Control technologies for emerging micro and nanoscale systems:
Gespeichert in:
Weitere Verfasser: | |
---|---|
Format: | Buch |
Sprache: | English |
Veröffentlicht: |
Berlin [u.a.]
Springer
2011
|
Schriftenreihe: | Lecture notes in control and information sciences
413 |
Schlagworte: | |
Online-Zugang: | Inhaltstext Inhaltsverzeichnis |
Beschreibung: | Literaturangaben |
Beschreibung: | XV, 287 S. Ill., graph. Darst. 24 cm |
ISBN: | 9783642221729 3642221726 |
Internformat
MARC
LEADER | 00000nam a2200000 cb4500 | ||
---|---|---|---|
001 | BV039577654 | ||
003 | DE-604 | ||
007 | t | ||
008 | 110912s2011 ad|| |||| 00||| eng d | ||
015 | |a 11,N23 |2 dnb | ||
016 | 7 | |a 1012138755 |2 DE-101 | |
020 | |a 9783642221729 |c kart. : EUR 85.55 (DE, freier Pr.) |9 978-3-642-22172-9 | ||
020 | |a 3642221726 |9 3-642-22172-6 | ||
024 | 3 | |a 9783642221729 | |
028 | 5 | 2 | |a Best.-Nr.: 12991655 |
035 | |a (OCoLC)747536971 | ||
035 | |a (DE-599)DNB1012138755 | ||
040 | |a DE-604 |b ger |e rakddb | ||
041 | 0 | |a eng | |
049 | |a DE-83 | ||
082 | 0 | |a 620.50150282 |2 22/ger | |
084 | |a SI 845 |0 (DE-625)143198: |2 rvk | ||
084 | |a 620 |2 sdnb | ||
245 | 1 | 0 | |a Control technologies for emerging micro and nanoscale systems |c Evangelos Eleftheriou ... (eds.) |
264 | 1 | |a Berlin [u.a.] |b Springer |c 2011 | |
300 | |a XV, 287 S. |b Ill., graph. Darst. |c 24 cm | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 1 | |a Lecture notes in control and information sciences |v 413 | |
500 | |a Literaturangaben | ||
650 | 0 | 7 | |a Nanotechnologie |0 (DE-588)4327470-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Rasterkraftmikroskopie |0 (DE-588)4274473-8 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2009 |z Zürich |2 gnd-content | |
689 | 0 | 0 | |a Nanotechnologie |0 (DE-588)4327470-5 |D s |
689 | 0 | 1 | |a MEMS |0 (DE-588)4824724-8 |D s |
689 | 0 | 2 | |a Rasterkraftmikroskopie |0 (DE-588)4274473-8 |D s |
689 | 0 | |5 DE-604 | |
700 | 1 | |a Eleftheriou, Evangelos |4 edt | |
776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe |t Control Technologies for Emerging Micro and Nanoscale Systems |
830 | 0 | |a Lecture notes in control and information sciences |v 413 |w (DE-604)BV005848579 |9 413 | |
856 | 4 | 2 | |m X:MVB |q text/html |u http://deposit.dnb.de/cgi-bin/dokserv?id=3831162&prov=M&dok_var=1&dok_ext=htm |3 Inhaltstext |
856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024429022&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-024429022 |
Datensatz im Suchindex
_version_ | 1805145169654185984 |
---|---|
adam_text |
IMAGE 1
CONTENTS
1 TECHNIQUES DEVELOPED FOR HIGH-SPEED AFM 1
TOSHIO ANDO 1.1 INTRODUCTION 1
1.2 IMAGING SPEED AND FEEDBACK BANDWIDTH 2
1.3 MECHANICAL DEVICES IN HIGH-SPEED AFM 2
1.3.1 CANTILEVERS 2
1.3.2 SCANNERS 4
1.4 ACTIVE DAMPING TECHNIQUES 5
1.4.1 FEEDBACK Q-CONTROL FOR Z-SCANNER 5
1.4.2 FEEDFORWARD DAMPING OF X-SCANNER 6
1.4.3 PRACTICE OF ACTIVE DAMPING OF SCANNER VIBRATIONS 7 1.5 DYNAMIC PID
