(2009). Practical MEMS: [analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and mircrofluidic systems]. Small Gear Publ.
Chicago-Zitierstil (17. Ausg.)Practical MEMS: [analysis and Design of Microsystems, MEMS Sensors (accelerometers, Pressure Sensors, Gyroscopes), Sensor Electronics, Actuators, RF MEMS, Optical MEMS, and Mircrofluidic Systems]. Las Vegas, NV: Small Gear Publ, 2009.
MLA-Zitierstil (9. Ausg.)Practical MEMS: [analysis and Design of Microsystems, MEMS Sensors (accelerometers, Pressure Sensors, Gyroscopes), Sensor Electronics, Actuators, RF MEMS, Optical MEMS, and Mircrofluidic Systems]. Small Gear Publ, 2009.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.