MEMS/NEMS: Handbook Techniques and Applications
Gespeichert in:
Format: | Elektronisch E-Book |
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Sprache: | English |
Veröffentlicht: |
Boston, MA
Springer Science+Business Media, Inc
2006
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Schlagworte: | |
Online-Zugang: | BFB01 BHS01 BSB01 BTU01 BTW01 DMM01 FAN01 FAW01 FAW02 FCO01 FFW01 FHA01 FHD01 FHI01 FHM01 FHN01 FHR01 FKE01 FLA01 FWS01 FWS02 HTW01 HWR01 LCO01 SAB01 SAM01 SBG01 SBR01 SND01 TUM01 UBA01 UBG01 UBM01 UBR01 UBT01 UBW01 UBY01 UER01 UPA01 Volltext |
Beschreibung: | 1 Online-Ressource v.: digital |
ISBN: | 9780387245201 9780387257860 |
DOI: | 10.1007/b136111 |
Internformat
MARC
LEADER | 00000nmm a2200000 c 4500 | ||
---|---|---|---|
001 | BV036650311 | ||
003 | DE-604 | ||
005 | 20220318 | ||
007 | cr|uuu---uuuuu | ||
008 | 100902s2006 |||| o||u| ||||||eng d | ||
020 | |a 9780387245201 |9 978-0-387-24520-1 | ||
020 | |a 9780387257860 |9 978-0-387-25786-0 | ||
035 | |a (OCoLC)636000632 | ||
035 | |a (DE-599)GBV556581105 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
049 | |a DE-526 |a DE-522 |a DE-634 |a DE-2070s |a DE-210 |a DE-155 |a DE-150 |a DE-70 |a DE-22 |a DE-54 |a DE-128 |a DE-863 |a DE-862 |a DE-898 |a DE-92 |a DE-M347 |a DE-859 |a DE-573 |a DE-1028 |a DE-1050 |a DE-858 |a DE-1102 |a DE-1046 |a DE-1047 |a DE-Aug4 |a DE-706 |a DE-20 |a DE-739 |a DE-355 |a DE-91 |a DE-19 |a DE-29 |a DE-703 |a DE-473 |a DE-384 |a DE-12 |a DE-860 |a DE-B768 |a DE-523 | ||
084 | |a ZN 3750 |0 (DE-625)157334: |2 rvk | ||
245 | 1 | 0 | |a MEMS/NEMS |b Handbook Techniques and Applications |c edited by Cornelius T. Leondes |
264 | 1 | |a Boston, MA |b Springer Science+Business Media, Inc |c 2006 | |
300 | |a 1 Online-Ressource |b v.: digital | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
533 | |a Online_Ausgabe |b Boston, MA |c Springer Science+Business Media, Inc |d 2006 |f Springer ebook collection / Chemistry and Materials Science 2005-2008 |n Sonstige Standardnummer des Gesamttitels: 041171-1 |7 s2006 | ||
650 | 4 | |a Electronics | |
650 | 4 | |a Engineering design | |
650 | 4 | |a Mechanical engineering | |
650 | 4 | |a Nanotechnology | |
650 | 4 | |a Optical materials | |
650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a MEMS |0 (DE-588)4824724-8 |D s |
689 | 0 | |5 DE-604 | |
700 | 1 | |a Leondes, Cornelius T. |e Sonstige |4 oth | |
776 | 0 | 8 | |i Reproduktion von |t MEMS/NEMS |d 2006 |
856 | 4 | 0 | |u https://doi.org/10.1007/b136111 |x Verlag |3 Volltext |
912 | |a ZDB-1-SCM | ||
999 | |a oai:aleph.bib-bvb.de:BVB01-020569824 | ||
966 | e | |u https://doi.org/10.1007/b136111 |l BFB01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l BHS01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l BSB01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l BTU01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l BTW01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l DMM01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FAN01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FAW01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FAW02 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FCO01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FFW01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FHA01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FHD01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FHI01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FHM01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FHN01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FHR01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FKE01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FLA01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FWS01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l FWS02 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l HTW01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l HWR01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l LCO01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l SAB01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l SAM01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l SBG01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l SBR01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l SND01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l TUM01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l UBA01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l UBG01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l UBM01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l UBR01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l UBT01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l UBW01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l UBY01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l UER01 |p ZDB-1-SCM |x Verlag |3 Volltext | |
