Handbook of semiconductor manufacturing technology:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Boca Raton, Fla. [u.a.]
CRC Press
2008
|
| Edition: | 2. ed. |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis lizenzfrei Inhaltsverzeichnis Inhaltsverzeichnis |
| Item Description: | Literaturangaben. - Previous ed.: New York: Marcel Dekker, 2000 |
| Physical Description: | getr. Zählung Ill., graph. Darst. |
| ISBN: | 1574446754 9781574446753 |
Staff View
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| 245 | 1 | 0 | |a Handbook of semiconductor manufacturing technology |c ed. by Robert Doering ; Yoshio Nishi |
| 250 | |a 2. ed. | ||
| 264 | 1 | |a Boca Raton, Fla. [u.a.] |b CRC Press |c 2008 | |
| 300 | |a getr. Zählung |b Ill., graph. Darst. | ||
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Record in the Search Index
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|---|---|
| adam_text | Contents
1 Introduction to Semiconductor Devices John R. Hauser 1-1
2 Overview of Interconnect—Copper and Low-K Integration Girish A. Dixit and
Robert H. Havemann 2-1
3 Silicon Materials Wen Lin and Howard Huff 3-1
4 SOI Materials and Devices Sorin Cristoloveanu and George K. Celler 4-1
5 Surface Preparation Glenn W. Gale, Brian K. Kirkpatrick, and Frederick W. Kern, Jr. 5-1
6 Supercritical Carbon Dioxide in Semiconductor Cleaning Mohammed J. Meziani,
Pankaj Pathak, and Ya-Ping Sun 6-1
7 Ion Implantation Michael Ameen, Ivan Berry, Walter Class, Hans-Joachim Gossmann,
and Leonard Rubin 7-1
8 Dopant Diffusion Sanjay Banerjee 8-1
9 Oxidation and Gate Dielectrics C. Rinn Cleavelin, Luigi Colombo,
Hiro Niimi, Sylvia Pas, and Eric M. Vogel 9-1
10 Silicides Christian Lavoie, Francois M. d Heurle and Shi-Li Zhang 10-1
11 Rapid Thermal Processing P.J. Timans 11-1
12 Low-K Dielectrics Ting Y. Tsui and Andrew J. McKerrow 12-1
13 Chemical Vapor Deposition Li-Qun Xia and Mei Chang 13-1
14 Atomic Layer Deposition Thomas E. Seidel 14-1
15 Physical Vapor Deposition Stephen M. Rossnagel 15-1
16 Damascene Copper Electroplating Jonathan Reid 16-1
17 Chemical-Mechanical Polishing Gregory B. Shinn, Vincent Korthuis,
Gautum Grover, Simon Fang, and Duane S. Boning 17-1
18 Optical Lithography Gene E. Fuller 18-1
19 Photoresist Materials and Processing Cesar M. Garza, Will Conley, and JeffByers 19-1
20 Photomask Fabrication Syed A. Rizvi and Sylvia Pas 20-1
21 Plasma Etch Peter L.G. Ventzek, Shahid Rauf, and Terry Sparks 21-1
22 Equipment Reliability Vallabh H. Dhudshia 22-1
23 Overview of Process Control Stephanie Watts Butler 23-1
24 In-Line Metrology Alain C. Diebold 24-1
25 In-Situ Metrology Gabriel G. Barna and Brad VanEck 25-1
26 Yield Modeling Ron Ross and Nick Atchison 26-1
27 Yield Management Louis Breaux and Sean Collins 27-1
28 Electrical, Physical, and Chemical Characterization Dieter K. Schroder,
Bruno W. Schueler, Thomas Shaffner, and Greg S. Strossman 28-1
29 Failure Analysis Lawrence C. Wagner 29-1
30 Reliability Physics and Engineering J.W. McPherson and E.T. Ogawa 30-1
31 Effects of Terrestrial Radiation on Integrated Circuits Robert Baumann 31-1
32 Integrated-Circuit Packaging Michael Lamson, Andreas Cangellaris,
and Erdogan Madenci 32-1
33 300 mm Wafer Fab Logistics and Automated Material
Handling Systems Leonard Foster and Devadas Pillai 33-1
34 Factory Modeling Samuel C. Wood 34-1
35 Economics of Semiconductor Manufacturing G. Dan Hutcheson 35-1
Appendix A: Physical Constants A-1
Appendix B: Units Conversion B-1
Appendix C: Standards Commonly Used in Semiconductor Manufacturing C-1
Appendix D: Acronyms D-1
Index 1-1
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| ctrlnum | (OCoLC)77476656 (DE-599)GBV521879418 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2. ed. |
