A user's guide to ellipsometry:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Mineola, N.Y
Dover Publ.
2006
|
| Edition: | Originally publ.: Boston: Acad. Press, c1993 |
| Subjects: | |
| Online Access: | kostenfrei Inhaltsverzeichnis Inhaltsverzeichnis |
| Physical Description: | XII, 260 S. graph. Darst. 22 cm |
| ISBN: | 9780486450285 0486450287 |
Staff View
MARC
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| 250 | |a Originally publ.: Boston: Acad. Press, c1993 | ||
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Record in the Search Index
| _version_ | 1804139111572832256 |
|---|---|
| adam_text | IMAGE 1
PREFACE
P. X
THEORETICAL ASPECTS
P. 1
DESCRIPTION OF AN ELECTROMAGNETIC WAVE
P. 1
INTERACTION OF LIGHT WITH MATERIAL
P. 2
POLARIZED LIGHT
P. 7
REFLECTIONS
P. 10
ELLIPSOMETRY DEFINITIONS
P. 17
REFERENCES
P. 18
INSTRUMENTATION
P. 19
FUNDAMENTALS AND HISTORY
P. 19
OPTICAL ELEMENTS
P. 21
THE MANUAL NULL INSTRUMENT
P. 26
ROTATING ELEMENT INSTRUMENTS
P. 30
REFERENCES
P. 34
USING OPTICAL PARAMETERS TO DETERMINE MATERIAL PROPERTIES
P. 35
DEL/PSI AND N AND K FOR SUBSTRATES
P. 35
THE CALCULATION OF DEL/PSI TRAJECTORIES FOR FILMS ON SUBSTRATES P. 39
TRAJECTORIES FOR TRANSPARENT FILMS
P. 40
TRAJECTORIES FOR ABSORBING FILMS
P. 45
TWO-FILM STRUCTURES
P. 47
REFERENCES
P. 50
DETERMINING OPTICAL PARAMETERS FOR INACCESSIBLE SUBSTRATES AND UNKNOWN
FILMS P. 51
INACCESSIBLE SUBSTRATES AND UNKNOWN FILMS
P. 51
DETERMINING FILM-FREE VALUES OF DEL AND PSI
P. 53
DETERMINING THE COMPLEX INDEX OF REFRACTION OF THE FILM
P. 58
SUMMARY
P. 62
REFERENCES
P. 63
EXTREMELY THIN FILMS
P. 65
GENERAL PRINCIPLES
P. 65
SOME EXAMPLES OF EXTREMELY THIN FILMS
P. 69
SUMMARY
P. 80
REFERENCES
P. 80
THE SPECIAL CASE OF POLYSILICON
P. 82
GENERAL
P. 82
RANGE OF THE OPTICAL CONSTANTS
P. 82
DEL/PSI TRAJECTORIES IN GENERAL
P. 86
EFFECT OF THE COEFFICIENT OF EXTINCTION
P. 88
EFFECT OF THE INDEX OF REFRACTION
P. 88
REQUIREMENTS
P. 91
MEASURING THE THICKNESS OF OXIDE ON POLYSILICON
P. 91
SIMPLIFICATIONS
P. 92
IMAGE 2
REFERENCES
P. 94
THE EFFECT OF ROUGHNESS
P. 95
GENERAL
P. 95
MACROSCOPIC ROUGHNESS
P. 95
MICROSCOPIC ROUGHNESS
P. 96
PERSPECTIVE
P. 97
SUBSTRATE ROUGHNESS
P. 97
FILM GROWTH WITH ROUGHNESS
P. 102
REFERENCES
P. 106
CASE STUDIES
P. 107
DISSOLUTION AND SWELLING OF THIN POLYMER FILMS
P. 109
GENERAL
P. 109
EARLY WORK USING A PSI-METER
P. 109
LATER WORK USING AN ELLIPSOMETER
P. 114
MODELING THE SWOLLEN FILM
P. 114
COMPARISON OF DATA WITH MODEL
P. 115
REFERENCES
P. 118
ION BEAM INTERACTION WITH SILICON
P. 119
GENERAL
P. 119
DEVELOPMENT OF THE ANALYSIS METHOD
P. 119
ION BEAM DAMAGE RESULTS
P. 121
DAMAGE REMOVAL
