Modeling aspects in optical metrology: 18 - 19 June 2007, Munich, Germany
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE
c2007
|
| Series: | Proceedings of SPIE
6617 |
| Subjects: | |
| Online Access: | Table of contents |
| Item Description: | Includes bibliographical references and author index |
| Physical Description: | Getr. Zählung ill. 28 cm |
| ISBN: | 9780819467591 |
Staff View
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| id | DE-604.BV039618993 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:07:33Z |
| institution | BVB |
| isbn | 9780819467591 |
| language | English |
| lccn | 2007281789 |
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| physical | Getr. Zählung ill. 28 cm |
| publishDate | 2007 |
| publishDateSearch | 2007 |
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| publisher | SPIE |
| record_format | marc |
| series | Proceedings of SPIE |
| series2 | Proceedings of SPIE |
| spelling | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany) Bellingham, Wash. SPIE c2007 Getr. Zählung ill. 28 cm txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE 6617 Includes bibliographical references and author index Optical measurements Congresses Integrated circuits Congresses Semiconductors Design and construction Congresses (DE-588)1071861417 Konferenzschrift gnd-content Bosse, Harald Sonstige oth Proceedings of SPIE 6617 (DE-604)BV017065952 6617 http://www.loc.gov/catdir/toc/fy0802/2007281789.html Table of contents |
| spellingShingle | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany Proceedings of SPIE Optical measurements Congresses Integrated circuits Congresses Semiconductors Design and construction Congresses |
| subject_GND | (DE-588)1071861417 |
| title | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany |
| title_auth | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany |
| title_exact_search | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany |
| title_full | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany) |
| title_fullStr | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany) |
| title_full_unstemmed | Modeling aspects in optical metrology 18 - 19 June 2007, Munich, Germany Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany) |
| title_short | Modeling aspects in optical metrology |
| title_sort | modeling aspects in optical metrology 18 19 june 2007 munich germany |
| title_sub | 18 - 19 June 2007, Munich, Germany |
| topic | Optical measurements Congresses Integrated circuits Congresses Semiconductors Design and construction Congresses |
| topic_facet | Optical measurements Congresses Integrated circuits Congresses Semiconductors Design and construction Congresses Konferenzschrift |
| url | http://www.loc.gov/catdir/toc/fy0802/2007281789.html |
| volume_link | (DE-604)BV017065952 |
| work_keys_str_mv | AT bosseharald modelingaspectsinopticalmetrology1819june2007munichgermany |