Advanced metallization for ULSI applications: [the Advanced Metallization Conference 2012, 22nd Asian Session (ADMETAplus 2012) was held at Yayoi Hall, the University of Tokyo, Japan, from October 22 to 25, 2012]
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Tokyo
Japan Soc. of Applied Physics
2013
|
| Series: | Japanese journal of applied physics
52,5,4 : special issue |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschr.-Heftes. - Kongress aus dem Vorwort ermittelt |
| Physical Description: | Getr. Zählung Ill., graph. Darst. |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV040388078 | ||
| 003 | DE-604 | ||
| 005 | 20130814 | ||
| 007 | t | ||
| 008 | 120827s2013 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)812246676 | ||
| 035 | |a (DE-599)GBV720617383 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-384 | ||
| 245 | 1 | 0 | |a Advanced metallization for ULSI applications |b [the Advanced Metallization Conference 2012, 22nd Asian Session (ADMETAplus 2012) was held at Yayoi Hall, the University of Tokyo, Japan, from October 22 to 25, 2012] |c ed. by Fuminori Ito ... |
| 246 | 1 | 3 | |a Special issue: Advanced metallization for ULSI applications |
| 264 | 1 | |a Tokyo |b Japan Soc. of Applied Physics |c 2013 | |
| 300 | |a Getr. Zählung |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Japanese journal of applied physics |v 52,5,4 : special issue | |
| 500 | |a Einzelaufnahme eines Zeitschr.-Heftes. - Kongress aus dem Vorwort ermittelt | ||
| 650 | 0 | 7 | |a ULSI |0 (DE-588)4226286-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Metallisieren |0 (DE-588)4169599-9 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2012 |z Tokio |2 gnd-content | |
| 689 | 0 | 0 | |a ULSI |0 (DE-588)4226286-0 |D s |
| 689 | 0 | 1 | |a Metallisieren |0 (DE-588)4169599-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Ito, Fuminori |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-025241471 | ||
Record in the Search Index
| _version_ | 1804149432962252800 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV040388078 |
| ctrlnum | (OCoLC)812246676 (DE-599)GBV720617383 |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01420nam a2200349 cb4500</leader><controlfield tag="001">BV040388078</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20130814 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">120827s2013 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)812246676</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBV720617383</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-384</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Advanced metallization for ULSI applications</subfield><subfield code="b">[the Advanced Metallization Conference 2012, 22nd Asian Session (ADMETAplus 2012) was held at Yayoi Hall, the University of Tokyo, Japan, from October 22 to 25, 2012]</subfield><subfield code="c">ed. by Fuminori Ito ...</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Special issue: Advanced metallization for ULSI applications</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Tokyo</subfield><subfield code="b">Japan Soc. of Applied Physics</subfield><subfield code="c">2013</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">Getr. Zählung</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Japanese journal of applied physics</subfield><subfield code="v">52,5,4 : special issue</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufnahme eines Zeitschr.-Heftes. - Kongress aus dem Vorwort ermittelt</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">ULSI</subfield><subfield code="0">(DE-588)4226286-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Metallisieren</subfield><subfield code="0">(DE-588)4169599-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">2012</subfield><subfield code="z">Tokio</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">ULSI</subfield><subfield code="0">(DE-588)4226286-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Metallisieren</subfield><subfield code="0">(DE-588)4169599-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ito, Fuminori</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-025241471</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 2012 Tokio gnd-content |
| genre_facet | Konferenzschrift 2012 Tokio |
| id | DE-604.BV040388078 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:22:57Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-025241471 |
| oclc_num | 812246676 |
| open_access_boolean | |
| owner | DE-384 |
| owner_facet | DE-384 |
| physical | Getr. Zählung Ill., graph. Darst. |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Japan Soc. of Applied Physics |
| record_format | marc |
| series2 | Japanese journal of applied physics |
| spelling | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2012, 22nd Asian Session (ADMETAplus 2012) was held at Yayoi Hall, the University of Tokyo, Japan, from October 22 to 25, 2012] ed. by Fuminori Ito ... Special issue: Advanced metallization for ULSI applications Tokyo Japan Soc. of Applied Physics 2013 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Japanese journal of applied physics 52,5,4 : special issue Einzelaufnahme eines Zeitschr.-Heftes. - Kongress aus dem Vorwort ermittelt ULSI (DE-588)4226286-0 gnd rswk-swf Metallisieren (DE-588)4169599-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2012 Tokio gnd-content ULSI (DE-588)4226286-0 s Metallisieren (DE-588)4169599-9 s DE-604 Ito, Fuminori Sonstige oth |
| spellingShingle | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2012, 22nd Asian Session (ADMETAplus 2012) was held at Yayoi Hall, the University of Tokyo, Japan, from October 22 to 25, 2012] ULSI (DE-588)4226286-0 gnd Metallisieren (DE-588)4169599-9 gnd |
| subject_GND | (DE-588)4226286-0 (DE-588)4169599-9 (DE-588)1071861417 |
| title | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2012, 22nd Asian Session (ADMETAplus 2012) was held at Yayoi Hall, the University of Tokyo, Japan, from October 22 to 25, 2012] |
| title_alt | Special issue: Advanced metallization for ULSI applications |
| title_auth | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2012, 22nd Asian Session (ADMETAplus 2012) was held at Yayoi Hall, the University of Tokyo, Japan, from October 22 to 25, 2012] |
| title_exact_search | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2012, 22nd Asian Session (ADMETAplus 2012) was held at Yayoi Hall, the University of Tokyo, Japan, from October 22 to 25, 2012] |
| title_full | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2012, 22nd Asian Session (ADMETAplus 2012) was held at Yayoi Hall, the University of Tokyo, Japan, from October 22 to 25, 2012] ed. by Fuminori Ito ... |
| title_fullStr | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2012, 22nd Asian Session (ADMETAplus 2012) was held at Yayoi Hall, the University of Tokyo, Japan, from October 22 to 25, 2012] ed. by Fuminori Ito ... |
| title_full_unstemmed | Advanced metallization for ULSI applications [the Advanced Metallization Conference 2012, 22nd Asian Session (ADMETAplus 2012) was held at Yayoi Hall, the University of Tokyo, Japan, from October 22 to 25, 2012] ed. by Fuminori Ito ... |
| title_short | Advanced metallization for ULSI applications |
| title_sort | advanced metallization for ulsi applications the advanced metallization conference 2012 22nd asian session admetaplus 2012 was held at yayoi hall the university of tokyo japan from october 22 to 25 2012 |
| title_sub | [the Advanced Metallization Conference 2012, 22nd Asian Session (ADMETAplus 2012) was held at Yayoi Hall, the University of Tokyo, Japan, from October 22 to 25, 2012] |
| topic | ULSI (DE-588)4226286-0 gnd Metallisieren (DE-588)4169599-9 gnd |
| topic_facet | ULSI Metallisieren Konferenzschrift 2012 Tokio |
| work_keys_str_mv | AT itofuminori advancedmetallizationforulsiapplicationstheadvancedmetallizationconference201222ndasiansessionadmetaplus2012washeldatyayoihalltheuniversityoftokyojapanfromoctober22to252012 AT itofuminori specialissueadvancedmetallizationforulsiapplications |