APA (7th ed.) Citation

Hartzell, A. L., da Silva, M. G., & Shea, H. R. (2011). MEMS Reliability. Springer US. https://doi.org/10.1007/978-1-4419-6018-4

Chicago Style (17th ed.) Citation

Hartzell, Allyson L., Mark G. da Silva, and Herbert R. Shea. MEMS Reliability. Boston, MA: Springer US, 2011. https://doi.org/10.1007/978-1-4419-6018-4.

MLA (9th ed.) Citation

Hartzell, Allyson L., et al. MEMS Reliability. Springer US, 2011. https://doi.org/10.1007/978-1-4419-6018-4.