MEMS: a practical guide to design, analysis, and applications
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Berlin <<[u.a.]>>
Springer <<[u.a.]>>
2006
|
| Subjects: | |
| Online Access: | BTU01 FHR01 Volltext |
| Item Description: | Literaturangaben |
| Physical Description: | 1 Online-Ressource (XXV, 965 S.) Ill., graph. Darst. |
| ISBN: | 0815514972 3540211179 9783540336556 |
| DOI: | 10.1007/978-3-540-33655-6 |
Staff View
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Record in the Search Index
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| dewey-ones | 621 - Applied physics |
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| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV036594966 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:43:46Z |
| institution | BVB |
| isbn | 0815514972 3540211179 9783540336556 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-020515598 |
| oclc_num | 249321430 |
| open_access_boolean | |
| owner | DE-898 DE-BY-UBR DE-634 |
| owner_facet | DE-898 DE-BY-UBR DE-634 |
| physical | 1 Online-Ressource (XXV, 965 S.) Ill., graph. Darst. |
| psigel | ZDB-2-ENG |
| publishDate | 2006 |
| publishDateSearch | 2006 |
| publishDateSort | 2006 |
| publisher | Springer <<[u.a.]>> |
| record_format | marc |
| spelling | MEMS a practical guide to design, analysis, and applications ed. by Jan G. Korvink ... Micro-electro-mechanical systems Berlin <<[u.a.]>> Springer <<[u.a.]>> 2006 1 Online-Ressource (XXV, 965 S.) Ill., graph. Darst. txt rdacontent c rdamedia cr rdacarrier Literaturangaben MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s DE-604 Korvink, Jan G. Sonstige oth https://doi.org/10.1007/978-3-540-33655-6 Verlag Volltext |
| spellingShingle | MEMS a practical guide to design, analysis, and applications MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4824724-8 |
| title | MEMS a practical guide to design, analysis, and applications |
| title_alt | Micro-electro-mechanical systems |
| title_auth | MEMS a practical guide to design, analysis, and applications |
| title_exact_search | MEMS a practical guide to design, analysis, and applications |
| title_full | MEMS a practical guide to design, analysis, and applications ed. by Jan G. Korvink ... |
| title_fullStr | MEMS a practical guide to design, analysis, and applications ed. by Jan G. Korvink ... |
| title_full_unstemmed | MEMS a practical guide to design, analysis, and applications ed. by Jan G. Korvink ... |
| title_short | MEMS |
| title_sort | mems a practical guide to design analysis and applications |
| title_sub | a practical guide to design, analysis, and applications |
| topic | MEMS (DE-588)4824724-8 gnd |
| topic_facet | MEMS |
| url | https://doi.org/10.1007/978-3-540-33655-6 |
| work_keys_str_mv | AT korvinkjang memsapracticalguidetodesignanalysisandapplications AT korvinkjang microelectromechanicalsystems |