Surface and thin film analysis by spectroscopic reflectometry with extreme ultraviolet emitting laboratory sources:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
Aachen
Apprimus-Verl.
2011
|
| Edition: | 1. Aufl. |
| Series: | Ergebnisse aus der Lasertechnik
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | VI, 148 S. Ill., graph. Darst. 21 cm |
| ISBN: | 9783863590208 |
Staff View
MARC
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Record in the Search Index
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| adam_text | IMAGE 1
CONTENTS
ACKNOWLEDGEMENTS II
ABSTRACT III
CHAPTER 1 INTRODUCTION 1
1.1 OBJECTIVE 1
1.2 MOTIVATION 1
1.3 THE SOFT X-RAY AND EXTREME ULTRAVIOLET SPECTRUM 4
1.4 EUV/XUV SOURCES 5
1.4.1 SYNCHROTRON 6
1.4.2 TABLE-TOP SOURCES 9
1.5 STATE-OF-THE-ART SURFACE ANALYSIS TECHNIQUES 15
CHAPTER 2 THEORETICAL REVIEW 19
2.1 LIGHT-MATTER INTERACTION OF XUV 21
2.1.1 REFRACTIVE INDEX AT XUEV WAVELENGTHS 23
2.1.2 TOTAL EXTERNAL REFLECTION 24
2.2 MATRIX FORMALISM FOR REFLECTION AT INTERFACES 28
2.3 FINE STRUCTURE IN ABSORPTION SPECTRA 33
CHAPTER 3 EXPERIMENTAL DEMONSTRATOR DEVELOPMENT 37
3.1 THE XUV REFLECTOMETER 38
3.2 DETECTORS 48
3.2.1 DEVELOPMENT OF A COMPACT LINE SCAN DETECTOR 50
3.3 SAMPLE MANAGEMENT AND BEAM ALIGNMENT 52
3.3.1 OPTICAL PATH ALIGNMENT 52
BIBLIOGRAFISCHE INFORMATIONEN HTTP://D-NB.INFO/1013924363
DIGITALISIERT DURCH
IMAGE 2
3.3.2 SAMPLE POSITIONING CONTROL 54
CHAPTER 4 DATA ANALYSIS 57
4.1 XUV REFLECTOMETRY DATA ANALYSIS 58
4.1.1 NOISE INFLUENCE ON XUV REFLECTIVITY DATA 60
4.1.2 MULTI-ANGLE MEASUREMENTS 64
4.2 ADAPTED SPECTRAL DECOMPOSITION ALGORITHM 66
4.2.1 SPECTRAL BAND DECOMPOSITION 68
4.2.2 SPECTRAL SHARPENING 71
CHAPTER 5 RESULTS 77
5.1 SYSTEM ATTRIBUTES 77
5.1.1 DETECTOR 77
5.1.2 GRATINGS 82
5.1.2.1 SAMPLE FOOTPRINT 83
5.1.3 SOURCE - SPECTRAL RANGE 83
5.1.4 PHOTON STATISTIC - STABILITY OF MEASUREMENT 85
5.1.5 INSTRUMENTAL STRAY LIGHT 90
5.2 SAMPLES 92
5.2.1 REFERENCE SAMPLES 92
5.2.1.1 LONG TERM DEGRADATION 94
5.2.2 PROOF-OF-PRINCIPLE EXPERIMENTS 96
5.2.3 SILICON WAFERS AND SURFACE OXIDES 99
5.2.4 HFO 2 HIGH-K GATE DIELECTRIC AND BURIED OXIDE 101
CHAPTER 6 SUMMARY AND OUTLOOK 109
APPENDIX A APPENDIX 113
A.I OVERVIEW: STANDARD SURFACE ANALYSIS TECHNIQUES 113
A.2 SPECTROGRAPH TYPES 123
A.3 QUANTUM EFFICIENCY 124
A.4 NON-LINEAR REGRESSION 125
A.5 PHOTON TRANSFER 130
|
| any_adam_object | 1 |
| author | Banyay, Matus |
| author_GND | (DE-588)1013879627 |
| author_facet | Banyay, Matus |
| author_role | aut |
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| building | Verbundindex |
| bvnumber | BV039608296 |
| classification_rvk | UP 7800 |
| ctrlnum | (OCoLC)769016032 (DE-599)DNB1013924363 |
| dewey-full | 530.4175 535.3230287 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics 535 - Light and related radiation |
| dewey-raw | 530.4175 535.3230287 |
| dewey-search | 530.4175 535.3230287 |
| dewey-sort | 3530.4175 |
| dewey-tens | 530 - Physics |
| discipline | Physik |
| edition | 1. Aufl. |
| format | Thesis Book |
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| id | DE-604.BV039608296 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:07:19Z |
