Ferroelectrics in microwave devices, circuits and systems: physics, modelling, fabrication and measurements
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
London
Springer
2009
|
| Series: | Engineering materials and processes
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XX, 394 S. Ill., graph. Darst. |
| ISBN: | 9781848825062 |
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MARC
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| 245 | 1 | 0 | |a Ferroelectrics in microwave devices, circuits and systems |b physics, modelling, fabrication and measurements |c Spartak Gevorgian |
| 264 | 1 | |a London |b Springer |c 2009 | |
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| adam_text | Contents
1
Introduction:
Overview of Agile Microwave Technologies
................ 1
1.1
Introduction
................................................................................... 1
1.2
Ferroelectrics: The Main Material Properties
............................... 2
1.2.1
Ferroelectric Properties
.................................................... 3
1.2.2
Dielectric Properties
......................................................... 4
1.2.3
Acoustic Properties
.......................................................... 5
1.2.4
Typical Microwave Paraelectrics
..................................... 6
1.3
Microwave Applications
............................................................... 7
1.3.1
Historical Overview
......................................................... 7
1.3.2
Current Status
................................................................... 8
1.3.3
Potential and Trends
......................................................... 11
1.4
Other Agile Microwave Technologies
.......................................... 15
1.5
Conclusions
................................................................................... 18
References
................................................................................................ 18
2
Physics of the Tunable Ferroelectric Devices
....................................... 21
2.1
Introduction
................................................................................... 21
2.2
Crystal Structure, Non-Polar (Paraelectric)
and Polar (Ferroelectric) Phases
.................................................... 22
2.3
Dielectric Models of the Ferroelectric and Paraelectric Phases
.... 24
2.3.1
Phenomenological (Thermodynamic) Theory
.................. 24
2.3.2
Microscopic Theory
......................................................... 27
2.4
Engineering Models of the Dielectric Permittivity
....................... 29
2.4.1
Barrett s Formula. Bulk Single Crystals
.......................... 29
2.4.2
Rupprecht-Bell-Silverman Model.
Bulk Single Crystals
......................................................... 30
2.4.3
Vendik s Model. Bulk Single Crystals
............................. 31
2.4.4
Granular Ceramics and Composites
................................. 32
2.4.5
Columnar Thin Film Ceramics and Composites
.............. 34
Xl
Contents
2.5 Models
of the Loss Tangent
.......................................................... 37
2.5.1
Loss Mechanisms and Early Models
of the Loss Tangent
.......................................................... 37
2.5.2
Models of the Main Loss Mechanisms
............................. 39
2.6
Dielectric Nonlinearities
............................................................... 44
2.6.1
Nonlinear Performance of Paraelectrics
........................... 44
2.6.2
Nonlinearity and Power Handling Capability
.................. 45
2.7
Thin Films vs. Bulk
....................................................................... 46
2.7.1
Thin Film vs. Bulk Single Crystal
.................................... 46
2.7.2
Strain
................................................................................ 48
2.7.3
The Effects of the Strain on Dielectric Properties
of the Thin Films
.............................................................. 50
2.8
Electro-Acoustic Properties
.......................................................... 52
2.8.1
Electrostriction
................................................................. 52
2.8.2
Piezoelectricity and
Electrostriction
................................. 52
2.8.3
Electric Field Induced Piezoelectricity
in Paraelectric Films
......................................................... 54
2.9
Bulk Conductivity
......................................................................... 56
2.10
Conclusions
................................................................................... 57
References
................................................................................................ 57
Fabrication of Ferroelectric Components and Devices
....................... 61
3.1
Introduction
................................................................................... 61
3.2
Fabrication of Devices Using Single Crystals
............................... 63
3.2.1
Growth Techniques of Single Crystals
............................. 63
3.2.2
Structural Characterization
............................................... 64
3.2.3
Bulk Single Crystal Devices
............................................ 65
3.2.4
Thin Film Single Crystal Capacitors
................................ 66
3.3
Fabrication of Devices Using Bulk Ceramics
............................... 68
3.3.1
Ceramic Processes
............................................................ 68
3.3.2
Bulk Ceramic Device Fabrication
.................................... 68
3.3.3
Structure of the Bulk Ferroelectric Ceramics
................... 73
3.4
Thick Film, HTCC and LTCC Technologies
................................ 74
3.4.1
Fabrication of Devices Using Thick Film Technology....
