Nano and micromachining:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
London
ISTE [u.a.]
2009
|
| Edition: | 1. publ. |
| Subjects: | |
| Online Access: | Publisher description Inhaltsverzeichnis |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | X, 212 S. Ill., graph. Darst. |
| ISBN: | 9781848211032 |
Staff View
MARC
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|---|---|---|---|
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| 003 | DE-604 | ||
| 005 | 20090714 | ||
| 007 | t | ||
| 008 | 090316s2009 xxuad|| |||| 00||| eng d | ||
| 010 | |a 2008037127 | ||
| 020 | |a 9781848211032 |9 978-1-84821-103-2 | ||
| 035 | |a (OCoLC)440884591 | ||
| 035 | |a (DE-599)BVBBV035369243 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 044 | |a xxu |c US | ||
| 049 | |a DE-703 | ||
| 050 | 0 | |a T174.7 | |
| 080 | |a 620.3 | ||
| 082 | 0 | |a 620/.5 | |
| 084 | |a ZN 3700 |0 (DE-625)157333: |2 rvk | ||
| 245 | 1 | 0 | |a Nano and micromachining |c edited by J. Paulo Davim ... |
| 250 | |a 1. publ. | ||
| 264 | 1 | |a London |b ISTE [u.a.] |c 2009 | |
| 300 | |a X, 212 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a nanotehnologija - mikroobdelave | |
| 650 | 4 | |a Nanotechnology | |
| 650 | 4 | |a Micromachining | |
| 700 | 1 | |a Davim, J. Paulo |d 1964- |e Sonstige |0 (DE-588)1043445226 |4 oth | |
| 856 | 4 | |u http://www.loc.gov/catdir/enhancements/fy0903/2008037127-d.html |3 Publisher description | |
| 856 | 4 | 2 | |m Digitalisierung UB Bayreuth |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017173154&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-017173154 | ||
Record in the Search Index
| _version_ | 1804138696786575360 |
|---|---|
| adam_text | Table
of
Contents
Preface
їх
Chapter
1.
Nanoscale Cutting
............................. 1
Rüdiger RENTSCH
1.1.
Introduction
.................................... 1
1.2.
Basic elements of molecular dynamics modeling
............. 3
1.2.1.
Material representation and
microstructure
.............. 3
1.2.2.
Atomic interaction
............................ 4
1.2.3.
System dynamics and numerical description
............. 7
1.2.4.
Boundary conditions
........................... 8
1.3.
Design and requirements for state-of-the-art MD cutting
process simulations
................................. 10
1.4.
Capabilities of MD for nanoscale material removal
process analysis
.................................... 12
1.4.1.
Analysis of
microstructure
and deformation
............. 12
1.4.2.
Obtaining cutting forces, stress and temperature
........... 15
1.5.
Advances and recent developments in material removal
process simulation
.................................. 18
1.5.1.
Complete
3D
surface machining simulation
............. 18
1.5.2.
Consideration of fluids in MD cutting simulation
.......... 20
1.6.
Summary and outlook
.............................. 23
1.7.
References
.................................... 24
Chapter
2.
Ductile Mode Cutting of Brittle Materials: Mechanism,
Chip Formation and Machined Surfaces
...................... 27
Xiaoping LI
2.1.
Introduction
.................................... 27
2.2.
The mechanism of ductile mode cutting of brittle materials
....... 29
2.2.1.
Transition of chip formation mode from ductile to brittle
..... 29
vi Nano and Micromachining
2.2.2.
MD
modeling and simulation of nanoscale ductile mode
cutting of silicon
................................. 32
2.2.3.
The mechanism of ductile mode chip formation in cutting
of silicon
...................................... 32
2.3.
The chip formation in cutting of brittle materials
............. 35
2.3.1.
Material deformation and crack initiation in the chip
formation zone
.................................. 35
2.3.2.
Stress conditions in the chip formation zone in relation
to ductile-brittle mode of chip formation
................... 36
2.4.
Machined surfaces in relation to chip formation mode
.......... 38
2.5.
