Plasma chemistry:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Cambridge [u.a.]
Cambridge Univ. Press
2012
|
| Edition: | 1. paperback ed. |
| Subjects: | |
| Online Access: | Klappentext Inhaltsverzeichnis |
| Item Description: | Includes bibliographical references (p. 915-961) and index |
| Physical Description: | XLII, 978 S. Ill., graph. Darst. |
| ISBN: | 9781107684935 9780521847353 |
Staff View
MARC
| LEADER | 00000nam a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV040546166 | ||
| 003 | DE-604 | ||
| 005 | 20150408 | ||
| 007 | t | ||
| 008 | 121116s2012 xxkad|| |||| 00||| eng d | ||
| 010 | |a 2008298230 | ||
| 020 | |a 9781107684935 |c pbk. |9 978-1-107-68493-5 | ||
| 020 | |a 9780521847353 |c hbk. |9 978-0-521-84735-3 | ||
| 035 | |a (OCoLC)820399456 | ||
| 035 | |a (DE-599)BVBBV040546166 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 044 | |a xxk |c GB | ||
| 049 | |a DE-703 |a DE-11 |a DE-83 |a DE-29T |a DE-634 | ||
| 050 | 0 | |a QD581 | |
| 082 | 0 | |a 541/.0424 | |
| 084 | |a UR 8000 |0 (DE-625)146642: |2 rvk | ||
| 084 | |a VE 5850 |0 (DE-625)147126:253 |2 rvk | ||
| 100 | 1 | |a Fridman, Alexander A. |d 1953- |e Verfasser |0 (DE-588)1053135238 |4 aut | |
| 245 | 1 | 0 | |a Plasma chemistry |c Alexander Fridman |
| 250 | |a 1. paperback ed. | ||
| 264 | 1 | |a Cambridge [u.a.] |b Cambridge Univ. Press |c 2012 | |
| 300 | |a XLII, 978 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Includes bibliographical references (p. 915-961) and index | ||
| 650 | 4 | |a Plasma chemistry |v Textbooks | |
| 650 | 0 | 7 | |a Plasmachemie |0 (DE-588)4254737-4 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Plasmachemie |0 (DE-588)4254737-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 856 | 4 | 2 | |m Digitalisierung UB Bayreuth |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025391978&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Klappentext |
| 856 | 4 | 2 | |m Digitalisierung UB Bayreuth |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025391978&sequence=000004&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-025391978 | ||
Record in the Search Index
| _version_ | 1804149637887557632 |
|---|---|
| adam_text | PLASMA
CHEMISTRY
This unique book provides a fundamental introduction to all aspects of modern
plasma chemistry. The book describes mechanisms and kinetics of chemical pro¬
cesses in plasma, plasma statistics, thermodynamics, fluid mechanics, and elec¬
trodynamics, as well as all major electric discharges applied in plasma chemistry.
The book considers most of the major applications of plasma chemistry, from
electronics to thermal coatings, from treatment of polymers to fuel conversion
and hydrogen production, and from plasma metallurgy to plasma medicine. The
book can be helpful to engineers, scientists, and students interested in plasma
physics, plasma chemistry, plasma engineering, and combustion, as well as in
chemical physics, lasers, energy systems, and environmental control. The book
contains an extensive database on plasma kinetics and thermodynamics, as well as
many convenient numerical formulas for practical calculations related to specific
plasma-chemical processes and applications. The book contains a large number
of problems and concept questions that are helpful in university courses related to
plasma, lasers, combustion, chemical kinetics, statistics and thermodynamics, and
high-temperature and high-energy fluid mechanics.
Alexander
Fridman
is Nyheim Chair Professor of Drexel University and Director
of Drexel Plasma Institute. His research focuses on plasma approaches to material
treatment, fuel conversion, hydrogen production, biology, medicine, and environ¬
mental control. Professor
Fridman
has more than
35
years of plasma research expe¬
rience in national laboratories and universities in Russia, France, and the United
States. He has published
6
books and
450
papers, chaired several international
plasma conferences, and received numerous awards, including the Stanley Kaplan
Distinguished Professorship in Chemical Kinetics and Energy Systems, the George
Soros Distinguished Professorship in Physics, and the State Prize of the USSR for
discovery of selective stimulation of chemical processes in non-thermal plasma.
Contents
Foreword page
xxxix
Preface
xli
1 Introduction to Theoretical and Applied Plasma Chemistry I
1.1. Plasma as the Fourth State of Matter I
1.2.
Plasma in Nature and in the Laboratory
2
1.3.
Plasma Temperatures: Thermal and Non-Thermal Plasmas
4
1.4.
Plasma Sources for Plasma Chemistry: Gas Discharges
5
1
.5.
Fundamentals of Plasma Chemistry: Major Components of
Chemically Active Plasma and Mechanisms of Plasma-Chemical
Processes
8
1
.6.
Applied Plasma Chemistry
9
1
.7.
Plasma as a High-Tech Magic Wand of Modern Technology 1
0
2
Elementary Plasma-Chemical Reactions 1
2
2.
1
.
Ionización
Processes 1
2
2.1.1.
Elementary Charged Particles in Plasma 1
2
2.
1
.2.
Elastic and Inelastic Collisions and Their Fundamental
Parameters 1
3
2.
1
.3.
Classification of lonization Processes 1
4
2.
1
.4.
Elastic Scattering and Energy Transfer in Collisions of
Charged Particles: Coulomb Collisions 1
5
2.
1
.5.
Direct lonization by Electron Impact: Thomson Formula 1
6
2.
1
.6.
Specific Features of lonization of Molecules by Electron
Impact: Frank-Condon Principle and Dissociative
lonization 1
7
2.
1
.7.
Stepwise lonization by Electron Impact 1
8
2.
1
.8.
lonization by High-Energy Electrons and Electron Beams:
Bethe-Bloch Formula
20
2.
1
.9.
Photo-lonization Processes
20
2.
1
.10.
lonization in Collisions of Heavy Particles: Adiabatic
Principle and Massey Parameter
2
1
2.
1
.
11
.
Penning lonization Effect and Associative lonization
2
1
2.2.
Elementary Plasma-Chemical Reactions of Positive Ions
22
2.2.
1
.
Different Mechanisms of Electron-Ion Recombination in
Plasma
22
VII
Contents
2.2.2.
Dissociative
Electron—Ion
Recombination and Possible
Preliminary Stage of Ion Conversion
23
2.2.3.
Three-Body and Radiative Electron-Ion Recombination
Mechanisms
25
2.2.4.
Ion-Molecular Reactions, Ion-Molecular Polarization
Collisions, and the
Langevin
Rate Coefficient
26
2.2.5.
Ion-Atomic Charge Transfer Processes and Resonant
Charge Transfer
28
2.2.6.
Non-Resonant Charge Transfer Processes and
Ion-Molecular Chemical Reactions of Positive and
Negative Ions
29
2.3.
Elementary Plasma-Chemical Reactions Involving Negative Ions
31
2.3.
1
.
Dissociative Electron Attachment to Molecules as a Major
Mechanism of Negative Ion Formation in Electronegative
Molecular Gases
31
2.3.2.
Three-Body Electron Attachment and Other Mechanisms
of Formation of Negative Ions
33
2.3.3.
Destruction of Negative Ions: Associative Detachment,
Electron Impact Detachment, and Detachment in
Collisions with Excited Particles
35
2.3.4.
Recombination of Negative and Positive Ions
37
2.3.5.
Ion-Ion Recombination in Binary Collisions
38
2.3.6.
Three-Body Ion-Ion Recombination: Thomson s Theory
and
Langevin
Model
39
2.4.
Electron Emission and Heterogeneous lonization Processes
42
2.4.
1
.
Thermionic Emission:
Sommerfeld
Formula and Schottky
Effect
42
2.4.2.
Field Emission of Electrons in Strong Electric Fields:
Fowler-Nordheim Formula and Thermionic Field Emission
43
2.4.3.
Secondary Electron Emission
45
2.4.4.
Photo-lonization of Aerosols: Monochromatic Radiation
46
2.4.5.
Photo-lonization of Aerosols: Continuous-Spectrum
Radiation
49
2.4.6.
Thermal lonization of Aerosols:
Einbinder
Formula
5
1
2.4.7.
Space Distribution of Electrons and Electric Field Around a
Thermally Ionized Macro-Particle
52
2.4.8.
Electric Conductivity of Thermally Ionized Aerosols
53
2.5.
Excitation and Dissociation of Neutral Particles in Ionized
Gases
54
2.5.1.
Vibrational Excitation of Molecules by Electron
Impact
54
2.5.2.
Rate Coefficients of Vibrational Excitation by Electron
Impact: Semi-Empirical
Fridman
Approximation
56
2.5.3.
Rotational Excitation of Molecules by Electron Impact
58
2.5.4.
Electronic Excitation of Atoms and Molecules by Electron
Impact
59
2.5.5.
Dissociation of Molecules by Direct Electron Impact
61
2.5.6.
Distribution of Electron Energy in Non-Thermal
Discharges Between Different Channels of Excitation and
lonization
63
viii
Contents
2.6.
Elementary
Relaxation
Processes of Energy Transfer Involving
Vibrationally, Rotationally, and Electronically Excited Molecules
67
2.6.1.
Vibrational-Translational (VT) Relaxation: Slow Adiabatic
Elementary Process
67
2.6.2.
Landau-Teller Formula for VT-Relaxation Rate Coefficients
69
2.6.3.
Fast Non-Adiabatic Mechanisms of VT Relaxation
7
1
2.6.4.
Vibrational Energy Transfer Between Molecules: Resonant
W
Relaxation
72
2.6.5.
Non-Resonant
W
Exchange: Relaxation of Anharmonic
Oscillators and Intermolecular
W
Relaxation
74
2.6.6.
Rotational Relaxation Processes: Parker Formula
76
2.6.7.
Relaxation of Electronically Excited Atoms and Molecules
76
2.7.
Elementary Chemical Reactions of Excited Molecules:
Fridman-Macheret
a-Model
79
2.7.
1
.
Rate Coefficient of Reactions of Excited Molecules
79
2.7.2.
Efficiency a of Vibrational Energy in Overcoming
Activation Energy of Chemical Reactions: Numerical
Values and Classification Table
81
2.7.3.
Fridman-Macheret
a-Model
8
1
2.7.4.
Efficiency of Vibrational Energy in Elementary Reactions
Proceeding Through Intermediate Complexes: Synthesis of
Lithium Hydride
83
2.7.5.
Dissociation of Molecules in Non-Equilibrium Conditions
with Essential Contribution of Translational Energy:
Non-Equilibrium Dissociation Factor
Z
86
2.7.6.
Semi-Empirical Models of Non-Equilibrium Dissociation of
Molecules Determined by Vibrational and Translational
Temperatures
87
Problems and Concept Questions
89
Plasma-Chemical Kinetics, Thermodynamics,
and Electrodynamics
92
3.
1
.
Plasma Statistics and Thermodynamics, Chemical and lonization
Equilibrium, and the Saha Equation
92
3.1.1.
Statistical Distributions: Boltzmann Distribution Function
92
3.
1
.2.
Equilibrium Statistical Distribution of Diatomic Molecules
over Vibrational-Rotational States
93
3.
1
.3.
Saha Equation for lonization Equilibrium in Thermal Plasma
94
3.
1
.4.
Dissociation Equilibrium in Molecular Gases
94
3.
1
.5.
Complete Thermodynamic Equilibrium
(СТЕ)
and Local
Thermodynamic Equilibrium (LTE) in Plasma
95
3.
1
.6.
Thermodynamic Functions of Quasi-Equilibrium Thermal
Plasma Systems
95
3.
1
.7.
Non-Equilibrium Statistics of Thermal and Non-Thermal
Plasmas
97
3.1.8.
Non-Equilibrium Statistics of Vibrationally Excited
Molecules: Treanor Distribution
99
3.2.
Electron Energy Distribution Functions (EEDFs) in Non-Thermal
Plasma
100
3.2.
1
.
Fokker-Planck Kinetic Equation for Determination of EEDF 1
00
ix
Contents
3.2.2. Druyvesteyn Distribution, Margenau
Distributions,
and
Other Specific
EEDF
ΙΟΙ
3.2.3.
Effect of Electron-Molecular and Electron-Electron
Collisions on EEDF
103
3.2.4.
Relation Between Electron Temperature and the Reduced
Electric Field
104
3.2.5.
Isotropie
and
Anisotropie
Parts of the Electron
Distribution Functions: EEDF and Plasma Conductivity 1
04
3.3.
Diffusion, Electric/Thermal Conductivity, and Radiation in Plasma 1
06
3.3.
1
.
Electron Mobility, Plasma Conductivity, and Joule Heating 1
06
3.3.2.
Plasma Conductivity in Crossed Electric and Magnetic
Fields
107
3.3.3.
Ion Energy and Ion Drift in Electric Field
109
3.3.4.
Free Diffusion of Electrons and Ions; Continuity Equation;
and Einstein Relation Between Diffusion Coefficient,
Mobility, and Mean Energy
109
3.3.5.
