3.1
FINITE NETWORK-BASED EVALUATION O F THE REYNOLDS EQUATION 170 7.3.2
PHYSICS-BASED LUMPED ELEMENT MODELS 173 7.3.2.1 BOUNDARY MODEL 173
7.3.2.2 HOLE MODEL 174
7.3.3 GAS RAREFACTION EFFECTS 175
7.3.4 CALCULATION O F THE TOTAL DAMPING FORCE 177 7.3.5 COUPLING WITH
MECHANICAL MODELS 177 7.3.6 AUTOMATED MODEL GENERATION 178 7.4
EVALUATION 179
7.4.1 NUMERICAL EVALUATION 179
7.4.2 EXPERIMENTAL EVALUATION 180 7.4.3 COMPARISON WITH ALTERNATIVE
DAMPING MODELS 185 7.5 CONCLUSION 186
REFERENCES 187
8 COMPACT MODELING O F RF-MEMS DEVICES 191 JACOPO IANNACCI 8.1
INTRODUCTION 191
8.2 BRIEF DESCRIPTION O F THE MEMS COMPACT MODELING APPROACH 192 8.3
RF-MEMS MULTISTATE ATTENUATOR PARALLEL SECTION 194 8.4 RF-MEMS
MULTISTATE ATTENUATOR SERIES SECTION 202
8.5 WHOLE RF-MEMS MULTISTATE ATTENUATOR NETWORK 205 8.6 CONCLUSIONS 207
REFERENCES 208
PART III MATHEMATICAL MODEL ORDER REDUCTION FOR MEMS DEVICES 211
9 MOMENT-MATCHING-BASED LINEAR MODEL ORDER REDUCTION FOR NONPARAMETRIC
AND PARAMETRIC ELECTROTHERMAL MEMS MODELS 213 TAMARA BECHTOLD, DENNIS
HOHLFDD, EVGENII B. RUDNYI, AND J A N G. KORVINK 9.1 INTRODUCTION 213
9.2 METHODOLOGY FOR APPLYING MODEL ORDER REDUCTION TO ELECTROTHERMAL
MEMS MODELS: REVIEW O F ACHIEVED RESULTS A N D OPEN ISSUES 213 9.3 MEMS
CASE STUDY - SILICON-BASED MICROHOTPLATE 220
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X I I I CONTENTS
9.4 APPLICATION O F THE REDUCED-ORDER MODEL FOR THE PARAMETERIZATION O F
T H E
CONTROLLER 223
9.5 APPLICATION O F PARAMETRIC REDUCED-ORDER MODEL TO THE EXTRACTION OF
THIN-FILM THERMAL PARAMETERS 227 9.5.1 PARAMETRIC MODEL ORDER REDUCTION
228 9.5.2 PARAMETER EXTRACTION METHODOLOGY 230
9.6 CONCLUSION A N D OUTLOOK 232
REFERENCES 234
10 PROJECTION-BASED NONLINEAR MODEL ORDER REDUCTION 237 A M I T HOCHMAN,
DMITRY M. VASILYEV, MICHAI J. REWIENSKI, AND JACOB K. WHITE 10.1
INTRODUCTION 237
10.2 PROBLEM SPECIFICATION 238
10.3 PROJECTION PRINCIPLE A N D EVALUATION COST FOR NONLINEAR SYSTEMS
239 10.4 TAYLOR SERIES EXPANSIONS 240
10.4.1 MICROFLUIDIC CHANNEL EXAMPLE 241 10.4.2 MODEL REDUCTION VIA
QUADRATIC TAYLOR EXPANSION 242 10.4.3 STABILITY ISSUES 244
10.4.4 TAYLOR SERIES EXPANSIONS: SUMMARY 245 10.5 TRAJECTORY
PIECEWISE-LINEAR METHOD 245 10.5.1 NONLINEAR TRANSMISSION-LINE MODEL 246
10.5.2 STABILITY ISSUES 247
10.5.3 TPWL SUMMARY 249
10.6 DISCRETE EMPIRICAL INTERPOLATION METHOD 250 10.6.1 THERMAL ANALYSIS
251
10.6.2 STABILITY ISSUES 253
10.6.3 DEIM SUMMARY 254
