International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling Napa, Calif. (2010). Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009): 26 - 29 April 2009, Napa Valley, CA. American Inst. of Physics.
Chicago-Zitierstil (17. Ausg.)International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling Napa, Calif. Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009): 26 - 29 April 2009, Napa Valley, CA. New York, NY: American Inst. of Physics, 2010.
MLA-Zitierstil (9. Ausg.)International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling Napa, Calif. Papers from the 2009 International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT 2009): 26 - 29 April 2009, Napa Valley, CA. American Inst. of Physics, 2010.