APA (7th ed.) Citation

(2008). Handbook of semiconductor manufacturing technology (2. ed.). CRC Press.

Chicago Style (17th ed.) Citation

Handbook of Semiconductor Manufacturing Technology. 2. ed. Boca Raton, Fla. [u.a.]: CRC Press, 2008.

MLA (9th ed.) Citation

Handbook of Semiconductor Manufacturing Technology. 2. ed. CRC Press, 2008.