Surface analysis: the principal techniques
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Chichester [u.a.]
Wiley
2009
|
| Edition: | 2. ed. |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XIX, 666 S. Ill., graph. Darst. |
| ISBN: | 9780470017647 9780470017630 |
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MARC
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| 245 | 1 | 0 | |a Surface analysis |b the principal techniques |c Eds.: John C. Vickerman ... |
| 250 | |a 2. ed. | ||
| 264 | 1 | |a Chichester [u.a.] |b Wiley |c 2009 | |
| 300 | |a XIX, 666 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Surfaces (Physique) | |
| 650 | 4 | |a Surfaces (Technologie) - Analyse | |
| 650 | 4 | |a Spectrum analysis | |
| 650 | 4 | |a Surfaces (Technology) |x Analysis | |
| 650 | 0 | 7 | |a Oberflächenanalyse |0 (DE-588)4172243-7 |2 gnd |9 rswk-swf |
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| 689 | 0 | 0 | |a Oberflächenanalyse |0 (DE-588)4172243-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Vickerman, John C. |e Sonstige |4 oth | |
| 856 | 4 | 2 | |m Digitalisierung UB Bayreuth |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017154398&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-017154398 | ||
Record in the Search Index
| _version_ | 1804138670579515392 |
|---|---|
| adam_text | Contents
List of Contributors
xv
Preface
xvii
ι
Introduction
ι
John C. Vickerman
1.1
How do we Define the Surface?
1
1.2
How Many Atoms in a Surface?
2
1.3
Information Required
3
1.4
Surface Sensitivity
5
1.5
Radiation Effects
-
Surface Damage
7
1.6
Complexity of the Data
8
2
Auger Electron Spectroscopy
9
Hans
; Jörg
Mathieu
2.1
Introduction
9
2.2
Principle of the Auger Process
10
2.2.1
Kinetic Energies of Auger Peaks
11
2.2.2
Ionization Cross-Section
15
2.2.3
Comparison of Auger and Photon Emission
16
2.2.4
Electron Backscattering
17
2.2.5
Escape Depth
18
2.2.6
Chemical Shifts
19
2.3
Instrumentation
21
2.3.1
Electron Sources
22
2.3.2
Spectrometers
24
2.3.3
Modes of Acquisition
24
2.3.4
Detection Limits
29
2.3.5
Instrument Calibration
30
VI
CONTENTS
2.4
Quantitative
Analysis
31
2.5
Depth Profile Analysis
33
2.5.1
Thin Film Calibration Standard
34
2.5.2
Depth Resolution
36
2.5.3
Sputter Rates
37
2.5.4
Preferential Sputtering
40
2.5.5
λ
-Correction
41
2.5.6
Chemical Shifts in AES Profiles
42
2.6
Summary
43
References
44
Problems
45
Electron Spectroscopy for Chemical Analysis
47
Buddy D. Ratner and David G. Castner
3.1
Overview
47
3.1.1
The Basic
ESCA
Experiment
48
3.1.2
A History of the Photoelectric Effect and
ESCA
48
3.1.3
Information Provided by
ESCA
49
3.2
X-ray Interaction with Matter, the Photoelectron Effect
and
Photoemission
from Solids
50
3.3
Binding Energy and the Chemical Shift
52
3.3.1
Koopmans Theorem
53
3.3.2
Initial State Effects
53
3.3.3
Final State Effects
57
3.3.4
Binding Energy Referencing
58
3.3.5
Charge Compensation in Insulators
60
3.3.6
Peak Widths
61
3.3.7
Peak Fitting
62
3.4
Inelastic Mean Free Path and Sampling Depth
63
3.5
Quantification
67
3.5.1
Quantification Methods
68
3.5.2
Quantification Standards
70
3.5.3
Quantification Example
71
3.6
Spectral Features
73
3.7
Instrumentation
