Handbook of vacuum technology:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English German |
| Veröffentlicht: |
Weinheim
Wiley-VCH
2008
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| Online-Zugang: | Inhaltstext Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben |
| Beschreibung: | XXVIII, 1002 S. Ill., graph. Darst. 25 cm 1 Beil. |
| ISBN: | 9783527407231 |
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MARC
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| 245 | 1 | 0 | |a Handbook of vacuum technology |c ed. by Karl Jousten. Transl. by C. Benjamin Nakhosteen |
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Datensatz im Suchindex
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CONTENTS PREFACE XXV LIST OF CONTRIBUTORS XXVII 1 THE HISTORY OFVACUUM
SCIENCE AND VACUUM TECHNOLOGY 1 REFERENCES 1 6 FURTHER READING 16 2
APPLICATIONS AND SCOPE OFVACUUM TECHNOLOGY 17 REFERENCES 24 3 GAS LAWS
AND KINETIC THEORY OF GASES 25 3.1 DESCRIPTION OFTHE GAS STATE 25 3.1.1
STATE VARIABLES 25 3.1.2 EXTENSIVE QUANTITIES 29 3.1.3 EQUATION OF STATE
OF AN IDEAL GAS 31 3.1.4 MIXTURES OF DIFFERENT GAS SPECIES 33 3.2
KINETIC THEORY OF GASES 34 3.2.1 MODEL CONCEPTIONS 34 3.2.2 WALL
PRESSURE DUE TO IMPACTING PARTICLES 35 3.2.3 MAXWELL-BOLTZMANN VELOCITY
DISTRIBUTION 37 3.2.4 COLLISION RATE AND EFFUSION 40 3.2.5 SIZE OF GAS
PARTICLES AND FREE PATH 41 3.3 TRANSPORT PROPERTIES OF GASES 45 3.3.1
PRESSURE DEPENDENCE 45 3.3.2 TRANSPORT OF FRICTIONAL FORCES IN GASES AND
VISCOSITY 47 3.3.3 TRANSPORT OFHEAT IN GASES AND THERMAL CONDUCTIVITY 51
BIBLIOGRAFISCHE INFORMATIONEN HTTP://D-NB.INFO/988248751 DIGITALISIERT
DURCH VI CONTENTS 3.5 VAPORS 71 3.5.1 SATURATION VAPOR PRESSURE 72 3.5.2
EVAPORATION RATE 74 REFERENCES 77 4 GAS FLOW 79 4.1 TYPES OF FLOW,
DEFINITIONS 79 4.1.1 CHARACTERIZING FLOW, KNUDSEN NUMBER, REYNOLDS
NUMBER 79 4.1.2 GAS FLOW, THROUGHPUT, PUMPING SPEED 83 4.1.3 FLOW
RESISTANCE, FLOW CONDUCTANCE 87 4.1.4 EFFECTIVE PUMPING SPEED OFAVACUUM
PUMP 88 4.2 INVISCID VISCOUS FLOW, GAS DYNAMICS 90 4.2.1 CONSERVATION
LAWS 90 4.2.2 GRADUAL CHANGE OF CROSS-SECTIONAL AREA: ISENTROPIC CHANGE
OF STATE 91 4.2.3 CRITICAL FLOW 94 4.2.4 CHOKED FLOW AT LOW OUTLET
PRESSURE 96 4.2.5 CONTRACTION OF FLOW INTO APERTURE AND TUBE 98 4.2.6
EXAMPLES OF NOZZLE FLOW 98 4.2.7 STRAIGHT AND OBLIQUE COMPRESSION SHOCKS