| institution | BVB |
| isbn | 9783863590208 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-024459004 |
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| physical | VI, 148 S. Ill., graph. Darst. 21 cm |
| publishDate | 2011 |
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| publisher | Apprimus-Verl. |
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| series2 | Ergebnisse aus der Lasertechnik |
| spelling | Banyay, Matus Verfasser (DE-588)1013879627 aut Surface and thin film analysis by spectroscopic reflectometry with extreme ultraviolet emitting laboratory sources Matus Banyay 1. Aufl. Aachen Apprimus-Verl. 2011 VI, 148 S. Ill., graph. Darst. 21 cm txt rdacontent n rdamedia nc rdacarrier Ergebnisse aus der Lasertechnik Zugl.: Aachen, Techn. Hochsch., Diss., 2011 Oberflächenanalyse (DE-588)4172243-7 gnd rswk-swf Extremes Ultraviolett (DE-588)4264163-9 gnd rswk-swf Reflektometrie (DE-588)4296759-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Reflektometrie (DE-588)4296759-4 s Extremes Ultraviolett (DE-588)4264163-9 s Oberflächenanalyse (DE-588)4172243-7 s DE-604 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024459004&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Banyay, Matus Surface and thin film analysis by spectroscopic reflectometry with extreme ultraviolet emitting laboratory sources Oberflächenanalyse (DE-588)4172243-7 gnd Extremes Ultraviolett (DE-588)4264163-9 gnd Reflektometrie (DE-588)4296759-4 gnd |
| subject_GND | (DE-588)4172243-7 (DE-588)4264163-9 (DE-588)4296759-4 (DE-588)4113937-9 |
| title | Surface and thin film analysis by spectroscopic reflectometry with extreme ultraviolet emitting laboratory sources |
| title_auth | Surface and thin film analysis by spectroscopic reflectometry with extreme ultraviolet emitting laboratory sources |
| title_exact_search | Surface and thin film analysis by spectroscopic reflectometry with extreme ultraviolet emitting laboratory sources |
| title_full | Surface and thin film analysis by spectroscopic reflectometry with extreme ultraviolet emitting laboratory sources Matus Banyay |
| title_fullStr | Surface and thin film analysis by spectroscopic reflectometry with extreme ultraviolet emitting laboratory sources Matus Banyay |
| title_full_unstemmed | Surface and thin film analysis by spectroscopic reflectometry with extreme ultraviolet emitting laboratory sources Matus Banyay |
| title_short | Surface and thin film analysis by spectroscopic reflectometry with extreme ultraviolet emitting laboratory sources |
| title_sort | surface and thin film analysis by spectroscopic reflectometry with extreme ultraviolet emitting laboratory sources |
| topic | Oberflächenanalyse (DE-588)4172243-7 gnd Extremes Ultraviolett (DE-588)4264163-9 gnd Reflektometrie (DE-588)4296759-4 gnd |
| topic_facet | Oberflächenanalyse Extremes Ultraviolett Reflektometrie Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024459004&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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