Ambipolar Diffusion and Debye Radius 1
10
3.3.6.
Thermal Conductivity in Plasma 111
3.3.7.
Non-Equilibrium Thermal Conductivity and Treanor Effect
in Vibrational Energy Transfer 11
2
3.3.8.
Plasma Emission and Absorption of Radiation in
Continuous Spectrum and Unsold-Kramers Formula 11
2
3.3.9.
Radiation Transfer in Plasma: Optically Thin and Optically
Thick Plasmas 11
3
3.4.
Kinetics of Vibrationally and Electronically Excited Molecules in
Plasma: Effect of Hot Atoms 11
4
3.4.
1
.
Fokker-Plank
Kinetic Equation for Non-Equilibrium
Vibrational Distribution Functions 11
4
3.4.2.
VT and
W
Fluxes of Excited Molecules in Energy Space 11
5
3.4.3.
Non-Equilibrium Vibrational Distribution Functions:
Regime of Strong Excitation 11
7
3.4.4.
Non-Equilibrium Vibrational Distribution Functions:
Regime of Weak Excitation 11
9
3.4.5.
Kinetics of Population of Electronically Excited States in
Plasma 1
20
3.4.6.
Non-Equilibrium Translational Energy Distribution
Functions of Heavy Neutrals: Effect of Hot Atoms in Fast
VT-Relaxation Processes 1
22
3.4.7.
Generation of Hot Atoms in Chemical Reactions
123
3.5.
Vibrational Kinetics of Gas Mixtures, Chemical Reactions, and
Relaxation Processes 1
24
3.5.
1
.
Kinetic Equation and Vibrational Distributions in Gas
Mixtures: Treanor
Isotopie
Effect in Vibrational Kinetics 1
24
3.5.2.
Reverse
Isotopie
Effect in Plasma-Chemical Kinetics
126
3.5.3.
Macrokinetics of Chemical Reactions of Vibrationally
Excited Molecules 1
29
3.5.4.
Vibrational Energy Losses Due to VT Relaxation 1
3
1
3.5.5.
Vibrational Energy Losses Due to Non-Resonance
W
Exchange 1
32
3.6.
Energy Balance and Energy Efficiency of Plasma-Chemical
Processes 1
32
Contents
3.6.
1
. Energy
Efficiency of
Quasi-Equilibrium
and
Non-Equilibrium Plasma-Chemical Processes 1
32
3.6.2.
Energy Efficiency of Plasma-Chemical Processes
Stimulated by Vibrational Excitation of Molecules 1
33
3.6.3.
Energy Efficiency of Plasma-Chemical Processes
Stimulated by Electronic Excitation and Dissociative
Attachment 1
34
3.6.4.
Energy Balance and Energy Efficiency of Plasma-Chemical
Processes Stimulated by Vibrational Excitation of
Molecules
134
3.6.5.
Components of Total Energy Efficiency: Excitation,
Relaxation, and Chemical Factors 1
36
3.6.6.
Energy Efficiency of Quasi-Equilibrium Plasma-Chemical
Systems: Absolute, Ideal, and Super-Ideal Quenching 1
37
3.6.7.
Mass and Energy Transfer Equations in Multi-Component
Quasi-Equilibrium Plasma-Chemical Systems 1
37
3.6.8.
Transfer Phenomena Influence on Energy Efficiency of
Plasma-Chemical Processes 1
39
3.7.
Elements of Plasma Electrodynamics
140
3.7.
1
.
Ideal and Non-Ideal Plasmas 1
40
3.7.2.
Plasma Polarization: Debye Shielding of Electric Field in
Plasma
141
3.7.3.
Plasmas and Sheaths: Physics of DC Sheaths
142
3.7.4.
High-Voltage Sheaths: Matrix and Child Law Sheath
Models
144
3.7.5.
Electrostatic Plasma Oscillations: Langmuir or Plasma
Frequency 1
45
3.7.6.
Penetration of Slow-Changing Fields into Plasma: Skin
Effect in Plasma
146
3.7.7.
Magneto-Hydrodynamics: Diffusion of Magnetic Field
and Magnetic Field Frozen in Plasma 1
46
3.7.8.
Magnetic Pressure: Plasma Equilibrium in Magnetic Field
and Pinch Effect
147
3.7.9.
Two-Fluid Magneto-Hydrodynamics: Generalized Ohm s
Law
149
3.7.10.
Plasma Diffusion Across Magnetic Field
149
3.7.1
1. Magneto-Hydrodynamic Behavior of Plasma: Alfven
Velocity and Magnetic Reynolds Number 1
50
3.7.
1
2.
High-Frequency Plasma Conductivity and Dielectric
Permittivity 1
5
1
3.7.
1
3.
Propagation of Electromagnetic Waves in Plasma 1
53
3.7.
1
4.
Plasma Absorption and Reflection of Electromagnetic
Waves: Bouguer Law. Critical Electron Density 1
54
Problems and Concept Questions 1
55
Electric Discharges in Plasma Chemistry 1
57
4.
1
.
Fundamentals of Electric Breakdown, Streamer Processes, and
Steady-State Regimes of Non-Equilibrium Electrical Discharges 1
57
4.
1
.
1
.
Townsend Mechanism of Electric Breakdown and
Paschen
Curves 1
57
4.
1
.2.
Spark Breakdown Mechanism: Streamer Concept
159
xi
Contents
4.
1
.3.
Meek Criterion of Streamer Formation: Streamer
Propagation Models 1
63
4.
1
.4.
Streamers and Microdischarges 1
64
4.
1
.5.
Interaction of Streamers and Microdischarges 1
66
4.
1
.6.
Monte Carlo Modeling of Interaction of Streamers and
Microdischarges 1
67
4.
1
.7.
Self-Organized Pattern of DBD Microdischarges due to
Streamer Interaction
168
4.
1
.8.
Steady-State Regimes of Non-Equilibrium Electric
Discharges and General Regimes Controlled by Volume
and Surface Recombination Processes 1
70
4.
1
.9.
Discharge Regime Controlled by Electron-Ion
Recombination 1
7
1
4.
1
.
1
0.
Discharge Regime Controlled by Electron Attachment 1
72
4.
1
.
11
.
Non-Thermal Discharge Regime Controlled by
Charged-Particle Diffusion to the Walls: The
Engel-Steenbeck Relation 1
72
4.2.
Glow Discharges 1
75
4.2.
1
.
General Structure and Configurations of Glow
Discharges 1
75
4.2.2.
Current-Voltage Characteristics of DC Discharges
177
4.2.3.
Dark Discharge and Transition from Townsend Dark to
Glow Discharge 1
78
4.2.4.
Current-Voltage Characteristics of Cathode Layer:
Normal Glow Discharge 1
79
4.2.5.
Abnormal, Subnormal, and Obstructed Regimes of Glow
Discharges
181
4.2.6.
Positive Column of Glow Discharge 1
82
4.2.7.
Hollow Cathode Glow Discharge 1
83
4.2.8.
Other Specific Glow Discharge Plasma Sources 1
84
4.2.9.
Energy Efficiency Peculiarities of Glow Discharge
Application for Plasma-Chemical Processes
186
4.3.
Arc Discharges
187
4.3.
1
.
Classification and Current-Voltage Characteristics of Arc
Discharges
187
4.3.2.
Cathode and Anode Uyers of Arc Discharges 1
89
4.3.3.
Cathode Spots in Arc Discharges
191
4.3.4.
Positive Column of High-Pressure Arcs: Elenbaas-Heller
Equation 1
93
4.3.5.
Steenbeck-Raizer Channel Model of Positive
Column 1
94
4.3.6.
Steenbeck-Raizer Arc Channel Modeling of Plasma
Temperature, Specific Power, and Electric Field in Positive
Column
196
4.3.7.
Configurations of Arc Discharges Applied in Plasma
Chemistry and Plasma Processing
197
4.3.8.
Gliding Arc Discharge
200
4.3.9.
Equilibrium Phase of Gliding Arc, Its Critical Parameters,
and Fast Equilibrium-to-Non-Equilibrium Transition
204
4.3.10.
Gliding Arc Stability Analysis and Transitional and
Non-Equilibrium Phases of the Discharge
205
XII
Contents
4.3.1
1.
Special
Configurations of Gliding Arc Discharges: Gliding
Arc Stabilized in Reverse Vortex (Tornado) Flow
207
4.4.
Radiofrequency and Microwave Discharges in Plasma Chemistry
209
4.4.
1
.
Generation of Thermal Plasma in Radiofrequency
Discharges
209
4.4.2.
Thermal Plasma Generation in Microwave and Optical
Discharges
211
4.4.3.
Non-Thermal Radiofrequency Discharges:
Capacitive
and
Inductive Coupling of Plasma
2
1
5
4.4.4.
Non-Thermal RF-CCP Discharges in Moderate Pressure
Regimes
2
1
6
4.4.5.
Low-Pressure Capacitively Coupled RF Discharges
2
1
9
4.4.6.
RF Magnetron Discharges
222
4.4.7.
Non-Thermal Inductively Coupled RF Discharges in
Cylindrical Coil
224
4.4.8.
Planar-Coil and Other Configurations of Non-Thermal
Inductively Coupled RF Discharges
226
4.4.9.
Non-Thermal Low-Pressure Microwave and Other
Wave-Heated Discharges
229
4.4.10.
Non-Equilibrium Plasma-Chemical Microwave Discharges
of Moderate Pressure
23
1
4.5.
Non-Thermal Atmospheric Pressure Discharges
233
4.5.
1
.
Corona Discharges
233
4.5.2.
Pulsed Corona Discharges
234
4.5.3.
Dielectric Barrier Discharges
237
4.5.4.
Special Modifications of DBD: Surface, Packed-Bed, and
Ferroelectric Discharges
239
4.5.5.
Spark Discharges
240
4.5.6.
Atmospheric Pressure Glow Mode of DBD
241
4.5.7.
APGs: Resistive Barrier Discharge
242
4.5.8.
One-Atmosphere Uniform Glow Discharge Plasma as
Another Modification of APG
243
4.5.9.
Electronically Stabilized APG Discharges
244
4.5.
1
0.
Atmospheric-Pressure Plasma Jets
245
4.6.
Microdischarges
247
4.6.
1
.
General Features of
Microdischarges
247
4.6.2.
Micro-Glow Discharge
248
4.6.3.
Micro-Hollow-Cathode Discharge
251
4.6.4.
Arrays of
Microdischarges: Microdischarge
Self-Organization and Structures
252
4.6.5.
Kilohertz-Frequency-Range
Microdischarges
254
4.6.6.
RF
Microdischarges
255
4.6.7.
Microwave
Microdischarges
257
Problems and Concept Questions
257
Inorganic Gas-Phase Plasma Decomposition Processes
259
5.
1
.
COi . Dissociation in Plasma, Thermal, and Non-Thermal
Mechanisms
259
5.
1
.
1
.
Fundamental and Applied Aspects of the CO2 Plasma
Chemistry
259
xiii
Contents
5.1.2.
Major Experimental Results on CO2: Dissociation in
Different Plasma Systems and Energy Efficiency of the
Process
260
5.
1
.3.
Mechanisms of
CO?
Decomposition in Quasi-Equilibrium
Thermal Plasma
262
5.
1
.4.
CO2 Dissociation in Plasma, Stimulated by Vibrational
Excitation of Molecules
263
5.
1
.5.
CO2 Dissociation in Plasma by Means of Electronic
Excitation of Molecules
265
5.
1
.6.
CO2 Dissociation in Plasma by Means of Dissociative
Attachment of Electrons
267
5.2.
Physical Kinetics of CO2 Dissociation, Stimulated by Vibrational
Excitation of the Molecules in Non-Equilibrium Plasma
268
5.2.
1
.
Asymmetric and Symmetric CO2 Vibrational Modes
268
5.2.2.
Contribution of Asymmetric and Symmetric CO2
Vibrational Modes into Plasma-Chemical Dissociation
Process
269
5.2.3.
Transition of Highly Vibrationally Excited CO2 Molecules
into the Vibrational Quasi Continuum
27
1
5.2.4.
One-Temperature Approximation of CO2 Dissociation
Kinetics in Non-Thermal Plasma
273
5.2.5.
Two-Temperature Approximation of CO2 Dissociation
Kinetics in Non-Thermal Plasma
274
5.2.6.
Elementary Reaction Rates of CO2 Decomposition,
Stimulated in Plasma by Vibrational Excitation of the
Molecules
275
5.3.
Vibrational Kinetics and Energy Balance of Plasma-Chemical
CO2 Dissociation
276
5.3.
1
.
Two-Temperature Approach to Vibrational Kinetics and
Energy Balance of CO2 Dissociation in Non-Equilibrium
Plasma: Major Energy Balance and Dynamic Equations
276
5.3.2.
Two-Temperature Approach to Vibrational Kinetics and
Energy Balance of CO2 Dissociation in Non-Equilibrium
Plasma: Additional Vibrational Kinetic Relations
277
5.3.3.
Results of CO2 Dissociation Modeling in the
Two-Temperature Approach to Vibrational Kinetics
279
5.3.4.