80
3.7.1
Vacuum Systems for
ESCA
Experiments
80
3.7.2
X-ray Sources
82
3.7.3
Analyzers
3.7.4
Data Systems
3.7.5
Accessories
3.8
Spectral Quality
3.9
Depth Profiling
3.10
X-Y Mapping and Imaging
3.11
Chemical Derivatization
3.12
Valence Band
3.13
Perspectives
3.14
Conclusions
Acknowledgements
References
Problems
CONTENTS
VII
84
86
88
88
89
94
96
96
99
100
101
101
109
Molecular Surface Mass Spectrometry by SIMS
113
John C. Vickerman
4.1
Introduction
113
4.2
Basic Concepts
116
4.2.1
The Basic Equation
116
4.2.2
Sputtering
116
4.2.3
Ionization
121
4.2.4
The Static Limit and Depth Profiling
123
4.2.5
Surface Charging
124
4.3
Experimental Requirements
125
4.3.1
Primary Beam
125
4.3.2
Mass Analysers
131
4.4
Secondary Ion Formation
140
4.4.1
Introduction
140
4.4.2
Models of Sputtering
143
4.4.3
Ionization
149
4.4.4
Influence of the Matrix Effect in Organic
Materials Analysis
151
4.5
Modes of Analysis
155
4.5.1
Spectral Analysis
155
4.5.2
SIMS Imaging or Scanning SIMS
166
4.5.3
Depth Profiling and
3D
Imaging
173
4.6
Ionization of the Sputtered Neutrals
183
VIII
CONTENTS
4.6.1
Photon Induced Post-Ionization
184
4.6.2
Photon Post-Ionization and SIMS
190
4.7
Ambient Methods of Desorption Mass Spectrometry
194
References
199
Problems
203
5 Dynamic SIMS
207
David McPhail and Mark Dowsett
5.1
Fundamentals and Attributes
207
5.1.1
Introduction
207
5.1.2
Variations on a Theme
211
5.1.3
The Interaction of the Primary Beam
with the Sample
214
5.1.4
Depth Profiling
217
5.1.5
Complimentary Techniques and Data
Comparison
224
5.2
Areas
and Methods of Application
226
5.2.1
Dopant and Impurity Profiling
226
5.2.2
Profiling High Concentration Species
227
5.2.3
Use of SIMS in Near Surface Regions
230
5.2.4
Applications of SIMS Depth Profiling
in Materials Science
233
5.3
Quantification of Data
233
5.3.1
Quantification of Depth Profiles
233
5.3.2
Fabrication of Standards
239
5.3.3
Depth Measurement and Calibration of the
Depth Scale
241
5.3.4
Sources of Error in Depth Profiles
242
5.4
Novel
Approaches
246
5.4.1
Bevelling and Imaging or Line Scanning
246
5.4.2
Reverse-Side Depth Profiling
250
5.4.3
Two-Dimensional Analysis
251
5.5
Instrumentation
252
5.5.1
Overview
252
5.5.2
Secondary Ion Optics
253
5.5.3
Dual Beam Methods and ToF
254
5.5.4
Gating
254
CONTENTS
IX
5.6
Conclusions
256
References
257
Problems
267
Low-Energy Ion Scattering and Rutherford Backscattering
269
Edmund
laglauer
6.1
Introduction
269
6.2
Physical Basis
271
6.2.1
The Scattering Process
271
6.2.2
Collision Kinematics
272
6.2.3
Interaction Potentials and Cross-sections
275
6.2.4
Shadow Cone
278
6.2.5
Computer Simulation
281
6.3
Rutherford Backscattering
284
6.3.1
Energy Loss
284
6.3.2
Apparatus
287
6.3.3
Beam Effects
289
6.3.4
Quantitative Layer Analysis
290
6.3.5
Structure Analysis
293
6.3.6
Medium-Energy Ion Scattering (MEIS)
297
6.3.7
The Value of RBS and Comparison to Related
Techniques
298
6.4
Low-Energy Ion Scattering
300
6.4.1
Neutralization
300
6.4.2
Apparatus
303
6.4.3
Surface Composition Analysis
307
6.4.4
Structure Analysis
316
6.4.5
Conclusions
323
Acknowledgement
324
References
324
Problems
330
Key Facts
330
7
Vibrational Spectroscopy from Surfaces
333
Martyn
E.
