Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009): 26 - 29 April 2009, Napa Valley, CA
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
American Inst. of Physics
2010
|
| Schriftenreihe: | Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena
28,1 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-Heftes |
| Beschreibung: | Getr. Zählung Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV036434223 | ||
| 003 | DE-604 | ||
| 005 | 20100622 | ||
| 007 | t | ||
| 008 | 100503s2010 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)705470457 | ||
| 035 | |a (DE-599)GBV624285235 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-384 |a DE-706 | ||
| 111 | 2 | |a International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling |d 2009 |c Napa, Calif. |j Verfasser |0 (DE-588)16063172-5 |4 aut | |
| 245 | 1 | 0 | |a Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) |b 26 - 29 April 2009, Napa Valley, CA |c Publ. by AVS. Proceedings ed.: Jerry Hunter |
| 264 | 1 | |a New York, NY |b American Inst. of Physics |c 2010 | |
| 300 | |a Getr. Zählung |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena |v 28,1 | |
| 500 | |a Einzelaufnahme eines Zeitschr.-Heftes | ||
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Messtechnik |0 (DE-588)4114575-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Metrologie |0 (DE-588)4169749-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2009 |z Napa Calif. |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Metrologie |0 (DE-588)4169749-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 1 | 1 | |a Messtechnik |0 (DE-588)4114575-6 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Hunter, Jerry |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-020306733 | ||
Datensatz im Suchindex
| _version_ | 1804142914129887233 |
|---|---|
| any_adam_object | |
| author_corporate | International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling Napa, Calif |
| author_corporate_role | aut |
| author_facet | International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling Napa, Calif |
| author_sort | International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling Napa, Calif |
| building | Verbundindex |
| bvnumber | BV036434223 |
| ctrlnum | (OCoLC)705470457 (DE-599)GBV624285235 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01807nam a2200409 cb4500</leader><controlfield tag="001">BV036434223</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20100622 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">100503s2010 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)705470457</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBV624285235</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-384</subfield><subfield code="a">DE-706</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling</subfield><subfield code="d">2009</subfield><subfield code="c">Napa, Calif.</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)16063172-5</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009)</subfield><subfield code="b">26 - 29 April 2009, Napa Valley, CA</subfield><subfield code="c">Publ. by AVS. Proceedings ed.: Jerry Hunter</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York, NY</subfield><subfield code="b">American Inst. of Physics</subfield><subfield code="c">2010</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">Getr. Zählung</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena</subfield><subfield code="v">28,1</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufnahme eines Zeitschr.-Heftes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Messtechnik</subfield><subfield code="0">(DE-588)4114575-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Metrologie</subfield><subfield code="0">(DE-588)4169749-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">2009</subfield><subfield code="z">Napa Calif.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Metrologie</subfield><subfield code="0">(DE-588)4169749-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Messtechnik</subfield><subfield code="0">(DE-588)4114575-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hunter, Jerry</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-020306733</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 2009 Napa Calif. gnd-content |
| genre_facet | Konferenzschrift 2009 Napa Calif. |
| id | DE-604.BV036434223 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:39:19Z |
| institution | BVB |
| institution_GND | (DE-588)16063172-5 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-020306733 |
| oclc_num | 705470457 |
| open_access_boolean | |
| owner | DE-384 DE-706 |
| owner_facet | DE-384 DE-706 |
| physical | Getr. Zählung Ill., graph. Darst. |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena |
| spelling | International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling 2009 Napa, Calif. Verfasser (DE-588)16063172-5 aut Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA Publ. by AVS. Proceedings ed.: Jerry Hunter New York, NY American Inst. of Physics 2010 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : B, Microelectronics and nanometer structures, processing, measurement and phenomena 28,1 Einzelaufnahme eines Zeitschr.-Heftes Halbleiter (DE-588)4022993-2 gnd rswk-swf Messtechnik (DE-588)4114575-6 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Metrologie (DE-588)4169749-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2009 Napa Calif. gnd-content Halbleiter (DE-588)4022993-2 s Metrologie (DE-588)4169749-2 s DE-604 Halbleitertechnologie (DE-588)4158814-9 s Messtechnik (DE-588)4114575-6 s Hunter, Jerry Sonstige oth |
| spellingShingle | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA Halbleiter (DE-588)4022993-2 gnd Messtechnik (DE-588)4114575-6 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Metrologie (DE-588)4169749-2 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4114575-6 (DE-588)4158814-9 (DE-588)4169749-2 (DE-588)1071861417 |
| title | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA |
| title_auth | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA |
| title_exact_search | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA |
| title_full | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA Publ. by AVS. Proceedings ed.: Jerry Hunter |
| title_fullStr | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA Publ. by AVS. Proceedings ed.: Jerry Hunter |
| title_full_unstemmed | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) 26 - 29 April 2009, Napa Valley, CA Publ. by AVS. Proceedings ed.: Jerry Hunter |
| title_short | Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009) |
| title_sort | papers from the 2009 international workshop on insight in semiconductor device fabrication metrology and modeling insight 2009 26 29 april 2009 napa valley ca |
| title_sub | 26 - 29 April 2009, Napa Valley, CA |
| topic | Halbleiter (DE-588)4022993-2 gnd Messtechnik (DE-588)4114575-6 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Metrologie (DE-588)4169749-2 gnd |
| topic_facet | Halbleiter Messtechnik Halbleitertechnologie Metrologie Konferenzschrift 2009 Napa Calif. |
| work_keys_str_mv | AT internationalworkshoponinsightinsemiconductordevicefabricationmetrologyandmodelingnapacalif papersfromthe2009internationalworkshoponinsightinsemiconductordevicefabricationmetrologyandmodelinginsight20092629april2009napavalleyca AT hunterjerry papersfromthe2009internationalworkshoponinsightinsemiconductordevicefabricationmetrologyandmodelinginsight20092629april2009napavalleyca |