Papers from the 53rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, 26 - 29 May 2009, Marco Island, FL:
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York
American Inst. of Physics
2009
|
| Series: | Journal of vacuum science & technology : B
27,6 |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschr.-Heftes |
| Physical Description: | S. 2502 - 3261 Ill., graph. Darst. |
| ISBN: | 9780982301234 |
Staff View
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| 111 | 2 | |a International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |n 53 |d 2009 |c Marco Island, Fla. |j Verfasser |0 (DE-588)16054937-1 |4 aut | |
| 245 | 1 | 0 | |a Papers from the 53rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, 26 - 29 May 2009, Marco Island, FL |c conference chair: Stephen Chou |
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| 700 | 1 | |a Chou, Stephen |e Sonstige |4 oth | |
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| genre_facet | Konferenzschrift 2009 Marco Island |
| id | DE-604.BV036016948 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:09:35Z |
| institution | BVB |
| institution_GND | (DE-588)16054937-1 |
| isbn | 9780982301234 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018909152 |
| oclc_num | 633509942 |
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| owner | DE-384 DE-706 |
| owner_facet | DE-384 DE-706 |
| physical | S. 2502 - 3261 Ill., graph. Darst. |
| publishDate | 2009 |
| publishDateSearch | 2009 |
| publishDateSort | 2009 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology : B |
| spelling | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 53 2009 Marco Island, Fla. Verfasser (DE-588)16054937-1 aut Papers from the 53rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, 26 - 29 May 2009, Marco Island, FL conference chair: Stephen Chou New York American Inst. of Physics 2009 S. 2502 - 3261 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : B 27,6 Einzelaufnahme eines Zeitschr.-Heftes Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Teilchenstrahl (DE-588)4165339-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2009 Marco Island gnd-content Nanotechnologie (DE-588)4327470-5 s Teilchenstrahl (DE-588)4165339-7 s DE-604 Chou, Stephen Sonstige oth |
| spellingShingle | Papers from the 53rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, 26 - 29 May 2009, Marco Island, FL Nanotechnologie (DE-588)4327470-5 gnd Teilchenstrahl (DE-588)4165339-7 gnd |
| subject_GND | (DE-588)4327470-5 (DE-588)4165339-7 (DE-588)1071861417 |
| title | Papers from the 53rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, 26 - 29 May 2009, Marco Island, FL |
| title_auth | Papers from the 53rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, 26 - 29 May 2009, Marco Island, FL |
| title_exact_search | Papers from the 53rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, 26 - 29 May 2009, Marco Island, FL |
| title_full | Papers from the 53rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, 26 - 29 May 2009, Marco Island, FL conference chair: Stephen Chou |
| title_fullStr | Papers from the 53rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, 26 - 29 May 2009, Marco Island, FL conference chair: Stephen Chou |
| title_full_unstemmed | Papers from the 53rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, 26 - 29 May 2009, Marco Island, FL conference chair: Stephen Chou |
| title_short | Papers from the 53rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, 26 - 29 May 2009, Marco Island, FL |
| title_sort | papers from the 53rd international conference on electron ion and photon beam technology and nanofabrication 26 29 may 2009 marco island fl |
| topic | Nanotechnologie (DE-588)4327470-5 gnd Teilchenstrahl (DE-588)4165339-7 gnd |
| topic_facet | Nanotechnologie Teilchenstrahl Konferenzschrift 2009 Marco Island |
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