Vertible
and
Veter
Gardner
7.1
Introduction
333
7.2
Infrared Spectroscopy from Surfaces
334
CONTENTS
7 ■
7.2.1 Transmission
IR Spectroscopy
335
7.2.2 Photoacoustic Spectroscopy 340
7.2.3
Reflectance Methods
342
7.3 Electron Energy
Loss
Spectroscopy
(EELS)
361
7.3.1
Inelastic or Impact Scattering
362
7.3.2
Elastic or
Dipole
Scattering
365
7.3.3
The EELS (HREELS) Experiment
367
7.4
The Group Theory of Surface Vibrations
368
7.4.1
General Approach
368
7.4.2
Group Theory Analysis of Ethyne Adsorbed at a
Flat, Featureless Surface
369
7.4.3
Group Theory Analysis of Ethyne Adsorbed at a
(100)
Surface of an FCC Metal
373
7.4.4
The Expected Form of the RAIRS and Dipolar
EELS (HREELS) Spectra
374
7.5
Laser Raman Spectroscopy from Surfaces
375
7.5.1
Theory of Raman Scattering
376
7.5.2
The Study of Collective Surface Vibrations
(Phonons) using Raman Spectroscopy
377
7.5.3
Raman Spectroscopy from Metal Surfaces
379
7.5.4
Spatial Resolution in Surface Raman
Spectroscopy
380
7.5.5
Fourier Transform Surface Raman Techniques
380
7.6
Inelastic Neutron Scattering (INS)
381
7.6.1
Introduction to INS
381
7.6.2
The INS Spectrum
382
7.6.3
INS Spectra of Hydrodesesulfurization Catalysts
382
7.7
Sum-Frequency Generation Methods
383
References
386
Problems
389
8
Surface Structure Determination by Interference Techniques
391
Christopher A. Lucas
8.1
Introduction
391
8.1.1
Basic Theory of Diffraction
-
Three Dimensions
392
8.1.2
Extension to Surfaces
-
Two Dimensions
398
8.2
Electron Diffraction Techniques
402
8.2.1
General Introduction
402
CONTENTS
XI
8.2.2
Low
Energy Electron
Diffraction
403
8.2.3
Reflection High Energy Electron Diffraction
(RHEED)
418
8.3
X-ray Techniques
424
8.3.1
General Introduction
424
8.3.2
X-ray Adsorption Spectroscopy
427
8.3.3
Surface X-ray Diffraction (SXRD)
447
8.3.4
X-ray Standing Waves (XSWs)
456
8.4
Photoelectron Diffraction
464
8.4.1
Introduction
464
8.4.2
Theoretical Considerations
465
8.4.3
Experimental Details
469
8.4.4
Applications of XPD and PhD
470
References
474
9
Scanning Probe Microscopy
479
Graham
}.
Leggett
9.1
Introduction
479
9.2
Scanning Tunnelling Microscopy
480
9.2.1
Basic Principles of the STM
481
9.2.2
Instrumentation and Basic Operation Parameters
487
9.2.3
Atomic Resolution and Spectroscopy: Surface
Crystal and Electronic Structure
489
9.3
Atomic Force Microscopy
511
9.3.1
Basic Principles of the AFM
511
9.3.2
Chemical Force Microscopy
524
9.3.3
Friction Force Microscopy
526
9.3.4
Biological Applications of the AFM
532
9.4
Scanning Near-Field Optical Microscopy
537
9.4.1
Optical Fibre Near-Field Microscopy
537
9.4.2
Apertureless
SNOM
541
9.5
Other Scanning Probe Microscopy Techniques
542
9.6
Lithography Using Probe Microscopy Methods
544
9.6.1
STM Lithography
544
9.6.2
AFM Lithography
545
9.6.3
Near-Field Photolithography
549
9.6.4
The Millipede
550
XII CONTENTS
9.7
Conclusions
551
References
552
Problems
559
io
The Application of Multivariate Data Analysis Techniques in
Surface Analysis
563
Joanna L.S. Lee and Ian S.
