Handbook of physical vapor deposition (PVD) processing:
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Norwich, N.Y.
William Andrew, an imprint of Elsevier
[2010]
|
| Edition: | Second edition |
| Subjects: | |
| Online Access: | UER01 Volltext |
| Physical Description: | 1 Online-Ressource (746 pages) Illustrationen, Grafiken |
| ISBN: | 9780815520375 |
Staff View
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV039827463 | ||
| 003 | DE-604 | ||
| 005 | 20200825 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 120124s2010 sz |||| o||u| ||||||eng d | ||
| 020 | |a 9780815520375 |c Online |9 978-0-8155-2037-5 | ||
| 035 | |a (ZDB-33-EBS)ocn613958939 | ||
| 035 | |a (OCoLC)775112750 | ||
| 035 | |a (DE-599)BVBBV039827463 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 044 | |a sz |c XA-CH | ||
| 049 | |a DE-1046 |a DE-91 |a DE-29 | ||
| 084 | |a ZM 7680 |0 (DE-625)160562: |2 rvk | ||
| 084 | |a UP 7550 |0 (DE-625)146434: |2 rvk | ||
| 084 | |a ELT 280b |2 stub | ||
| 084 | |a FER 882b |2 stub | ||
| 245 | 1 | 0 | |a Handbook of physical vapor deposition (PVD) processing |c Donald M. Mattox |
| 250 | |a Second edition | ||
| 264 | 1 | |a Norwich, N.Y. |b William Andrew, an imprint of Elsevier |c [2010] | |
| 264 | 4 | |c © 2010 | |
| 300 | |a 1 Online-Ressource (746 pages) |b Illustrationen, Grafiken | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 650 | 4 | |a Physical vapor deposition / Handbooks, manuals, etc | |
| 650 | 0 | 7 | |a PVD-Verfahren |0 (DE-588)4115673-0 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a PVD-Verfahren |0 (DE-588)4115673-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Mattox, Donald M. |e Sonstige |0 (DE-588)1214767370 |4 oth | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |
| 856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780815520375 |x Verlag |3 Volltext |
| 912 | |a ZDB-33-ESD |a ZDB-33-EBS | ||
| 940 | 1 | |q FAW_PDA_ESD_Kauf | |
| 940 | 1 | |q TUM_PDA_ELSEVIER_erworben | |
| 940 | 1 | |q FLA_PDA_ESD | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-024687467 | ||
| 966 | e | |u http://www.sciencedirect.com/science/book/9780815520375 |l UER01 |p ZDB-33-EBS |q UER_PDA_EBS_Kauf |x Verlag |3 Volltext | |
Record in the Search Index
| _version_ | 1804148764123856896 |
|---|---|
| any_adam_object | |
| author_GND | (DE-588)1214767370 |
| building | Verbundindex |
| bvnumber | BV039827463 |
| classification_rvk | ZM 7680 UP 7550 |
| classification_tum | ELT 280b FER 882b |
| collection | ZDB-33-ESD ZDB-33-EBS |
| ctrlnum | (ZDB-33-EBS)ocn613958939 (OCoLC)775112750 (DE-599)BVBBV039827463 |
| discipline | Physik Elektrotechnik Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik |
| edition | Second edition |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01744nmm a2200481zc 4500</leader><controlfield tag="001">BV039827463</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20200825 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">120124s2010 sz |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780815520375</subfield><subfield code="c">Online</subfield><subfield code="9">978-0-8155-2037-5</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-33-EBS)ocn613958939</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)775112750</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV039827463</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">sz</subfield><subfield code="c">XA-CH</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-29</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZM 7680</subfield><subfield code="0">(DE-625)160562:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7550</subfield><subfield code="0">(DE-625)146434:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 280b</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">FER 882b</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of physical vapor deposition (PVD) processing</subfield><subfield code="c">Donald M. Mattox</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">Second edition</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Norwich, N.Y.</subfield><subfield code="b">William Andrew, an imprint of Elsevier</subfield><subfield code="c">[2010]</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">© 2010</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (746 pages)</subfield><subfield code="b">Illustrationen, Grafiken</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Physical vapor deposition / Handbooks, manuals, etc</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">PVD-Verfahren</subfield><subfield code="0">(DE-588)4115673-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">PVD-Verfahren</subfield><subfield code="0">(DE-588)4115673-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mattox, Donald M.</subfield><subfield code="e">Sonstige</subfield><subfield code="0">(DE-588)1214767370</subfield><subfield code="4">oth</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780815520375</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield><subfield code="a">ZDB-33-EBS</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">FAW_PDA_ESD_Kauf</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">TUM_PDA_ELSEVIER_erworben</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">FLA_PDA_ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-024687467</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780815520375</subfield><subfield code="l">UER01</subfield><subfield code="p">ZDB-33-EBS</subfield><subfield code="q">UER_PDA_EBS_Kauf</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV039827463 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T00:12:19Z |
| institution | BVB |
| isbn | 9780815520375 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-024687467 |
| oclc_num | 613958939 775112750 |
| open_access_boolean | |
| owner | DE-1046 DE-91 DE-BY-TUM DE-29 |
| owner_facet | DE-1046 DE-91 DE-BY-TUM DE-29 |
| physical | 1 Online-Ressource (746 pages) Illustrationen, Grafiken |
| psigel | ZDB-33-ESD ZDB-33-EBS FAW_PDA_ESD_Kauf TUM_PDA_ELSEVIER_erworben FLA_PDA_ESD ZDB-33-EBS UER_PDA_EBS_Kauf |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | William Andrew, an imprint of Elsevier |
| record_format | marc |
| spelling | Handbook of physical vapor deposition (PVD) processing Donald M. Mattox Second edition Norwich, N.Y. William Andrew, an imprint of Elsevier [2010] © 2010 1 Online-Ressource (746 pages) Illustrationen, Grafiken txt rdacontent c rdamedia cr rdacarrier Physical vapor deposition / Handbooks, manuals, etc PVD-Verfahren (DE-588)4115673-0 gnd rswk-swf PVD-Verfahren (DE-588)4115673-0 s DE-604 Mattox, Donald M. Sonstige (DE-588)1214767370 oth Erscheint auch als Druck-Ausgabe http://www.sciencedirect.com/science/book/9780815520375 Verlag Volltext |
| spellingShingle | Handbook of physical vapor deposition (PVD) processing Physical vapor deposition / Handbooks, manuals, etc PVD-Verfahren (DE-588)4115673-0 gnd |
| subject_GND | (DE-588)4115673-0 |
| title | Handbook of physical vapor deposition (PVD) processing |
| title_auth | Handbook of physical vapor deposition (PVD) processing |
| title_exact_search | Handbook of physical vapor deposition (PVD) processing |
| title_full | Handbook of physical vapor deposition (PVD) processing Donald M. Mattox |
| title_fullStr | Handbook of physical vapor deposition (PVD) processing Donald M. Mattox |
| title_full_unstemmed | Handbook of physical vapor deposition (PVD) processing Donald M. Mattox |
| title_short | Handbook of physical vapor deposition (PVD) processing |
| title_sort | handbook of physical vapor deposition pvd processing |
| topic | Physical vapor deposition / Handbooks, manuals, etc PVD-Verfahren (DE-588)4115673-0 gnd |
| topic_facet | Physical vapor deposition / Handbooks, manuals, etc PVD-Verfahren |
| url | http://www.sciencedirect.com/science/book/9780815520375 |
| work_keys_str_mv | AT mattoxdonaldm handbookofphysicalvapordepositionpvdprocessing |