High-temperature stable metallization systems for SiC applications:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
Aachen
Shaker
2011
|
| Series: | Berichte aus der Mikrosystemtechnik
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XV, 223 S. Ill., graph. Darst. |
| ISBN: | 9783844000313 |
Staff View
MARC
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Record in the Search Index
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| adam_text | VII
TABLE OF CONTENTS
ACKNOWLEDGEMENT ILL
ABSTRACT IV
ABSTRACT (GERMAN) V
TABLE OF CONTENTS VII
SUMMARY X
1 INTRODUCTION 1
1.1 HIGH-TEMPERATURE APPLICATIONS 4
1.2 SILICON CARBIDE 8
2 HIGH-TEMPERATURE METALLIZATION SYSTEMS 12
2.1 OHMIC CONTACTS ON SILICON CARBIDE 14
2.2 STATE-OF-THE-ART HIGH-TEMPERATURE METALLIZATION SYSTEMS 18
2.2.1 DIFFUSION BARRIERS 21
2.2.2 PRESENT HIGH-TEMPERATURE METALLIZATION SYSTEMS 27
23 SUMMARY 36
3 CHOICE OF MATERIALS 38
3.1 CONTACT LAYERS: VSI2 AND TASI
2
41
3.2 BARRIER LAYERS: W-SI-N AND TA-SI-N 46
33 INTERCONNECT LAYER: PT 55
3.4 SUMMARY ..........57
4 EXPERIMENTAL EVALUATION CONCEPT 59
BIBLIOGRAFISCHE INFORMATIONEN
HTTP://D-NB.INFO/1011627760
DIGITALISIERT DURCH
VIII TABLE OF CONTENTS
5 EXPERIMENTAL 62
5.1 TEST CHIP DESIGN 62
5.2 PROCESS DEVELOPMENT 64
5.2.1 SIC SELECTIVE DOPING 64
5.2.2 ADJUSTING THE SUICIDE COMPOSITION 67
5.2.3 BARRIER PRECONDITIONING 71
5.2.4 PLATINUM DEPOSITION 74
5.3 SAMPLE PREPARATION 77
5.3.1 SUBSTRATES 77
5.3.2 METALLIZATION STACK 79
5.4 EXPERIMENTAL BARRIER EVALUATION ...84
5.4.1 BARRIER COMPOSITION 85
5.4.2 BARRIER CRYSTALLIZATION BEHAVIOR 87
5.4.3 SURFACE MORPHOLOGY AND DIFFUSION BEHAVIOR 92
5.4.4 PRESELECTION OF BARRIER LAYERS 104
5.5 FINAL TESTING ON 6H-SIC 107
5.5.1 I/V CHARACTERISTICS AND CONTACT RESISTIVITY 110
5.5.2 ELECTRICAL LONG-TERM STABILITY AT HIGH TEMPERATURE 114
5.5.3 DIFFUSION 129
5.6 SUMMARY 138
6 PIEZORESISTIVE SIC HIGH-TEMPERATURE PRESSURE SENSOR 142
6.1 INTRODUCTION 142
6.2 SENSOR DESIGN ........143
63 DEVICE FABRICATION 150
6.3.1 SENSOR WAFER FABRICATION PROCESS 150
6.3.2 BACKPLATE WAFER FABRICATION PROCESS 156
6.3.3 WAFER BONDING AND DICING 158
TABLE OF CONTENTS IX
6.4 DEVICE TESTING 163
6.4.1 MECHANICAL TESTING 163
6.4.2 ELECTRICAL CHARACTERIZATION AND PRESSURE TESTS 165
6.5 SUMMARY 173
7 CONCLUSION 176
SYMBOLS AND ACRONYMS 181
LIST OF TABLES 185
LIST OF FIGURES 187
REFERENCES 192
|
| any_adam_object | 1 |
| author | Schellin, Bernt |
| author_facet | Schellin, Bernt |
| author_role | aut |
| author_sort | Schellin, Bernt |
| author_variant | b s bs |
| building | Verbundindex |
| bvnumber | BV037404753 |
| classification_rvk | ZN 4152 |
| ctrlnum | (OCoLC)748692953 (DE-599)BVBBV037404753 |
| dewey-full | 681.2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 681 - Precision instruments and other devices |
| dewey-raw | 681.2 |
| dewey-search | 681.2 |
| dewey-sort | 3681.2 |
| dewey-tens | 680 - Manufacture of products for specific uses |
| discipline | Handwerk und Gewerbe / Verschiedene Technologien Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Thesis Book |
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| id | DE-604.BV037404753 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T23:23:36Z |
| institution | BVB |
| isbn | 9783844000313 |
| language | English |
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| physical | XV, 223 S. Ill., graph. Darst. |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Shaker |
| record_format | marc |
| series2 | Berichte aus der Mikrosystemtechnik |
| spelling | Schellin, Bernt Verfasser aut High-temperature stable metallization systems for SiC applications Bernt Schellin High-temperature stable metallization systems for SiC applicationsl Aachen Shaker 2011 XV, 223 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Berichte aus der Mikrosystemtechnik Zugl.: Berlin, Techn. Univ., Diss., 2010 Temperaturbeständigkeit (DE-588)4184690-4 gnd rswk-swf Siliciumcarbid (DE-588)4055009-6 gnd rswk-swf Drucksensor (DE-588)4150765-4 gnd rswk-swf Metallisieren (DE-588)4169599-9 gnd rswk-swf Hochtemperatur (DE-588)4282597-0 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Drucksensor (DE-588)4150765-4 s Siliciumcarbid (DE-588)4055009-6 s Metallisieren (DE-588)4169599-9 s Temperaturbeständigkeit (DE-588)4184690-4 s Hochtemperatur (DE-588)4282597-0 s DE-604 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=022557347&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Schellin, Bernt High-temperature stable metallization systems for SiC applications Temperaturbeständigkeit (DE-588)4184690-4 gnd Siliciumcarbid (DE-588)4055009-6 gnd Drucksensor (DE-588)4150765-4 gnd Metallisieren (DE-588)4169599-9 gnd Hochtemperatur (DE-588)4282597-0 gnd |
| subject_GND | (DE-588)4184690-4 (DE-588)4055009-6 (DE-588)4150765-4 (DE-588)4169599-9 (DE-588)4282597-0 (DE-588)4113937-9 |
| title | High-temperature stable metallization systems for SiC applications |
| title_alt | High-temperature stable metallization systems for SiC applicationsl |
| title_auth | High-temperature stable metallization systems for SiC applications |
| title_exact_search | High-temperature stable metallization systems for SiC applications |
| title_full | High-temperature stable metallization systems for SiC applications Bernt Schellin |
| title_fullStr | High-temperature stable metallization systems for SiC applications Bernt Schellin |
| title_full_unstemmed | High-temperature stable metallization systems for SiC applications Bernt Schellin |
| title_short | High-temperature stable metallization systems for SiC applications |
| title_sort | high temperature stable metallization systems for sic applications |
| topic | Temperaturbeständigkeit (DE-588)4184690-4 gnd Siliciumcarbid (DE-588)4055009-6 gnd Drucksensor (DE-588)4150765-4 gnd Metallisieren (DE-588)4169599-9 gnd Hochtemperatur (DE-588)4282597-0 gnd |
| topic_facet | Temperaturbeständigkeit Siliciumcarbid Drucksensor Metallisieren Hochtemperatur Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=022557347&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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