CONTROL 8
1.6 DRIFT COMPENSATOR 9
1.7 BIO-IMAGING 10
1.7.1 DYNAMIC EQUILIBRIUM AT THE BACTERIORHODOPSIN CRYSTAL EDGE 10
1.7.2 STRUCTURAL CHANGES OF BACTERIORHODOPSIN UNDER LIGHT 12
1.8 CONCLUSION 13
REFERENCES 14
2 HIGH-ACCURACY ATOMIC FORCE MICROSCOPE 17
DAVID L. TRUMPER, ROBERT J. HOCKEN, DARYA AMIN-SHAHIDI, DEAN LJUBICIC,
JERALD OVERCASH 2.1 INTRODUCTION 18
2.2 MECHANICAL DESIGN 19
2.2.1 OVERALL METROLOGY SYSTEM 20
2.2.2 AFM HEAD 21
BIBLIOGRAFISCHE INFORMATIONEN HTTP://D-NB.INFO/1012138755
DIGITALISIERT DURCH
IMAGE 2
X CONTENTS
2.3 SELF-SENSING PROBE FOR FREQUENCY MEASURING AFM 23 2.3.1 SELF-SENSING
AFM PROBE 23
2.3.2 ELECTROMECHANICAL MODEL 24
2.3.3 FREQUENCY MEASURING AFM 26
2.3.4 PROBE ELECTRONICS IMPLEMENTATION 28
2.3.5 SENSING CURVES 34
2.4 CONTROL AND INSTRUMENTATION 36
2.4.1 SYSTEM OVERVIEW 36
2.4.2 PERIOD ESTIMATION 37
2.4.3 TRACKING CONTROL 37
2.5 EXPERIMENTAL RESULTS 40
2.5.1 SINGLE-POINT TESTS 40
2.5.2 IMAGING TESTS AT MIT 41
2.5.3 IMAGING TEST AFTER INTEGRATION WITH SAMM 43
REFERENCES 44
3 HIGH-SPEED, ULTRA-HIGH-PRECISION NANOPOSITIONING: A SIGNAL
TRANSFORMATION APPROACH 47
ALI BAZAEI, YUEN K. YONG, S.O. REZA MOHEIMANI, ABU SEBASTIAN 3.1
INTRODUCTION 47
3.2 OBJECTIVES 49
3.3 SIGNAL TRANSFORMATION 49
3.4 INVESTIGATION OF SYSTEM ROBUSTNESS 50
3.5 INCORPORATING ROBUSTNESS IN SIGNAL TRANSFORMATION 52 3.6
EXPERIMENTAL RESULTS 53
3.6.1 TRACKING PERFORMANCE AND NOISE 54
REFERENCES 56
APPENDIX 58
4 2DOF CONTROL DESIGN FOR NANOPOSITIONING 67
CHIBUM LEE, GAYATHRI MOHAN, SRINIVASA SALAPAKA 4.1 INTRODUCTION 67
4.2 TWO DEGREE-OF-FREEDOM DESIGN 70
4.2.1 FEEDFORWARD CONTROL DESIGN FOR FIXED FEEDBACK SYSTEM 71
4.2.2 IMPROVING ROBUSTNESS TO OPERATING CONDITIONS FOR GIVEN FEEDBACK
SYSTEM 73
4.2.3 SIMULTANEOUS FEEDBACK AND FEEDFORWARD CONTROL DESIGN 75
4.2.4 ROLE OF FEEDFORWARD AND FEEDBACK COMPONENTS 78 4.3 SUMMARY 79
REFERENCES 80
IMAGE 3
CONTENTS XI
5 IMPROVING THE IMAGING SPEED OF AFM WITH MODERN CONTROL TECHNIQUES 83
STEFAN KUIPER, GEORG SCHITTER 5.1 INTRODUCTION 83
5.2 IMPROVED CONTROL OF THE LATERAL SCANNING MOTION 85
5.2.1 ITERATIVE LEARNING CONTROL 86
5.2.2 SELF-SENSING PIEZO ACTUATION 89
5.3 CONTROLLING THE TIP-SAMPLE INTERACTION FORCES 93
5.3.1 DUAL ACTUATION 94
5.3.2 IMAGING RESULTS 97
5.4 CONCLUSION 97
REFERENCES 98
6 NON-RASTER SCANNING IN ATOMIC FORCE MICROSCOPY FOR HIGH-SPEED IMAGING
OF BIOPOLYMERS 101
PETER I. CHANG, SEAN B. ANDERSSON 6.1 INTRODUCTION 101
6.2 OVERVIEW OF LOCAL RASTER SCANNING 102
6.2.1 AFM SYSTEM BLOCK 102
6.2.2 DETECTOR BLOCK 103
6.2.3 ESTIMATOR BLOCK 104
6.2.4 FILTER BLOCK 104
6.2.5 TIP TRAJECTORY DESIGN BLOCK 104
6.3 CONTROLLER DETAILS 104
6.3.1 SAMPLE DETECTION 104
6.3.2 ESTIMATION OF CURVATURE AND HEADING DIRECTION 106 6.3.3 FILTERING
108
6.3.4 TIP TRAJECTORY 109
6.3.5 SUMMARY I LL
6.4 SIMULATION EXPERIMENTS 112
6.5 CONCLUSION AND FUTURE WORK 115
REFERENCES 116
7 HIGH-BANDWIDTH INTERMITTENT-CONTACT MODE SCANNING PROBE MICROSCOPY
USING ELECTROSTATICALLY-ACTUATED MICROCANTILEVERS 119 DEEPAK R. SAHOO,