References
.................................... 40
Chapter
3.
Diamond Tools in Micromachining
................. 45
Waqar AHMED, Mark J. JACKSON and Michael D. WHITFIELD
3.1.
Introduction
.................................... 45
3.2.
Diamond technology
.............................. 45
3.2.1.
Hot Filament CVD (HFCVD)
...................... 46
3.3.
Preparation of substrate
............................. 48
3.3.1.
Selection of substrate material
..................... 48
3.3.2.
Pre-treatment of substrate
........................ 49
3.4.
Modified HFCVD process
........................... 51
3.4.1.
Modification of filament assembly
................... 51
3.4.2.
Process conditions
............................ 52
3.5.
Nucleation and diamond growth
....................... 53
3.5.1.
Nucleation
................................. 54
3.5.2.
Bias-enhanced nucleation (BEN)
.................... 55
3.5.3.
Influence of temperature
......................... 56
3.6.
Deposition on complex substrates
...................... 58
3.6.1.
Diamond deposition on metallic (molybdenum) wire
........ 58
3.6.2.
Deposition on WC-Co microtools
................... 58
3.6.3.
Diamond deposition on tungsten carbide
(WC-Co)
microtool
............................... 59
3.7.
Diamond micromachining
........................... 62
3.7.1.
Performance of diamond-coated
microtool
.............. 66
3.8.
Conclusions
.................................... 67
3.9.
References
.................................... 67
Chapter
4.
Conventional Processes: Microturning,
Microdrilling
and
M
icromilling
.................................... 71
Wit GRZESIK
4.1.
Introduction
.................................... 71
4.1.1.
Definitions and technological possibilities
.............. 71
4.1.2.
Main applications of micromachining
................. 72
4.2.
Microturning
................................... 74
Table
of
Contents
vii
4.2.1.
Characteristic features and applications
................ 74
4.2.2.
Microturning tools and tooling systems
................ 75
4.2.3.
Machine tools for microturning
..................... 77
4.3. Microdrilling................................... 79
4.3.1.
Characteristic features and applications
................ 79
4.3.2. Microdrills
and tooling systems
.................... 80
4.3.3.
Machine tools for microdrilling
..................... 83
4.4.
Micromilling
................................... 85
4.4.1.
Characteristic features and applications
................ 85
4.4.2.
Micromills and tooling systems
..................... 87
4.4.3.
Machine tools for micromilling
..................... 89
4.5.
Product quality in micromachining
...................... 92
4.5.1.
Quality challenges in micromachining
................ 92
4.5.2.
Burr formation in micromachining operations
............ 92
4.5.3.
Surface quality inspection of micromachining products
...... 96
4.6.
References
.................................... 98
Chapter
5.
Microgrinding and Ultra-precision Processes
........... 101
Mark J. JACKSON and Michael D. WHITFIELD
5.1.
Introduction
.................................... 101
5.2.
Micro and nanogrinding
............................ 104
5.2.1.
Nanogrinding apparatus
......................... 105
5.2.2.
Nanogrinding procedures
........................ 105
5.3.
Nanogrinding tools
............................... 106
5.3.1.
Dissolution modeling
........................... 109
5.3.2.
Preparation of nanogrinding wheels
.................. 110
5.3.3.
Bonding systems
............................. 112
5.3.4.
Vitrified bonding systems
........................ 113
5.4.
Conclusions
.................................... 121
5.5.
References
.................................... 122
Chapter
6.
Non-Conventional Processes: Laser Micromachining
..... 125
Grant M. ROBINSON and Mark J. JACKSON
6.1.
Introduction
.................................... 125
6.2.
Fundamentals of lasers
............................. 126
6.2.1.
Stimulated emission
........................... 126
6.2.2.
Types of lasers
............................... 127
6.2.3.
Laser optics
................................ 128
6.2.4.
Beam quality
................................ 129
6.2.5.
Laser-material interactions
....................... 131
6.3.
Laser
microfabrication
............................. 133
6.3.1.
Nanosecond pulse
microfabrication
.................. 133
6.3.2.
