Practical MEMS: [analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and mircrofluidic systems]
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Las Vegas, NV
Small Gear Publ.
2009
|
| Subjects: | |
| Item Description: | Literaturverz. S. 445 - 467 |
| Physical Description: | XVI, 478 S. zahlr. graph. Darst |
| ISBN: | 0982299109 9780982299104 |
Staff View
MARC
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Record in the Search Index
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| id | DE-604.BV040507251 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:25:20Z |
| institution | BVB |
| isbn | 0982299109 9780982299104 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-025353864 |
| oclc_num | 816338850 |
| open_access_boolean | |
| owner | DE-M347 DE-898 DE-BY-UBR DE-29T DE-83 |
| owner_facet | DE-M347 DE-898 DE-BY-UBR DE-29T DE-83 |
| physical | XVI, 478 S. zahlr. graph. Darst |
| publishDate | 2009 |
| publishDateSearch | 2009 |
| publishDateSort | 2009 |
| publisher | Small Gear Publ. |
| record_format | marc |
| spelling | Practical MEMS [analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and mircrofluidic systems] Ville Kaajakari Las Vegas, NV Small Gear Publ. 2009 XVI, 478 S. zahlr. graph. Darst txt rdacontent n rdamedia nc rdacarrier Literaturverz. S. 445 - 467 Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikrosensor (DE-588)4561097-6 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Mikromechanik (DE-588)4205811-9 s MEMS (DE-588)4824724-8 s Mikrosensor (DE-588)4561097-6 s DE-604 Kaajakari, Ville Sonstige oth |
| spellingShingle | Practical MEMS [analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and mircrofluidic systems] Mikromechanik (DE-588)4205811-9 gnd Mikrosensor (DE-588)4561097-6 gnd MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4561097-6 (DE-588)4824724-8 |
| title | Practical MEMS [analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and mircrofluidic systems] |
| title_auth | Practical MEMS [analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and mircrofluidic systems] |
| title_exact_search | Practical MEMS [analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and mircrofluidic systems] |
| title_full | Practical MEMS [analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and mircrofluidic systems] Ville Kaajakari |
| title_fullStr | Practical MEMS [analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and mircrofluidic systems] Ville Kaajakari |
| title_full_unstemmed | Practical MEMS [analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and mircrofluidic systems] Ville Kaajakari |
| title_short | Practical MEMS |
| title_sort | practical mems analysis and design of microsystems mems sensors accelerometers pressure sensors gyroscopes sensor electronics actuators rf mems optical mems and mircrofluidic systems |
| title_sub | [analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and mircrofluidic systems] |
| topic | Mikromechanik (DE-588)4205811-9 gnd Mikrosensor (DE-588)4561097-6 gnd MEMS (DE-588)4824724-8 gnd |
| topic_facet | Mikromechanik Mikrosensor MEMS |
| work_keys_str_mv | AT kaajakariville practicalmemsanalysisanddesignofmicrosystemsmemssensorsaccelerometerspressuresensorsgyroscopessensorelectronicsactuatorsrfmemsopticalmemsandmircrofluidicsystems |