One-Temperature Approach to Vibrational Kinetics and
Energy Balance of CO2 Dissociation in Non-Equilibrium
Plasma: Major Equations
280
5.3.5.
Threshold Values of Vibrational Temperature, Specific
Energy Input, and lonization Degree for Effective
Stimulation of CO2 Dissociation by Vibrational Excitation
of the Molecules
281
5.3.6.
Characteristic Time Scales of CO2 Dissociation in Plasma
Stimulated by Vibrational Excitation of the Molecules:
VT-Relaxation Time
282
5.3.7.
Flow Velocity and Compressibility Effects on Vibrational
Relaxation Kinetics During Plasma-Chemical CO2
Dissociation: Maximum Linear Preheating Temperature
283
5.3.8.
CO2 Dissociation in Active and Passive Discharge Zones:
Discharge (reV) and After-Glow (rp) Residence Time
284
XIV
Contents
5.3.9.
lonízation
Degree Regimes of the CO2 Dissociation
Process in Non-Thermal Plasma
285
5.3.10.
Energy Losses Related to Excitation of CO2 Dissociation
Products: Hyperbolic Behavior of Energy Efficiency
Dependence on Specific Energy Input
286
5.4.
Energy Efficiency of CO2 Dissociation in Quasi-Equilibrium
Plasma, and Non-Equilibrium Effects of Quenching Products of
Thermal Dissociation
288
5.4.
1
.
Ideal and Super-Ideal Modes of Quenching Products of
CO2 Dissociation in Thermal Plasma
288
5.4.2.
Kinetic Evolution of Thermal CO2 Dissociation Products
During Quenching Phase
288
5.4.3.
Energy Efficiency of CO2 Dissociation in Thermal Plasma
Under Conditions of Ideal Quenching of Products
289
5.4.4.
Vibrational-Translational Non-Equilibrium Effects of
Quenching Products of Thermal CO2 Dissociation in
Plasma: Super-Ideal Quenching Mode
290
5.4.5.
Maximum Value of Energy Efficiency of CO2 Dissociation
in Thermal Plasma with Super-Ideal Quenching of the
Dissociation Products
29
1
5.4.6.
Kinetic Calculations of Energy Efficiency of CO2
Dissociation in Thermal Plasma with Super-Ideal
Quenching
29
1
5.4.7.
Comparison of Thermal and Non-Thermal Plasma
Approaches to CO2 Dissociation: Comments on Products
(CO-O2) Oxidation and Explosion
292
5.5.
Experimental Investigations of CO2 Dissociation in Different
Discharge Systems
293
5.5.
1
.
Experiments with Non-Equilibrium Microwave Discharges
of Moderate Pressure, Discharges in Waveguide
Perpendicular to Gas Flow Direction, and Microwave
Plasma Parameters in CO2
293
5.5.2.
Plasma-Chemical Experiments with Dissociation of CO2 in
Non-Equilibrium Microwave Discharges of Moderate
Pressure
295
5.5.3.
Experimental Diagnostics of Plasma-Chemical
Non-Equilibrium Microwave Discharges in
Moderate-Pressure CCv. Plasma Measurements
296
5.5.4.
Experimental Diagnostics of Plasma-Chemical
Non-Equilibrium Microwave Discharges in
Moderate-Pressure CO2: Temperature Measurements
297
5.5.5.
CO2 Dissociation in Non-Equilibrium Radiofrequency
Discharges: Experiments with Inductively Coupled
Plasma
299
5.5.6.
CO2 Dissociation in Non-Equilibrium Radiofrequency
Discharges: Experiments with Capacitively Coupled Plasma
300
5.5.7.
CO2 Dissociation in Non-Self-Sustained
Atmospheric-Pressure Discharges Supported by
High-Energy Electron Beams or UV Radiation
302
5.5.8.
CO2 Dissociation in Different Types of Glow Discharges
302
xv
Contents
5.5.9. CO2
Dissociation
¡η
Other Non-Thermal and Thermal
Discharges: Contribution of Vibrational and Electronic
Excitation Mechanisms
304
5.6.
CO2 Dissociation in Special Experimental Systems, Including
Supersonic Stimulation and Plasma Radiolysis
304
5.6.1.
Dissociation of CO2 in Supersonic Non-Equilibrium
Discharges: Advantages and Gasdynamic Characteristics
304
5.6.2.
Kinetics and Energy Balance of Non-Equilibrium
Plasma-Chemical CO2 Dissociation in Supersonic Flow
306
5.6.3.
Limitations of Specific Energy Input and CO2 Conversion
Degree in Supersonic Plasma Related to Critical Heat
Release and Choking the Flow
308
5.6.4.
Experiments with Dissociation of CO2 in Non-Equilibrium
Supersonic Microwave Discharges
308
5.6.5.
Gasdynamic Stimulation of CO2 Dissociation in Supersonic
Flow: Plasma Chemistry Without Electricity
309
5.6.6.
Plasma Radiolysis of CO2 Provided by High-Current
Relativistic Electron Beams
3
1
0
5.6.7.
Plasma Radiolysis of CO2 in Tracks of Nuclear Fission
Fragments
311
5.6.8.
lonization Degree in Tracks of Nuclear Fission Fragments,
Energy Efficiency of Plasma Radiolysis of CO2, and
Plasma-Assisted Chemonuclear Reactors
ЗІЗ
5.7.
Complete CO2 Dissociation in Plasma with Production of
Carbon and Oxygen
3
1
4
5.7.1.
Complete Plasma-Chemical Dissociation of CO2: Specifics
of the Process and Elementary Reaction Mechanism
3
1
4
5.7.2.
Kinetics of CO Disproportioning Stimulated in
Non-Equilibrium Plasma by Vibrational Excitation of
Molecules
314
5.7.3.
Experiments with Complete CO2 Dissociation in
Microwave Discharges Operating in Conditions of Electron
Cyclotron Resonance
3
1
6
5.7.4.
Experiments with Complete CO2 Dissociation in
Stationary Plasma-Beam Discharge
3
1
7
5.8.
Dissociation of Water Vapor and Hydrogen Production in
Plasma-Chemical Systems
3
1
8
5.8.
1
.
Fundamental and Applied Aspects of H2O Plasma
Chemistry
318
5.8.2.
Kinetics of Dissociation of Water Vapor Stimulated in
Non-Thermal Plasma by Vibrational Excitation of Water
Molecules
319
5.8.3.
Energy Efficiency of Dissociation of Water Vapor
Stimulated in Non-Thermal Plasma by Vibrational
Excitation
320
5.8.4.
Contribution of Dissociative Attachment of Electrons into
Decomposition of Water Vapor in Non-Thermal
Plasma
322
5.8.5.
Kinetic Analysis of the Chain Reaction of H2O Dissociation
via Dissociative Attachment/Detachment Mechanism
324
xvi
Contents
5.8.6. H2O
Dissociation in Thermal
Plasma
and Quenching of the
Dissociation Products: Absolute and Ideal Quenching
Modes
325
5.8.7.
Cooling Rate Influence on Kinetics of H2O Dissociation
Products in Thermal Plasma: Super-Ideal Quenching
Effect
326
5.8.8.
Water Dissociation and H2 Production in Plasma-Chemical
System CO2-H2O
328
5.8.9.
CO-to-H2 Shift Reaction: Plasma Chemistry of
CO-O2-H2O Mixture
330
5.9.
Experimental Investigations of H2O Dissociation in Different
Discharge Systems
33
1
5.9.
1
.
Microwave Discharge in Water Vapor
33
1
5.9.2.
Plasma-Chemical Experiments with Microwave Discharge
in Water Vapor
332
5.9.3.
Dissociation of Water Vapor in Glow Discharges
332
5.9.4.
Dissociation of H2O with Production of H2 and H2O2 in
Supersonic Microwave Discharges
334
5.9.5.
Plasma Radiolysis of Water Vapor in Tracks of Nuclear
Fission Fragments
335
5.9.6.
Effect of Plasma Radiolysis on Radiation Yield of Hydrogen
Production in Tracks of Nuclear Fission Fragments
336
5.
1
0.
Inorganic Gas-Phase Plasma-Chemical Processes of
Decomposition of Triatomic Molecules: NH3, SO2, and
N2O
336
5.
1
0.
1
.
Gas-Phase Plasma Decomposition Reactions in Multi-Phase
Technologies
336
5.10.2.
Dissociation of Ammonia in Non-Equilibrium Plasma:
Mechanism of the Process in Glow Discharge
337
5.
1
0.3.
Mechanism of Formation of Molecular Nitrogen and
Hydrogen in Non-Equilibrium Plasma-Chemical Process of
Ammonia Dissociation
338
5.10.4.
Plasma Dissociation of Sulfur Dioxide
338
5.10.5.
Destruction and Conversion of Nitrous Oxide in
Non-Equilibrium Plasma
340
5.
11
.
Non-Thermal and Thermal Plasma Dissociation of Diatomic
Molecules
341
5.
11
.
1
.
Plasma-Chemical Decomposition of Hydrogen Halides:
Example of HBr Dissociation with Formation of Hydrogen
and Bromine
34
1
5.
11
.2.
Dissociation of
HF, HCI,
and HI in Plasma
343
5.
11
.3.
Non-Thermal and Thermal Dissociation of Molecular
Fluorine
344
5.
11
.4.
Dissociation of Molecular Hydrogen in Non-Thermal and
Thermal Plasma Systems
345
5.
11
.5.
Dissociation of Molecular Nitrogen in Non-Thermal and
Thermal Plasma Systems
347
5.
11
.6.
Thermal Plasma Dissociation of Other Diatomic Molecules
(O2. CI2, Br2)
347
Problems and Concept Questions
35
1
xvii
Contents
Gas-Phase
Inorganic Synthesis in
Plasma 355
6.
1. Plasma-Chemical Synthesis of Nitrogen Oxides from Air and
Nitrogen-Oxygen Mixtures: Thermal and Non-Thermal
Mechanisms
355
6.
1
.
1
.
Fundamental and Applied Aspects of NO Synthesis in Air
Plasma
355
6.
1
.2.
Mechanisms of NO Synthesis Provided in Non-Thermal
Plasma by Excitation of Neutral Molecules: Zeldovich
Mechanism
356
6.
1
.3.
Mechanisms of NO Synthesis Provided in Non-Thermal
Plasma by Charged Particles
358
6.
1
.4.
NO Synthesis in Thermal Plasma Systems
358
6.
1
.5.
Energy Efficiency of Different Mechanisms of NO Synthesis
in Thermal and Non-Thermal Discharge Systems
359
6.2.
Elementary Reaction of NO Synthesis Stimulated by Vibrational
Excitation of Molecular Nitrogen
36
1
6.2.
1
.
Limiting Elementary Reaction of Zeldovich Mechanism:
Adiabatic and Non-Adiabatic Channels of NO Synthesis
36
1
6.2.2.
Electronically Adiabatic Channel of NO Synthesis
О
+ N2 -*■
NO
+ N
Stimulated by Vibrational Excitation
of Molecular Nitrogen
361
6.2.3.
Electronically Non-Adiabatic Channel of NO Synthesis
(O
+ N2 ->
NO
+
N): Stages of the Elementary Process
and Method of Vibronic Terms
363
6.2.4.
Transition Probability Between Vibronic Terms
Corresponding to Formation of Intermediate
^О*(
Σ+)
Complex
364
6.2.5.
Probability
of Formation of Intermediate
^О*(
Σ+)
Complex in Electronically Non-Adiabatic Channel of NO
Synthesis
365
6.2.6.
Decay of Intermediate Complex
Ν2θ*( Σ+):
Second Stage
of Electronically Non-Adiabatic Channel of NO Synthesis
366
6.2.7.
Total Probability of Electronically Non-Adiabatic Channel
of NO Synthesis (O
+
N2
->
NO
+
N)
367
6.3.
Kinetics and Energy Balance of Plasma-Chemical NO Synthesis
Stimulated in Air and O2-N2 Mixtures by Vibrational Excitation
367
6.3.
1
.
Rate Coefficient of Reaction
О
+ N2 ->·
NO -I-
N
Stimulated in Non-Equilibrium Plasma by Vibrational
Excitation of Nitrogen Molecules
367
6.3.2.
Energy Balance of Plasma-Chemical NO Synthesis:
Zeldovich Mechanism Stimulated by Vibrational Excitation
368
6.3.3.
Macro-Kinetics of Plasma-Chemical NO Synthesis: Time
Evolution of Vibrational Temperature
369
6.3.4.
Energy Efficiency of Plasma-Chemical NO Synthesis:
Excitation and Relaxation Factors
370
6.3.5.
Energy Efficiency of Plasma-Chemical NO Synthesis:
Chemical Factor
371
6.3.6.
Stability of Products of Plasma-Chemical Synthesis to
Reverse Reactions in Active Zone of Non-Thermal Plasma
37
1
XVIII
Contents
6.3.7.
Effect of Hot Nitrogen Atoms on Yield of NO Synthesis
in Non-Equilibrium Plasma in Air and Nitrogen-Oxygen
Mixtures
372
6.3.8.
