Spectroscopic ellipsometry: principles and applications
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Chichester
Wiley
2009
|
| Edition: | corr. print. |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XVIII, 369 S. Ill., graph. Darst. |
| ISBN: | 9780470016084 0470016086 |
Staff View
MARC
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| 100 | 1 | |a Fujiwara, Hiroyuki |e Verfasser |0 (DE-588)140809872 |4 aut | |
| 245 | 1 | 0 | |a Spectroscopic ellipsometry |b principles and applications |c Hiroyuki Fujiwara |
| 250 | |a corr. print. | ||
| 264 | 1 | |a Chichester |b Wiley |c 2009 | |
| 300 | |a XVIII, 369 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Ellipsometry | |
| 650 | 4 | |a Spectrum analysis | |
| 650 | 4 | |a Materials |x Optical properties | |
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Record in the Search Index
| _version_ | 1804148736815792128 |
|---|---|
| adam_text | Contents
Foreword
xiii
Preface
xv
Acknowledgments
xvii
1
Introduction to
Spectroscopie
Ellipsometry
1
1.1
Features of
Spectroscopie
Ellipsometry
1
1.2
Applications of
Spectroscopie
Ellipsometry
3
1.3
Data Analysis
5
1.4
History of Development
7
1.5
Future Prospects
9
References
10
2
Principles of Optics
13
2.
1 Propagation of Light
13
2.1.1
Propagation of One-Dimensional Waves
13
2.1.2
Electromagnetic Waves
18
2.1.3
Refractive Index
19
2.2
Dielectrics
24
2.2.1
Dielectric Polarization
24
2.2.2
Dielectric Constant
25
2.2.3
Dielectric Function
29
2.3
Reflection and Transmission of Light
32
2.3.1
Refraction of Light
32
2.3.2
p- and s-Polarized Light Waves
33
2.3.3
Reflectance and Transmittance
39
2.3.4
Brewster Angle
40
2.3.5
Total Reflection
42
2.4
Optical Interference
43
2.4.1
Optical Interference in Thin Films
43
2.4.2
Multilayers
46
References
48
3
Polarization of Light
49
3.1
Representation of Polarized Light
49
3.1.1
Phase of Light
49
3.1.2
Polarization States of Light Waves
50
viii Spectroscopie Ellipsometry
3.2
Optical Elements
52
3.2.1
Polarizer (Analyzer)
53
3.2.2
Compensator
(Retarder)
57
3.2.3
Photoelastic Modulator
58
3.2.4
Depolarizer
59
3.3
Jones Matrix
60
3.3.1
Jones Vector
60
3.3.2
Transformation of Coordinate Systems
62
3.3.3
Jones Matrices of Optical Elements
66
3.3.4
Representation of Optical Measurement by Jones
Matrices
68
3.4
Stokes Parameters
70
3.4.1
Definition of Stokes Parameters
70
3.4.2
Poincaré
Sphere
72
3.4.3
Partially Polarized Light
75
3.4.4
Mueller Matrix
77
References
78
4
Principles of
Spectroscopie
Ellipsometry
81
4.1
Principles of Ellipsometry Measurement
8
1
4.1.1
Measured Values in Ellipsometry
81
4.1.2
Coordinate System in Ellipsometry
84
4.1.3
Jones and Mueller Matrices of Samples
86
4.2
Ellipsometry Measurement
87
4.2.1
Measurement Methods of Ellipsometry
87
4.2.2
Rotating-Analyzer Ellipsometry
(RAE)
93
4.2.3
Rotating-Analyzer Ellipsometry with Compensator
97
4.2.4
Rotating-Compensator Ellipsometry (RCE)
99
4.2.5
Phase-Modulation Ellipsometry
(PME)
104
4.2.6
Infrared
Spectroscopie
Ellipsometry
106
4.2.7
Mueller Matrix Ellipsometry
111
4.2.8
Null Ellipsometry and Imaging Ellipsometry
113
4.3
Instrumentation for Ellipsometry
117
4.3.1
Installation of Ellipsometry System
117
4.3.2
Fourier Analysis
120
4.3.3
Calibration of Optical Elements
122
4.3.4
Correction of Measurement Errors
127
4.4
Precision and Error of Measurement
130
4.4.1
Variation of Precision and Error with Measurement
Method
131
4.4.2
Precision of
(ψ, Δ)
135
4.4.3
Precision of Film Thickness and Absorption Coefficient
137
4.4.4
Depolarization Effect of Samples
139
References
141
Contents
їх
5 Data
Analysis
147
5.1 Interpretation
of
(ψ, Δ)
147
5.1.1
Variations of
(ψ, Δ)
with Optical Constants
147
5.1.2
Variations of
(ψ, Δ)
in Transparent Films
150
5.1.3
Variations of
(ψ, Δ)
in Absorbing Films
155
5.2
Dielectric Function Models
158
5.2.1
Lorentz
Model
160
5.2.2
Interpretation of the
Lorentz
Model
162
5.2.3
Sellmeier and Cauchy Models
170
5.2.4
Tauc-Lorentz Model
170
5.2.5
Drude
Model
173
5.2.6
Kramers-Kronig Relations
176
5.3
Effective Medium Approximation
177
5.3.1
Effective Medium Theories
177
5.3.2
Modeling of Surface Roughness
181
5.3.3
Limitations of Effective Medium Theories
184
5.4
Optical Models
187
5.4.1
Construction of Optical Models
187
5.4.2
Pseudo-Dielectric Function
189
5.4.3
Optimization of Sample Structures
191
5.4.4
Optical Models for Depolarizing Samples
191
5.5
Data Analysis Procedure
196
5.5.1
Linear Regression Analysis
196
5.5.2
Fitting Error Function
199
5.5.3
Mathematical Inversion
200
References
204
6
Ellipsometry of
Anisotropie
Materials
209
6.1
Reflection and Transmission of Light by
Anisotropie
Materials
209
6.1.1
Light Propagation in
Anisotropie
Media
209
6.1.2
Index Ellipsoid
213
6.1.3
Dielectric Tensor
215
6.1.4
Jones Matrix of
Anisotropie
Samples
217