Shielding gas
................................ 135
6.3.3.
Nozzle designs for laser micromachining
............... 136
viii Nano
and Micromachining
6.3.4.
Stages of surface melting
........................ 138
6.3.5.
Effects of nanosecond pulsed microfabrication
........... 138
6.3.6.
Picosecond pulse
microfabrication
................... 143
6.3.7.
Femtosecond pulse microfabrication
................. 146
6.3.8.
Effects of femtosecond laser machining
................ 150
6.4.
Laser nanofabrication
.............................. 151
6.5.
Conclusions
.................................... 154
6.6.
References
.................................... 154
Chapter
T.Evaluation
of Subsurface Damage in
Nano
and Micromachining
.................................. 157
Jianmei ZHANG, Jiangang SUN and Zhijian PEI
7.1.
Introduction
.................................... 157
7.2.
Destructive evaluation technologies
..................... 158
7.2.1.
Cross-sectional microscopy
....................... 158
7.2.2.
Preferential etching
............................ 159
7.2.3.
Angle lapping/angle polishing
..................... 159
7.3.
Non-destructive evaluation technologies
.................. 160
7.3.1.
X-ray diffraction
............................. 160
7.3.2.
Micro-Raman spectroscopy
....................... 164
7.3.3.
Laser scattering
.............................. 167
7.4.
Acknowledgements
............................... 172
7.5.
References
.................................... 172
Chapter
8.
Applications of
Nano
and Micromachining in Industry
..... 175
Jiwang YAN
8.1.
Introduction
.................................... 175
8.2.
Typical machining methods
.......................... 176
8.2.1.
Diamond turning
............................. 176
8.2.2.
Shaper/planner machining
........................ 178
8.3.
Applications in optical manufacturing
.................... 179
8.3.1.
Aspheric lens
............................... 179
8.3.2.
Fresnel lens
................................ 186
8.3.3.
Microstractured components
...................... 193
8.4.
Semiconductor and electronics related applications
............ 200
8.4.1.
Semiconductor wafer production
.................... 200
8.4.2.
LSI substrate planarization
....................... 202
8.5.
Summary
..................................... 203
8.6.
Acknowledgements
............................... 204
8.7.
References
.................................... 204
List of Authors
...................................... 209
Index
............................................ 211
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| id | DE-604.BV035369243 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:32:18Z |
| institution | BVB |
| isbn | 9781848211032 |
| language | English |
| lccn | 2008037127 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-017173154 |
| oclc_num | 440884591 |
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| owner | DE-703 |
| owner_facet | DE-703 |
| physical | X, 212 S. Ill., graph. Darst. |
| publishDate | 2009 |
| publishDateSearch | 2009 |
| publishDateSort | 2009 |
| publisher | ISTE [u.a.] |
| record_format | marc |
| spelling | Nano and micromachining edited by J. Paulo Davim ... 1. publ. London ISTE [u.a.] 2009 X, 212 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Includes bibliographical references and index nanotehnologija - mikroobdelave Nanotechnology Micromachining Davim, J. Paulo 1964- Sonstige (DE-588)1043445226 oth http://www.loc.gov/catdir/enhancements/fy0903/2008037127-d.html Publisher description Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017173154&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Nano and micromachining nanotehnologija - mikroobdelave Nanotechnology Micromachining |
| title | Nano and micromachining |
| title_auth | Nano and micromachining |
| title_exact_search | Nano and micromachining |
| title_full | Nano and micromachining edited by J. Paulo Davim ... |
| title_fullStr | Nano and micromachining edited by J. Paulo Davim ... |
| title_full_unstemmed | Nano and micromachining edited by J. Paulo Davim ... |
| title_short | Nano and micromachining |
| title_sort | nano and micromachining |
| topic | nanotehnologija - mikroobdelave Nanotechnology Micromachining |
| topic_facet | nanotehnologija - mikroobdelave Nanotechnology Micromachining |
| url | http://www.loc.gov/catdir/enhancements/fy0903/2008037127-d.html http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017173154&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT davimjpaulo nanoandmicromachining |