Proceedings of the 2nd International Conference on Microelectronics and Plasma Technology - ICMAP 2009:
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Amsterdam u.a.
Elsevier
2010
|
| Series: | Thin solid films
518,22 |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschr.-Heftes |
| Physical Description: | VIII S., S.6143 - 6703 zahlr. Ill. und graph. Darst. |
Staff View
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| illustrated | Illustrated |
| indexdate | 2024-07-09T22:46:39Z |
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| language | English |
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| physical | VIII S., S.6143 - 6703 zahlr. Ill. und graph. Darst. |
| publishDate | 2010 |
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| publisher | Elsevier |
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| series2 | Thin solid films |
| spelling | International Conference on Microelectronics and Plasma Technology 2 2009 Busan Verfasser (DE-588)16086156-1 aut Proceedings of the 2nd International Conference on Microelectronics and Plasma Technology - ICMAP 2009 guest ed. Nae-Eung Lee Amsterdam u.a. Elsevier 2010 VIII S., S.6143 - 6703 zahlr. Ill. und graph. Darst. txt rdacontent n rdamedia nc rdacarrier Thin solid films 518,22 Einzelaufnahme eines Zeitschr.-Heftes Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2009 Pusan gnd-content Mikroelektronik (DE-588)4039207-7 s Plasmatechnik (DE-588)4140353-8 s DE-604 Lee, Nae-Eung Sonstige oth |
| spellingShingle | Proceedings of the 2nd International Conference on Microelectronics and Plasma Technology - ICMAP 2009 Plasmatechnik (DE-588)4140353-8 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4140353-8 (DE-588)4039207-7 (DE-588)1071861417 |
| title | Proceedings of the 2nd International Conference on Microelectronics and Plasma Technology - ICMAP 2009 |
| title_auth | Proceedings of the 2nd International Conference on Microelectronics and Plasma Technology - ICMAP 2009 |
| title_exact_search | Proceedings of the 2nd International Conference on Microelectronics and Plasma Technology - ICMAP 2009 |
| title_full | Proceedings of the 2nd International Conference on Microelectronics and Plasma Technology - ICMAP 2009 guest ed. Nae-Eung Lee |
| title_fullStr | Proceedings of the 2nd International Conference on Microelectronics and Plasma Technology - ICMAP 2009 guest ed. Nae-Eung Lee |
| title_full_unstemmed | Proceedings of the 2nd International Conference on Microelectronics and Plasma Technology - ICMAP 2009 guest ed. Nae-Eung Lee |
| title_short | Proceedings of the 2nd International Conference on Microelectronics and Plasma Technology - ICMAP 2009 |
| title_sort | proceedings of the 2nd international conference on microelectronics and plasma technology icmap 2009 |
| topic | Plasmatechnik (DE-588)4140353-8 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Plasmatechnik Mikroelektronik Konferenzschrift 2009 Pusan |
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