6.2
Fresnel Equations for
Anisotropie
Materials
222
6.2.1 Anisotropie
Substrate
222
6.2.2 Anisotropie
Thin Film on
Isotropie
Substrate
224
6.3 4x4
Matrix Method
226
6.3.1
Principles of the
4
χ
4
Matrix Method
226
6.3.2
Calculation Method of Partial Transfer Matrix
232
6.3.3
Calculation Methods of Incident and Exit Matrices
233
6.3.4
Calculation Procedure of the
4
χ
4
Matrix Method
236
6.4
Interpretation of
(ψ, Δ)
for
Anisotropie
Materials
237
6.4.1
Variations of
(ψ, Δ)
in
Anisotropie
Substrates
237
6.4.2
Variations of
(ψ, Δ)
in
Anisotropie
Thin Films
241
Spectroscopic Ellipsometry
6.5
Measurement and Data Analysis of
Anisotropie
Materials
243
6.5.1
Measurement Methods
243
6.5.2
Data Analysis Methods
245
References
246
7
Data Analysis Examples
249
7.1
Insulators
249
7.1.1
Analysis Examples
249
7.1.2
Advanced Analysis
252
7.2
Semiconductors
256
7.2.1
Optical Transitions in Semiconductors
256
7.2.2
Modeling of Dielectric Functions
258
7.2.3
Analysis Examples
262
7.2.4
Analysis of Dielectric Functions
268
7.3
Metals/Semiconductors
276
7.3.1
Dielectric Function of Metals
276
7.3.2
Analysis of Free-Carrier Absorption
281
7.3.3
Advanced Analysis
286
7.4
Organic
Materials/Biomaterials
287
7.4.1
Analysis of Organic Materials
287
7.4.2
Analysis of
Biomaterials
292
7.5 Anisotropie
Materials
294
7.5.1
Analysis of
Anisotropie
Insulators
295
7.5.2
Analysis of
Anisotropie
Semiconductors
296
7.5.3
Analysis of
Anisotropie
Organic Materials
299
References
303
Reai-Time Monitoring by Spectroscopic Ellipsometry
311
8.1
Data Analysis in Reai-Time Monitoring
311
8.1.1
Procedures for Reai-Time Data Analysis
312
8.1.2
Linear Regression Analysis (LRA)
313
8.1.3
Global Error Minimization (GEM)
317
8.1.4
Virtual Substrate Approximation
(VSA)
323
8.2
Observation of Thin-Film Growth by Reai-Time Monitoring
328
8.2.1
Analysis Examples
328
8.2.2
Advanced Analysis
331
8.3
Process Control by Real-Time Monitoring
333
8.3.1
Data Analysis in Process Control
334
8.3.2
Process Control by Linear Regression Analysis (LRA)
334
8.3.3
Process Control by Virtual Substrate Approximation
(VSA)
340
References
342
Contents xi
Appendices
1 Trigonometrie
Functions
345
2
Definitions of Optical Constants
347
3
Maxwell s Equations for Conductors
349
4
Jones-Mueller Matrix Conversion
353
5
Kramers-Kronig Relations
357
Index
361
|
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| id | DE-604.BV039806760 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:11:53Z |
| institution | BVB |
| isbn | 9780470016084 0470016086 |
| language | English |
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| physical | XVIII, 369 S. Ill., graph. Darst. |
| publishDate | 2009 |
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| publishDateSort | 2009 |
| publisher | Wiley |
| record_format | marc |
| spelling | Fujiwara, Hiroyuki Verfasser (DE-588)140809872 aut Spectroscopic ellipsometry principles and applications Hiroyuki Fujiwara corr. print. Chichester Wiley 2009 XVIII, 369 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Ellipsometry Spectrum analysis Materials Optical properties Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Spektralanalyse (DE-588)4132368-3 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 s Spektralanalyse (DE-588)4132368-3 s DE-604 Digitalisierung UB Regensburg application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024667125&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Fujiwara, Hiroyuki Spectroscopic ellipsometry principles and applications Ellipsometry Spectrum analysis Materials Optical properties Ellipsometrie (DE-588)4152025-7 gnd Spektralanalyse (DE-588)4132368-3 gnd |
| subject_GND | (DE-588)4152025-7 (DE-588)4132368-3 |
| title | Spectroscopic ellipsometry principles and applications |
| title_auth | Spectroscopic ellipsometry principles and applications |
| title_exact_search | Spectroscopic ellipsometry principles and applications |
| title_full | Spectroscopic ellipsometry principles and applications Hiroyuki Fujiwara |
| title_fullStr | Spectroscopic ellipsometry principles and applications Hiroyuki Fujiwara |
| title_full_unstemmed | Spectroscopic ellipsometry principles and applications Hiroyuki Fujiwara |
| title_short | Spectroscopic ellipsometry |
| title_sort | spectroscopic ellipsometry principles and applications |
| title_sub | principles and applications |
| topic | Ellipsometry Spectrum analysis Materials Optical properties Ellipsometrie (DE-588)4152025-7 gnd Spektralanalyse (DE-588)4132368-3 gnd |
| topic_facet | Ellipsometry Spectrum analysis Materials Optical properties Ellipsometrie Spektralanalyse |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024667125&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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