Dielectric thin films for future electron devices: science and technology: [selection of papers presented at the 2011 International Workshop on "Dielectric Thin Films for Future Electron Devices: Science and Technology" (IWDTF 2011), ... Tokyo on January 20 and 21 in 2011]
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Tokyo
Japan Soc. of Applied Physics
2011
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| Series: | Japanese journal of applied physics
50,10,2 : special issue |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschr.-Heftes |
| Physical Description: | Getr. Zählung Ill., graph. Darst. |
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| indexdate | 2024-07-10T00:11:58Z |
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| publishDate | 2011 |
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| publisher | Japan Soc. of Applied Physics |
| record_format | marc |
| series2 | Japanese journal of applied physics |
| spelling | Dielectric thin films for future electron devices: science and technology [selection of papers presented at the 2011 International Workshop on "Dielectric Thin Films for Future Electron Devices: Science and Technology" (IWDTF 2011), ... Tokyo on January 20 and 21 in 2011] ed. by Akira Sakai ... Special issue Dielectric thin films for future electron devices: science and technology Tokyo Japan Soc. of Applied Physics 2011 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Japanese journal of applied physics 50,10,2 : special issue Einzelaufnahme eines Zeitschr.-Heftes ULSI (DE-588)4226286-0 gnd rswk-swf Dielektrische Schicht (DE-588)4194257-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2011 Tokio gnd-content ULSI (DE-588)4226286-0 s Dielektrische Schicht (DE-588)4194257-7 s DE-604 Sakai, Akira edt |
| spellingShingle | Dielectric thin films for future electron devices: science and technology [selection of papers presented at the 2011 International Workshop on "Dielectric Thin Films for Future Electron Devices: Science and Technology" (IWDTF 2011), ... Tokyo on January 20 and 21 in 2011] ULSI (DE-588)4226286-0 gnd Dielektrische Schicht (DE-588)4194257-7 gnd |
| subject_GND | (DE-588)4226286-0 (DE-588)4194257-7 (DE-588)1071861417 |
| title | Dielectric thin films for future electron devices: science and technology [selection of papers presented at the 2011 International Workshop on "Dielectric Thin Films for Future Electron Devices: Science and Technology" (IWDTF 2011), ... Tokyo on January 20 and 21 in 2011] |
| title_alt | Special issue Dielectric thin films for future electron devices: science and technology |
| title_auth | Dielectric thin films for future electron devices: science and technology [selection of papers presented at the 2011 International Workshop on "Dielectric Thin Films for Future Electron Devices: Science and Technology" (IWDTF 2011), ... Tokyo on January 20 and 21 in 2011] |
| title_exact_search | Dielectric thin films for future electron devices: science and technology [selection of papers presented at the 2011 International Workshop on "Dielectric Thin Films for Future Electron Devices: Science and Technology" (IWDTF 2011), ... Tokyo on January 20 and 21 in 2011] |
| title_full | Dielectric thin films for future electron devices: science and technology [selection of papers presented at the 2011 International Workshop on "Dielectric Thin Films for Future Electron Devices: Science and Technology" (IWDTF 2011), ... Tokyo on January 20 and 21 in 2011] ed. by Akira Sakai ... |
| title_fullStr | Dielectric thin films for future electron devices: science and technology [selection of papers presented at the 2011 International Workshop on "Dielectric Thin Films for Future Electron Devices: Science and Technology" (IWDTF 2011), ... Tokyo on January 20 and 21 in 2011] ed. by Akira Sakai ... |
| title_full_unstemmed | Dielectric thin films for future electron devices: science and technology [selection of papers presented at the 2011 International Workshop on "Dielectric Thin Films for Future Electron Devices: Science and Technology" (IWDTF 2011), ... Tokyo on January 20 and 21 in 2011] ed. by Akira Sakai ... |
| title_short | Dielectric thin films for future electron devices: science and technology |
| title_sort | dielectric thin films for future electron devices science and technology selection of papers presented at the 2011 international workshop on dielectric thin films for future electron devices science and technology iwdtf 2011 tokyo on january 20 and 21 in 2011 |
| title_sub | [selection of papers presented at the 2011 International Workshop on "Dielectric Thin Films for Future Electron Devices: Science and Technology" (IWDTF 2011), ... Tokyo on January 20 and 21 in 2011] |
| topic | ULSI (DE-588)4226286-0 gnd Dielektrische Schicht (DE-588)4194257-7 gnd |
| topic_facet | ULSI Dielektrische Schicht Konferenzschrift 2011 Tokio |
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