102 4.2.8 LAVAL NOZZLE, EFNUENT FLOW AGAINST COUNTERPRESSURE 105 4.2.9
FLOW AROUND A CORNER (PRANDTL-MEYER FLOW) 107 4.3 FRICTIONAL-VISCOUS
FLOW THROUGH A TUBE 110 4.3.1 LAMINAR AND TURBULENT FLOW THROUGH A TUBE
110 4.3. CONTENTS VII 4.5 FLOW THROUGHOUT THE ENTIRE PRESSURE RANGE 147
4.5.1 FLOW RANGES 147 4.5.2 FLOW THROUGH A THIN APERTURE WITH CIRCULAR
CROSS SECTION 147 4.5.3 FLOW THROUGH A LONG TUBE WITH CIRCULAR CROSS
SECTION 150 4.6 FLOW WITH TEMPERATURE DIFFERENCE, TRIERMAL EFFUSION,
TRANSPIRATION 154 4.7 MEASURING FLOW CONDUCTANCES 158 4.7.1 NECESSITYOF
MEASUREMENT 158 4.7.2 MEASUREMENT OF INTRINSIC CONDUCTANCES (INHERENT
CONDUCTANCES) 158 4.7.3 CALCULATION OF REDUCED CONDUCTANCE (ASSEMBLY
CONDUCTANCE) 160 4.7.4 MEASURING REDUCED CONDUCTANCES 160 REFERENCES 162
FURTHER READING 162 5 ANALYTICAL AND NUMERICAL CALCULATIONS OF RAREFIED
GAS FLOWS 263 5.1 MAINCONCEPTS 163 5.1.1 KNUDSEN NUMBER AND GAS
RAREFACTION 263 5.1.2 MACROSCOPIC QUANTITIES 164 5.1.3 VELOCITY
DISTRIBUTION FUNCTION 164 5.1.4 GLOBAL EQUILIBRIUM 265 5.1.5 LOCAL
EQUILIBRIUM 266 5.1.6 BOLTZMANN EQUATION 266 5.1.7 TRANSPORT
COEFFICIENTS 268 5.1.8 MODEL EQUATIONS 270 5.1. VIII CONTENTS 5.5.4
TRANSITIONAL REGIME 197 5.5.5 ARBITRARY PRESSURE AND TEMPERATURE DROPS
202 5.5.6 VARIABLE CROSS SECTION 206 5.5.7 THERMO-MOLECULAR PRESSURE
RATIO 208 5.6 FLOW THROUGH AN ORIFICE 211 5.7 MODELING OF HOLWECK PUMP
213 REFERENCES 218 6 SORPTION AND DIFFUSION 222 6.1 SORPTION PHENOMENA
AND THE CONSEQUENCES, DEFINITIONS AND TERMINOLOGY 221 6.2 ADSORPTION AND
DESORPTION KINETICS 226 6.2.1 ADSORPTION RATE 226 6.2.2 DESORPTION RATE
227 6.2.3 HOBSON MODEL OFA PUMP-DOWN CURVE 228 6.2.4 MONOLAYER
ADSORPTION ISOTHERMS 232 6.2.5 MULTILAYER ADSORPTION AND
BRUNAUER-EMMETT-TELLER (BET) ISOTHERM 234 6.2.6 MONOLAYER TIME 236 6.3
ABSORPTION, DIFFUSION, AND OUTGASSING 237 6.4 PERMEATION 243 REFERENCES
245 FURTHER READING 245 7 POSITIVE DISPLACEMENT PUMPS 247 7.1
INTRODUCTION AND OVERVIEW 247 CONTENTS IX 7.3 SINGLE-SHAFT ROTATING
POSITIVE DISPLACEMENT PUMPS 265 7.3.1 LIQUID RING VACUUM PUMPS 265
7.3.1.1 DESIGN AND PRINCIPLEOF OPERATION 265 7.3.1.2 OPERATING
PROPERTIES AND DIMENSIONING 267 7.3.1.3 DESIGNS 270 7.3.1.4 PUMP UNITS
WITH LIQUID RING VACUUM PUMPS 272 7.3.1.5 SUGGESTIONS FOR ECONOMICAL
OPERATION 275 7.3.2 SLIDING VANE ROTARY PUMPS 277 7.3.2.1 OPERATING
PRINCIPLE AND DESIGN 277 7.3.2.2 DRY RUNNING SLIDING VANE ROTARY PUMPS