Stability of Products of Plasma-Chemical NO Synthesis to
Reverse Reactions Outside of the Discharge Zone
373
6.4.
Experimental Investigations of NO Synthesis from Air and
N2-O2 Mixtures in Different Discharges
374
6.4.
1
.
Non-Equilibrium Microwave Discharge in Magnetic Field
Operating in Conditions of Electron Cyclotron Resonance
374
6.4.2.
Evolution of Vibrational Temperature of Nitrogen
Molecules in Non-Equilibrium ECR: Microwave Discharge
During Plasma-Chemical NO Synthesis
376
6.4.3.
NO Synthesis in the Non-Equilibrium ECR Microwave
Discharge
377
6.4.4.
NO Synthesis in Non-Self-Sustained Discharges Supported
by Relativistic Electron Beams
378
6.4.5.
Experiments with NO Synthesis from Air in Stationary
Non-Equilibrium Plasma-Beam Discharge
379
6.4.6.
Experiments with NO Synthesis from
N2
and O2 in
Thermal Plasma of Arc Discharges
380
6.4.7.
General Schematic and Parameters of Industrial
Plasma-Chemical Technology of NO Synthesis from Air
38
1
6.5.
Plasma-Chemical Ozone Generation: Mechanisms and Kinetics
382
6.5.
1
.
Ozone Production as a Large-Scale Industrial Application
of Non-Thermal Atmospheric-Pressure Plasma
382
6.5.2.
Energy Cost and Energy Efficiency of Plasma-Chemical
Production of Ozone in Some Experimental and Industrial
Systems
383
6.5.3.
Plasma-Chemical Ozone Formation in Oxygen
383
6.5.4.
Optimum DBD
Microdischarge
Strength and Maximization
of Energy Efficiency of Ozone Production in Oxygen
Plasma
385
6.5.5.
Plasma-Chemical Ozone Generation in Air
386
6.5.6.
Discharge Poisoning Effect During Ozone Generation in
Air Plasma
387
6.5.7.
Temperature Effect on Plasma-Chemical Generation and
Stability of Ozone
388
6.5.8.
Negative Effect of Water Vapor on Plasma-Chemical
Ozone Synthesis
389
6.5.9.
Effect of Hydrogen, Hydrocarbons, and Other Admixtures
on Plasma-Chemical Ozone Synthesis
390
6.6.
Experimental and Industrial Plasma-Chemical Ozone Generators
392
6.6.1.
Synthesis of Ozone in Dielectric Barrier Discharges as the
Oldest and Still Most Successful Approach to Ozone
Generation
392
6.6.2.
Tubular DBD Ozone Generators and Urge Ozone
Production Installations
392
6.6.3.
Planar and Surface Discharge Configurations of DBD
Ozone Generators
394
6.6.4.
Synthesis of Ozone in Pulsed Corona Discharges
395
XIX
Contents
6.6.5.
Peculiarities of Ozone Synthesis in Pulsed Corona with
Respect to DBD
396
6.6.6.
Possible Specific Contribution of Vibrational Excitation of
Molecules to Ozone Synthesis in Pulsed Corona
Discharges
397
6.7.
Synthesis of KrF2 and Other Aggressive Fluorine Oxidizers
399
6.7.
1
.
Plasma-Chemical Gas-Phase Synthesis of KrF2 and
Mechanism of Surface Stabilization of Reaction Products
399
6.7.2.
Physical Kinetics of KrF2 Synthesis in Krypton Matrix
400
6.7.3.
Synthesis of KrF2 in Glow Discharges, Barrier Discharges,
and Photo-Chemical Systems
40
1
6.7.4.
Synthesis of KrF2 in Non-Equilibrium Microwave Discharge
in Magnetic Field
402
6.7.5.
Plasma F2 Dissociation as the First Step in Synthesis of
Aggressive Fluorine Oxidizers
402
6.7.6.
Plasma-Chemical Synthesis of O2F2 and Other Oxygen
Fluorides
403
6.7.7.
Plasma-Chemical Synthesis of NF3 and Other Nitrogen
Fluorides
404
6.7.8.
Plasma-Chemical Synthesis of Xenon Fluorides and Other
Fluorine Oxidizers
405
6.8.
Plasma-Chemical Synthesis of Hydrazine
(N^4),
Ammonia
(NH3), Nitrides of Phosphorus, and Some Other Inorganic
Compounds
406
6.8.1.
Direct Plasma-Chemical Hydrazine (N2H4) Synthesis from
Nitrogen and Hydrogen in Non-Equilibrium Discharges
406
6.8.2.
Hydrazine (N2H^) Synthesis from N2-H2 Mixture in
Non-Self-Sustained Stationary Discharge Supported by
Electron Beam
407
6.8.3.
Kinetics of Hydrazine (N2H4) Synthesis from N2-H2
Mixture in Non-Thermal Plasma Conditions
407
6.8.4.
Synthesis of Ammonia in DBD and Glow Discharges
408
6.8.5.
Plasma-Chemical Synthesis of Nitrides of Phosphorus
409
6.8.6.
Sulfur Gasification by Carbon Dioxide in Non-Thermal and
Thermal Plasmas
409
6.8.7.
CN and NO Synthesis in CO-N2 Plasma
4
1
2
6.8.8.
Gas-Phase Synthesis Related to Plasma-Chemical
Oxidation of HCI and SO2
413
Problems and Concept Questions
414
Plasma Synthesis, Treatment, and Processing of Inorganic
Materials, and Plasma Metallurgy
4
1
7
7.
1
.
Plasma Reduction of Oxides of Metals and Other Elements
4
1
7
7.
1
.
1. Thermal Plasma Reduction of Iron Ore, Iron Production
from Oxides Using Hydrogen and Hydrocarbons, and
Plasma-Chemical Steel Manufacturing
417
7.
1
.2.
Productivity and Energy Efficiency of Thermal Plasma
Reduction of Iron Ore
4
1
9
7.1.3.
Hydrogen Reduction of Refractory Metal Oxides in
Thermal Plasma and Plasma Metallurgy of Tungsten and
Molybdenum
420
xx
Contents
7.
1
.4.
Thermal Plasma Reduction of Oxides of Aluminum and
Other Inorganic Elements
423
7.
1
.5.
Reduction of Metal Oxides and Production of Metals Using
Non-Thermal Hydrogen Plasma
425
7.
1
.6.
Non-Equilibrium Surface Heating and Evaporation Effect in
Heterogeneous Plasma-Chemical Processes in
Non-Thermal Discharges
426
7.
1
.7.
Non-Equilibrium Surface Heating and Evaporation in
Plasma Treatment of Thin Layers of Flat Surfaces: Effect of
Short Pulses
427
7.2.
Production of Metals and Other Elements by Carbothermic
Reduction and Direct Decomposition of Their Oxides in
Thermal Plasma
429
7.2.
1
.
Carbothermic Reduction of Elements from Their Oxides
429
7.2.2.
Production of Pure Metallic Uranium by Carbothermic
Plasma-Chemical Reduction of Uranium Oxides
429
7.2.3.
Production of Niobium by Carbothermic
Plasma-Chemical Reduction of Niobium Oxides
430
7.2.4.
Double-Stage Carbothermic Thermal Plasma Reduction
of Rare and Refractory Metals from Their Oxides
430
7.2.5.
Carbothermic Reduction of Iron from Iron Titanium
Oxide Concentrates in a Thermal Plasma
Fluidized
Bed
43
1
7.2.6.
Production of Silicon Monoxide by S1O2 Decomposition
in Thermal Plasma
432
7.2.7.
Experiments with S1O2 Reduction to Pure Silicon
Monoxide in High-Temperature Radiofrequency ICP
Discharges
433
7.2.8.
Reduction of Aluminum by Direct Thermal Plasma
Decomposition of Alumina
434
7.2.9.
Reduction of Vanadium by Direct Plasma Decomposition
of Its Oxides, V2O5 and V2O3
436
7.2.
1
0.
Reduction of Indium and Germanium by Direct Plasma
Decomposition of Their Oxides
439
7.3.
Hydrogen Plasma Reduction of Metals and Other Elements from
Their Halides
440
7.3.
1
.
Using Halides for Production of Metals and Other
Elements from Their Compounds
440
7.3.2.
Plasma-Chemical Production of Boron: Thermal Plasma
Reduction of BCI3 with Hydrogen
44
1
7.3.3.
Hydrogen Reduction of Niobium from Its Pentachloride
(N1CI5) in Thermal Plasma
442
7.3.4.
Hydrogen Reduction of Uranium from Its Hexafluoride
(UFb) in Thermal Plasma
442
7.3.5.
Hydrogen Reduction of Tantalum
(Ta),
Molybdenum (Mo),
Tungsten (W), Zirconium (Zr), and Hafnium (Hf) from
Their Chlorides in Thermal Plasma
443
7.3.6.
Hydrogen Reduction of Titanium
(Ti),
Germanium (Ge),
and Silicon (Si) from Their Tetrachlorides in Thermal
Plasma
445
7.3.7.
Thermal Plasma Reduction of Some Other Halides with
Hydrogen: Plasma Production of Intermetallic Compounds
446
XXI
Contents
7.3.8.
Hydrogen Reduction of Halides in Non-Thermal Plasma
448
7.4.
Direct Decomposition of Halides in Thermal and Non-Thermal
Plasma
448
7.4.
1
.
Direct Decomposition of Halides and Production of Metals
in Plasma
448
7.4.2.
Direct UF6 Decomposition in Thermal Plasma:
Requirements for Effective Product Quenching
449
7.4.3.
Direct Decomposition of Halides of Some Alkali and
Alkaline Earth Metals in Thermal Plasma
45
1
7.4.4.
Direct Thermal Plasma Decomposition of Halides of
Aluminum, Silicon, Arsenic, and Some Other Elements of
Groups
3, 4,
and
5 457
7.4.5.
Direct Thermal Plasma Decomposition of Halides of
Titanium
(Ti),
Zirconium (Zr), Hafnium (Hf), Vanadium (V),
and Niobium (Nb)
461
7.4.6.
Direct Decomposition of Halides of Iron (Fe), Cobalt (Co),
Nickel
(Ni),
and Other Transition Metals in Thermal Plasma
465
7.4.7.
Direct Decomposition of Halides and Reduction of Metals
in Non-Thermal Plasma
469
7.4.8.
Kinetics of Dissociation of Metal Halides in Non-Thermal
Plasma: Distribution of Halides over Oxidation Degrees
470
7.4.9.
Heterogeneous Stabilization of Products During Direct
Decomposition of Metal Halides in Non-Thermal Plasma:
Application of Plasma Centrifuges for Product Quenching
472
7.5.
Plasma-Chemical Synthesis of Nitrides and Carbides of Inorganic
Materials
472
7.5.
1
.
Plasma-Chemical Synthesis of Metal Nitrides from
Elements: Gas-Phase and Heterogeneous Reaction
Mechanisms
472
7.5.2.
Synthesis of Nitrides of Titanium and Other Elements by
Plasma-Chemical Conversion of Their Chlorides
473
7.5.3.
Synthesis of Silicon Nitride (S13N4) and Oxynitrides by
Non-Thermal Plasma Conversion of Silane (S1H4)
474
7.5.4.
Production of Metal Carbides by Solid-Phase Synthesis in
Thermal Plasma of Inert Gases
475
7.5.5.
Synthesis of Metal Carbides by Reaction of Solid Metal
Oxides with Gaseous Hydrocarbons in Thermal Plasma
475
7.5.6.
Gas-Phase Synthesis of Carbides in Plasma-Chemical
Reactions of Halides with Hydrocarbons
475
7.5.7.
Conversion of Solid Oxides into Carbides Using Gaseous
Hydrocarbons Inside of RF-ICP Thermal Plasma Discharge
and Some Other Plasma Technologies for Carbide
Synthesis
477
7.6.
Plasma-Chemical Production of Inorganic Oxides by Thermal
Decomposition of Minerals, Aqueous Solutions, and Conversion
Processes
477
7.6.
1
.
Plasma Production of Zirconia
(ΖγΟσ)
by Decomposition
of Zircon Sand (ZrSiO4)
477
7.6.2.
Plasma Production of Manganese Oxide (MnO) by
Decomposition of Rhodonite (MnSiO3)
478
XXII
Contents
7.6.3. Plasma-Chemical
Extraction
of
Nickel
from
Serpentine
Minerals 482
7.6.4.
Production of Uranium Oxide (U3O8) by Thermal Plasma
Decomposition of
Uranyl
Nitrate (UC>2(NO3)2) Aqueous
Solutions
482
7.6.5.
Production of Magnesium Oxide (MgO) by Thermal
Plasma Decomposition of Aqueous Solution or Melt of
Magnesium Nitrate (Mg(NO3)2)
483
7.6.6.
Plasma-Chemical Production of Oxide Powders for
Synthesis of High-Temperature Superconducting
Composites
483
7.6.7.
Production of Uranium Oxide (U3O8) by Thermal Plasma
Conversion of Uranium Hexafluoride (UF6) with Water
Vapor
484
7.6.8.