10.7 A COMPARATIVE CASE STUDY O F A N MEMS SWITCH 255 10.7.1 PULL-IN
EFFECT 256
10.7.2 GENERALIZING FROM TRAINING INPUTS 258 10.7.3 HARMONIC DISTORTION
258
10.7.4 A NOTE ABOUT CPU TIMES 259
10.8 SUMMARY A N D OUTLOOK 260
ACKNOWLEDGMENT 260 REFERENCES 261
11 LINEAR AND NONLINEAR MODEL ORDER REDUCTION FOR MEMS ELECTROSTATIC
ACTUATORS 263 JAN LIENEMANN, EMANUELE BERTARELLI, ANDREAS GREINER, AND J
A N G. KORVINK 11.1 INTRODUCTION 263
11.2 THE VARIABLE GAP PARALLEL PLATE CAPACITOR 264 11.2.1 PULL-IN 266
11.2.2 REGIMES O F THE TRAJECTORY 268 11.3 MODEL ORDER REDUCTION METHODS
269
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CONTENTS X I I I
11.3.1 REPRESENTATION O F N ONLINEARITIES 270
11.3.2 MOR METHODS FOR SECOND-ORDER LINEAR SYSTEMS 270 11.3.3 MOR
METHODS FOR NONLINEAR SYSTEMS 272 11.3.3.1 POLYNOMIAL PROJECTION 273
11.3.3.2 TRAJECTORY PIECEWISE-LINEAR (TPWL) METHOD 274 11.4 EXAMPLE 1:
IBM SCANNING-PROBE DATA STORAGE DEVICE 275 11.4.1 CANTILEVER MODEL 277
11.4.2 MODEL ORDER REDUCTION WITH POLYNOMIAL PROJECTION 277 11.4.2.1
EXTRACTION O F NONLINEAR SYSTEM 277 11.4.2.2 POLYNOMIAL APPROXIMATION
278 11.4.2.3 MODEL ORDER REDUCTION O F THE POLYNOMIAL SYSTEM 278 11.4.3
RESULTS 279
11.4.4 DISCUSSION 281
11.5 EXAMPLE 2: ELECTROSTATIC MICROPUMP DIAPHRAGM 281 11.5.1 PLATE MODEL
FORMULATION 282 11.5.2 MODEL ORDER REDUCTION BY TPWL A N D ARNOLDI
METHODS 284 11.6 RESULTS A N D DISCUSSION 285
11.7 CONCLUSIONS 286
ACKNOWLEDGMENTS 287 REFERENCES 287
12 MODAL-SUPERPOSITION-BASED NONLINEAR MODEL ORDER REDUCTION FOR MEMS
GYROSCOPES 291 JAN MEHNER 12.1 INTRODUCTION 291
12.2 MODEL ORDER REDUCTION VIA MODAL SUPERPOSITION 292 12.3 MEMS
TESTCASE: VIBRATORY GYROSCOPE 293 12.4 FLOW CHART O F THE NONLINEAR
MODEL ORDER REDUCTION PROCEDURE 294 12.5 THEORETICAL BACKGROUND O F
MODAL SUPERPOSITION TECHNOLOGIES 295 12.5.1 LINEAR MECHANICAL SYSTEMS
295 12.5.2 NONLINEAR ELECTROMECHANICAL INTERACTIONS A N D BODY LOADS O F
CAPACITIVE
SENSORS 297
12.5.3 PARAMETRIC REDUCED ORDER MODELS FOR PACKAGING INTERACTIONS 298
12.6 SPECIFIC ALGORITHMS O F T H E REDUCED ORDER MODEL GENERATION PASS
299
12.6.1 EXTRACTION O F BODY LOAD CONTRIBUTION VECTORS FOR MODAL
SUPERPOSITION 299 12.6.2 EXTRACTION O F CAPACITANCES FOR COMB CELL
CONDUCTORS A N D PLATELIKE CAPACITORS 301 12.6.3 DATA SAMPLING A N D
FUNCTION FIT PROCEDURES FOR MULTIVARIABLE
CAPACITANCES 302 12.7 SYSTEM SIMULATIONS O F MEMS BASED O N MODAL
SUPERPOSITION 304 12.7.1 BEHAVIORAL ANALYSIS O F VIBRATORY GYROSCOPES IN
MATLAB/
SIMULINK 304