74
3.4.2
Fabrication of HTCC and LTCC Devices
........................ 76
3.4.3
Structure of Thick and HTCC/LTCC Films
..................... 78
3.5
Fabrication of Thin Ferroelectric Films
........................................ 80
3.5.1
Chemical Deposition Methods
......................................... 81
3.52
Physical Deposition Methods
........................................... 87
3.6
Thin Film Device Processing
........................................................ 98
3.6.1
Coplanar-Plate Configuration
.......................................... 99
3.6.2
Parallel-Plate Configuration
............................................. 101
3.7
Substrate Micromachining and Passivation
.................................. 106
3.7.1
Substrate Micromachining
............................................... 106
3.7.2
Substrate Passivation
........................................................ 107
Contents xiii
3.8
Conclusions
................................................................................... 108
References
................................................................................................ 109
4
Substrates, Varactors and Passive Components
.................................. 115
4.1
Introduction
................................................................................... 115
4.2
Substrates
...................................................................................... 116
4.2.1
Common Substrates
......................................................... 116
4.2.2
Silicon as a Microwave Substrate
.................................... 118
4.2.3
High Resistivity Silicon
................................................... 119
4.3
Varactors. Basic Designs and Figure of Merit
.............................. 125
4.3.1
Basic Designs of Ferroelectric Varactors
......................... 125
4.3.2
Figure of Merit, Structure and Performance
of Ferroelectric Films
....................................................... 128
4.3.3
Correlation of the Design with the Film Structure
........... 129
4.3.4
Varactor Design Issues
..................................................... 134
4.4
Equivalent Circuit Model of the Varactors
................................... 139
4.4.1
Equivalent Circuit
............................................................ 139
4.4.2
Impedance of Parallel-Plate Varactors
............................. 143
4.5
Low Frequency and Tuning Performances
................................... 144
4.5.1
С
-V
and P-V Performances
.............................................. 144
4.5.2
I-V Performance
............................................................... 146
4.5.3
Tuneability and Response Time
....................................... 149
4.6
Microwave Performance
............................................................... 151
4.6.1
Parallel-Plate Varactors
.................................................... 151
4.6.2
Coplanar-Plate Varactors
................................................. 156
4.6.3
Distributed Varactors
....................................................... 161
4.7
Power Handling Capability and High Power Varactors
................ 162
4.7.1
Parallel-Plate Varactors
.................................................... 163
4.7.2
Coplanar-Plate Varactors
................................................. 164
4.8
Ferroelectrics in Passive Devices
as High Permittivity Dielectric
...................................................... 165
4.8.1
High Density Capacitors
.................................................. 165
4.82
MEMs with Ferroelectric Spacers
.................................... 167
4.8.3
MOS
Transistors with Ferroelectrics
as Gate Dielectric
............................................................. 168
4.9
Conclusions
................................................................................... 169
References
................................................................................................ 170
5
Ferroelectric Devices
.............................................................................. 175
5.1
Introduction
................................................................................... 175
5.2
Tunable Delay Lines and Delay Line Type Phase Shifters
........... 176
52.1
Figure of Merit
................................................................. 176
522
Periodically Loaded Lines
................................................ 177
5.2.3
Uniformly Loaded Delay Lines
........................................ 182
52.4
Other Delay Lines
............................................................ 186
xjv
Contents
5.3
Phase Shifters
................................................................................ 187
5.3.1
Figure of Merit of an Analog Phase Shifter
..................... 187
5.3.2
Periodically Loaded Line Phase Shifters
.......................... 188
5.3.3
Reflection Type Phase Shifters
........................................ 192
5.3.4
Phase Shifters Based on All Pass Filter Topology
........... 192
5.3.5
Other Phase Shifters
......................................................... 194
5.4
Tunable Filters
.............................................................................. 196
5.4.1
Tunable Resonators
.......................................................... 196
5.4.2
Bandpass Filters
............................................................... 199
5.4.3
Notch Filters
..................................................................... 203
5.5
Matching Networks (Impedance Tuners)
...................................... 204
5.6
Power Splitters
.............................................................................. 206
5.7
Antennas
....................................................................................... 207
5.8
Nonlinear Devices
......................................................................... 208