Conversion of Silicon
Tetrafluoride (S1F4)
with Water
Vapor into Silica (S1O2) and HF in Thermal Plasma
484
7.6.9.
Production of Pigment Titanium Dioxide (T1O2) by
Thermal Plasma Conversion of Titanium
Tetrachloride
(ТіСЦ)
in Oxygen
485
7.6.10.
Thermal Plasma Conversion of Halides in Production of
Individual and Mixed Oxides of Chromium, Aluminum,
and Titanium
486
7.6.
11
.
Thermal Plasma Treatment of Phosphates: Tricalcium
Phosphate
(СЗДРО^і)
and Fluoroapatite
(CasF(PO4)3)
487
7.6.
1
2.
Oxidation of Phosphorus and Production of Phosphorus
Oxides in Air Plasma
488
7.7.
Plasma-Chemical Production of Hydrides, Borides, Carbonyls,
and Other Compounds of Inorganic Materials
488
7.7.
1
.
Production of Hydrides in Thermal and Non-Thermal
Plasma
488
7.7.2.
Non-Thermal Plasma Mechanisms of Hydride Formation
by Hydrogen Gasification of Elements and by
Hydrogénation
of Thin Films
489
7.7.3.
Synthesis of Metal Carbonyls in Non-Thermal Plasma:
Effect of Vibrational Excitation of CO Molecules on
Carbonyl Synthesis
490
7.7.4.
Plasma-Chemical Synthesis of Borides of Inorganic
Materials
492
7.7.5.
Synthesis of Intermetallic Compounds in Thermal Plasma
493
7.8.
Plasma Cutting, Welding, Melting, and Other High-Temperature
Inorganic Material Processing Technologies
493
7.8.1.
Plasma Cutting Technology
493
7.8.2.
Plasma Welding Technology
494
7.8.3.
About Plasma Melting and Remelting of Metals
495
7.8.4.
Plasma Spheroidization and Densification of Powders
495
Problems and Concept Questions
496
Plasma-Surface Processing of Inorganic Materials: Micro- and
Nano-Technologies
499
8.
1. Thermal Plasma Spraying
499
8.
1
.
1
.
Plasma Spraying as a Thermal Spray Technology
499
XXIII
8.
.2.
8.
.3.
8.
.4.
8.
.5.
8.
.6.
8.
1.7.
Contents
DC-Arc
Plasma Spray: Air Plasma Spray 500
DC-Arc Plasma Spray:
VPS, LPPS, CAPS, SPS,
UPS, and
Other Specific
Spray
Approaches
50
1
Radiofrequency Plasma Spray 502
Thermal
Plasma
Spraying of Monolithic
Materials 503
Thermal
Plasma
Spraying of Composite Materials
505
Thermal Spray Technologies: Reactive Plasma Spray
Forming
507
8.
1
.8.
Thermal Plasma Spraying of Functionally Gradient
Materials
508
8.
1
.9.
Thermal Plasma Spray Modeling
5
1
0
8.2.
Plasma-Chemical Etching: Mechanisms and Kinetics
510
8.2.
1
.
Main Principles of Plasma Etching as Part of Integrated
Circuit Fabrication Technology
510
8.2.2.
Etch Rate, Anisotropy, Selectivity, and Other Plasma Etch
Requirements
5
11
8.2.3.
Basic Plasma Etch Processes: Sputtering
514
8.2.4.
Basic Plasma Etch Processes: Pure Chemical Etching
5
1
5
8.2.5.
Basic Plasma Etch Processes: Ion Energy-Driven Etching
516
8.2.6.
Basic Plasma Etch Processes: Ion-Enhanced Inhibitor
Etching
5
1
6
8.2.7.
Surface Kinetics of Etching Processes; Kinetics of Ion
Energy-Driven Etching
5
1
7
8.2.8.
Discharges Applied for Plasma Etching: RF-CCP Sources,
RF Diodes and
Triodes,
and MERIEs
5
1
9
8.2.9.
Discharges Applied for Plasma Etching: High-Density
Plasma Sources
520
8.2.10.
Discharge Kinetics in Etching Processes: Ion Density and
Ion Flux
520
8.2.1
1. Discharge Kinetics in Etching Processes: Density and Flux
of Neutral Etchants
52
1
8.3.
Specific Plasma-Chemical Etching Processes
523
8.3.
1
.
Gas Composition in Plasma Etching Processes:
Etchants-to-Unsaturates Flux Ratio
523
8.3.2.
Pure Chemical F-Atom Etching of Silicon:
Flamm
Formulas and Doping Effect
523
8.3.3.
Ion Energy-Driven F-Atom Etching Process: Main Etching
Mechanisms
524
8.3.4.
Plasma Etching of Silicon in CF4 Discharges: Kinetics of
Fluorine Atoms
525
8.3.5.
Plasma Etching of Silicon in CF< Discharges: Kinetics of
CFX Radicals and Competition Between Etching and
Carbon Deposition
526
8.3.6.
Plasma Etching of Silicon by
CI
Atoms
528
8.3.7.
Plasma Etching of SiO2 by
F
Atoms and CFX Radicals
529
8.3.8.
ñasma
Etching of Silicon Nitride (Si3N4)
529
8.3.9.
Plasma Etching of Aluminum
529
8.3.
1
0.
Plasma Etching of Photoresist
53О
8.3.
11
.
Plasma Etching of Refraaory Metals and Semiconductors
530
8.4.
Plasma Cleaning of CVD and Etching Reactors in
Micro-Electronics and Other Plasma Cleaning Processes
53
1
xxiv
Contents
8.4.
1
. In Situ Plasma
Cleaning in Micro-Electronics and Related
Environmental Issues
53
1
8.4.2.
Remote Plasma Cleaning Technology in Microelectronics:
Choice of Cleaning Feedstock Gas
532
8.4.3.
Kinetics of F-Atom Generation from NF3, CF4, and C2F4 in
Remote Plasma Sources
533
8.4.4.
Surface and Volume Recombination of
F
Atoms in
Transport Tube
535
8.4.5.
Effectiveness of
F
Atom Transportation from Remote
Plasma Source
538
8.4.6.
Other Plasma Cleaning Processes: Passive Plasma Cleaning
539
8.4.7.
Other Plasma Cleaning Processes: Active Plasma Cleaning
540
8.4.8.
Wettability Improvement of Metallic Surfaces by Active and
Passive Plasma Cleaning
541
8.5.
Plasma Deposition Processes: Plasma-Enhanced Chemical Vapor
Deposition and Sputtering Deposition
54
1
8.5.
1
.
Plasma-Enhanced Chemical Vapor Deposition: General
Principles
541
8.5.2.
PECVD of Thin Films of Amorphous Silicon
542
8.5.3.
Kinetics of Amorphous Silicon Film Deposition in Silane
(SiH4) Discharges
543
8.5.4.
Plasma Processes of Silicon Oxide
(SÍO2)
Film Growth:
Direct Silicon Oxidation
545
8.5.5.
Plasma Processes of Silicon Oxide (S1O2) Film Growth:
PECVD from Silane-Oxygen Feedstock Mixtures and
Conformai
and Non-Conformal Deposition Within
Trenches
545
8.5.6.
Plasma Processes of Silicon Oxide (S1O2) Film Growth:
PECVD from
ТЕОЅ-Ог
Feed-Gas Mixtures
547
8.5.7.
PECVD Process of Silicon Nitride (Si3 N4)
547
8.5.8.
Sputter Deposition Processes: General Principles
548
8.5.9.
Physical Sputter Deposition
548
8.5.
1
0.
Reactive Sputter Deposition Processes
549
8.5.
11
.
Kinetics of Reactive Sputter Deposition: Hysteresis Effect
550
8.6.
Ion Implantation Processes: Ion-Beam Implantation and
Plasma-Immersion Ion Implantation
55
1
8.6.
1
.
Ion-Beam Implantation
55
1
8.6.2.
Plasma-Immersion Ion Implantation: General Principles
552
8.6.3.
Dynamics of Sheath Evolution in Plasma-Immersion Ion
Implantation: From Matrix Sheath to Child Law Sheath
553
8.6.4.
Time Evolution of Implantation Current in PHI Systems
555
8.6.5.
Pill Applications for Processing Semiconductor Materials
556
8.6.6.
Pill Applications for Modifying Metallurgical Surfaces:
Plasma Source Ion Implantation
557
8.7.
Microarc (Electrolytic-Spark) Oxidation Coating and Other
Microdischarge
Surface Processing Systems
557
8.7.1.
Microarc (Electrolytic-Spark) Oxidation Coating: General
Features
557
8.7.2.
Major Characteristics of the Microarc (Electrolytic-Spark)
Oxidation Process
558
xxv
Contents
8.7.3.
Mechanism of Microarc (Electrolytic-Spark) Oxidation
Coating of Aluminum in
Sulfuric Acid
559
8.7.4.
Breakdown of Oxide Film and Starting Microarc
Discharge
560
8.7.5.
Microarc Discharge Plasma Chemistry of Oxide Coating
Deposition on Aluminum in Concentrated
Sulfuric Acid
Electrolyte 562
8.7.6.
Direct Micropatterning and
Microfabrication
in
Atmospheric-Pressure
Microdischarges
563
8.7.7.
Microetching,
Microdeposition,
and
Microsurface
Modification by Atmospheric-Pressure
Microplasma
Discharges
564
8.8.
Plasma Nanotechnologies: Nanoparticles and Dusty Plasmas
566
8.8.
1
.
Nanoparticles in Plasma: Kinetics of Dusty Plasma
Formation in Low-Pressure Silane Discharges
566
8.8.2.
Formation of Nanoparticles in Silane: Plasma Chemistry of
Birth and Catastrophic Evolution
567
8.8.3.
Critical Phenomena in Dusty Plasma Kinetics: Nucleation
of Nanoparticles, Winchester Mechanism, and Growth of
First Generation of Negative Ion Clusters
570
8.8.4.
Critical Size of Primary Nanoparticles in Silane Plasma
572
8.8.5.
Critical Phenomenon of Neutral-Particle Trapping in Silane
Plasma
573
8.8.6.
Critical Phenomenon of Super-Small Nanoparticle
Coagulation
575
8.8.7.
Critical Change of Plasma Parameters due to Formation of
Nanoparticles:
α—γ
Transition
577
8.8.8.
Other Processes of Plasma Production of Nanoparticles:
Synthesis of Aluminum Nanopowder and Luminescent
Silicon Quantum Dots
579
8.8.9.
Plasma Synthesis of Nanocomposite Particles
580
8.9.
Plasma Nanotechnologies: Synthesis of
Fullerenes
and Carbon
Nanotubes
58
1
8.9.
1
.
Highly Organized Carbon Nanostructures:
Fullerenes
and
Carbon Nanotubes
58
1
8.9.2.
Plasma Synthesis of
Fullerenes
583
8.9.3.
Plasma Synthesis of Endohedral
Fullerenes
583
8.9.4.
Plasma Synthesis of Carbon Nanotubes by Dispersion of
Thermal Arc Electrodes
584
8.9.5.
Plasma Synthesis of Carbon Nanotubes by Dissociation of
Carbon Compounds
584
8.9.6.
Surface Modification of Carbon Nanotubes by RF
ñasma
585
Problems and Concept Questions
586
9
Organic and Polymer Plasma Chemistry
589
9.1.
Thermal Plasma Pyrolysis of Methane and Other Hydrocarbons:
Production of Acetylene and
Ethylene
589
9.
1
.
1
.
Kinetics of Thermal Plasma Pyrolysis of Methane and
Other Hydrocarbons: The
Kassel
Mechanism
589
9.
1
.2.
Kinetics of Double-Step
ñasma
Pyrolysis of Hydrocarbons
59
1
XXVI
Contents
9.
1
.3. Electric Cracking
of Natural
Gas
with Production of
Acetylene-Hydrogen or Acetylene-Ethylene-Hydrogen
Mixtures
59
1
9.
1
.4.
Other Processes and Regimes of Hydrocarbon Conversion
in Thermal Plasma
592
9.
1
.5.
Some Chemical Engineering Aspects of Plasma Pyrolysis of
Hydrocarbons
595
9.
1
.6.
Production of Vinyl Chloride as an Example of Technology
Based on Thermal Plasma Pyrolysis of Hydrocarbons
596
9.
1
.7.
Plasma Pyrolysis of Hydrocarbons with Production of Soot
and Hydrogen
597
9.
1
.8.
Thermal Plasma Production of Acetylene by Carbon Vapor
Reaction with Hydrogen or Methane
598
9.2.
Conversion of Methane into Acetylene and Other Processes of
Gas-Phase Conversion of Hydrocarbons in Non-Thermal Plasmas
598
9.2.
1
.
Energy Efficiency of CH4 Conversion into Acetylene in
Thermal and Non-Thermal Plasmas
598
9.2.2.
High-Efficiency CH4 Conversion into C2H2 in
Non-Thermal Moderate-Pressure Microwave Discharges
598
9.2.3.