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X I V | CONTENTS
12.7.2 SIMULATIONS WITH REDUCED ORDER MODELS BASED O N KIRCHHOFFIAN
NETWORKS 306
12.7.3 EXPANSION O F SYSTEM SIMULATION RESULTS TO FULL ORDER FEM MODELS
306
12.8 CONCLUSION A N D OUTLOOK 307
REFERENCES 308
PART IV MODELING O F ENTIRE MICROSYSTEMS 311
13 TOWARDS SYSTEM-LEVEL SIMULATION O F ENERGY HARVESTING MODULES 313
DENNIS HOHLFELD, TAMARA BECHTOLD, EVGENII B. RUDNYI, BERT OP HET VELD,
AND ROB VAN SCHAIJK 13.1 INTRODUCTION 313
13.1.1 WIRELESS AUTONOMOUS SENSOR NODES 314 13.1.2 MICROPOWER MODULE 315
13.1.3 VIBRATIONAL HARVESTERS 316 13.2 DESIGN A N D FABRICATION O F THE
PIEZOELECTRIC GENERATOR 317
13.3 EXPERIMENTAL RESULTS 318
13.4 MODELING A N D SIMULATION 318
13.4.1 LUMPED ELEMENT MODELING 319 13.4.2 FINITE ELEMENT MODELING 320
13.4.3 MODEL ORDER REDUCTION 322 13.4.4 TRANSIENT MEMS CIRCUIT
COSIMULATION 323
13.4.5 HARMONIC MEMS CIRCUIT COSIMULATION 325 13.5 MAXIMUM POWER POINT
FOR THE PIEZOELECTRIC HARVESTER 327 13.5.1 COMPLEX MATCHING 328 13.5.2
REAL MATCHING 330
13.5.3 CONSEQUENCE O F MATCHING 331 13.6 CONCLUSIONS A N D OUTLOOK 332
REFERENCES 333
14 APPLICATION O F REDUCED ORDER MODELS IN CIRCUIT-LEVEL DESIGN FOR RF
MEMS DEVICES 335 LAURA DEL TIN, EVGENII B. RUDNYI, AND JAN G. KORVINK
14.1 MODEL EQUATIONS FOR RF MEMS DEVICES 337
14.2 EXTRACTION O F THE REDUCED ORDER MODEL 340 14.2.1 SECOND ORDER ODE
SYSTEMS 341 14.2.2 HANDLING NONLINEARITIES I N THE INPUT FUNCTION 341
14.2.3 EXTRACTION PROCEDURE 343
14.3 APPLICATION EXAMPLES 345
14.3.1 VIBRATING DEVICES 345 14.3.2 MICROSWITCH 351
14.4 CONCLUSION A N D OUTLOOK 354
REFERENCES 355
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CONTENTS | X V
15 SYSTEMC AMS AND COSIMUIATION ASPECTS 357
FRANGOIS PICHEUX, MARIE-MINERVE LOUERAT, AND KARSTEN EINWICH 15.1
INTRODUCTION 357
15.2 HETEROGENEOUS MODELING WITH SYSTEMC AMS 358 15.2.1 SYSTEMC AMS
TIMED DATAFLOW (TDF) 358 15.2.2 TIMED DATAFLOW MODEL O F THE
ACCELEROMETER 359 15.2.3 ELECTRICAL LINEAR NETWORK MODEL O F THE MEMS
ACCELEROMETER 361 15.3 CASE STUDY: DETECTION O F SEISMIC PERTURBATIONS
USING THE ACCELEROMETER 363 15.3.1 SEISMIC STIMULI A N D SEISMIC SENSORS
I N SYSTEMC AMS TDF 365 15.3.2 DIGITAL CONTROLLER IN SYSTEMC 365 15.3.3
2.4 G H Z RF TRANSCEIVER 366 15.3.4 BATTERY MODELING 368 15.3.5 EMBEDDED
SOFTWARE, CROSS-COMPILED G N U GCC APPLICATION FOR
MIPS 369
15.3.6 SIMULATION RESULTS 369
15.4 CONCLUSION 370
APPENDIX 371 REFERENCES 374