966 | e | |u https://doi.org/10.1007/b136111 |l UPA01 |p ZDB-1-SCM |x Verlag |3 Volltext |
Datensatz im Suchindex
DE-BY-FWS_katkey | 379013 |
---|---|
_version_ | 1824554132417019904 |
any_adam_object | |
building | Verbundindex |
bvnumber | BV036650311 |
classification_rvk | ZN 3750 |
collection | ZDB-1-SCM |
ctrlnum | (OCoLC)636000632 (DE-599)GBV556581105 |
discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
doi_str_mv | 10.1007/b136111 |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>05109nmm a2200889 c 4500</leader><controlfield tag="001">BV036650311</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20220318 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">100902s2006 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780387245201</subfield><subfield code="9">978-0-387-24520-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780387257860</subfield><subfield code="9">978-0-387-25786-0</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)636000632</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBV556581105</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-526</subfield><subfield code="a">DE-522</subfield><subfield code="a">DE-634</subfield><subfield code="a">DE-2070s</subfield><subfield code="a">DE-210</subfield><subfield code="a">DE-155</subfield><subfield code="a">DE-150</subfield><subfield code="a">DE-70</subfield><subfield code="a">DE-22</subfield><subfield code="a">DE-54</subfield><subfield code="a">DE-128</subfield><subfield code="a">DE-863</subfield><subfield code="a">DE-862</subfield><subfield code="a">DE-898</subfield><subfield code="a">DE-92</subfield><subfield code="a">DE-M347</subfield><subfield code="a">DE-859</subfield><subfield code="a">DE-573</subfield><subfield code="a">DE-1028</subfield><subfield code="a">DE-1050</subfield><subfield code="a">DE-858</subfield><subfield code="a">DE-1102</subfield><subfield code="a">DE-1046</subfield><subfield code="a">DE-1047</subfield><subfield code="a">DE-Aug4</subfield><subfield code="a">DE-706</subfield><subfield code="a">DE-20</subfield><subfield code="a">DE-739</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-19</subfield><subfield code="a">DE-29</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-473</subfield><subfield code="a">DE-384</subfield><subfield code="a">DE-12</subfield><subfield code="a">DE-860</subfield><subfield code="a">DE-B768</subfield><subfield code="a">DE-523</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3750</subfield><subfield code="0">(DE-625)157334:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">MEMS/NEMS</subfield><subfield code="b">Handbook Techniques and Applications</subfield><subfield code="c">edited by Cornelius T. Leondes</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Boston, MA</subfield><subfield code="b">Springer Science+Business Media, Inc</subfield><subfield code="c">2006</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource</subfield><subfield code="b">v.: digital</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="533" ind1=" " ind2=" "><subfield code="a">Online_Ausgabe</subfield><subfield code="b">Boston, MA</subfield><subfield code="c">Springer Science+Business Media, Inc</subfield><subfield code="d">2006</subfield><subfield code="f">Springer ebook collection / Chemistry and Materials Science 2005-2008</subfield><subfield code="n">Sonstige Standardnummer des Gesamttitels: 041171-1</subfield><subfield code="7">s2006</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Engineering design</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Mechanical engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanotechnology</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical materials</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Leondes, Cornelius T.