Limits of Quasi-Equilibrium
Kassel
Kinetics for Plasma
Conversion of CH4 into C2H2
600
9.2.4.
Contribution of Vibrational Excitation to Methane
Conversion into Acetylene in Non-Equilibrium Discharge
Conditions
601
9.2.5.
Non-Equilibrium Kinetics of Methane Conversion into
Acetylene Stimulated by Vibrational Excitation
602
9.2.6.
Other Processes of Decomposition, Elimination, and
Isomerization of Hydrocarbons in Non-Equilibrium Plasma:
Plasma Catalysis
603
9.3.
Plasma Synthesis and Conversion of Organic Nitrogen
Compounds
604
9.3.
1
.
Synthesis of Dicyanogen (C2N2) from Carbon and
Nitrogen in Thermal Plasma
604
9.3.2.
Co-Production of Hydrogen Cyanide (HCN) and
Acetylene (C2H2) from Methane and Nitrogen in Thermal
Plasma Systems
605
9.3.3.
Hydrogen Cyanide (HCN) Production from Methane and
Nitrogen in Non-Thermal Plasma
606
9.3.4.
Production of HCN and H2 in CH4-NH3 Mixture in
Thermal and Non-Thermal Plasmas
608
9.3.5.
Thermal and Non-Thermal Plasma Conversion Processes
in CO-N2 Mixture
609
9.3.6.
Other Non-Equilibrium Plasma Processes of Organic
Nitrogen Compounds Synthesis
610
9.4.
Organic Plasma Chemistry of Chlorine and Fluorine Compounds
6
11
9.4.
1
.
Thermal Plasma Synthesis of Reactive Mixtures for
Production of Vinyl Chloride
6
11
9.4.2.
Thermal Plasma Pyrolysis of Dichloroethane, Butyl
Chloride, Hexachlorane, and Other Organic Chlorine
Compounds for Further Synthesis of Vinyl Chloride
6
1
2
9.4.3.
Thermal Plasma Pyrolysis of Organic Fluorine Compounds
6
1
3
XXVII
Contents
9.4.4. Pyrolysis
of Organic Fluorine Compounds in Thermal
Plasma of Nitrogen: Synthesis of Nitrogen-Containing
Fluorocarbons
9.4.5.
Thermal Plasma Pyrolysis of Chlorofluorocarbons
6
1
4
9.4.6.
Non-Thermal Plasma Conversion of CFCs and Other
Plasma Processes with Halogen-Containing Organic
Compounds
616
9.5.
Plasma Synthesis of Aldehydes, Alcohols, Organic Acids, and
Other Oxygen-Containing Organic Compounds
617
9.5.
1
.
Non-Thermal Plasma Direct Synthesis of
Methanol
from
Methane and Carbon Dioxide
6
1
7
9.5.2.
Non-Thermal Plasma Direct Synthesis of
Methanol
from
Methane and Water Vapor
6
1
7
9.5.3.
Production of Formaldehyde (CH2O) by CH4 Oxidation
in Thermal and Non-Thermal Plasmas
618
9.5.4.
Non-Thermal Plasma Oxidation of Methane and Other
Hydrocarbons with Production of
Methanol
and Other
Organic Compounds
619
9.5.5.
Non-Thermal Plasma Synthesis of Aldehydes, Alcohols,
and Organic Acids in Mixtures of Carbon Oxides with
Hydrogen: Organic Synthesis in CO2-H2O Mixture
620
9.5.6.
Non-Thermal Plasma Production of Methane and
Acetylene from Syngas (CO-H2)
621
9.6.
Plasma-Chemical Polymerization of Hydrocarbons: Formation
of Thin Polymer Films
622
9.6.
1
.
General Features of Plasma Polymerization
622
9.6.2.
General Aspects of Mechanisms and Kinetics of Plasma
Polymerization
622
9.6.3.
Initiation of Polymerization by Dissociation of
Hydrocarbons in Plasma Volume
623
9.6.4.
Heterogeneous Mechanisms of Plasma-Chemical
Polymerization of
С
1
/C2 Hydrocarbons
625
9.6.5.
Plasma-Initiated Chain Polymerization: Mechanisms of
Plasma Polymerization of Methyl Methacrylate
625
9.6.6.
Plasma-Initiated Graft Polymerization
626
9.6.7.
Formation of Polymer Macroparticles in Volume of
Non-Thermal Plasma in Hydrocarbons
627
9.6.8.
Plasma-Chemical Reactors for Deposition of Thin
Polymer Films
628
9.6.9.
Some Specific Properties of Plasma-Polymerized Films
628
9.6.10.
Electric Properties of Plasma-Polymerized Films
630
9.6.1
1. Some Specific Applications of Plasma-Polymerized Film
Deposition
63
1
9.7.
Interaction of Non-Thermal Plasma with Polymer Surfaces:
Fundamentals of Plasma Modification of Polymers
632
9.7.
1
.
Plasma Treatment of Polymer Surfaces
632
9.7.2.
Major Initial Chemical Products Created on Polymer
Surfaces During Their Interaction with Non-Thermal
Plasma
633
xxviii
Contents
9.7.3.
Kinetics of Formation of Main Chemical Products in
Process of Polyethylene Treatment in Pulsed RF
Discharges
634
9.7.4.
Kinetics of Polyethylene Treatment in Continuous RF
Discharge
636
9.7.5.
Non-Thermal Plasma Etching of Polymer Materials
636
9.7.6.
Contribution of Electrons and Ultraviolet Radiation in the
Chemical Effect of Plasma Treatment of Polymer Materials
637
9.7.7.
Interaction of Atoms, Molecules, and Other Chemically
Active Heavy Particles Generated in Non-Thermal Plasma
with Polymer Materials: Plasma-Chemical Oxidation of
Polymer Surfaces
638
9.7.8.
Plasma-Chemical Nitrogenation of Polymer Surfaces
639
9.7.9.
Plasma-Chemical Fluorination of Polymer Surfaces
640
9.7.
1
0.
Synergetic Effect of Plasma-Generated Active
Atomic/Molecular Particles and UV Radiation During
Plasma Interaction with Polymers
640
9.7.
11
.
Aging Effect in Plasma-Treated Polymers
64
1
9.8.
Applications of Plasma Modification of Polymer Surfaces
64
1
9.8.
1
.
Plasma Modification of Wettability of Polymer Surfaces
64
1
9.8.2.
Plasma Enhancement of Adhesion of Polymer Surfaces:
Metallization of Polymer Surfaces
643
9.8.3.
Plasma Modification of Polymer Fibers and Polymer
Membranes
645
9.8.4.
Plasma Treatment of Textile Fibers: Treatment of Wool
645
9.8.5.
Plasma Treatment of Textile Fibers: Treatment of Cotton
and Synthetic Textiles and the Lotus Effect
648
9.8.6.
Specific Conditions and Results of Non-Thermal Plasma
Treatment of Textiles
649
9.8.7.
Plasma-Chemical Processes for Final Fabric Treatment
649
9.8.8.
Plasma-Chemical Treatment of Plastics, Rubber Materials,
and Special Polymer Films
654
9.9.
Plasma Modification of Gas-Separating Polymer Membranes
655
9.9.
1
.
Application of Polymer Membranes for Gas Separation:
Enhancement of Polymer Membrane Selectivity by Plasma
Polymerization and by Plasma Modification of Polymer
Surfaces
655
9.9.2.
Microwave Plasma System for Surface Modification of
Gas-Separating Polymer Membranes
656
9.9.3.
Influence of Non-Thermal Discharge Treatment
Parameters on Permeability of Plasma-Modified
Gas-Separating Polymer Membranes
657
9.9.4.
Plasma Enhancement of Selectivity of Gas-Separating
Polymer Membranes
659
9.9.5.
Chemical and Structural Modification of Surface Layers of
Gas-Separating Polymer Membranes by Microwave
Plasma Treatment
66
1
9.9.6.
Theoretical Model of Modification of Polymer Membrane
Surfaces in After-Glow of Oxygen-Containing Plasma of
Non-Polymerizing Gases: Lame Equation
662
XXIX
Contents
9.9.7. Elasticity/Electrostatics
Similarity Approach to
Permeability of Plasma-Treated Polymer Membranes
663
9.9.8.
Effect of Cross-Link s Mobility and Clusterization on
Permeability of Plasma-Treated Polymer Membranes
664
9.9.9.
Modeling of Selectivity of Plasma-Treated Gas-Separating
Polymer Membranes
666
9.9.10.
Effect of Initial Membrane Porosity on Selectivity
of Plasma-Treated Gas-Separating Polymer Membranes
667
9.
1
0.
Plasma-Chemical Synthesis of Diamond Films
668
9.
1
0.
1
.
General Features of Diamond-Film Production and
Deposition in Plasma
668
9.
1
0.2.
Different Discharge Systems Applied for Synthesis of
Diamond Films
669
9.
1
0.3.
Non-Equilibrium Discharge Conditions and Gas-Phase
Plasma-Chemical Processes in the Systems Applied for
Synthesis of Diamond Films
67
1
9.10.4.
Surface Chemical Processes of Diamond-Film Growth
in Plasma
672
9.
1
0.5.
Kinetics of Diamond-Film Growth
673
Problems and Concept Questions
674
10
Plasma-Chemical Fuel Conversion and Hydrogen Production
676
1
0.
1
.
Plasma-Chemical Conversion of Methane, Ethane, Propane, and
Natural Gas into Syngas
(СО-Нг)
and Other Hydrogen-Rich
Mixtures
676
1
0.1.
1. General Features of Plasma-Assisted Production of
Hydrogen from Hydrocarbons: Plasma Catalysis
676
10.1.2.
Syngas Production by Partial Oxidation of Methane in
Different Non-Equilibrium Plasma Discharges, Application
of Gliding Arc Stabilized in Reverse Vortex (Tornado)
Flow
678
10.
1
.3.
Plasma Catalysis for Syngas Production by Partial
Oxidation of Methane in Non-Equilibrium Gliding Arc
Stabilized in Reverse Vortex (Tornado) Flow
68
1
10.1.4.
Non-Equilibrium Plasma-Catalytic Syngas Production from
Mixtures of Methane with Water Vapor
683
10.1.5.
Non-Equilibrium Plasma-Chemical Syngas Production
from Mixtures of Methane with Carbon Dioxide
685
10.1.6.
Plasma-Catalytic Direct Decomposition (Pyrolysis) of
Ethane in Atmospheric-Pressure Microwave
Discharges
687
10.1.7.
Plasma Catalysis in the Process of Hydrogen Production
by Direct Decomposition (Pyrolysis) of Methane
688
10.1.8.
Mechanism of Plasma Catalysis of Direct CH4
Decomposition in Non-Equilibrium Discharges
689
10.1.9.
Plasma-Chemical Conversion of Propane,
Propane-Butane Mixtures, and Other Gaseous
Hydrocarbons to Syngas and Other Hydrogen-Rich
Mixtures
$90
xxx
Contents
1
0.2.
Plasma-Chemical Reforming of Liquid Fuels into Syngas
(CO-H2): On-Board Generation of Hydrogen-Rich Gases for
Internal Combustion Engine Vehicles
692
1
0.2.
1
.
Specific Applications of Plasma-Chemical Reforming of
Liquid Automotive Fuels: On-Board Generation of
Hydrogen-Rich Gases
692
1
0.2.2.
Plasma-Catalytic Steam Conversion and Partial Oxidation
of Kerosene for Syngas Production
693
1
0.2.3.
Plasma-Catalytic Conversion of
Ethanol
with Production
of Syngas
694
10.2.4.
Plasma-Stimulated Reforming of Diesel Fuel and Diesel
Oils into Syngas
697
10.2.5.
Plasma-Stimulated Reforming of Gasoline into
Syngas
698
1
0.2.6.
Plasma-Stimulated Reforming of Aviation Fuels into Syngas
698
1
0.2.7.
Plasma-Stimulated Partial Oxidation Reforming of
Renewable Biomass:
Biodiesel
699
10.2.8.
Plasma-Stimulated Partial Oxidation Reforming of
Bio-Oils and Other Renewable Biomass into Syngas
700
10.3.
Combined Plasma-Catalytic Production of Hydrogen by Partial
Oxidation of Hydrocarbon Fuels
70
1
1
0.3.
1
.
Combined Plasma-Catalytic Approach Versus Plasma
Catalysis in Processes of Hydrogen Production by Partial
Oxidation of Hydrocarbons
70
1
10.3.2.
Pulsed-Corona-Based Combined Plasma-Catalytic System
for Reforming of Hydrocarbon Fuel and Production of
Hydrogen-Rich Gases
702
1
0.3.3.
Catalytic Partial Oxidation Reforming of
Isooctane
703
10.3.4.
Partial Oxidation Reforming of
Isooctane
Stimulated by
Non-Equilibrium Atmospheric-Pressure Pulsed Corona
Discharge
703
1
0.3.5.
Reforming of
Isooctane
and Hydrogen Production in
Pulsed-Corona-Based Combined Plasma-Catalytic
System
704
10.3.6.