WALTER HAEBERLE, ABU SEBASTIAN, HARALAMPOS POZIDIS, EVANGELOS ELEFTHERIOU
7.1 INTRODUCTION 120
7.2 SPM SETUP FOR IC-MODE OPERATION 121
7.3 METHODOLOGY 123
7.3.1 INPUT SHAPING 124
7.3.2 PARALLEL IC OPERATION 126
7.3.3 FEEDBACK FOR RELIABLE IC OPERATION 127
IMAGE 4
XII CONTENTS
7.4 EXPERIMENTAL RESULTS 129
7.5 CONCLUSION 133
REFERENCES 134
8 SYSTEMS AND CONTROL APPROACH TO ELECTRO-THERMAL SENSING 137 ABU
SEBASTIAN 8.1 INTRODUCTION 137
8.2 SYSTEMS MODEL 138
8.3 ELECTRO-THERMAL TOPOGRAPHY SENSOR 142
8.4 ELECTRO-THERMAL POSITION SENSOR 145
8.5 FEEDBACK-ENHANCED ELECTROTHERMAL SENSING 148
8.6 CONCLUSION 151
REFERENCES 151
9 MOTION CONTROLLER FOR ATOMIC FORCE MICROSCOPY BASED
NANOBIOMANIPULATION 153
NING XI, RUIGUO YANG, KING WAI CHIU LAI, BO SONG, BINGTUAN GAO, JIAN
SHI, CHANMIN SU 9.1 INTRODUCTION 153
9.2 SYSTEM MODIFICATION AND IDENTIFICATION 155
9.2.1 AFM IMAGING 156
9.2.2 AFM NANOMANIPULATION 157
9.2.3 HARDWARE MODIFICATION 157
9.2.4 SYSTEM IDENTIFICATION 158
9.3 CONTROL SCHEME DESIGN ISSUES 158
9.3.1 FEEDBACK ISSUE 158
9.3.2 FREQUENCY ISSUE 159
9.3.3 NONLINEARITY ISSUE 159
9.4 DESIGN AND IMPLEMENTATION OF THE MULTIPLE-INPUT SINGLE-OUTPUT SYSTEM
160
9.4.1 STEP RESPONSE ANALYSIS 162
9.4.2 CONTINUOUS INPUT 163
9.5 EXPERIMENTAL TEST OF CONTROL SCHEME BY A NANOBIOMANIPULATION TASK
164
9.5.1 MATERIALS AND METHODS FOR SAMPLE PREPARATION 164 9.5.2 STRUCTURAL
CHARACTERIZATION OF CELL-CELL ADHESION STRUCTURE BY DIFFERENT TECHNIQUES
165
9.5.3 EXPERIMENTAL SETUP AND RESULTS 165
9.6 CONCLUSION 166
REFERENCES 167
10 NANOBIOSCIENCE BASED ON NANOROBOTIC MANIPULATION 169 TOSHIO FUKUDA,
MASAHIRO NAKAJIMA 10.1 INTRODUCTION 169
10.2 NANOROBOTIC MANIPULATION SYSTEM 170
IMAGE 5
CONTENTS XIII
10.2.1 NANOROBOTIC MANIPULATION SYSTEM UNDER VARIOUS MICROSCOPES 170
10.2.2 NANOLABORATORY BASED ON NANOROBOTIC MANIPULATIONS 172
10.3 NANOBIOSCIENCE APPLICATIONS BASED ON NANOROBOTIC MANIPULATIONS 173
10.3.1 SINGLE-CELL ANALYSIS AND NANOSURGERY SYSTEM BASED ON NANOROBOTIC
MANIPULATIONS 173
10.3.2 E-SEM NANONANOROBOTIC MANIPULATION SYSTEM 175 10.3.3 EXAMPLES FOR
SINGLE-CELL MANIPULATIONS BASED ON E-SEM NANOROBOTIC MANIPULATION SYSTEM
175 10.4 FUTURE DIRECTION OF NANOBIOSCIENCE APPLICATIONS BASED ON
NANOROBOTIC MANIPULATIONS - "IN VITRO" REALIZATION OF "IN VIVO"
ENVIRONMENT FOR BIO-MEDICAL APPLICATIONS 177 10.5 CONCLUSION 178
REFERENCES 178
11 SELF-CONFIGURING CMOS MICROSYSTEMS 181
GARY K. FEDDER, TAMAL MUKHERJEE, LAWRENCE PILEGGI 11.1 INTRODUCTION 181
11.2 CMOS AND MEMS INTEGRATION 182
11.3 RECONFIGURABLE RF MEMS CAPACITORS 184
11.4 SELF-CONFIGURING MEMS PROBES 188
11.5 SELF-HEALING RF MICRORESONATOR SYSTEMS 191
11.6 CONCLUSIONS 197
REFERENCES 199
12 CAPILLARY FORCE ACTUATION: A MECHATRONIC PERSPECTIVE 201 CARL R.
KNOSPE 12.1 INTRODUCTION 201
12.1.1 MICROACTUATORS 201
12.1.2 CAPILLARY FORCE ACTUATION 203
12.2 PRINCIPLE OF ACTUATION 204
12.2.1 ELECTROWETTING 204
12.2.2 CAPILLARY BRIDGES 205
12.2.3 EQUILIBRIUM ACTUATOR FORCE 206