278 7.3.2.3 OIL-LUBRICATED SLIDING VANE ROTARY PUMPS 279 7.3.2.4
ONCE-THROUGH LUBRICATED SLIDING VANE ROTARY PUMPS 282 7.3.2.5 OPERATING
BEHAVIOR AND RECOMMENDATIONS 282 7.3.2.6 CHARACTERISTIC CURVES AND
RATINGS 284 7.3.3 ROTARY PLUNGER PUMPS 286 7.3.3.1 PRINCIPLE OF
OPERATION AND TECHNICAL DESIGN 286 7.3.3.2 A COMPARISON OF SLIDING VANE
ROTARY PUMPS AND ROTARY PLUNGER PUMPS 289 7.3.4 TROCHOIDAL PUMPS 290
7.3.5 SCROLL PUMPS 291 7.3.5. X I CONTENTS 7.5 SPECIFIC PROPERTIES OF
OIL-SEALED POSITIVE DISPLACEMENT PUMPS 323 7.5.1 PUMPING SPEED AND
PRODUCIBLE ULTIMATE PRESSURE 323 7.5.1.1 PUMPING SPEED AND ULTIMATE
PARTIAL PRESSURE 323 7.5.1.2 ULTIMATE PRESSURE AND OIL SELECTION 325
7.5.2 OIL BACKFLOW 328 7.6 BASICS OF POSITIVE DISPLACEMENT PUMPS 329
7.6.1 PUMPING DOWN VAPORS - GAS BALLAST 329 7.6.2 POWER REQUIREMENTS 333
7.6.2.1 ISOTHERMAL COMPRESSION 334 7.6.2.2 ADIABATIC COMPRESSION 334
7.6.2.3 POLYTROPIC COMPRESSION 335 7.6.2.4 COMPRESSION POWER 335 7.7
OPERATING AND SAFETY RECOMMENDATIONS 337 7.7.1 INSTALLATION 337 7.7.2
STARTING AND SHUT DOWN, INLET VALVES 338 7.7.3 PUMP SELECTION AND
OPERATING RECOMMENDATIONS 339 7.7.4 TECHNICAL SAFETY RECOMMENDATIONS 340
7.8 SPECIFIC ACCESSORIES FOR POSITIVE DISPLACEMENT PUMPS 342 7.8.1
SORPTION TRAPS 342 7.8.2 SAFETY VALVES 343 CONTENTS XI 9 JET AND
DIFFUSION PUMPS 375 9.1 INTRODUCTION, OVERVIEW 375 9.2 LIQUID JET VACUUM
PUMPS 377 9.3 STEAM JET VACUUM PUMPS 379 9.3.1 DESIGN AND FUNCTION 379
9.3.2 PERFORMANCE DATA, OPERATING BEHAVIOR, AND CONTROL 381 9.3.3
MULTISTAGE STEAM JET VACUUM PUMPS 384 9.3.4 ORGANIC VAPORS AS DRIVING
PUMP FLUIDS 387 9.4 DIFFUSION PUMPS 388 9.4.1 DESIGN AND PRINCIPLE OF
OPERATION 388 9.4.2 PUMP FLUIDS 393 9.4.3 BAFFLES AND VAPOR TRAPS 394
9.4.4 FRACTIONATING AND DEGASSING 395 9.4.5 OPERATING SUGGESTIONS 397
9.4.6 PUMPING SPEED, CRITICAL BACKING PRESSURE, HYBRID PUMPS 397 9.4.7
CALCULATING PERFORMANCE CHARACTERISTICS OF DIFFUSION AND VAPOR JET PUMPS
BY USING A SIMPLE PUMP MODEL 400 9.5 DIFFUSION PUMPS VERSUS VAPOR JET
PUMPS 408 REFERENCES 410 FURTHER READING ON POSITIVE DISPLACEMENT PUMPS
411 10 MOLECULAR AND TURBOMOLECULAR PUMPS 423 10.1 INTRODUCTION 413 XII
CONTENTS 10.4.7.3 MAGNETIC BEARINGS 437 10.4.8 DRIVES AND HANDLING 439
10.4.9 PERFORMANCE CHARACTERISTICS 440 10.4.9.1 PUMPING SPEED 440
10.4.9.2 COMPRESSION RATIO, ULTIMATE PRESSURE, BASE PRESSURE 442
