Sakai, A. (2009). Dielectric thin films for future ULSI devices: Science and technology ; [selection of papers presented at the 2008 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" ; (IWDTF2008), which was held in Tokyo from November 5 through 7 in 2008]. Japan Soc. of Applied Physics.
Chicago-Zitierstil (17. Ausg.)Sakai, Akira. Dielectric Thin Films for Future ULSI Devices: Science and Technology ; [selection of Papers Presented at the 2008 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" ; (IWDTF2008), Which Was Held in Tokyo from November 5 Through 7 in 2008]. Tokyo: Japan Soc. of Applied Physics, 2009.
MLA-Zitierstil (9. Ausg.)Sakai, Akira. Dielectric Thin Films for Future ULSI Devices: Science and Technology ; [selection of Papers Presented at the 2008 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" ; (IWDTF2008), Which Was Held in Tokyo from November 5 Through 7 in 2008]. Japan Soc. of Applied Physics, 2009.