Precision nanometrology: sensors and measuring systems for nanomanufacturing
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
London [u.a.]
Springer
2010
|
| Series: | Springer Series in Advanced Manufacturing
|
| Online Access: | Inhaltstext |
| Physical Description: | XIII, 354 S. zahlr. Ill., graph. Darst. 235 mm x 155 mm |
| ISBN: | 9781849962537 |
Staff View
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Record in the Search Index
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| discipline | Maschinenbau / Maschinenwesen Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV036661176 |
| illustrated | Illustrated |
| indexdate | 2024-09-06T00:17:10Z |
| institution | BVB |
| isbn | 9781849962537 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-020580474 |
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| physical | XIII, 354 S. zahlr. Ill., graph. Darst. 235 mm x 155 mm |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | Springer |
| record_format | marc |
| series2 | Springer Series in Advanced Manufacturing |
| spelling | Gao, Wei 1973- Verfasser (DE-588)133785823 aut Precision nanometrology sensors and measuring systems for nanomanufacturing Wei Gao London [u.a.] Springer 2010 XIII, 354 S. zahlr. Ill., graph. Darst. 235 mm x 155 mm txt rdacontent n rdamedia nc rdacarrier Springer Series in Advanced Manufacturing Erscheint auch als Online-Ausgabe 978-1-84996-254-4 text/html http://deposit.dnb.de/cgi-bin/dokserv?id=3439893&prov=M&dok_var=1&dok_ext=htm Inhaltstext |
| spellingShingle | Gao, Wei 1973- Precision nanometrology sensors and measuring systems for nanomanufacturing |
| title | Precision nanometrology sensors and measuring systems for nanomanufacturing |
| title_auth | Precision nanometrology sensors and measuring systems for nanomanufacturing |
| title_exact_search | Precision nanometrology sensors and measuring systems for nanomanufacturing |
| title_full | Precision nanometrology sensors and measuring systems for nanomanufacturing Wei Gao |
| title_fullStr | Precision nanometrology sensors and measuring systems for nanomanufacturing Wei Gao |
| title_full_unstemmed | Precision nanometrology sensors and measuring systems for nanomanufacturing Wei Gao |
| title_short | Precision nanometrology |
| title_sort | precision nanometrology sensors and measuring systems for nanomanufacturing |
| title_sub | sensors and measuring systems for nanomanufacturing |
| url | http://deposit.dnb.de/cgi-bin/dokserv?id=3439893&prov=M&dok_var=1&dok_ext=htm |
| work_keys_str_mv | AT gaowei precisionnanometrologysensorsandmeasuringsystemsfornanomanufacturing |