Holdings: Advanced nanoscale ULSI interconnects

Advanced nanoscale ULSI interconnects: fundamentals and applications

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Bibliographic Details
Format:	Book
Language:	English
Published:	New York [u.a.] Springer 2009
Subjects:	Integrated circuits > Ultra large scale integration Nanoelectromechanical systems Nanotechnologie ULSI
Online Access:	Inhaltstext Inhaltsverzeichnis
Physical Description:	XX, 552 S. Ill. graph. Darst.
ISBN:	9780387958675

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MARC


LEADER	00000nam a2200000 c 4500
001	BV035989312
003	DE-604
005	20100401
007	t
008	100201s2009 ad\|\| \|\|\|\| 00\|\|\| eng d
015			\|a 09N060722 \|2 dnb
016	7		\|a 992146348 \|2 DE-101
020			\|a 9780387958675 \|9 978-0-387-95867-5
035			\|a (OCoLC)310400991
035			\|a (DE-599)DNB992146348
040			\|a DE-604 \|b ger \|e rakddb
041	0		\|a eng
049			\|a DE-83 \|a DE-29T
050		0	\|a TK7874.76
082	0		\|a 621.395 \|2 22
084			\|a ZN 4900 \|0 (DE-625)157417: \|2 rvk
084			\|a 540 \|2 sdnb
245	1	0	\|a Advanced nanoscale ULSI interconnects \|b fundamentals and applications \|c Yosi Shacham-Diamand ... ed.
264		1	\|a New York [u.a.] \|b Springer \|c 2009
300			\|a XX, 552 S. \|b Ill. graph. Darst.
336			\|b txt \|2 rdacontent
337			\|b n \|2 rdamedia
338			\|b nc \|2 rdacarrier
650		4	\|a Integrated circuits \|x Ultra large scale integration
650		4	\|a Nanoelectromechanical systems
650	0	7	\|a Nanotechnologie \|0 (DE-588)4327470-5 \|2 gnd \|9 rswk-swf
650	0	7	\|a ULSI \|0 (DE-588)4226286-0 \|2 gnd \|9 rswk-swf
689	0	0	\|a Nanotechnologie \|0 (DE-588)4327470-5 \|D s
689	0	1	\|a ULSI \|0 (DE-588)4226286-0 \|D s
689	0		\|5 DE-604
700	1		\|a Shacham-Diamand, Yosi \|e Sonstige \|4 oth
776	0	8	\|i Erscheint auch als \|n Online-Ausgabe \|z 978-0-387-95868-2
856	4		\|q text/html \|u http://deposit.dnb.de/cgi-bin/dokserv?id=3227275&prov=M&dok_var=1&dok_ext=htm \|3 Inhaltstext
856	4	2	\|m GBV Datenaustausch \|q application/pdf \|u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=018882148&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA \|3 Inhaltsverzeichnis
943	1		\|a oai:aleph.bib-bvb.de:BVB01-018882148