Comparison of
Isooctane
Reforming in Plasma
Preprocessing and Plasma Postprocessing Configurations
of the Combined Plasma-Catalytic System
706
10.4.
Plasma-Chemical Conversion of Coal: Mechanisms, Kinetics, and
Thermodynamics
707
10.4.1.
Coal and Its Composition, Structure, and Conversion to
Other Fuels
707
1
0.4.2.
Thermal Conversion of Coal
708
10.4.3.
Transformations of Sulfur-Containing Compounds During
Thermal Conversion of Coal
7
1
0
10.4.4.
Transformations of Nitrogen-Containing Compounds
During Thermal Conversion of Coal
7
11
10.4.5.
Thermodynamic Analysis of Coal Conversion in Thermal
Plasma
711
10.4.6.
Kinetic Phases of Coal Conversion in Thermal Plasma
712
XXXI
Contents
10.4.7.
Kinetic Analysis of Thermal Plasma Conversion of Coal:
Kinetic Features of the Major Phases of Coal Conversion
in Plasma
14
10.4.8.
Coal Conversion in Non-Thermal Plasma
715
1
0.5.
Thermal and Non-Thermal Plasma-Chemical Systems for Coal
Conversion
716
1
0.5.
1
·
General Characteristics of Coal Conversion in Thermal
Plasma Jets
716
10.5.2.
Thermal Plasma Jet Pyrolysis of Coal in Argon, Hydrogen,
and Their Mixtures: Plasma Jet Production of Acetylene
from Coal
716
10.53.
Heating of Coal Particles and Acetylene Quenching
During Pyrolysis of Coal in Argon and Hydrogen Plasma
Jets
719
1
0.5.4-
Pyrolysis of Coal in Thermal Nitrogen Plasma Jet with
Co-Production of Acetylene and Hydrogen Cyanide
72
1
1
0.5.5.
Coal Gasification in a Thermal Plasma Jet of Water Vapor
72
1
10.5.6.
Coal Gasification by H2O and Syngas Production in
Thermal Plasma Jets: Application of Steam Plasma Jets and
Plasma Jets of Other Gases
722
1
0.5.7.
Coal Gasification in Steam-Oxygen and Air Plasma Jets
724
1
0.5.8.
Conversion of Coal Directly in Electric Arcs
724
10.5.9.
Direct Pyrolysis of Coal with Production of Acetylene
(C2H2) in Arc Plasma of Argon and Hydrogen
724
1
0.5.
1
0.
Direct Gasification of Coal with Production of Syngas
(H2-CO) in Electric Arc Plasma of Water Vapor
725
10.5.1
1. Coal Conversion in Non-Equilibrium Plasma of
Microwave Discharges
726
1
0.5.
1
2.
Coal Conversion in Non-Equilibrium Microwave
Discharges Containing Water Vapor or Nitrogen
728
10.5.13.
Coal Conversion in Low-Pressure Glow and Other
Strongly Non-Equilibrium Non-Thermal Discharges
730
10.5.14.
Plasma-Chemical Coal Conversion in Corona and
Dielectric Barrier Discharges
73
1
1
0.6.
Energy and Hydrogen Production from Hydrocarbons with
Carbon Bonding in Solid Suboxides and without CO2 Emission
732
1
0.6.
1
.
Highly Ecological Hydrogen Production by Partial
Oxidation of Hydrocarbons without CO2 Emission:
Plasma Generation of Carbon Suboxides
732
10.6.2.
Thermodynamics of the Conversion of Hydrocarbons
into Hydrogen with Production of Carbon Suboxides and
without CO2 Emission
732
1
0.6.3.
Plasma-Chemical Conversion of Methane and Coal into
Carbon Suboxide
734
10.6.4.
Mechanochemical Mechanism of Partial Oxidation of
Coal with Formation of Suboxides
735
10.6.5.
Kinetics of Mechanochemical Partial Oxidation of Coal to
Carbon Suboxides
736
і
0.6.6.
Biomass Conversion into Hydrogen with the Production
of Carbon Suboxides and Without CO2 Emission
737
xxxii
Contents
10.7.
Hydrogen
Sulfide
Decomposition in
Plasma
with Production of
Hydrogen and Sulfur: Technological Aspects of Plasma-Chemical
Hydrogen Production
738
1
0.7.
1
.
H2S Dissociation in Plasma with Production of Hydrogen
and Elemental Sulfur and Its Industrial Applications
738
10.7.2.
Application of Microwave, Radiofrequency, and Arc
Discharges for H2S Dissociation with Production of
Hydrogen and Elemental Sulfur
740
10.7.3.
Technological Aspects of Plasma-Chemical Dissociation of
Hydrogen
Sulfide
with Production of Hydrogen and
Elemental Sulfur
74
1
1
0.7.4.
Kinetics of H2S Decomposition in Plasma
744
10.7.5.
Non-Equilibrium Clusterization in a Centrifugal Field and
Its Effect on H2S Decomposition in Plasma with
Production of Hydrogen and Condensed-Phase Elemental
Sulfur
745
10.7.6.
Influence of the Centrifugal Field on Average Cluster
Sizes: Centrifugal Effect Criterion for Energy Efficiency of
H2S Decomposition in Plasma
748
10.7.7.
Effect of Additives (CO2,
Ог,
and Hydrocarbons) on
Plasma-Chemical Decomposition of H2S
749
1
0.7.8.
Technological Aspects of H2 Production from Water in
Double-Step and Multi-Step Plasma-Chemical Cycles
75
1
Problems and Concept Questions
753
11 Plasma Chemistry in Energy Systems and Environmental
Control
755
I I.I. Plasma Ignition and Stabilization of Flames
755
I I.I.I. General Features of Plasma-Assisted Ignition and
Combustion
755
11.1
.2.
Experiments with Plasma Ignition of Supersonic Flows
757
11
.
1
.3.
Non-Equilibrium Plasma Ignition of Fast and Transonic
Flows: Low-Temperature Fuel Oxidation Versus Ignition
758
11
.
1
.4.
Plasma Sustaining of Combustion in Low-Speed Gas Flows
760
11
.
1
.5.
Kinetic Features of Plasma-Assisted Ignition and
Combustion
76
1
11
.
1
.6.
Combined Non-Thermal/Quasi-Thermal Mechanism of
Flame Ignition and Stabilization: Zebra Ignition and
Application of Non-Equilibrium Magnetic Gliding Arc
Discharges
763
11
.
1
.7.
Magnetic Gliding Arc Discharge Ignition of Counterflow
Flame
765
11
.
1
.8.
Plasma Ignition and Stabilization of Combustion of
Pulverized Coal: Application for Boiler Furnaces
768
11
.2.
Mechanisms and Kinetics of Plasma-Stimulated Combustion
770
11
.2.
1
.
Contribution of Different Plasma-Generated Chemically
Active Species in Non-Equilibrium Plasma Ignition and
Stabilization of Flames
770
11
.2.2.
Numerical Analysis of Contribution of Plasma-Generated
Radicals to Stimulate Ignition
770
xxxiii
Contents
11
.2.3.
Possibility of Plasma-Stimulated Ignition Below the
Auto-Ignition Limit: Conventional Kinetic Mechanisms of
Explosion of Hydrogen and Hydrocarbons
77
1
11
.2.4.
Plasma Ignition in
Н^-Ог-Не
Mixtures
773
I
1.2.5.
Plasma Ignition in Hydrocarbon-Air Mixtures
774
11
.2.6.
Analysis of Subthreshold Plasma Ignition Initiated
Thermally: The Bootstrap Effect
775
11
.2.7.
Subthreshold Ignition Initiated by Plasma-Generated
Radicals
776
1
1.2.8.
Subthreshold Ignition Initiated by Plasma-Generated
Excited Species
778
11
.2.9.
Contribution of Plasma-Excited Molecules into
Suppressing HO2 Formation During Subthreshold Plasma
Ignition of Hydrogen
779
1
1.2.10.
Subthreshold Plasma Ignition of Hydrogen Stimulated by
Excited Molecules Through Dissociation of HO2
78
1
11
.2.
11
.
Subthreshold Plasma Ignition of
Ethylene
Stimulated by
Excited Molecules Effect of NO
783
11
.2.
1
2.
Contribution of Ions in the Subthreshold Plasma Ignition
784
11
.2.
1
3.
Energy Efficiency of Plasma-Assisted Combustion in
Ram/Scramjet Engines
785
1
1.3.
Ion and Plasma Thrusters
787
1
1.3.1.
General Features of Electric Propulsion: Ion and Plasma
Thrusters
787
1
1.3.2.
Optimal Specific Impulse of an Electric Rocket Engine
788
1
1.3.3.
Electric Rocket Engines Based on Ion Thrusters
789
1
1.3.4.
Classification of Plasma Thrusters: Electrothermal Plasma
Thrusters 79Q
11
.3.5.
Electrostatic Plasma Thrusters
79
1
1
1.3.6.
Magneto-Plasma-Dynamic Thrusters
791
11
.3.7.
Pulsed Plasma Thrusters
792
11
.4.
Plasma Applications in High-Speed Aerodynamics
792
11
.4.
1
.
Plasma Interaction with High-Speed Flows and Shocks
792
11
.4.2.
Plasma Effects on Shockwave
Strutture
and Velocity
793
11
.4.3.
Plasma Aerodynamic Effects in Ballistic Range Tests
793
11
.4.4.
Global Thermal Effects: Diffuse Discharges
795
1
1-4.5.
High-Speed Aerodynamic Effects of Filamentary
Discharges
795
1
1.4.6.
Aerodynamic Effects of Surface and Dielectric Barrier
D.scharges: Aerodynamic Plasma Actuators
797
14.7.
Plasma Application for Inlet Shock Control:
Magneto-Hydrodynamics in Flow Control and Power
Extraction 798
11 ς μ
4 8 Pl
ľ,™
Jet lnieCtion in HiSh-SFx*d Aerodynamics
799
1
1.5.
Magneto-Hydrodynamic Generators and Other Plasma Systems
of Power Electronics 799
1
1.5.1.
Plasma Power Electronics 799
1.5.2.
Plasma
MHD
Generators in Power Electronics: Different
Types of
MHD
Generators
800
1.5.3.
Major Electric and Thermodynamic Characteristics of
MHD
Generators
30,
xxxiv
Contents
1
1.5.4. Electric
Conductivity of Working Fluid in Plasma
MHD
Generators
802
11
.5.5.
Plasma Thermionic Converters of Thermal Energy into
Electricity: Plasma Chemistry of Cesium
803
11
.5.6.
Gas-Discharge Commutation Devices
804
11
.6.
Plasma Chemistry in Lasers and Light Sources
804
11
.6.
1
.
Classification of Lasers: Inversion Mechanisms in Gas and
Plasma Lasers and Users on Self-Limited Transitions
804
11
.6.2.
Pulse-Periodic Self-Limited Lasers on Metal Vapors and
on Molecular Transitions
805
1
1.6.3.
Quasi-Stationary Inversion in Collisional Gas-Discharge
Lasers: Excitation by Long-Lifetime Particles and Radiative
Deactivation
806
11
.6.4.
Ionic Gas-Discharge Lasers of Low Pressure: Argon and
Не
-Ne
Lasers
806
1
1.6.5.
Inversion Mechanisms in Plasma Recombination Regime:
Plasma Lasers
807
11
.6.6.
Plasma Lasers Using Electronic Transitions: He-Cd,
He-Zn, He-Sr, and Penning Users
807
1
1.6.7.
Plasma Users Based on Atomic Transitions of Xe and on
Transitions of Multi-Charged Ions
808
11
.6.8.
Excimer Lasers
809
11
.6.9.
Gas-Discharge Users Using Vibrational-Rotational
Transitions: CO2 Users
8
1
0
11
.6.
1
0.
Gas-Discharge Users Using Vibrational-Rotational
Transitions: CO Users
81
1
11
.6.
11
.
Plasma Stimulation of Chemical Users
8
11
11
.6.
1
2.
Energy Efficiency of Chemical Users: Chemical Users
with Excitation Transfer
8
1
2
11
.6.
1
3.
Plasma Sources of Radiation with High Spectral Brightness
8
1
4
11
.6.
1
4.
Mercury-Containing and Mercury-Free Plasma Umps
8
1
5
11
.6.
1
5.
Plasma Display Panels and Plasma TV
816
1
1.7.
Non-Thermal Plasma in Environmental Control: Cleaning
Exhaust Gas of SO2 and NOX
8
1
7
11
.7.
1
.
Industrial SO2 Emissions and Plasma Effectiveness of
Cleaning Them
8
1
7
11
.7.2.
Plasma-Chemical SO2 Oxidation to SO3 in Air and
Exhaust Gas Cleaning Using Relativistic Electron
Beams
818
11
.7.3.
SO2 Oxidation in Air to SO3 Using Continuous and
Pulsed Corona Discharges
8
1
9
1
1.7.4.
Plasma-Stimulated Liquid-Phase Chain Oxidation of SO2
in Droplets
820
11
.7.5.
Plasma-Catalytic Chain Oxidation of SO2 in Clusters
822
11
.7.6.