12.2.4 LIMITING PHENOMENA 206
12.3 ACTUATOR DYNAMICS 207
12.3.1 CHARGING DYNAMICS 207
12.3.2 FLUID MODEL 207
12.3.3 NON-EQUILIBRIUM ACTUATOR MODEL 208
12.3.4 EQUILIBRIA 209
12.4 ALTERNATIVE CONFIGURATIONS 209
12.4.1 WETTING PASSIVE SURFACE CONFIGURATION 210
12.4.2 PINNED PASSIVE SURFACE CONFIGURATION 211
IMAGE 6
XIV CONTENTS
12.5 POTENTIAL APPLICATIONS 212
12.5.1 RF MEMS 212
12.5.2 MICROGRIPPERS 214
12.5.3 MICRO-TOTAL ANALYSIS SYSTEMS 216
12.6 CONCLUSIONS 216
REFERENCES 217
13 CONTROL AND ESTIMATION IN FORCE FEEDBACK SENSORS 219 KARL JOHAN
ASTROEM 13.1 INTRODUCTION 219
13.2 FORCE BALANCE 220
13.3 DESIGN OF FORCE FEEDBACK SYSTEMS 220
13.4 DETERMINING THE OBSERVER GAINS 223
13.5 ATUNNELINGACCELEROMETER 225
13.6 THE CONTROLLER 228
13.7 EXPERIMENTS 230
13.8 SUMMARY 232
REFERENCES 232
14 H2 GUARANTEED COST CONTROL IN TRACK-FOLLOWING SERVOS 235 RICHARD
CONWAY, JIANBIN NIE, ROBERTO HOROWITZ 14.1 INTRODUCTION 235
14.1.1 PRELIMINARIES 237
14.2 HARD DISK DRIVE MODEL 238
14.3 H2 GUARANTEED COST ANALYSIS 242
14.3.1 SEMI-DEFINITE PROGRAMMING APPROACH 242
14.3.2 RICCATI EQUATION APPROACH 245
14.3.3 APPLICATION TO HARD DISK DRIVES 248
14.4 FULL INFORMATION H2 GUARANTEED COST CONTROL 249
14.4.1 SEMI-DEFINITE PROGRAMMING APPROACH 250
14.4.2 RICCATI EQUATION APPROACH 251
14.4.3 APPLICATION TO HARD DISK DRIVES 254
14.5 OUTPUT FEEDBACK H2 GUARANTEED COST CONTROL 256
14.5.1 SEQUENTIAL SEMI-DEFINITE PROGRAMMING APPROACH 256 14.5.2 RICCATI
EQUATION AND SEMI-DEFINITE PROGRAMMING APPROACH 261
14.5.3 APPLICATION TO HARD DISK DRIVES 267
14.6 CONCLUSION 269
REFERENCES 270
15 LATERAL TAPE MOTION AND CONTROL SYSTEMS DESIGN IN TAPE STORAGE 271
ANGELIKI PANTAZI 15.1 INTRODUCTION 271
15.2 SYSTEM DESCRIPTION 272
IMAGE 7
CONTENTS XV
15.3 LATERAL TAPE MOTION 274
15.3.1 STATIONARY PERIODIC COMPONENTS 275
15.3.2 STACK SHIFTS 275
15.4 ACTIVE TAPE GUIDING 276
15.5 TRACK-FOLLOW CONTROL SYSTEM 280
15.5.1 TRACK-FOLLOW CONTROLLER FOR PERIODIC DISTURBANCES 281 15.5.2
TRACK-FOLLOW CONTROLLER FOR STACK SHIFTS 284 15.6 CONCLUSION 286
REFERENCES 286
AUTHOR INDEX 289 |
any_adam_object | 1 |
author2 | Eleftheriou, Evangelos |
author2_role | edt |
author2_variant | e e ee |
author_facet | Eleftheriou, Evangelos |
building | Verbundindex |
bvnumber | BV039577654 |
classification_rvk | SI 845 |
ctrlnum | (OCoLC)747536971 (DE-599)DNB1012138755 |
dewey-full | 620.50150282 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 620 - Engineering and allied operations |
dewey-raw | 620.50150282 |
dewey-search | 620.50150282 |
dewey-sort | 3620.50150282 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Maschinenbau / Maschinenwesen Mathematik |
format | Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a2200000 cb4500</leader><controlfield tag="001">BV039577654</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">110912s2011 ad|| |||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">11,N23</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">1012138755</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783642221729</subfield><subfield code="c">kart. : EUR 85.55 (DE, freier Pr.)</subfield><subfield code="9">978-3-642-22172-9</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3642221726</subfield><subfield code="9">3-642-22172-6</subfield></datafield><datafield tag="024" ind1="3" ind2=" "><subfield code="a">9783642221729</subfield></datafield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">Best.-Nr.: 12991655</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)747536971</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB1012138755</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.50150282</subfield><subfield code="2">22/ger</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">SI 845</subfield><subfield code="0">(DE-625)143198:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">620</subfield><subfield code="2">sdnb</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Control technologies for emerging micro and nanoscale systems</subfield><subfield code="c">Evangelos Eleftheriou ... (eds.)</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">2011</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XV, 287 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield><subfield code="c">24 cm</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Lecture notes in control and information sciences</subfield><subfield code="v">413</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Rasterkraftmikroskopie</subfield><subfield code="0">(DE-588)4274473-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">2009</subfield><subfield code="z">Zürich</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Rasterkraftmikroskopie</subfield><subfield code="0">(DE-588)4274473-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Eleftheriou, Evangelos</subfield><subfield code="4">edt</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe</subfield><subfield code="t">Control Technologies for Emerging Micro and Nanoscale Systems</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Lecture notes in control and information sciences</subfield><subfield code="v">413</subfield><subfield code="w">(DE-604)BV005848579</subfield><subfield code="9">413</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">X:MVB</subfield><subfield code="q">text/html</subfield><subfield code="u">http://deposit.dnb.de/cgi-bin/dokserv?id=3831162&prov=M&dok_var=1&dok_ext=htm</subfield><subfield code="3">Inhaltstext</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024429022&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-024429022</subfield></datafield></record></collection> |
genre | (DE-588)1071861417 Konferenzschrift 2009 Zürich gnd-content |
genre_facet | Konferenzschrift 2009 Zürich |
id | DE-604.BV039577654 |
illustrated | Illustrated |
indexdate | 2024-07-21T00:09:45Z |
institution | BVB |
isbn | 9783642221729 3642221726 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-024429022 |
