Patterning and characterization of TiN films:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
2009
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| Subjects: | |
| Physical Description: | 65 S. Ill., graph. Darst. |
Staff View
MARC
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Record in the Search Index
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| any_adam_object | |
| author | Baum, Marcus |
| author_facet | Baum, Marcus |
| author_role | aut |
| author_sort | Baum, Marcus |
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| building | Verbundindex |
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| ctrlnum | (OCoLC)634536260 (DE-599)BVBBV035781720 |
| discipline | Physik |
| format | Thesis Book |
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| illustrated | Illustrated |
| indexdate | 2024-07-09T22:04:25Z |
| institution | BVB |
| language | English |
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| physical | 65 S. Ill., graph. Darst. |
| publishDate | 2009 |
| publishDateSearch | 2009 |
| publishDateSort | 2009 |
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| spelling | Baum, Marcus Verfasser aut Patterning and characterization of TiN films von Marcus Baum 2009 65 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Regensburg, Univ., Diplomarb., 2009 Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Titannitrid (DE-588)4185564-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Dünne Schicht (DE-588)4136925-7 s Titannitrid (DE-588)4185564-4 s DE-604 |
| spellingShingle | Baum, Marcus Patterning and characterization of TiN films Dünne Schicht (DE-588)4136925-7 gnd Titannitrid (DE-588)4185564-4 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4185564-4 (DE-588)4113937-9 |
| title | Patterning and characterization of TiN films |
| title_auth | Patterning and characterization of TiN films |
| title_exact_search | Patterning and characterization of TiN films |
| title_full | Patterning and characterization of TiN films von Marcus Baum |
| title_fullStr | Patterning and characterization of TiN films von Marcus Baum |
| title_full_unstemmed | Patterning and characterization of TiN films von Marcus Baum |
| title_short | Patterning and characterization of TiN films |
| title_sort | patterning and characterization of tin films |
| topic | Dünne Schicht (DE-588)4136925-7 gnd Titannitrid (DE-588)4185564-4 gnd |
| topic_facet | Dünne Schicht Titannitrid Hochschulschrift |
| work_keys_str_mv | AT baummarcus patterningandcharacterizationoftinfilms |