10.4.9.3 PUMP-DOWN TIMES FOR VACUUM CHAMBERS 442 10.4.9.4 PUMPING OF
HIGH GAS THROUGHPUTS 444 10.4.10 OPERATION AND MAINTENANCE 445 10.4.10.1
BACKING PUMP SELECTION 445 10.4.10.2 GENERAL NOTES 446 10.4.10.3
START-UP 446 10.4.10.4 OBTAINING BASE PRESSURE 446 10.4.10.5 OPERATION
IN MAGNETIC FIELDS 446 10.4.10.6 VENTING 446 10.4.10.7 MAINTENANCE 447
10.4.11 APPLICATIONS 448 REFERENCES 450 11 SORPTION PUMPS 453 11.1
INTRODUCTION 453 11.2 ADSORPTION PUMPS 455 11.2.1 WORKING PRINCIPLE 455
11.2.2 DESIGN 457 11.2.3 ULTIMATE VACUUM AND PUMPING SPEED 458 11.2.3.1
ULTIMATE PRESSURE WITH A SINGLE ADSORPTION PUMP 458 11.2.3.2 ULTIMATE
PRESSURE WITH TWO OR MORE ADSORPTION PUMPS 459 CONTENTS XIII 11.4.2
TECHNICAL DESIGN (DIODE TYPE) 487 11.4.3 PUMPING SPEED 487 11.4.4 THE
DIFFERENTIAL ION PUMP 490 11.4.5 TRIODE PUMPS 492 11.4.6 DISTRIBUTED ION
PUMPS 494 11.4.7 RESIDUAL GAS SPECTRUM 494 11.4.8 OPERATION 495 11.5
ORBITRON PUMPS 496 REFERENCES 498 FURTHER READING 499 12 CRYOTECHNOLOGY
AND CRYOPUMPS 502 12.1 INTRODUCTION 502 12.2 METHODS OF REFRIGERATION
502 12.2.1 CONCEPTS AND FUNDAMENTAL LAWS OFTHERMODYNAMICS 502 12.2.2
SPECIAL COOLING PROCESSES 505 12.2.2.1 JOULE-THOMSON EXPANSION, LINDE
PROCESS 505 12.2.2.2 EXPANSION ENGINES 507 12.2.2.3 CLAUDE PROCESS 508
12.2.2.4 STIRLING PROCESS 509 12.2.2.5 GIFFORD-MCMAHON PROCESS 510
12.2.2.6 GENERAL CHARACTERISTICS OF REFRIGERATING SYSTEMS 511 12.2.2.7
LOW-TEMPERATURE MEASUREMENT 523 12.3 CRYOSTAT TECHNOLOGY 513 12.3.1
CRYOSTATS 513 12.3.2 VACUUM-INSULATED DUCTS 517 XIV CONTENTS 12.4.3
DESIGNS 541 12.4.3.1 BATH CRYOPUMPS 542 12.4.3.2 EVAPORATOR CRYOPUMPS
543 12.4.3.3 CRYOPUMPS WITH REFRIGERATING MACHINES (REFRIGERATOR
CRYOPUMPS) 544 12.4.3.4 EXAMPLES OF APPLICATIONS 548 12.4.3.5 CRYOPUMPS
IN NUCLEAR FUSION TECHNOLOGY 548 12.4.3.6 CRYOPUMPS IN AEROSPACE
TECHNOLOGY 548 12.4.3.7 CRYOPUMPS IN PARTICLE ACCELERATORS 550 12.4.3.8
CRYOPUMPS IN INDUSTRIAL SYSTEMS 550 12.4.3.9 CRYOPUMPS FOR UHV SYSTEMS
551 12.4.4 DEVELOPMENT TRENDS FOR CRYOPUMPS 552 REFERENCES 553 13 TOTAL
PRESSURE VACUUM GAUGES 555 13.1 INTRODUCTION 555 13.2 MECHANICAL VACUUM
GAUGES 556 13.2.1 PRINCIPLE AND CLASSIFICATION 556 13.2.2
CORRUGATED-DIAPHRAGM VACUUM GAUGES 557 13.2.3 CAPSULE ELEMENT VACUUM
GAUGES (MEASURING RANGE LKPA-LOOKPA) 558 13.2.4 BOURDON TUBE VACUUM
GAUGES (MEASURING RANGE LKPA-LOOKPA) 559 13.2.4.1 QUARTZ BOURDON TUBE