P. 123
REFERENCES
P. 126
DRY OXIDATION OF METALS
P. 127
GENERAL
P. 127
OXIDATION OF BISMUTH AT ROOM TEMPERATURE
P. 127
PLASMA OXIDATION OF TANTALUM
P. 130
THERMAL OXIDATION OF NICKEL
P. 132
REFERENCES
P. 134
OPTICAL PROPERTIES OF SPUTTERED CHROMIUM SUBOXIDE THIN FILMS P. 135
GENERAL
P. 135
FILM PREPARATION AND AUGER ANALYSIS
P. 135
OPTICAL MEASUREMENTS
P. 136
REFERENCE
P. 138
ION-ASSISTED FILM GROWTH OF ZIRCONIUM DIOXIDE
P. 139
EXPERIMENTAL APPARATUS
P. 139
OPTICAL MEASUREMENTS
P. 140
REFERENCES
P. 141
ELECTROCHEMICAL/ELLIPSOMETRIC STUDIES OF OXIDES ON METALS
P. 142
GENERAL
P. 142
EXPERIMENTAL METHODS
P. 142
IMAGE 3
OXIDE GROWTH: 1. ZIRCONIUM
P. 145
OXIDE GROWTH: 2. TITANIUM
P. 147
OXIDE GROWTH: 3. VANADIUM
P. 150
DEPOSITION OF OXIDES: 1. LEAD
P. 154
DEPOSITION OF OXIDES: 2. MANGANESE
P. 156
REFERENCES
P. 158
AMORPHOUS HYDROGENATED CARBON FILMS
P. 160
GENERAL
P. 160
MECHANISM OF FILM FORMATION
P. 160
PROPERTIES VS. DEPOSITION PARAMETERS
P. 164
REFERENCES
FLUOROPOLYMER FILMS ON SILICON FROM REACTIVE ION ETCHING P. 168 GENERAL
P. 168 FILM FORMATION AND PROPERTIES P. 168 INTERFACE STUDIES P. 172
REMOVAL WITH A HYDROGEN PLASMA P. 176 OTHER FORMATION AND REMOVAL
STUDIES P. 177 REFERENCES P. 179 VARIOUS FILMS ON INP P. 180 GENERAL P.
180 THE INP SURFACE OPTICAL PROPERTIES P. 180 THE THERMAL OXIDE ON INP
P. 182 PMMA ON INP P. 183 REFERENCES P. 185 BENZOTRIAZOLE AND
BENZIMIDAZOLE ON COPPER P. 186 GENERAL P. 186 EX SITU STUDIES P. 187 IN
SITU STUDIES P. 188 REFERENCES P. 194 GAS ADSORPTION ON METAL SURFACES
P. 196 GENERAL P. 196 NO, O[SUBSCRIPT 2], AND CO ON COPPER P. 196
OXIDATION OF NICKEL P. 200 THE INTERACTION OF SMALL AMOUNTS OF OXYGEN
WITH ALUMINUM FILMS P. 202 RESIDUAL GASES ON SILVER P. 207 REFERENCES P.
211 SILICON-GERMANIUM THIN FILMS P. 213 GENERAL P. 213 EXPERIMENTAL P.
213 RESULTS P. 213 REFERENCES P. 216
IMAGE 4
PROFILING OF HGCDTE
P. 217
GENERAL
P. 217
EXPERIMENTAL
P. 217
RESULTS
P. 218
DISCUSSION
P. 219
REFERENCES
P. 220
OXIDES AND NITRIDES OF SILICON
P. 221
GENERAL
P. 221
LOW TEMPERATURE GROWTH OF SILICON DIOXIDE
P. 221
PLASMA ENHANCED SILICON NITRIDE
P. 224
SILICON OXYNITRIDE FILMS AS A SELECTIVE DIFFUSION BARRIER
P. 226
REFERENCES
P. 229
APPENDICES
P. 231
DEL/PSI TRAJECTORY CALCULATIONS
P. 233
GENERAL
P. 233
PROGRAM ONEFILM
P. 234
PROGRAM THREEFILMS
P. 235
REFERENCES
P. 235
EFFECTIVE MEDIUM CONSIDERATIONS
P. 246
GENERAL
P. 246
THEORY
P. 247
EXAMPLES
P. 248
REFERENCES
P. 251
LITERATURE VALUES OF OPTICAL CONSTANTS OF VARIOUS MATERIALS
P. 253
GENERAL
P. 253
VALUES
P. 253
REFERENCES
P. 255
INDEX
P. 257
TABLE OF CONTENTS PROVIDED BY BLACKWELL S BOOK SERVICES AND R.R. BOWKER.