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_version_	1805093446917029888
adam_text	IMAGE 1 INTRODUCTION CHALLENGES IN ULSI INTERCONNECTS - INTRODUCTION TO THE BOOK P. 3 TECHNOLOGY BACKGROUND MOS DEVICE AND INTERCONNECTS SCALING PHYSICS P. 15 INTERCONNECTS IN ULSI SYSTEMS: CU INTERCONNECTS ELECTRICAL PERFORMANCE P. 39 ELECTRODEPOSITION P. 63 ELECTROPHORETIC DEPOSITION P. 73 WAFER-LEVEL 3D INTEGRATION FOR ULSI INTERCONNECTS P. 79 INTERCONNECT MATERIALS DIFFUSION BARRIERS FOR ULTRA-LARGE-SCALE INTEGRATED COPPER METALLIZATION P. 93 SUICIDES P. 121 MATERIALS FOR ULSI METALLIZATION - OVERVIEW OF ELECTRICAL PROPERTIES P. 131 LOW-K MATERIALS AND DEVELOPMENT TRENDS P. 145 ELECTRICAL AND MECHANICAL CHARACTERISTICS OF AIR-BRIDGE CU INTERCONNECTS P. 153 ALD SEED LAYERS FOR PLATING AND ELECTROLESS PLATING P. 169 DEPOSITION PROCESSES FOR ULSI INTERCONNECTS ELECTROCHEMICAL PROCESSES FOR ULSI INTERCONNECTS P. 183 ATOMIC LAYER DEPOSITION (ALD) PROCESSES FOR ULSI MANUFACTURING P. 207 ELECTROLESS DEPOSITION APPROACHING THE MOLECULAR SCALE P. 221 MODELING MODELING SUPERCONFORMAL ELECTRODEPOSITION USING AN OPEN SOURCE PDE SOLVER P. 239 ELECTROCHEMICAL PROCESS INTEGRATION INTRODUCTION TO ELECTROCHEMICAL PROCESS INTEGRATION FOR CU INTERCONNECTS P. 257 DAMASCENE CONCEPT AND PROCESS STEPS P. 263 ADVANCED BEOL TECHNOLOGY OVERVIEW P. 275 LITHOGRAPHY FOR CU DAMASCENE FABRICATION P. 299 PHYSICAL VAPOR DEPOSITION BARRIERS FOR CU METALLIZATION - PVD BARRIERS P. 311 LOW-K DIELECTRICS P. 325 CMP FOR CU PROCESSING P. 343 ELECTROCHEMICAL VIEW OF COPPER CHEMICAL-MECHANICAL POLISHING (CMP) P. 379 COPPER POST-CMP CLEANING P. 379 ELECTROCHEMICAL PROCESSES AND TOOLS ELECTROCHEMICAL PROCESSING TOOLS FOR ADVANCED COPPER INTERCONNECTS: AN INTRODUCTION P. 389 ELECTROCHEMICAL DEPOSITION PROCESSES AND TOOLS P. 397 ELECTROLESS DEPOSITION PROCESSES AND TOOLS P. 413 TOOLS FOR MONITORING AND CONTROL OF BATH COMPONENTS P. 435 PROCESSES AND TOOLS FOR CO ALLOY CAPPING P. 445 ADVANCED PLANARIZATION TECHNIQUES P. 459 METROLOGY INTEGRATED METROLOGY (IM) HISTORY AT A GLANCE P. 479 THIN FILM METROLOGY - X-RAY METHODS P. 497 IMAGE 2 SUMMARY AND FORESIGHT EMERGING NANOSCALE INTERCONNECT PROCESSING TECHNOLOGIES: FUNDAMENTAL AND PRACTICE P. 505 SELF-ASSEMBLY OF SHORT AROMATIC PEPTIDES: FROM AMYLOID FIBRIL FORMATION TO NANOTECHNOLOGY P. 531 INDEX P. 539 TABLE OF CONTENTS PROVIDED BY BLACKWELL'S BOOK SERVICES AND R.R. BOWKER. USED WITH PERMISSION.
any_adam_object	1
building	Verbundindex
bvnumber	BV035989312
callnumber-first	T - Technology
callnumber-label	TK7874
callnumber-raw	TK7874.76
callnumber-search	TK7874.76
callnumber-sort	TK 47874.76
callnumber-subject	TK - Electrical and Nuclear Engineering
classification_rvk	ZN 4900
ctrlnum	(OCoLC)310400991 (DE-599)DNB992146348
dewey-full	621.395
dewey-hundreds	600 - Technology (Applied sciences)
dewey-ones	621 - Applied physics
dewey-raw	621.395
dewey-search	621.395
dewey-sort	3621.395
dewey-tens	620 - Engineering and allied operations
discipline	Chemie / Pharmazie Elektrotechnik / Elektronik / Nachrichtentechnik
format	Book
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a2200000 c 4500</leader><controlfield tag="001">BV035989312</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20100401</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">100201s2009 ad\|\| \|\|\|\| 00\|\|\| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">09N060722</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">992146348</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780387958675</subfield><subfield code="9">978-0-387-95867-5</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)310400991</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB992146348</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield><subfield code="a">DE-29T</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7874.76</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.395</subfield><subfield code="2">22</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4900</subfield><subfield code="0">(DE-625)157417:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">540</subfield><subfield code="2">sdnb</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Advanced nanoscale ULSI interconnects</subfield><subfield code="b">fundamentals and applications</subfield><subfield code="c">Yosi Shacham-Diamand ... ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">2009</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XX, 552 S.</subfield><subfield code="b">Ill. graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits</subfield><subfield code="x">Ultra large scale integration</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanoelectromechanical systems</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">ULSI</subfield><subfield code="0">(DE-588)4226286-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">ULSI</subfield><subfield code="0">(DE-588)4226286-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Shacham-Diamand, Yosi</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Online-Ausgabe</subfield><subfield code="z">978-0-387-95868-2</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="q">text/html</subfield><subfield code="u">http://deposit.dnb.de/cgi-bin/dokserv?id=3227275&prov=M&dok_var=1&dok_ext=htm</subfield><subfield code="3">Inhaltstext</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">GBV Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=018882148&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-018882148</subfield></datafield></record></collection>
id	DE-604.BV035989312
illustrated	Illustrated
indexdate	2024-07-20T10:27:37Z
institution	BVB
isbn	9780387958675
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-018882148
oclc_num	310400991
open_access_boolean
owner	DE-83 DE-29T
owner_facet	DE-83 DE-29T
physical	XX, 552 S. Ill. graph. Darst.
publishDate	2009
publishDateSearch	2009
publishDateSort	2009
publisher	Springer
record_format	marc
spelling	Advanced nanoscale ULSI interconnects fundamentals and applications Yosi Shacham-Diamand ... ed. New York [u.a.] Springer 2009 XX, 552 S. Ill. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Integrated circuits Ultra large scale integration Nanoelectromechanical systems Nanotechnologie (DE-588)4327470-5 gnd rswk-swf ULSI (DE-588)4226286-0 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s ULSI (DE-588)4226286-0 s DE-604 Shacham-Diamand, Yosi Sonstige oth Erscheint auch als Online-Ausgabe 978-0-387-95868-2 text/html http://deposit.dnb.de/cgi-bin/dokserv?id=3227275&prov=M&dok_var=1&dok_ext=htm Inhaltstext GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=018882148&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Advanced nanoscale ULSI interconnects fundamentals and applications Integrated circuits Ultra large scale integration Nanoelectromechanical systems Nanotechnologie (DE-588)4327470-5 gnd ULSI (DE-588)4226286-0 gnd
subject_GND	(DE-588)4327470-5 (DE-588)4226286-0
title	Advanced nanoscale ULSI interconnects fundamentals and applications
title_auth	Advanced nanoscale ULSI interconnects fundamentals and applications
title_exact_search	Advanced nanoscale ULSI interconnects fundamentals and applications
title_full	Advanced nanoscale ULSI interconnects fundamentals and applications Yosi Shacham-Diamand ... ed.
title_fullStr	Advanced nanoscale ULSI interconnects fundamentals and applications Yosi Shacham-Diamand ... ed.
title_full_unstemmed	Advanced nanoscale ULSI interconnects fundamentals and applications Yosi Shacham-Diamand ... ed.
title_short	Advanced nanoscale ULSI interconnects
title_sort	advanced nanoscale ulsi interconnects fundamentals and applications
title_sub	fundamentals and applications
topic	Integrated circuits Ultra large scale integration Nanoelectromechanical systems Nanotechnologie (DE-588)4327470-5 gnd ULSI (DE-588)4226286-0 gnd
topic_facet	Integrated circuits Ultra large scale integration Nanoelectromechanical systems Nanotechnologie ULSI
url	http://deposit.dnb.de/cgi-bin/dokserv?id=3227275&prov=M&dok_var=1&dok_ext=htm http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=018882148&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT shachamdiamandyosi advancednanoscaleulsiinterconnectsfundamentalsandapplications

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