VACUUM GAUGES 560 13.2. CONTENTS XV 13.5 THERMAL CONDUCTIVITY VACUUM
GAUGES 583 13.5.1 PRINCIPLE 583 13.5.2 THERMAL CONDUCTIVITY VACUUM
GAUGES WITH CONSTANT WIRE TEM- PERATURE 587 13.5.3 THERMAL CONDUCTIVITY
VACUUM GAUGES WITH CONSTANT HEATING 590 13.5.4 THERMOCOUPLE VACUUM
GAUGES 592 13.5.5 THERMISTORS 593 13.5.6 GUIDELINES FOR OPERATING
THERMAL CONDUCTIVITY VACUUM GAUGES 593 13.6 THERMAL MASS FLOWMETERS 594
13.7 IONIZATION GAUGES 596 13.7.1 PRINCIPLE AND CLASSIFICATION 596
13.7.2 HISTORYOF IONIZATION GAUGES 597 13.7.3 EMITTING-CATHODE
IONIZATION GAUGES (HOT-CATHODE IONIZATION GAUGES) 599 13.7.3.1
MEASUREMENT PRINCIPLE 599 13.7.3.2 DESIGN OF EMITTING-CATHODE IONIZATION
GAUGES (HOT-CATHODE IONIZATION GAUGES) 603 13.7.3.3 CONCENTRIC TRIODE
604 13.7.3.4 FINE-VACUUM IONIZATION GAUGES 604 13.7.3.5 BAYARD-ALPERT
IONIZATION GAUGES 605 13.7.3.6 EXTRACTOR IONIZATION GAUGES 610 13.7.3.7
ADDITIONAL TYPES OF EMITTING-CATHODE IONIZATION GAUGES 623 13.7.3. XVI
CONTENTS 14.2.4 MASS ANALYZERS 643 14.2.4.1 QUADRUPOLE MASS ANALYZERS
644 14.2.4.2 MINIATURIZED QUADRUPOLE MASS ANALYZERS 648 14.2.4.3
MAGNETIC SECTOR ANALYZERS 649 14.2.5 ION DETECTORS 653 14.2.5.1
FARADAYCUPS 653 14.2.5.2 SECONDARY ELECTRON MULTIPLIER DETECTION 654
14.2.5.3 DISCRETE DYNODE ELECTRON MULTIPLIERS 655 14.2.5.4 CONTINUOUS
DYNODE ELECTRON MULTIPLIERS (CDEM) 656 14.2.5.5 MICROCHANNEL PLATE
DETECTORS 657 14.2.6 SOFTWARE FOR MASS SPECTROMETER CONTROL 658 14.2.6.1
ANALOG SCAN, ION CURRENT VERSUS MASS 658 14.2.6.2 SELECTED PEAKS, ION
CURRENT VERSUS TIME 659 14.2.6.3 LEAK DETECTION MODE 659 14.2.7 FURTHER
APPLICATIONS OF MASS SPECTROMETERS 659 14.3 PARTIAL PRESSURE MEASUREMENT
USING OPTICAL METHODS 659 14.4 LEAK DETECTORS 662 14.4.1 BASIC
PRINCIPLES AND HISTORICAL OVERVIEW 662 14.4.2 HELIUM LEAK DETECTORS 663
14.4.2.1 REQUIREMENTS AND GENERAL FUNCTIONS OFVACUUM LEAK DETECTION 663
14.4.2.2 HELIUM SECTOR FIELD MASS SPECTROMETERS 664 14.4.2.3 INLET
PRESSURE OF HELIUM LEAK DETECTORS 665 CONTENTS XVII 15 CALIBRATIONS AND
STANDARDS 685 15.1 INTRODUCTION 685 15.2 CALIBRATION OFVACUUM GAUGES 688
15.2.1 PRIMARY STANDARDS 688 15.2.1.1 LIQUID MANOMETERS 689 15.2.1.2
COMPRESSION MANOMETER AFTER MCLEOD 692 15.2.1.3 PISTON GAUGES AND
PRESSURE BALANCES 695 15.2.1.4 STATIC EXPANSION METHOD 698 15.2.1.5
CONTINUOUS EXPANSION METHOD 703 15.2.1.6 OTHER PRIMARY STANDARDS 709