5.8.1
Harmonic Generators
....................................................... 208
5.8.2
Frequency Up-Converters
................................................ 208
5.8.3
Power
Limiters................................................................. 209
5.8.4
Pulse Shapers
................................................................... 210
5.8.5
Parametric Amplifiers
...................................................... 211
5.9
TFBARs
........................................................................................ 212
5.9.1
Basic Designs and Resonant Frequencies
........................ 212
5.9.2
Tunable TFBARs
............................................................. 213
5.10
Conclusions
................................................................................... 217
References
................................................................................................ 217
Circuit and System Applications of Tunable Ferroelectric Devices
.. 225
6.1
Introduction
................................................................................... 225
6.2
Voltage Controlled Oscillators
...................................................... 226
6.3
Amplifiers
..................................................................................... 229
6.4
Steerable Phased Array and Beam Antennas
................................ 231
6.4.1
Phased Arrays
.................................................................. 231
6.4.2
Steerable Beamformers and Phased Arrays
..................... 232
6.4.3
Nontraditional
and Lens Type Steerable Beamformers
... 236
6.5
Conclusions
................................................................................... 241
References
................................................................................................ 242
Modeling
.................................................................................................. 245
7.1
Introduction
................................................................................... 245
7.2
Coplanar-PIate Transmission Lines
.............................................. 246
7.2.1
The Equivalent Circuit of the Lines
................................. 246
7.2.2
Coplanar-Strip Waveguides
............................................. 249
7.2.3
Coplanar Waveguides
...................................................... 259
7.3
Multilayer Substrate Coplanar-PIate Capacitors
........................... 260
7.3.1
Coplanar Plate Capacitors with the Straight Gap (Slot)...
260
7.3.2
Interdigital (IDC)
Coplanar-PIate Capacitors
................... 265
Contents
7.4
Parallel-Plate Capacitor
................................................................. 267
7.5
Conclusions
................................................................................... 271
Appendix A
.............................................................................................. 273
Appendix
В
.............................................................................................. 276
AppendixC
.............................................................................................. 280
Appendix
D
.............................................................................................. 285
References
................................................................................................ 285
Measurements of the Dielectric Properties
.......................................... 287
8.1
Introduction
................................................................................... 287
8.2
Resonant Techniques
.................................................................... 289
8.2.1
Disk Resonator Technique
............................................... 289
8.2.2
Courtney Resonator
.......................................................... 291
8.2.3
Composite Resonator Method
.......................................... 295
8.2.4
Split-Post Dielectric Resonator Method for Thick
and Thin Films
................................................................. 297
8.2.5
Open Resonator Technique
.............................................. 299
8.2.6
Resonant Technique for on Wafer Characterization
of the Ferroelectric Varactors and Films
.......................... 302
8.2.7
Transmission Line Resonator Method
............................. 306
8.2.8
Near Field Scanning Microscope
..................................... 308
8.2.9
Uncertainty of Resonant Measurements
........................... 311
8.3
Broadband Techniques
.................................................................. 317
8.3.1
Transmission/Reflection Method. Bulk Samples
in Waveguides
.................................................................. 317
8.3.2
Film Measurements Using Coplanar Waveguide
(CPW)
.............................................................................. 321
8.3.3
Film Measurements Using Coupled
Microstrip
Lines
..... 325
8.3.4
Measurements Using Test Varactors
................................ 326
8.4
Nonlinear Measurements of Ferroelectrics
................................... 330
8.5
Switching Time of Ferroelectric Films
......................................... 332
8.6
Conclusions
................................................................................... 334
Appendix
E
............................................................................................... 336
Appendix
F
............................................................................................... 343
Appendix
G
.............................................................................................. 346
References
................................................................................................ 347
Potentials and Perspectives
.................................................................... 351
