A practical guide to optical metrology for thin films:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Weinheim
Wiley-VCH
2013
|
| Schlagworte: | |
| Online-Zugang: | Inhaltstext Inhaltsverzeichnis |
| Beschreibung: | XII, 211 S. Ill., graph. Darst. |
| ISBN: | 3527411674 9783527411672 9783527664344 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV040506276 | ||
| 003 | DE-604 | ||
| 005 | 20131014 | ||
| 007 | t | ||
| 008 | 121026s2013 ad|| |||| 00||| eng d | ||
| 015 | |a 12N18 |2 dnb | ||
| 016 | 7 | |a 1021678562 |2 DE-101 | |
| 020 | |a 3527411674 |9 3-527-41167-4 | ||
| 020 | |a 9783527411672 |c : Pb. : ca. EUR 69.00 (DE) |9 978-3-527-41167-2 | ||
| 020 | |a 9783527664344 |c oBook |9 978-3-527-66434-4 | ||
| 035 | |a (OCoLC)820493599 | ||
| 035 | |a (DE-599)DNB1021678562 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-83 |a DE-522 |a DE-11 |a DE-703 |a DE-91G |a DE-92 |a DE-29T | ||
| 082 | 0 | |a 530.4175 |2 22/ger | |
| 084 | |a UP 7500 |0 (DE-625)146433: |2 rvk | ||
| 084 | |a ZQ 3910 |0 (DE-625)158088: |2 rvk | ||
| 084 | |a MSR 329f |2 stub | ||
| 084 | |a PHY 781f |2 stub | ||
| 084 | |a MSR 415f |2 stub | ||
| 084 | |a WER 070f |2 stub | ||
| 100 | 1 | |a Quinten, Michael |e Verfasser |0 (DE-588)111740789 |4 aut | |
| 245 | 1 | 0 | |a A practical guide to optical metrology for thin films |c Michael Quinten |
| 264 | 1 | |a Weinheim |b Wiley-VCH |c 2013 | |
| 300 | |a XII, 211 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Optische Messtechnik |0 (DE-588)4172667-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Schichtdicke |0 (DE-588)4264521-9 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
| 689 | 0 | 1 | |a Schichtdicke |0 (DE-588)4264521-9 |D s |
| 689 | 0 | 2 | |a Optische Messtechnik |0 (DE-588)4172667-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe, EPUB |z 978-3-527-66435-1 |
| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe, MOBI |z 978-3-527-66436-8 |
| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe, PDF |z 978-3-527-66437-5 |
| 856 | 4 | |q text/html |u http://deposit.dnb.de/cgi-bin/dokserv?id=4014765&prov=M&dok_var=1&dok_ext=htm |3 Inhaltstext | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025352903&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-025352903 | |
Datensatz im Suchindex
| _version_ | 1807954093757431808 |
|---|---|
| adam_text |
IMAGE 1
V I I
CONTENTS
PREFACE X I
1 INTRODUCTION 1
2 PROPAGATION O F LIGHT AND OTHER ELECTROMAGNETIC WAVES 7 2.1 PROPERTIES
O F ELECTROMAGNETIC WAVES 7 2.2 HUYGENS-FRESNEL PRINCIPLE 14
2.3 INTERFERENCE OF ELECTROMAGNETIC WAVES 15 2.4 REFLECTION AND
REFRACTION 16
2.5 DIFFRACTION 21
2.5.1 TRANSMISSION GRATINGS 27
2.5.1.1 LAMELLAR TRANSMISSION GRATINGS 27 2.5.1.2 HOLOGRAPHIC
TRANSMISSION GRATINGS 29 2.5.2 REFLECTION GRATINGS 31
2.5.2.1 LAMELLAR REFLECTION GRATINGS 31 2.5.2.2 BLAZED GRATINGS 33
2.5.2.3 HOLOGRAPHIC GRATINGS 34 2.6 SCATTERING 34
2.7 DIELECTRIC FUNCTION AND REFRACTIVE INDEX 35 2.7.1 MODELS FOR THE
DIELECTRIC FUNCTION 35 2.7.2 KRAMERS-KRONIG ANALYSIS OF DIELECTRIC
FUNCTIONS 49 2.7.3 EMPIRIC FORMULAS FOR THE REFRACTIVE INDEX 50
2.7.4 EMA MODELS 53
3 SPECTRAL REFLECTANCE AND TRANSMITTANCE O F A LAYER STACK 59 3.1
REFLECTANCE AND TRANSMITTANCE O F A SINGLE LAYER 59 3.1.1 COHERENT
SUPERPOSITION O F REFLECTED LIGHT 59 3.1.2 INFLUENCE O F ABSORPTION ON
THE LAYER 65
3.1.3 PARTIAL INCOHERENCE DUE TO THICK SUBSTRATES 69 3.1.4 PARTIAL
INCOHERENCE DUE TO ROUGHNESS 72 3.1.5 COHERENT SUPERPOSITION O F
TRANSMITTED LIGHT 74 3.2 PROPAGATING WAVE MODEL FOR A LAYER STACK 75
3.2.1 COHERENT REFLECTANCE AND TRANSMITTANCE O F A LAYER STACK 76
HTTP://D-NB.INFO/1021678562
IMAGE 2
V I I I CONTENTS
3.2.2 CONSIDERATION O F INCOHERENT SUBSTRATES 78
3.2.3 CONSIDERATION O F SURFACE ROUGHNESS 78 3.2.4 R-T-0 MODEL FOR A
LAYER STACK 79
4 THE OPTICAL MEASUREMENT 81
4.1 SPECTRAL REFLECTANCE AND TRANSMITTANCE MEASUREMENT 81 4.2
ELLIPSOMETRIC MEASUREMENT 85
4.3 OTHER OPTICAL METHODS 88
4.3.1 PRISM COUPLING 88
4.3.2 CHROMATIC THICKNESS DETERMINATION 92 4.4 COMPONENTS FOR THE
OPTICAL MEASUREMENT 94 4.4.1 LIGHT SOURCES 94
4.4.1.1 HALOGEN LAMPS 94 4.4.1.2 WHITE LIGHT LED 95 4.4.1.3
SUPERLUMINESCENCE DIODES 96 4.4.1.4 XENON HIGH-PRESSURE ARC LAMPS 97
