Amorphous silicon carbide thin films: deposition, characterization, etching, and piezoresistive sensors applications
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York, NY
Nova Science Publishers
2011
|
| Series: | Materials science and technologies
|
| Subjects: | |
| Physical Description: | XII, 106 S. Ill., graph. Darst. |
| ISBN: | 9781613247747 |
Staff View
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| id | DE-604.BV039635593 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:07:56Z |
| institution | BVB |
| isbn | 9781613247747 |
| language | English |
| lccn | 2011017290 |
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| physical | XII, 106 S. Ill., graph. Darst. |
| publishDate | 2011 |
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| publisher | Nova Science Publishers |
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| series2 | Materials science and technologies |
| spelling | Fraga, Mariana Amorim Verfasser aut Amorphous silicon carbide thin films deposition, characterization, etching, and piezoresistive sensors applications Mariana Amorim Fraga New York, NY Nova Science Publishers 2011 XII, 106 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science and technologies Silicon carbide Silicon-carbide thin films Amorphous semiconductors Siliciumcarbid (DE-588)4055009-6 gnd rswk-swf Halbleiterbauelement (DE-588)4113826-0 gnd rswk-swf Siliciumcarbid (DE-588)4055009-6 s Halbleiterbauelement (DE-588)4113826-0 s DE-604 |
| spellingShingle | Fraga, Mariana Amorim Amorphous silicon carbide thin films deposition, characterization, etching, and piezoresistive sensors applications Silicon carbide Silicon-carbide thin films Amorphous semiconductors Siliciumcarbid (DE-588)4055009-6 gnd Halbleiterbauelement (DE-588)4113826-0 gnd |
| subject_GND | (DE-588)4055009-6 (DE-588)4113826-0 |
| title | Amorphous silicon carbide thin films deposition, characterization, etching, and piezoresistive sensors applications |
| title_auth | Amorphous silicon carbide thin films deposition, characterization, etching, and piezoresistive sensors applications |
| title_exact_search | Amorphous silicon carbide thin films deposition, characterization, etching, and piezoresistive sensors applications |
| title_full | Amorphous silicon carbide thin films deposition, characterization, etching, and piezoresistive sensors applications Mariana Amorim Fraga |
| title_fullStr | Amorphous silicon carbide thin films deposition, characterization, etching, and piezoresistive sensors applications Mariana Amorim Fraga |
| title_full_unstemmed | Amorphous silicon carbide thin films deposition, characterization, etching, and piezoresistive sensors applications Mariana Amorim Fraga |
| title_short | Amorphous silicon carbide thin films |
| title_sort | amorphous silicon carbide thin films deposition characterization etching and piezoresistive sensors applications |
| title_sub | deposition, characterization, etching, and piezoresistive sensors applications |
| topic | Silicon carbide Silicon-carbide thin films Amorphous semiconductors Siliciumcarbid (DE-588)4055009-6 gnd Halbleiterbauelement (DE-588)4113826-0 gnd |
| topic_facet | Silicon carbide Silicon-carbide thin films Amorphous semiconductors Siliciumcarbid Halbleiterbauelement |
| work_keys_str_mv | AT fragamarianaamorim amorphoussiliconcarbidethinfilmsdepositioncharacterizationetchingandpiezoresistivesensorsapplications |