(2008). Papers presented at Laser Processing for Semiconductor Devices - Science and Technology: Saint Malo, France, 1 - 2 October 2007 ; [international workshop]. Wiley-VCH.
Chicago-Zitierstil (17. Ausg.)Papers Presented at Laser Processing for Semiconductor Devices - Science and Technology: Saint Malo, France, 1 - 2 October 2007 ; [international Workshop]. Weinheim: Wiley-VCH, 2008.
MLA-Zitierstil (9. Ausg.)Papers Presented at Laser Processing for Semiconductor Devices - Science and Technology: Saint Malo, France, 1 - 2 October 2007 ; [international Workshop]. Wiley-VCH, 2008.
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