15.2.2 CALIBRATION BY COMPARISON 710 15.2.3 CAPACITANCE DIAPHRAGM GAUGES
72 2 15.2.4 SPINNING ROTOR GAUGES 716 15.2.5 IONIZATION GAUGES 718 15.3
CALIBRATIONS OF RESIDUAL GAS ANALYZERS 720 15.4 CALIBRATION OF TEST
LEAKS 723 15.5 STANDARDS FOR DETERMINING CHARACTERISTICS OFVACUUM PUMPS
726 REFERENCES 729 16 MATERIALS 733 16.1 REQUIREMENTS AND OVERVIEW OF
MATERIALS 733 16.2 MATERIALS FOR VACUUM TECHNOLOGY 734 16.2.1 METALS 734
16.2.1.1 THE MOST IMPORTANT METALS AND METAL ALLOYS 735 XVIII CONTENTS
16. 16. 16. 16. 16. 16. 16. 3.2 3.2.1 3.2.2 3.2.3 3.3 .3.3.1 .3.3.2
16.3.3.3 16 16 .3.3.4 .3.3.5 GAS PERMEABILITY 751 GAS PERMEABILITY OF
METALS 752 GAS PERMEABILITY OF GLASSES AND CERAMICS 753 GAS PERMEABILITY
OF PLASTICS 754 GAS EMISSIONS 756 BASICS 756 SATURATION VAPOR PRESSURE
(SEE ALSO SECTION 3.5.1) 756 SURFACE DESORPTION, GAS DIFFUSION FROM BULK
MATERIAL, REFERENCE VALUES FOR GAS EMISSIONS 758 GAS DIFFUSION FROM BULK
MATERIAL 758 REFERENCE VALUES FOR TOTAL GAS EMISSION RATES 762
REFERENCES 762 FURTHER READING 763 17 VACUUM COMPONENTS AND SEALS 765
17.1 INTRODUCTION 765 17.2 PERMANENT CONNECTIONS 765 17.2.1 WELDED
JOINTS 766 17.2.1.1 TIG (TUNGSTEN INERT-GAS) WELDING 766 17.2.1.2
MICRO-PLASMA WELDING, ELECTRON-BEAM WELDING, FRICTION WELDING 767 17.2.2
BRAZED JOINTS 767 17.2. CONTENTS XIX 17.4.2 DOUBLE-WALLED VESSELS 784
17.5 FLEXIBLE JOINTS 785 17.6 FEEDTHROUGHS 787 17.6.1 FEEDTHROUGHS FOR
MOTION AND MECHANICAL ENERGY 787 17.6.1.1 FEEDTHROUGHS FOR LINEAR MOTION
787 17.6.1.2 FEEDTHROUGHS FOR ROTARY MOTION 788 17.6.1.3 MANIPULATORS
788 17.6.2 ELECTRICAL FEEDTHROUGHS 789 17.6.2.1 PLASTIC FEEDTHROUGHS 789
17.6.2.2 CERAMIC FEEDTHROUGHS 790 17.6.3 FEEDTHROUGHS FOR LIQUIDS AND
GASES 792 17.6.3.1 WINDOWS 793 17.6.4 LUBRICATION UNDER VACUUM 793 17.7
VALVES 795 17.7.1 BASICS 795 17.7.1.1 DESIGN, DIMENSIONING, AND
REQUIREMENTS 796 17.7.1.2 CLASSIFICATION (TERMS) 796 17.7.1.3 ACTUATION
796 17.7.1.4 SEALING OF VALVES AND MATERIALS 797 17.7.2 CORNER VALVES
797 17.7.3 STRAIGHT-WAY VALVES 798 17.7 .4 SLIDING VALVES 800 17.7.5 GAS
DOSING VALVES 802 17.8 MANUFACTURING AND SURFACE TREATMENT OFVACUUM
COMPONENTS 802 17.8.1 MACHINING TECHNIQUES 802 XX CONTENTS 18.1.2.2
ASCII PROTOCOLS 814 18.1.2.3 STANDARDIZED BUS SYSTEMS 815 18.1.2.4
SENSOR INTEGRATION ACCORDING TO SECS AND HSMS STANDARDS 816 18.1.3
PROCESS-DATA ANALYSIS 818 18.2 GENERAL GUIDELINES FOR ULTIMATE AND