16 SYSTEM LEVEL MODELING O F ELECTROMECHANICAL SIGMA-DELTA MODULATORS
FOR INERTIAL MEMS SENSORS 3 7 7 MICHAEL KRAFT 16.1 INTRODUCTION A N D
MOTIVATION 377
16.2 SECOND ORDER ELECTROMECHANICAL E AM FOR A MEMS ACCELEROMETER 380
16.2.1 BASIC MODEL 380
16.2.2 ADVANCED MODEL 386 16.3 HIGHER ORDER ELECTROMECHANICAL E A M FOR
MEMS ACCELEROMETER 391 16.3.1 DESIGN METHODOLOGY FOR HIGHER ORDER E M S
A M 391 16.3.2 EXAMPLE DESIGN 392
16.3.3 FEEDBACK LINEARIZATION 395 16.3.4 ADVANCED MODEL 396 16.4 HIGHER
ORDER ELECTROMECHANICAL S A M FOR MEMS GYROSCOPES 397 16.5 CONCLUDING
REMARKS 400
REFERENCES 401
PART V SOFTWARE IMPLEMENTATIONS 405
17 3D PARAMETRIC-LIBRARY-BASED MEMS/IC DESIGN 407 GUNAR LORENZ AND
GEROLD SCHROPFER 17.1 ABOUT SCHEMATIC-DRIVEN MEMS MODELING 407
17.2 A 3D PARAMETRIC LIBRARY FOR MEMS D E S I G N - M E M S + 409
17.2.1 3D DESIGN ENTRY FOR MEMS 409
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X V I | CONTENTS
17.2.2 MEMS MODEL LIBRARY 410
17.2.3 INTEGRATION WITH SYSTEM SIMULATORS 412 17.2.4 INTEGRATION WITH
MATLAB A N D SIMULINK 413 17.2.5 INTEGRATION WITH EDA TOOLS 414 17.3
TOWARD MANUFACTURABLE MEMS DESIGNS 415
17.3.1 PARAMETERIZATION O F PROCESS A N D MATERIAL PROPERTIES 415 17.3.2
PROCESS DESIGN KITS 418
17.4 MICROMIRROR ARRAY DESIGN EXAMPLE 419 17.5 CONCLUSIONS 422
REFERENCES 423
18 MORFORANSYS 425
EVGENII B. RUDNYI
18.1 INTRODUCTION 425
18.2 PRACTICE-ORIENTED RESEARCH DURING THE DEVELOPMENT O F MOR FOR ANSYS
426 18.3 PROGRAMMING ISSUES 429
18.3.1 OBTAINING SYSTEM MATRICES FROM ANSYS 430 18.3.2 SOLVERS 431
18.4 OPEN PROBLEMS 432
18.5 CONCLUSION 436
REFERENCES 437
19 SUGAR: A SPICE FOR MEMS 439
JASON V. CLARK
19.1 INTRODUCTION 439
19.2 SUGAR 439
19.2.1 EQUATION O F MOTION 440
19.3 SUGAR-BASED APPLICATIONS 444 19.3.1 LIBRARY 444
19.3.2 DESIGN/SIMULATION 445 19.3.3 LAYOUT GENERATION 445 19.3.4 C O M M
O N GROUND TRACERS 445 19.3.5 ETCH HOLES 447
19.3.6 MULTILAYER PADS 447
19.3.7 PARAMETERIZED ARRAYS 447 19.3.8 OPTIMIZATION 448
19.3.9 NEMS 448
19.3.10 PSUGAR 450
19.3.11 GUI CONFIGURATION 450 19.3.12 DAES 451
19.3.13 SIMULATION 453 19.4 INTEGRATION O F SUGAR + COMSOL + SPICE +
SIMULINK 454 19.4.1 INTEGRATION 456
19.4.2 VERIFICATION 457
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CONTENTS | X V I I
19.5 CONCLUSION 4 5 7
REFERENCES 458
20 MODEL ORDER REDUCTION IMPLEMENTATIONS IN COMMERCIAL MEMS DESIGN
ENVIRONMENT 461 SANDEEP AKKARAJU
20.1 INTRODUCTION 461
20.1.1 A B INITIO (FIRST PRINCIPLES) SIMULATIONS 461 20.1.2 TECHNOLOGY