4.4.1.5 DEUTERIUM LAMPS 97 4.4.2 OPTICAL COMPONENTS 99
4.4.2.1 LENSES AND MIRRORS 99 4.4.2.2 POLARIZERS AND ANALYZERS 101
4.4.2.3 OPTICAL RETARDERS 102 4.4.3 OPTICAL FIBERS 103
4.4.4 MINIATURIZED SPECTROMETERS 107 4.4.4.1 GRATINGS 107
4.4.4.2 DETECTORS 110 4.4.4.3 SYSTEM PROPERTIES 115
5 THIN-FILM THICKNESS DETERMINATION 121 5.1 FAST FOURIER TRANSFORM 122
5.1.1 SINGLE LAYER 122
5.1.2 LAYER STACK 129
5.1.3 ACCURACY, RESOLUTION, REPEATABILITY, AND REPRODUCIBILITY 130 5.2
REGRESSION ANALYSIS WITH X 2 -TEST 131 5.2.1 METHOD O F THICKNESS
DETERMINATION 131 5.2.2 ACCURACY, RESOLUTION, REPEATABILITY, AND
REPRODUCIBILITY 137
6 THE COLOR O F THIN FILMS 141
7 APPLICATIONS 149
7.1 HIGH-REFLECTION AND ANTIREFLECTION COATINGS 150 7.1.1 HR COATINGS ON
METALLIC MIRRORS 151 7.1.2 AR COATINGS ON GLASS 152
7.1.3 AR COATINGS ON SOLAR WAFERS 153 7.2 THIN SINGLE- AND DOUBLE-LAYER
COATINGS 156 7.2.1 SI0 2 O N SILICON WAFERS 157
IMAGE 3
7.2.2 SI 3 N 4 HARDCOAT 157
7.2.3 DOUBLE-LAYER SYSTEM 158 7.2.4 POROUS SILICON ON SILICON 158 7.3
PHOTORESISTS AND PHOTOLITHOGRAPHIC STRUCTURING 160 7.4 THICKNESS O F
WAFERS AND TRANSPARENT PLASTIC FILMS 163 7.4.1 THICKNESS O F
SEMICONDUCTOR, GLASS, AND SAPPHIRE WAFERS 7.4.2 THICKNESS OF TRANSPARENT
PLASTIC FILMS 367 7.4.3 THICKNESS O F DOPED SILICON 169 7.5 SILICON ON
INSULATOR 174
7.6 THIN-FILM PHOTOVOLTAICS 177
7.6.1 INORGANIC THIN-FILM SOLAR CELLS 177 7.6.2 ORGANIC THIN-FILM SOLAR
CELLS 180 7.7 MEASUREMENT O F CRITICAL DIMENSIONS 182
NUMERICS WITH COMPLEX NUMBERS 187
FOURIER T RANSFORM 191
LEVENBERG-MARQUARDT ALGORITHM 197
DOWNHILL SIMPLEX ALGORITHM 199
REFERENCES 201
INDEX 209 |
| any_adam_object | 1 |
| author | Quinten, Michael |
| author_GND | (DE-588)111740789 |
| author_facet | Quinten, Michael |
| author_role | aut |
| author_sort | Quinten, Michael |
| author_variant | m q mq |
| building | Verbundindex |
| bvnumber | BV040506276 |
| classification_rvk | UP 7500 ZQ 3910 |
| classification_tum | MSR 329f PHY 781f MSR 415f WER 070f |
| ctrlnum | (OCoLC)820493599 (DE-599)DNB1021678562 |
| dewey-full | 530.4175 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
| dewey-raw | 530.4175 |
| dewey-search | 530.4175 |
| dewey-sort | 3530.4175 |
| dewey-tens | 530 - Physics |
| discipline | Physik Werkstoffwissenschaften Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a2200000 c 4500</leader><controlfield tag="001">BV040506276</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20131014</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">121026s2013 ad|| |||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">12N18</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">1021678562</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3527411674</subfield><subfield code="9">3-527-41167-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783527411672</subfield><subfield code="c">: Pb. : ca. EUR 69.00 (DE)</subfield><subfield code="9">978-3-527-41167-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783527664344</subfield><subfield code="c">oBook</subfield><subfield code="9">978-3-527-66434-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)820493599</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB1021678562</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield><subfield code="a">DE-522</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-91G</subfield><subfield code="a">DE-92</subfield><subfield code="a">DE-29T</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">530.4175</subfield><subfield code="2">22/ger</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7500</subfield><subfield code="0">(DE-625)146433:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZQ 3910</subfield><subfield code="0">(DE-625)158088:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">MSR 329f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 781f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">MSR 415f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">WER 070f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Quinten, Michael</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)111740789</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">A practical guide