WORKING PRESSURES 820 18.2.1 ULTIMATE PRESSURE P U IT AND ULTIMATE
WORKING PRESSURE P WULT OF A VACUUM PUMP 820 18.2.2 ULTIMATE PRESSURE P
U I T S OF A VACUUM APPARATUS OR SYSTEM 820 18.2.3 WORKING PRESSURE 821
18.2.4 WORKING PRESSURE DETERMINED BY PROCESS GAS FLOW 822 18.2.5
WORKING PRESSURE DETERMINED BY EVAPORATING SUBSTANCES 823 18.2.6 WORKING
PRESSURE DETERMINED BY OUTGASSING (COMPARE CHAPTER 6 AND SECTION 16.3)
826 18.2.7 WORKING PRESSURE DETERMINED BY PERMEATION GAS FLOW (COMPARE
SECTION 16.3.2) 826 18.2.8 WORKING PRESSURE DETERMINED BY LEAKAGE GAS
FLOW 827 18.3 TECHNIQUES FOR OPERATING LOW-VACUUM SYSTEMS (LOLKPA-LOOPA)
827 18.3.1 OVERVIEW 827 18.3.2 ASSEMBLYOF LOW-VACUUM SYSTEMS 829
CONTENTS XXI 18.6 TECHNIQUES FOR OPERATING ULTRAHIGH-VACUUM SYSTEMS (P
10" 5 PA, 10"" MBAR) 862 18.6.1 OVERVIEW 862 18.6.2 DESIGN OFUHV SYSTEMS
863 18.6.3 OPERATING GUIDELINES FOR UHV PUMPS 864 18.6.3.1 ADSORPTION
PUMPS 864 18.6.3.2 ION GETTER PUMPS 865 18.6.3.3 TITANIUM EVAPORATION
PUMPS 866 18.6.3.4 TURBOMOLECULAR PUMPS 867 18.6.3.5 CRYOPUMPS 867
18.6.3.6 BULK GETTER (NEG) PUMPS 867 18.6.4 PRESSURE MEASUREMENT 868
18.6.5 PUMP-DOWN TIMES, ULTIMATE PRESSURE. AND EVACUATING PROCEDURES 868
18.6.6 VENTING 869 18.6.7 ULTRAHIGH-VACUUM SYSTEMS 869 18.6.8
ULTRAHIGH-VACUUM (UHV) COMPONENTS 869 18.6.9 ULTRAHIGH-VACUUM (UHV) PUMP
STANDS 870 18.6.9.1 LARGE ULTRAHIGH-VACUUM (UHV) FACILITIES 873
REFERENCES 875 19 METHODS OF LEAK DETECTION 877 19.1 OVERVIEW 877 19.1.1
VACUUM LEAK DETECTION 877 19.1.2 OVERPRESSURE LEAK DETECTION 878 19.1.3
SEARCH GAS DISTRIBUTION IN THE ATMOSPHERE IN FRONT OF A LEAK 879 19.1.4
MEASUREMENT RESULTS WITH THE SNIFFING METHOD 880 XXII CONTENTS 19.3
OVERVIEW OF LEAK DETECTION METHODS (SEE ALSO DIN EN 1779) 889 19.3.1
GENERAL GUIDELINES FOR TIGHTNESS TESTING 889 19.3.2 METHODS WITHOUT
SEARCH GAS (PRESSURE TESTING) 890 19.3.2.1 INTRODUCTION 890 19.3.2.2
PRESSURE LOSS MEASUREMENT 891 19.3.2.3 PRESSURE RISE MEASUREMENT 892
19.3.2.4 ADDITIONAL METHODS 893 19.3.3 SEARCH GAS METHODS WITHOUT HELIUM
894 19.3.3.1 BASICS 894 19.3.3.2 VACUUM LEAK DETECTION WITH NON-HELIUM
SEARCH GAS 894 19.3.3.3 OVERPRESSURE LEAK DETECTION WITH SEARCH GASES
OTHER THAN HELIUM 896 19.4 LEAK DETECTION USING HELIUM LEAK DETECTORS
896 19.4.1 PROPERTIES OF HELIUM LEAK DETECTORS 896 19.4.2 TESTING OF