Simplified Mechanism and Energy Balance of the
Plasma-Catalytic Chain Oxidation of SO2 in
Clusters
823
11
.7.7.
Plasma-Stimulated Combined Oxidation of NOX and SO2
in Air: Simultaneous Industrial Exhaust Gas Cleaning of
Nitrogen and Sulfur Oxides
824
xxxv
Contents
I 1
.7.8.
Plasma-Assisted After Treatment of Automotive Exhaust:
Kinetic Mechanism of Double-Stage Plasma-Catalytic
NOX and Hydrocarbon Remediation
825
11
.7.9.
Plasma-Assisted Catalytic Reduction of NOX in
Automotive Exhaust Using Pulsed Corona Discharge:
Cleaning of Diesel Engine Exhaust
827
1
1.8.
Non-Thermal Plasma Treatment of Volatile Organic Compound
Emissions, and Some Other Plasma-Ecological Technologies
830
11
.8.
1
.
General Features of the Non-Thermal Plasma Treatment
of Volatile Organic Compound Emissions
830
11
.8.2.
Mechanisms and Energy Balance of the Non-Thermal
Plasma Treatment of VOC Emissions: Treatment of
Exhaust Gases from Paper Mills and Wood Processing
Plants
830
1
1.8.3.
Removal of Acetone and
Methanol
from Air Using Pulsed
Corona Discharge
832
11
.8.4.
Removal of Dimethyl
Sulfide
from Air Using Pulsed
Corona Discharge
833
11
.8.5.
Removal of a-Pinene from Air Using Pulsed Corona
Discharge; Plasma Treatment of Exhaust Gas Mixtures
835
1
1.8.6.
Treatment of Paper Mill Exhaust Gases Using Wet Pulsed
Corona Discharge
836
1
1.8.7.
Non-Thermal Plasma Control of Diluted Urge-Volume
Emissions of Chlorine-Containing VOCs
839
1
1.8.8.
Non-Thermal Plasma Removal of Elemental Mercury
from Coal-Fired Power Plants and Other Industrial
Offgases
843
11
.8.9.
Mechanism of Non-Thermal Plasma Removal of
Elemental Mercury from Exhaust Gases
844
1
1.8.10.
Plasma Decomposition of
Freons
(Chlorofluorocarbons) and Other Waste Treatment
Processes Organized in Thermal and Transitional
Discharges
845
Problems and Concept Questions
846
12
Plasma Biology and Plasma Medicine
848
12.1.
Non-Thermal Plasma Sterilization of Different Surfaces:
Mechanisms of Plasma Sterilization
848
1
2.
1
.
1
.
Application of Low-Pressure Plasma for Biological
Sterilization
848
12.1.2.
Inactivation of Micro-Organisms by Non-Equilibrium
High-Pressure Plasma
850
1
2.
1
.3.
Plasma Species and Factors Active for Sterilization: Direct
Effect of Charged Particles
85
1
1
2.
1
.4.
Plasma Species and Factors Active for Sterilization: Effects
of Electric Fields, Particularly Related to Charged Plasma
Particles
854
1
2.
1
.5.
Plasma Species and Factors Active for Sterilization: Effect
of Reactive Neutral Species
855
1
2.
1
.6.
Plasma Species and Factors Active for Sterilization: Effects
of Heat 858
xxxvi
Contents
1
2.
1
.7.
Plasma Species and Factors Active for Sterilization: Effect
of Ultraviolet Radiation
858
12.2.
Effects of Atmospheric-Pressure Air Plasma on Bacteria and
Cells: Direct Versus Indirect Treatment, Surface Versus In-Depth
Treatment, and Apoptosis Versus Necrosis
859
1
2.2.
1
.
Direct and Indirect Effects of Non-Thermal Plasma on
Bacteria
859
1
2.2.2.
Two Experiments Proving Higher Effectiveness of Direct
Plasma Treatment of Bacteria
862
1
2.2.3.
Surface Versus In-Depth Plasma Sterilization: Penetration
of DBD Treatment into Fluid for
Biomedical
Applications
863
12.2.4.
Apoptosis Versus Necrosis in Plasma Treatment of Cells:
Sublethal Plasma Treatment Effects
865
1
2.3.
Non-Thermal Plasma Sterilization of Air Streams: Kinetics of
Plasma Inactivation of Biological Micro-Organisms
866
12.3.1.
General Features of Plasma Inactivation of Airborne
Bacteria
866
12.3.2.
Pathogen Detection and Remediation Facility for Plasma
Sterilization of Air Streams
867
12.3.3.
Special DBD Configuration
-
the Dielectric Barrier
Grating Discharge
-
Applied in PDRF for Plasma
Sterilization of Air Streams
869
1
2.3.4.
Rapid and Direct Plasma Deactivation of Airborne
Bacteria in the PDRF
870
1
2.3.5.
Phenomenological Kinetic Model of Non-Thermal Plasma
Sterilization of Air Streams
87
1
1
2.3.6.
Kinetics and Mechanisms of Rapid Plasma Deactivation of
Airborne Bacteria in the PDRF
872
1
2.4.
Plasma Cleaning and Sterilization of Water: Special Discharges in
Liquid Water Applied for Its Cleaning and Sterilization
874
1
2.4.
1
.
Needs and General Features of Plasma Water Treatment:
Water Disinfection Using UV Radiation, Ozone, or
Pulsed Electric Fields
874
1
2.4.2.
Electrical Discharges in Water
875
12.4.3.
Mechanisms and Characteristics of Plasma Discharges in
Water
876
12.4.4.
Physical Kinetics of Water Breakdown
878
1
2.4.5.
Experimental Applications of Pulsed Plasma Discharges
for Water Treatment
879
12.4.6.
Energy-Effective Water Treatment Using Pulsed Spark
Discharges
880
1
2.5.
Plasma-Assisted Tissue Engineering
882
1
2.5.
1
.
Plasma-Assisted Regulation of Biological Properties of
Medical Polymer Materials
882
12.5.2.
Plasma-Assisted Attachment and Proliferation of Bone
Cells on Polymer Scaffolds
884
12.5.3.
DBD Plasma Effect on Attachment and Proliferation of
Osteoblasts Cultured over Poly-e-Caprolactone
Scaffolds
885
1
2.5.4.
Controlling of Stem Cell Behavior on Non-Thermal
Plasma Modified Polymer Surfaces
887
XXXVII
Contents
12.5.5.
Plasma-Assisted Bio-Active Liquid Microxerography,
Plasma
Bioprinter 888
1
2.6.
Animal and Human Living Tissue Sterilization
888
1
2.6.
1
.
Direct Plasma Medicine: Floating-Electrode Dielectric
Barrier Discharge
888
12.6.2.
Direct Plasma-Medical Sterilization of Living Tissue Using
FE-DBD Plasma
889
12.6.3.
Non-Damage
(Toxicity)
Analysis of Direct Plasma
Treatment of Living Tissue
890
1
2.7.
Non-Thermal Plasma-Assisted Blood Coagulation
892
1
2.7.
1
.
General Features of Plasma-Assisted Blood Coagulation
892
1
2.7.2.
Experiments with Non-Thermal Atmospheric-Pressure
Plasma-Assisted In Vitro Blood Coagulation
892
12.7.3.
In Vivo Blood Coagulation Using FE-DBD Plasma
893
1
2.7.4.
Mechanisms of Non-Thermal Plasma-Assisted Blood
Coagulation
894
1
2.8.
Plasma-Assisted Wound Healing and Tissue Regeneration
896
1
2.8.
1
.
Discharge Systems for Air-Plasma Surgery and Nitrogen
Oxide (NO) Therapy
896
1
2.8.2.
Medical Use of Plasma-Generated Exogenic NO
898
12.8.3.
Experimental Investigations of NO Effect on Wound
Healing and Inflammatory Processes
899
1
2.8.4.
Clinical Aspects of Use of Air Plasma and Exogenic NO in
Treatment of Wound Pathologies
900
1
2.8.5.
Air Plasma and Exogenic NO in Treatment of
Inflammatory and Destructive Illnesses
904
1
2.9.
Non-Thermal Plasma Treatment of Skin Diseases
906
1
2.9.
1
.
Non-Thermal Plasma Treatment of Melanoma Skin
Cancer
906
1
2.9.2.
Non-Thermal Plasma Treatment of Cutaneous
Leishmaniasis
908
1
2.9.3.
Non-Equilibrium Plasma Treatment of
Corneal
Infections
9
1
0
1
2.9.4.
Remarks on the Non-Thermal Plasma-Medical Treatment
of Skin
911
Problems and Concept Questions
9
1
2
References
9
1
5
Index
963
XXXVIII
|
| any_adam_object | 1 |
| author | Fridman, Alexander A. 1953- |
| author_GND | (DE-588)1053135238 |
| author_facet | Fridman, Alexander A. 1953- |
| author_role | aut |
| author_sort | Fridman, Alexander A. 1953- |
| author_variant | a a f aa aaf |
| building | Verbundindex |
| bvnumber | BV040546166 |
| callnumber-first | Q - Science |
| callnumber-label | QD581 |
| callnumber-raw | QD581 |
| callnumber-search | QD581 |
| callnumber-sort | QD 3581 |
| callnumber-subject | QD - Chemistry |
| classification_rvk | UR 8000 VE 5850 |
| ctrlnum | (OCoLC)820399456 (DE-599)BVBBV040546166 |
| dewey-full | 541/.0424 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 541 - Physical chemistry |
| dewey-raw | 541/.0424 |
| dewey-search | 541/.0424 |
| dewey-sort | 3541 3424 |
| dewey-tens | 540 - Chemistry and allied sciences |
| discipline | Chemie / Pharmazie Physik |
| edition | 1. paperback ed. |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01827nam a2200433zc 4500</leader><controlfield tag="001">BV040546166</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20150408 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">121116s2012 xxkad|| |||| 00||| eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="a">2008298230</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781107684935</subfield><subfield code="c">pbk.</subfield><subfield code="9">978-1-107-68493-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780521847353</subfield><subfield code="c">hbk.</subfield><subfield code="9">978-0-521-84735-3</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)820399456</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV040546166</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">xxk</subfield><subfield code="c">GB</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-83</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-634</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QD581</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">541/.0424</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UR 8000</subfield><subfield code="0">(DE-625)146642:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">VE 5850</subfield><subfield code="0">(DE-625)147126:253</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Fridman, Alexander A.</subfield><subfield code="d">1953-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)1053135238</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Plasma chemistry</subfield><subfield code="c">Alexander Fridman</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1. paperback ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Cambridge [u.a.]</subfield><subfield code="b">Cambridge Univ. Press</subfield><subfield code="c">2012</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XLII, 978 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references (p. 915-961) and index</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Plasma chemistry</subfield><subfield code="v">Textbooks</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmachemie</subfield><subfield code="0">(DE-588)4254737-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Plasmachemie</subfield><subfield code="0">(DE-588)4254737-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Digitalisierung UB Bayreuth</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025391978&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Klappentext</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Digitalisierung UB Bayreuth</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025391978&sequence=000004&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-025391978</subfield></datafield></record></collection> |
| id | DE-604.BV040546166 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:26:12Z |
| institution | BVB |
| isbn | 9781107684935 9780521847353 |
| language | English |
| lccn | 2008298230 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-025391978 |
| oclc_num | 820399456 |
| open_access_boolean | |
| owner | DE-703 DE-11 DE-83 DE-29T DE-634 |
| owner_facet | DE-703 DE-11 DE-83 DE-29T DE-634 |
| physical | XLII, 978 S. Ill., graph. Darst. |
| publishDate | 2012 |
| publishDateSearch | 2012 |
| publishDateSort | 2012 |
| publisher | Cambridge Univ. Press |
| record_format | marc |
| spelling | Fridman, Alexander A. 1953- Verfasser (DE-588)1053135238 aut Plasma chemistry Alexander Fridman 1. paperback ed. Cambridge [u.a.] Cambridge Univ. Press 2012 XLII, 978 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Includes bibliographical references (p. 915-961) and index Plasma chemistry Textbooks Plasmachemie (DE-588)4254737-4 gnd rswk-swf Plasmachemie (DE-588)4254737-4 s DE-604 Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025391978&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Klappentext Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025391978&sequence=000004&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Fridman, Alexander A. 1953- Plasma chemistry Plasma chemistry Textbooks Plasmachemie (DE-588)4254737-4 gnd |
| subject_GND | (DE-588)4254737-4 |
| title | Plasma chemistry |
| title_auth | Plasma chemistry |
| title_exact_search | Plasma chemistry |
| title_full | Plasma chemistry Alexander Fridman |
| title_fullStr | Plasma chemistry Alexander Fridman |
| title_full_unstemmed | Plasma chemistry Alexander Fridman |
| title_short | Plasma chemistry |
| title_sort | plasma chemistry |
| topic | Plasma chemistry Textbooks Plasmachemie (DE-588)4254737-4 gnd |
| topic_facet | Plasma chemistry Textbooks Plasmachemie |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025391978&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025391978&sequence=000004&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT fridmanalexandera plasmachemistry |