to optical metrology for thin films</subfield><subfield code="c">Michael Quinten</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Weinheim</subfield><subfield code="b">Wiley-VCH</subfield><subfield code="c">2013</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XII, 211 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Optische Messtechnik</subfield><subfield code="0">(DE-588)4172667-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Schichtdicke</subfield><subfield code="0">(DE-588)4264521-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Schichtdicke</subfield><subfield code="0">(DE-588)4264521-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Optische Messtechnik</subfield><subfield code="0">(DE-588)4172667-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe, EPUB</subfield><subfield code="z">978-3-527-66435-1</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe, MOBI</subfield><subfield code="z">978-3-527-66436-8</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe, PDF</subfield><subfield code="z">978-3-527-66437-5</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="q">text/html</subfield><subfield code="u">http://deposit.dnb.de/cgi-bin/dokserv?id=4014765&prov=M&dok_var=1&dok_ext=htm</subfield><subfield code="3">Inhaltstext</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025352903&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-025352903</subfield></datafield></record></collection> |
| id | DE-604.BV040506276 |
| illustrated | Illustrated |
| indexdate | 2024-08-21T00:16:24Z |
| institution | BVB |
| isbn | 3527411674 9783527411672 9783527664344 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-025352903 |
| oclc_num | 820493599 |
| open_access_boolean | |
| owner | DE-83 DE-522 DE-11 DE-703 DE-91G DE-BY-TUM DE-92 DE-29T |
| owner_facet | DE-83 DE-522 DE-11 DE-703 DE-91G DE-BY-TUM DE-92 DE-29T |
| physical | XII, 211 S. Ill., graph. Darst. |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Wiley-VCH |
| record_format | marc |
| spelling | Quinten, Michael Verfasser (DE-588)111740789 aut A practical guide to optical metrology for thin films Michael Quinten Weinheim Wiley-VCH 2013 XII, 211 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Optische Messtechnik (DE-588)4172667-4 gnd rswk-swf Schichtdicke (DE-588)4264521-9 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 s Schichtdicke (DE-588)4264521-9 s Optische Messtechnik (DE-588)4172667-4 s DE-604 Erscheint auch als Online-Ausgabe, EPUB 978-3-527-66435-1 Erscheint auch als Online-Ausgabe, MOBI 978-3-527-66436-8 Erscheint auch als Online-Ausgabe, PDF 978-3-527-66437-5 text/html http://deposit.dnb.de/cgi-bin/dokserv?id=4014765&prov=M&dok_var=1&dok_ext=htm Inhaltstext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025352903&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Quinten, Michael A practical guide to optical metrology for thin films Dünne Schicht (DE-588)4136925-7 gnd Optische Messtechnik (DE-588)4172667-4 gnd Schichtdicke (DE-588)4264521-9 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4172667-4 (DE-588)4264521-9 |
| title | A practical guide to optical metrology for thin films |
| title_auth | A practical guide to optical metrology for thin films |
| title_exact_search | A practical guide to optical metrology for thin films |
| title_full | A practical guide to optical metrology for thin films Michael Quinten |
| title_fullStr | A practical guide to optical metrology for thin films Michael Quinten |
| title_full_unstemmed | A practical guide to optical metrology for thin films Michael Quinten |
| title_short | A practical guide to optical metrology for thin films |
| title_sort | a practical guide to optical metrology for thin films |
| topic | Dünne Schicht (DE-588)4136925-7 gnd Optische Messtechnik (DE-588)4172667-4 gnd Schichtdicke (DE-588)4264521-9 gnd |
| topic_facet | Dünne Schicht Optische Messtechnik Schichtdicke |
| url | http://deposit.dnb.de/cgi-bin/dokserv?id=4014765&prov=M&dok_var=1&dok_ext=htm http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=025352903&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT quintenmichael apracticalguidetoopticalmetrologyforthinfilms |