USED WITH PERMISSION.
|
| any_adam_object | 1 |
| author | Tompkins, Harland G. 1938- |
| author_GND | (DE-588)129994987 |
| author_facet | Tompkins, Harland G. 1938- |
| author_role | aut |
| author_sort | Tompkins, Harland G. 1938- |
| author_variant | h g t hg hgt |
| building | Verbundindex |
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| callnumber-first | Q - Science |
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| callnumber-raw | QC443 |
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| callnumber-subject | QC - Physics |
| classification_rvk | UP 8300 |
| ctrlnum | (OCoLC)64511093 (DE-599)GBV508939410 |
| dewey-full | 620.1/1295 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.1/1295 |
| dewey-search | 620.1/1295 |
| dewey-sort | 3620.1 41295 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik |
| edition | Originally publ.: Boston: Acad. Press, c1993 |
| format | Book |
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| id | DE-604.BV035495316 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:38:53Z |
| institution | BVB |
| isbn | 9780486450285 0486450287 |
| language | English |
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| physical | XII, 260 S. graph. Darst. 22 cm |
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| spelling | Tompkins, Harland G. 1938- Verfasser (DE-588)129994987 aut A user's guide to ellipsometry Harland G. Tompkins Originally publ.: Boston: Acad. Press, c1993 Mineola, N.Y Dover Publ. 2006 XII, 260 S. graph. Darst. 22 cm txt rdacontent n rdamedia nc rdacarrier Ellipsometry Ellipsometry / Case studies Ellipsometry Case studies Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Reflektometrie (DE-588)4296759-4 gnd rswk-swf Oberflächeneigenschaft (DE-588)4219221-3 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Werkstoff (DE-588)4065579-9 gnd rswk-swf (DE-588)4522595-3 Fallstudiensammlung gnd-content Werkstoff (DE-588)4065579-9 s Dünne Schicht (DE-588)4136925-7 s Oberflächeneigenschaft (DE-588)4219221-3 s Reflektometrie (DE-588)4296759-4 s DE-604 Ellipsometrie (DE-588)4152025-7 s http://www.loc.gov/catdir/enhancements/fy0629/2006040253-d.html Publisher description kostenfrei DE-601 pdf/application http://www.gbv.de/dms/bowker/toc/9780486450285.pdf Inhaltsverzeichnis GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017551638&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Tompkins, Harland G. 1938- A user's guide to ellipsometry Ellipsometry Ellipsometry / Case studies Ellipsometry Case studies Ellipsometrie (DE-588)4152025-7 gnd Reflektometrie (DE-588)4296759-4 gnd Oberflächeneigenschaft (DE-588)4219221-3 gnd Dünne Schicht (DE-588)4136925-7 gnd Werkstoff (DE-588)4065579-9 gnd |
| subject_GND | (DE-588)4152025-7 (DE-588)4296759-4 (DE-588)4219221-3 (DE-588)4136925-7 (DE-588)4065579-9 (DE-588)4522595-3 |
| title | A user's guide to ellipsometry |
| title_auth | A user's guide to ellipsometry |
| title_exact_search | A user's guide to ellipsometry |
| title_full | A user's guide to ellipsometry Harland G. Tompkins |
| title_fullStr | A user's guide to ellipsometry Harland G. Tompkins |
| title_full_unstemmed | A user's guide to ellipsometry Harland G. Tompkins |
| title_short | A user's guide to ellipsometry |
| title_sort | a user s guide to ellipsometry |
| topic | Ellipsometry Ellipsometry / Case studies Ellipsometry Case studies Ellipsometrie (DE-588)4152025-7 gnd Reflektometrie (DE-588)4296759-4 gnd Oberflächeneigenschaft (DE-588)4219221-3 gnd Dünne Schicht (DE-588)4136925-7 gnd Werkstoff (DE-588)4065579-9 gnd |
| topic_facet | Ellipsometry Ellipsometry / Case studies Ellipsometry Case studies Ellipsometrie Reflektometrie Oberflächeneigenschaft Dünne Schicht Werkstoff Fallstudiensammlung |
| url | http://www.loc.gov/catdir/enhancements/fy0629/2006040253-d.html http://www.gbv.de/dms/bowker/toc/9780486450285.pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017551638&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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