9.1
Introduction
................................................................................... 351
9.2
Multiferroics
.................................................................................. 352
9.3
Ferroelectric Nanotubes. Ferromagnetic Nanowires
..................... 354
9.4
Metamaterials
................................................................................ 357
9.5
Bridging the THz Gap
............................................................... 360
9.6
Other Tunable Materials
............................................................... 361
9.6.1
Pyrochlores
....................................................................... 362
xvi Contents
9.6.2
Resistive Switching in Oxides
.......................................... 364
9.6.3
High Temperature Superconductors
(HTS)
...................... 367
9.6.4
Liquid Crystals
................................................................. 367
9.7
Other/New Effects
......................................................................... 370
9.7.1
Resistivity Switching in Doped SrTiO3
............................ 370
9.7.2
Nanoscale Effects
............................................................. 372
9.7.3
Integration with Semiconductors
..................................... 372
9.8
Conclusions
................................................................................... 373
References
................................................................................................ 374
10
Concluding Remarks
.............................................................................. 379
10.1
Introduction
................................................................................... 379
10.2
Stabilization of the Temperature Dependences
............................. 379
10.2.1
Intrinsic Temperature Dependences of Permittivity
and Tuneability
................................................................. 380
10.2.2
Materials and Device Design Based Methods
of Stabilization
................................................................. 381
10.3
Nonlinearity and Power Handling Capability
............................... 384
10.4
Hysteresis, Retention, Long Term Stability and Noise
................. 384
10.5
Reliability
...................................................................................... 387
10.6
Integration Trends
......................................................................... 388
References
................................................................................................ 389
Index
................................................................................................................ 391
|
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| id | DE-604.BV035656562 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:42:36Z |
| institution | BVB |
| isbn | 9781848825062 |
| language | English |
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| physical | XX, 394 S. Ill., graph. Darst. |
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| publisher | Springer |
| record_format | marc |
| series2 | Engineering materials and processes |
| spelling | Gevorgian, Spartak Verfasser aut Ferroelectrics in microwave devices, circuits and systems physics, modelling, fabrication and measurements Spartak Gevorgian London Springer 2009 XX, 394 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Engineering materials and processes Ferroelectric crystals Microwave devices Mikrowellenschaltung (DE-588)4169891-5 gnd rswk-swf Mikrowellenbauelement (DE-588)4123765-1 gnd rswk-swf Ferroelektrizität (DE-588)4154126-1 gnd rswk-swf Mikrowellenbauelement (DE-588)4123765-1 s Ferroelektrizität (DE-588)4154126-1 s DE-604 Mikrowellenschaltung (DE-588)4169891-5 s Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017711048&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Gevorgian, Spartak Ferroelectrics in microwave devices, circuits and systems physics, modelling, fabrication and measurements Ferroelectric crystals Microwave devices Mikrowellenschaltung (DE-588)4169891-5 gnd Mikrowellenbauelement (DE-588)4123765-1 gnd Ferroelektrizität (DE-588)4154126-1 gnd |
| subject_GND | (DE-588)4169891-5 (DE-588)4123765-1 (DE-588)4154126-1 |
| title | Ferroelectrics in microwave devices, circuits and systems physics, modelling, fabrication and measurements |
| title_auth | Ferroelectrics in microwave devices, circuits and systems physics, modelling, fabrication and measurements |
| title_exact_search | Ferroelectrics in microwave devices, circuits and systems physics, modelling, fabrication and measurements |
| title_full | Ferroelectrics in microwave devices, circuits and systems physics, modelling, fabrication and measurements Spartak Gevorgian |
| title_fullStr | Ferroelectrics in microwave devices, circuits and systems physics, modelling, fabrication and measurements Spartak Gevorgian |
| title_full_unstemmed | Ferroelectrics in microwave devices, circuits and systems physics, modelling, fabrication and measurements Spartak Gevorgian |
| title_short | Ferroelectrics in microwave devices, circuits and systems |
| title_sort | ferroelectrics in microwave devices circuits and systems physics modelling fabrication and measurements |
| title_sub | physics, modelling, fabrication and measurements |
| topic | Ferroelectric crystals Microwave devices Mikrowellenschaltung (DE-588)4169891-5 gnd Mikrowellenbauelement (DE-588)4123765-1 gnd Ferroelektrizität (DE-588)4154126-1 gnd |
| topic_facet | Ferroelectric crystals Microwave devices Mikrowellenschaltung Mikrowellenbauelement Ferroelektrizität |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017711048&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT gevorgianspartak ferroelectricsinmicrowavedevicescircuitsandsystemsphysicsmodellingfabricationandmeasurements |