CAD (TCAD) 462 20.1.3 SCHEMATIC OR COMPONENT-BASED DESIGN (TOP-DOWN
DESIGN) 462 20.1.4 LAYOUT-BASED DESIGN (BOTTOM-UP DESIGN) 463 20.1.5
SYSTEM MODEL EXTRACTION (SME) 464 20.1.6 VERIFICATION 465
20.1.7 SYSTEM SIMULATION 4 6 7
20.2 INTELLISENSE'S DESIGN METHODOLOGY 4 6 7 20.2.1 FROM THE TOP DOWN 4
6 7
20.2.2 ONE STEP AT A TIME 468
20.2.3 CLOSING THE LOOP 469
20.3 IMPLEMENTATION O F SYSTEM MODEL EXTRACTION IN INTELLISUITE 470
20.3.1 HIGH-LEVEL OVERVIEW 470 20.3.2 CAPTURING RESIDUAL STRESS A N D
FILM DAMPING EFFECTS 471 20.3.3 IMPLEMENTATION 473
20.4 BENCHMARKS 474
20.4.1 ACCELEROMETER 474 20.4.2 INERTIAL GYROSCOPE 474 20.4.3 FLUID
DAMPING 477
20.4.4 COUPLED PACKAGE-DEVICE MODELING 478 20.5 SUMMARY 480
REFERENCES 481
21 REDUCED ORDER MODELING O F MEMS AND IC SYSTEMS - A PRACTICAL APPROACH
483 SEBASTIEN CASES AND MARY-ANN MAKER 21.1 INTRODUCTION 483
21.2 THE MEMS DEVELOPMENT ENVIRONMENT 484 21.3 MODELING REQUIREMENTS A N
D IMPLEMENTATION WITHIN SOFTMEMS SIMULATION ENVIRONMENT 485 21.3.1
MODELS A N D INPUTS 487
21.3.2 MODELING PROCESS 490
21.3.3 MODEL OUTPUT 492
21.3.4 PARAMETERIZATION 492 21.4 APPLICATIONS 494
21.5 CONCLUSIONS A N D OUTLOOK 498
REFERENCES 498
IMAGE 12
X V I I I | CONTENTS
22 A WEB-BASED COMMUNITY FOR MODELING AND DESIGN O F MEMS 501
PETER J. GUGUNN, JASON V. CLARK, NARAYAN ALURU, TAMAL MUKHEIJEE, AND
GARY K. FEDDER 22.1 INTRODUCTION 501
22.2 THE MEMS MODELING A N D DESIGN LANDSCAPE 501 22.3 LEVERAGING
WEB-BASED COMMUNITIES 502 22.3.1 CONCEPTS O F WEB-BASED DESIGN 503
22.3.2 DESIGN COMMUNITY CONSTITUTION 504
22.4 MEMS MODELING A N D DESIGN ONLINE 505 22.4.1 SYSTEM-LEVEL MODELING
O F MEMS 506 22.4.2 WEB-BASED COMMUNITY CONVENTIONS 507 22.5 ENCODING
MEMS BEHAVIORAL MODELS 508 22.5.1 INSIDE THE BLACK BOX - NONLINEAR BEAM
509 22.5.2 BEHAVIORAL MODEL PERFORMANCE - NONLINEAR BEAM 511 22.5.3
BEHAVIORAL MODEL EXTENSIONS 512 22.5.4 BEHAVIORAL MODEL COMPOSABILITY
513
22.6 CONCLUSIONS A N D OUTLOOK 515
REFERENCES 515
INDEX 519 |
| any_adam_object | 1 |
| author2 | Bechtold, Tamara |
| author2_role | edt |
| author2_variant | t b tb |
| author_facet | Bechtold, Tamara |
| building | Verbundindex |
| bvnumber | BV040752833 |
| classification_rvk | ZN 3750 |
| ctrlnum | (OCoLC)828803728 (DE-599)BVBBV040752833 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre_facet | Aufsatzsammlung |
| id | DE-604.BV040752833 |
| illustrated | Illustrated |
| indexdate | 2024-07-20T06:47:30Z |
| institution | BVB |
