The proceedings of the 1st International Conference on Microelectronics and Plasma Technology (ICMAP 2008): [selected papers presented in ICMAP 2008, ... August 18 - 20, 2008, Jeju, Korea]
Saved in:
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Amsterdam [u.a.]
Elsevier
2009
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| Series: | Thin solid films
517,14 |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschr.-Heftes |
| Physical Description: | IX S., S. [3825] - 4275 Ill., graph. Darst. |
Staff View
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| id | DE-604.BV035576681 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:40:49Z |
| institution | BVB |
| institution_GND | (DE-588)16015747-X |
| language | English |
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| physical | IX S., S. [3825] - 4275 Ill., graph. Darst. |
| publishDate | 2009 |
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| publisher | Elsevier |
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| series2 | Thin solid films |
| spelling | International Conference on Microelectronics and Plasma Technology 1 2008 Jeju Verfasser (DE-588)16015747-X aut The proceedings of the 1st International Conference on Microelectronics and Plasma Technology (ICMAP 2008) [selected papers presented in ICMAP 2008, ... August 18 - 20, 2008, Jeju, Korea] guest ed. in chief: Geun-Young Yeom Amsterdam [u.a.] Elsevier 2009 IX S., S. [3825] - 4275 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Thin solid films 517,14 Einzelaufnahme eines Zeitschr.-Heftes Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2008 Cheju gnd-content Mikroelektronik (DE-588)4039207-7 s Plasmatechnik (DE-588)4140353-8 s DE-604 Yeom, Geun-Young edt |
| spellingShingle | The proceedings of the 1st International Conference on Microelectronics and Plasma Technology (ICMAP 2008) [selected papers presented in ICMAP 2008, ... August 18 - 20, 2008, Jeju, Korea] Plasmatechnik (DE-588)4140353-8 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4140353-8 (DE-588)4039207-7 (DE-588)1071861417 |
| title | The proceedings of the 1st International Conference on Microelectronics and Plasma Technology (ICMAP 2008) [selected papers presented in ICMAP 2008, ... August 18 - 20, 2008, Jeju, Korea] |
| title_auth | The proceedings of the 1st International Conference on Microelectronics and Plasma Technology (ICMAP 2008) [selected papers presented in ICMAP 2008, ... August 18 - 20, 2008, Jeju, Korea] |
| title_exact_search | The proceedings of the 1st International Conference on Microelectronics and Plasma Technology (ICMAP 2008) [selected papers presented in ICMAP 2008, ... August 18 - 20, 2008, Jeju, Korea] |
| title_full | The proceedings of the 1st International Conference on Microelectronics and Plasma Technology (ICMAP 2008) [selected papers presented in ICMAP 2008, ... August 18 - 20, 2008, Jeju, Korea] guest ed. in chief: Geun-Young Yeom |
| title_fullStr | The proceedings of the 1st International Conference on Microelectronics and Plasma Technology (ICMAP 2008) [selected papers presented in ICMAP 2008, ... August 18 - 20, 2008, Jeju, Korea] guest ed. in chief: Geun-Young Yeom |
| title_full_unstemmed | The proceedings of the 1st International Conference on Microelectronics and Plasma Technology (ICMAP 2008) [selected papers presented in ICMAP 2008, ... August 18 - 20, 2008, Jeju, Korea] guest ed. in chief: Geun-Young Yeom |
| title_short | The proceedings of the 1st International Conference on Microelectronics and Plasma Technology (ICMAP 2008) |
| title_sort | the proceedings of the 1st international conference on microelectronics and plasma technology icmap 2008 selected papers presented in icmap 2008 august 18 20 2008 jeju korea |
| title_sub | [selected papers presented in ICMAP 2008, ... August 18 - 20, 2008, Jeju, Korea] |
| topic | Plasmatechnik (DE-588)4140353-8 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Plasmatechnik Mikroelektronik Konferenzschrift 2008 Cheju |
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