oclc_num | 747536971 |
open_access_boolean | |
owner | DE-83 |
owner_facet | DE-83 |
physical | XV, 287 S. Ill., graph. Darst. 24 cm |
publishDate | 2011 |
publishDateSearch | 2011 |
publishDateSort | 2011 |
publisher | Springer |
record_format | marc |
series | Lecture notes in control and information sciences |
series2 | Lecture notes in control and information sciences |
spelling | Control technologies for emerging micro and nanoscale systems Evangelos Eleftheriou ... (eds.) Berlin [u.a.] Springer 2011 XV, 287 S. Ill., graph. Darst. 24 cm txt rdacontent n rdamedia nc rdacarrier Lecture notes in control and information sciences 413 Literaturangaben Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Rasterkraftmikroskopie (DE-588)4274473-8 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2009 Zürich gnd-content Nanotechnologie (DE-588)4327470-5 s MEMS (DE-588)4824724-8 s Rasterkraftmikroskopie (DE-588)4274473-8 s DE-604 Eleftheriou, Evangelos edt Erscheint auch als Online-Ausgabe Control Technologies for Emerging Micro and Nanoscale Systems Lecture notes in control and information sciences 413 (DE-604)BV005848579 413 X:MVB text/html http://deposit.dnb.de/cgi-bin/dokserv?id=3831162&prov=M&dok_var=1&dok_ext=htm Inhaltstext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024429022&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
spellingShingle | Control technologies for emerging micro and nanoscale systems Lecture notes in control and information sciences Nanotechnologie (DE-588)4327470-5 gnd Rasterkraftmikroskopie (DE-588)4274473-8 gnd MEMS (DE-588)4824724-8 gnd |
subject_GND | (DE-588)4327470-5 (DE-588)4274473-8 (DE-588)4824724-8 (DE-588)1071861417 |
title | Control technologies for emerging micro and nanoscale systems |
title_auth | Control technologies for emerging micro and nanoscale systems |
title_exact_search | Control technologies for emerging micro and nanoscale systems |
title_full | Control technologies for emerging micro and nanoscale systems Evangelos Eleftheriou ... (eds.) |
title_fullStr | Control technologies for emerging micro and nanoscale systems Evangelos Eleftheriou ... (eds.) |
title_full_unstemmed | Control technologies for emerging micro and nanoscale systems Evangelos Eleftheriou ... (eds.) |
title_short | Control technologies for emerging micro and nanoscale systems |
title_sort | control technologies for emerging micro and nanoscale systems |
topic | Nanotechnologie (DE-588)4327470-5 gnd Rasterkraftmikroskopie (DE-588)4274473-8 gnd MEMS (DE-588)4824724-8 gnd |
topic_facet | Nanotechnologie Rasterkraftmikroskopie MEMS Konferenzschrift 2009 Zürich |
url | http://deposit.dnb.de/cgi-bin/dokserv?id=3831162&prov=M&dok_var=1&dok_ext=htm http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=024429022&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
volume_link | (DE-604)BV005848579 |
work_keys_str_mv | AT eleftheriouevangelos controltechnologiesforemergingmicroandnanoscalesystems |