Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009): 26 - 29 April 2009, Napa Valley, CA
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York, NY
American Inst. of Physics
2010
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| Series: | Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena
28,1 |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschr.-Heftes |
| Physical Description: | Getr. Zählung Ill., graph. Darst. |
Staff View
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| 245 | 1 | 0 | |a Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) |b 26 - 29 April 2009, Napa Valley, CA |c Publ. by AVS. Proceedings ed.: Jerry Hunter |
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| illustrated | Illustrated |
| indexdate | 2024-07-09T22:39:19Z |
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| language | English |
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| physical | Getr. Zählung Ill., graph. Darst. |
| publishDate | 2010 |
| publishDateSearch | 2010 |
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| publisher | American Inst. of Physics |
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| series2 | Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena |
| spelling | International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling 2009 Napa, Calif. Verfasser (DE-588)16063172-5 aut Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA Publ. by AVS. Proceedings ed.: Jerry Hunter New York, NY American Inst. of Physics 2010 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena 28,1 Einzelaufnahme eines Zeitschr.-Heftes Halbleiter (DE-588)4022993-2 gnd rswk-swf Messtechnik (DE-588)4114575-6 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Metrologie (DE-588)4169749-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2009 Napa Calif. gnd-content Halbleiter (DE-588)4022993-2 s Metrologie (DE-588)4169749-2 s DE-604 Halbleitertechnologie (DE-588)4158814-9 s Messtechnik (DE-588)4114575-6 s Hunter, Jerry Sonstige oth |
| spellingShingle | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA Halbleiter (DE-588)4022993-2 gnd Messtechnik (DE-588)4114575-6 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Metrologie (DE-588)4169749-2 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4114575-6 (DE-588)4158814-9 (DE-588)4169749-2 (DE-588)1071861417 |
| title | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA |
| title_auth | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA |
| title_exact_search | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA |
| title_full | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA Publ. by AVS. Proceedings ed.: Jerry Hunter |
| title_fullStr | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA Publ. by AVS. Proceedings ed.: Jerry Hunter |
| title_full_unstemmed | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA Publ. by AVS. Proceedings ed.: Jerry Hunter |
| title_short | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) |
| title_sort | papers from the 2009 international workshop on insight in semiconductor device fabrication metrology and modeling insight 2009 26 29 april 2009 napa valley ca |
| title_sub | 26 - 29 April 2009, Napa Valley, CA |
| topic | Halbleiter (DE-588)4022993-2 gnd Messtechnik (DE-588)4114575-6 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Metrologie (DE-588)4169749-2 gnd |
| topic_facet | Halbleiter Messtechnik Halbleitertechnologie Metrologie Konferenzschrift 2009 Napa Calif. |
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