| format | Book |
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| id | DE-604.BV035349562 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:31:52Z |
| institution | BVB |
| isbn | 1574446754 9781574446753 |
| language | English |
| lccn | 2006102599 |
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| physical | getr. Zählung Ill., graph. Darst. |
| publishDate | 2008 |
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| publisher | CRC Press |
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| spelling | Handbook of semiconductor manufacturing technology ed. by Robert Doering ; Yoshio Nishi 2. ed. Boca Raton, Fla. [u.a.] CRC Press 2008 getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - Previous ed.: New York: Marcel Dekker, 2000 Semiconductors / Design and construction / Handbooks, manuals, etc Semiconductor industry / Handbooks, manuals, etc Semiconductor industry Handbooks, manuals, etc Semiconductors Design and construction Handbooks, manuals, etc Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s Fertigung (DE-588)4016899-2 s 1\p DE-604 Doering, Robert 1946- Sonstige (DE-588)136401767 oth Nishi, Yoshio Sonstige oth http://www.gbv.de/dms/ilmenau/toc/521879418.PDF lizenzfrei Inhaltsverzeichnis http://www.loc.gov/catdir/enhancements/fy0626/2006102599-d.html Publisher description lizenzfrei http://www.loc.gov/catdir/toc/ecip077/2006102599.html lizenzfrei Inhaltsverzeichnis HBZ Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017153727&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of semiconductor manufacturing technology Semiconductors / Design and construction / Handbooks, manuals, etc Semiconductor industry / Handbooks, manuals, etc Semiconductor industry Handbooks, manuals, etc Semiconductors Design and construction Handbooks, manuals, etc Fertigung (DE-588)4016899-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4016899-2 (DE-588)4158814-9 |
| title | Handbook of semiconductor manufacturing technology |
| title_auth | Handbook of semiconductor manufacturing technology |
| title_exact_search | Handbook of semiconductor manufacturing technology |
| title_full | Handbook of semiconductor manufacturing technology ed. by Robert Doering ; Yoshio Nishi |
| title_fullStr | Handbook of semiconductor manufacturing technology ed. by Robert Doering ; Yoshio Nishi |
| title_full_unstemmed | Handbook of semiconductor manufacturing technology ed. by Robert Doering ; Yoshio Nishi |
| title_short | Handbook of semiconductor manufacturing technology |
| title_sort | handbook of semiconductor manufacturing technology |
| topic | Semiconductors / Design and construction / Handbooks, manuals, etc Semiconductor industry / Handbooks, manuals, etc Semiconductor industry Handbooks, manuals, etc Semiconductors Design and construction Handbooks, manuals, etc Fertigung (DE-588)4016899-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Semiconductors / Design and construction / Handbooks, manuals, etc Semiconductor industry / Handbooks, manuals, etc Semiconductor industry Handbooks, manuals, etc Semiconductors Design and construction Handbooks, manuals, etc Fertigung Halbleitertechnologie |
| url | http://www.gbv.de/dms/ilmenau/toc/521879418.PDF http://www.loc.gov/catdir/enhancements/fy0626/2006102599-d.html http://www.loc.gov/catdir/toc/ecip077/2006102599.html http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017153727&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT doeringrobert handbookofsemiconductormanufacturingtechnology AT nishiyoshio handbookofsemiconductormanufacturingtechnology |
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