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Reproduktion von</subfield><subfield code="t">MEMS/NEMS</subfield><subfield code="d">2006</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-1-SCM</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-020569824</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">BFB01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">BHS01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">BSB01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">BTU01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">BTW01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">DMM01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FAN01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FAW02</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FCO01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FFW01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FHA01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FHD01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FHI01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FHM01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FHN01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FHR01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FKE01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FLA01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FWS01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">FWS02</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">HTW01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">HWR01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">LCO01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">SAB01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">SAM01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">SBG01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">SBR01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">SND01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">TUM01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">UBA01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">UBG01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">UBM01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">UBR01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">UBT01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">UBW01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">UBY01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">UER01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/b136111</subfield><subfield code="l">UPA01</subfield><subfield code="p">ZDB-1-SCM</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
id | DE-604.BV036650311 |
illustrated | Not Illustrated |
indexdate | 2025-02-20T06:46:54Z |
institution | BVB |
isbn | 9780387245201 9780387257860 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-020569824 |
oclc_num | 636000632 |
open_access_boolean | |
owner | DE-526 DE-522 DE-634 DE-2070s DE-210 DE-155 DE-BY-UBR DE-150 DE-70 DE-22 DE-BY-UBG DE-54 DE-128 DE-863 DE-BY-FWS DE-862 DE-BY-FWS DE-898 DE-BY-UBR DE-92 DE-M347 DE-859 DE-573 DE-1028 DE-1050 DE-858 DE-1102 DE-1046 DE-1047 DE-Aug4 DE-706 DE-20 DE-739 DE-355 DE-BY-UBR DE-91 DE-BY-TUM DE-19 DE-BY-UBM DE-29 DE-703 DE-473 DE-BY-UBG DE-384 DE-12 DE-860 DE-B768 DE-523 |
owner_facet | DE-526 DE-522 DE-634 DE-2070s DE-210 DE-155 DE-BY-UBR DE-150 DE-70 DE-22 DE-BY-UBG DE-54 DE-128 DE-863 DE-BY-FWS DE-862 DE-BY-FWS DE-898 DE-BY-UBR DE-92 DE-M347 DE-859 DE-573 DE-1028 DE-1050 DE-858 DE-1102 DE-1046 DE-1047 DE-Aug4 DE-706 DE-20 DE-739 DE-355 DE-BY-UBR DE-91 DE-BY-TUM DE-19 DE-BY-UBM DE-29 DE-703 DE-473 DE-BY-UBG DE-384 DE-12 DE-860 DE-B768 DE-523 |
physical | 1 Online-Ressource v.: digital |
psigel | ZDB-1-SCM |
publishDate | 2006 |
publishDateSearch | 2006 |
publishDateSort | 2006 |
publisher | Springer Science+Business Media, Inc |
record_format | marc |
spellingShingle | MEMS/NEMS Handbook Techniques and Applications Electronics Engineering design Mechanical engineering Nanotechnology Optical materials MEMS (DE-588)4824724-8 gnd |
subject_GND | (DE-588)4824724-8 |
title | MEMS/NEMS Handbook Techniques and Applications |
title_auth | MEMS/NEMS Handbook Techniques and Applications |
title_exact_search | MEMS/NEMS Handbook Techniques and Applications |
title_full | MEMS/NEMS Handbook Techniques and Applications edited by Cornelius T. Leondes |
title_fullStr | MEMS/NEMS Handbook Techniques and Applications edited by Cornelius T. Leondes |
title_full_unstemmed | MEMS/NEMS Handbook Techniques and Applications edited by Cornelius T. Leondes |
title_short | MEMS/NEMS |
title_sort | mems nems handbook techniques and applications |
title_sub | Handbook Techniques and Applications |
topic | Electronics Engineering design Mechanical engineering Nanotechnology Optical materials MEMS (DE-588)4824724-8 gnd |
topic_facet | Electronics Engineering design Mechanical engineering Nanotechnology Optical materials MEMS |
url | https://doi.org/10.1007/b136111 |
work_keys_str_mv | AT leondescorneliust memsnemshandbooktechniquesandapplications |