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MEMS Reliability:

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Bibliographic Details
Main Authors:	Hartzell, Allyson L. (Author), da Silva, Mark G. (Author), Shea, Herbert R. (Author)
Format:	Electronic eBook
Language:	English
Published:	Boston, MA Springer US 2011
Series:	MEMS Reference Shelf
Subjects:	Ingenieurwissenschaften Engineering Electronics Electronics and Microelectronics, Instrumentation
Online Access:	TUM01 Volltext
Physical Description:	1 Online-Ressource
ISBN:	9781441960184
DOI:	10.1007/978-1-4419-6018-4

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Record in the Search Index

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id	DE-604.BV040124444
illustrated	Not Illustrated
indexdate	2025-02-20T06:47:53Z
institution	BVB
isbn	9781441960184
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-024981730
oclc_num	724468001
open_access_boolean
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publishDate	2011
publishDateSearch	2011
publishDateSort	2011
publisher	Springer US
record_format	marc
series2	MEMS Reference Shelf
spellingShingle	Hartzell, Allyson L. da Silva, Mark G. Shea, Herbert R. MEMS Reliability Ingenieurwissenschaften Engineering Electronics Electronics and Microelectronics, Instrumentation
title	MEMS Reliability
title_auth	MEMS Reliability
title_exact_search	MEMS Reliability
title_full	MEMS Reliability by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea
title_fullStr	MEMS Reliability by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea
title_full_unstemmed	MEMS Reliability by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea
title_short	MEMS Reliability
title_sort	mems reliability
topic	Ingenieurwissenschaften Engineering Electronics Electronics and Microelectronics, Instrumentation
topic_facet	Ingenieurwissenschaften Engineering Electronics Electronics and Microelectronics, Instrumentation
url	https://doi.org/10.1007/978-1-4419-6018-4
work_keys_str_mv	AT hartzellallysonl memsreliability AT dasilvamarkg memsreliability AT sheaherbertr memsreliability

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