Gilmore
10.1
Introduction
563
10.2
Basic Concepts
565
10.2.1
Matrix and Vector Representation of Data
565
10.2.2
Dimensionality and Rank
567
10.2.3
Relation to Multivariate Analysis
568
10.2.4
Choosing the Appropriate Multivariate Method
568
10.3
Factor Analysis for Identification
569
10.3.1
Terminology
570
10.3.2
Mathematical Background
570
10.3.3
Principal Component Analysis
571
10.3.4
Multivariate Curve Resolution
579
10.3.5
Analysis of Multivariate Images
582
10.4
Regression Methods for Quantification
591
10.4.1
Terminology
591
10.4.2
Mathematical Background
592
10.4.3
Principal Component Regression
594
10.4.4
Partial Least Squares Regression
595
10.4.5
Calibration, Validation and Prediction
596
10.4.6
Example
-
Correlating ToF-SIMS Spectra with
Polymer Wettability Using PLS
598
10.5
Methods for Classification
600
10.5.1
Discriminant Function Analysis
601
10.5.2
Hierarchal Cluster Analysis
602
10.5.3
Artificial Neural Networks
603
10.6
Summary and Conclusion
606
Acknowledgements
608
References
608
Problems
611
CONTENTS XIII
Appendix
ι
Vacuum Technology for Applied Surface Science
613
Rod Wilson
Al.l Introduction: Gases and Vapours
613
Al.
2
The Pressure Regions of Vacuum Technology and
their Characteristics
619
A1.3 Production of a Vacuum
622
Al.3.1 Types of Pump
622
Al.
3.2
Evacuation of a Chamber
634
Al
.3.3
Choice of Pumping System
635
Al.
3.4
Determination of the Size of Backing Pumps
636
Al.
3.5
Flanges and their Seals
636
Al.
4
Measurement of Low Pressures
637
Al.4.1 Gauges for Direct Pressure Measurement
638
Al
.4.2
Gauges Using Indirect Means of Pressure
Measurement
640
Al
.4.3
Partial Pressure Measuring Instruments
644
Acknowledgement
647
References
647
Appendix
2
Units, Fundamental Physical Constants and
Conversions
649
A2.1 Base Units of the SI
649
A2.2 Fundamental Physical Constants
650
A2.3 Other Units and Conversions to SI
651
References
652
Index
653
|
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| indexdate | 2024-07-09T21:31:53Z |
| institution | BVB |
| isbn | 9780470017647 9780470017630 |
| language | English |
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| publisher | Wiley |
| record_format | marc |
| spelling | Surface analysis the principal techniques Eds.: John C. Vickerman ... 2. ed. Chichester [u.a.] Wiley 2009 XIX, 666 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Surfaces (Physique) Surfaces (Technologie) - Analyse Spectrum analysis Surfaces (Technology) Analysis Oberflächenanalyse (DE-588)4172243-7 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Oberflächenanalyse (DE-588)4172243-7 s DE-604 Vickerman, John C. Sonstige oth Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017154398&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Surface analysis the principal techniques Surfaces (Physique) Surfaces (Technologie) - Analyse Spectrum analysis Surfaces (Technology) Analysis Oberflächenanalyse (DE-588)4172243-7 gnd |
| subject_GND | (DE-588)4172243-7 (DE-588)4143413-4 |
| title | Surface analysis the principal techniques |
| title_auth | Surface analysis the principal techniques |
| title_exact_search | Surface analysis the principal techniques |
| title_full | Surface analysis the principal techniques Eds.: John C. Vickerman ... |
| title_fullStr | Surface analysis the principal techniques Eds.: John C. Vickerman ... |
| title_full_unstemmed | Surface analysis the principal techniques Eds.: John C. Vickerman ... |
| title_short | Surface analysis |
| title_sort | surface analysis the principal techniques |
| title_sub | the principal techniques |
| topic | Surfaces (Physique) Surfaces (Technologie) - Analyse Spectrum analysis Surfaces (Technology) Analysis Oberflächenanalyse (DE-588)4172243-7 gnd |
| topic_facet | Surfaces (Physique) Surfaces (Technologie) - Analyse Spectrum analysis Surfaces (Technology) Analysis Oberflächenanalyse Aufsatzsammlung |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017154398&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT vickermanjohnc surfaceanalysistheprincipaltechniques |