Jenaer Arbeiten zur Elektronenstrahllithographie: T. 2. (ab 1990)
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| Main Author: | |
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| Format: | Article |
| Language: | German |
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2012
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| Subjects: | |
| Physical Description: | Ill., graph. Darst. |
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Record in the Search Index
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| spelling | Hahmann, Peter Verfasser (DE-588)125027494 aut Jenaer Arbeiten zur Elektronenstrahllithographie T. 2. (ab 1990) Peter Hahmann 2012 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Geschichte gnd rswk-swf Elektronenstrahllithografie (DE-588)4151897-4 gnd rswk-swf Jena (DE-588)4028557-1 gnd rswk-swf Jena (DE-588)4028557-1 g Elektronenstrahllithografie (DE-588)4151897-4 s Geschichte z DE-604 volume:15 year:2012 pages:73-171 Jenaer Jahrbuch zur Technik- und Industriegeschichte / im Auftr. des Vereins Technikgeschichte in Jena e.V. Jena 15 (2012), S. 73 - 171 (DE-604)BV022397121 (DE-600)2024259-1 |
| spellingShingle | Hahmann, Peter Jenaer Arbeiten zur Elektronenstrahllithographie Elektronenstrahllithografie (DE-588)4151897-4 gnd |
| subject_GND | (DE-588)4151897-4 (DE-588)4028557-1 |
| title | Jenaer Arbeiten zur Elektronenstrahllithographie |
| title_auth | Jenaer Arbeiten zur Elektronenstrahllithographie |
| title_exact_search | Jenaer Arbeiten zur Elektronenstrahllithographie |
| title_full | Jenaer Arbeiten zur Elektronenstrahllithographie T. 2. (ab 1990) Peter Hahmann |
| title_fullStr | Jenaer Arbeiten zur Elektronenstrahllithographie T. 2. (ab 1990) Peter Hahmann |
| title_full_unstemmed | Jenaer Arbeiten zur Elektronenstrahllithographie T. 2. (ab 1990) Peter Hahmann |
| title_short | Jenaer Arbeiten zur Elektronenstrahllithographie |
| title_sort | jenaer arbeiten zur elektronenstrahllithographie t 2 ab 1990 |
| topic | Elektronenstrahllithografie (DE-588)4151897-4 gnd |
| topic_facet | Elektronenstrahllithografie Jena |
| work_keys_str_mv | AT hahmannpeter jenaerarbeitenzurelektronenstrahllithographie |