| isbn | 9783527319039 9783527647132 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-025732567 |
| oclc_num | 828803728 |
| open_access_boolean | |
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| owner_facet | DE-M347 DE-703 DE-29T DE-11 DE-634 DE-1043 DE-92 DE-83 |
| physical | XXXII, 530 S. Ill., graph. Darst. |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Wiley-VCH-Verl. |
| record_format | marc |
| series | Advanced micro & nanosystems |
| series2 | Advanced micro & nanosystems |
| spelling | System-level modeling of MEMS edited by Tamara Bechtold .... System-level modeling of MEMS Weinheim Wiley-VCH-Verl. [2013] © 2013 XXXII, 530 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Advanced micro & nanosystems 10 MEMS (DE-588)4824724-8 gnd rswk-swf Computersimulation (DE-588)4148259-1 gnd rswk-swf Ordnungsreduktion (DE-588)4136085-0 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content MEMS (DE-588)4824724-8 s Computersimulation (DE-588)4148259-1 s Ordnungsreduktion (DE-588)4136085-0 s DE-604 Bechtold, Tamara edt Erscheint auch als Online-Ausgabe, PDF 978-3-527-64712-5 Advanced micro & nanosystems 10 (DE-604)BV019371555 10 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025732567&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | System-level modeling of MEMS Advanced micro & nanosystems MEMS (DE-588)4824724-8 gnd Computersimulation (DE-588)4148259-1 gnd Ordnungsreduktion (DE-588)4136085-0 gnd |
| subject_GND | (DE-588)4824724-8 (DE-588)4148259-1 (DE-588)4136085-0 (DE-588)4143413-4 |
| title | System-level modeling of MEMS |
| title_alt | System-level modeling of MEMS |
| title_auth | System-level modeling of MEMS |
| title_exact_search | System-level modeling of MEMS |
| title_full | System-level modeling of MEMS edited by Tamara Bechtold .... |
| title_fullStr | System-level modeling of MEMS edited by Tamara Bechtold .... |
| title_full_unstemmed | System-level modeling of MEMS edited by Tamara Bechtold .... |
| title_short | System-level modeling of MEMS |
| title_sort | system level modeling of mems |
| topic | MEMS (DE-588)4824724-8 gnd Computersimulation (DE-588)4148259-1 gnd Ordnungsreduktion (DE-588)4136085-0 gnd |
| topic_facet | MEMS Computersimulation Ordnungsreduktion Aufsatzsammlung |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025732567&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV019371555 |
| work_keys_str_mv | AT bechtoldtamara systemlevelmodelingofmems |