COMPONENTS 897 19.4.2.1 TESTING PROCEDURE, INTEGRAL TESTING 897 19.4.2.2
PROCEDURE FOR LEAK LOCALIZATION 899 19.4.3 TESTING OFVACUUM SYSTEMS 901
19.4.3.1 GENERAL CONSIDERATIONS FOR PARTIAL FLOW OPERATION 901 19.4.3.2
POINTS ON SYSTEMS FOR CONNECTING LEAK DETECTORS 902 19.4.3. CONTENTS
XXIII 20 APPENDIX 915 20.A TABLES 915 20.B DIAGRAMS 950 20.C COMMON
ABBREVIATIONS 965 20.D QUANTITIES AND UNITS 966 20.E GLOSSAR) 7 ,
SYMBOLS OF PHYSICAL QUANTITIES AND THEIR SI UNITS USED IN THIS BOOK 968
INDEX 977 DIRECTORY OF PRODUCTS AND SUPPLIERS 997 |
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| dewey-sort | 3621.55 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Maschinenbau / Maschinenwesen Maschinenbau |
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| spelling | Handbuch Vakuumtechnik Handbook of vacuum technology ed. by Karl Jousten. Transl. by C. Benjamin Nakhosteen Weinheim Wiley-VCH 2008 XXVIII, 1002 S. Ill., graph. Darst. 25 cm 1 Beil. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Vakuumpumpe (DE-588)4127061-7 gnd rswk-swf Vakuumtechnik (DE-588)4062270-8 gnd rswk-swf 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content 2\p (DE-588)4123623-3 Lehrbuch gnd-content Vakuumtechnik (DE-588)4062270-8 s DE-604 Vakuumpumpe (DE-588)4127061-7 s Jousten, Karl 1960- Sonstige (DE-588)132075555 oth text/html http://deposit.dnb.de/cgi-bin/dokserv?id=3089572&prov=M&dok_var=1&dok_ext=htm Inhaltstext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017151530&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of vacuum technology Vakuumpumpe (DE-588)4127061-7 gnd Vakuumtechnik (DE-588)4062270-8 gnd |
| subject_GND | (DE-588)4127061-7 (DE-588)4062270-8 (DE-588)4143413-4 (DE-588)4123623-3 |
| title | Handbook of vacuum technology |
| title_alt | Handbuch Vakuumtechnik |
| title_auth | Handbook of vacuum technology |
| title_exact_search | Handbook of vacuum technology |
| title_full | Handbook of vacuum technology ed. by Karl Jousten. Transl. by C. Benjamin Nakhosteen |
| title_fullStr | Handbook of vacuum technology ed. by Karl Jousten. Transl. by C. Benjamin Nakhosteen |
| title_full_unstemmed | Handbook of vacuum technology ed. by Karl Jousten. Transl. by C. Benjamin Nakhosteen |
| title_short | Handbook of vacuum technology |
| title_sort | handbook of vacuum technology |
| topic | Vakuumpumpe (DE-588)4127061-7 gnd Vakuumtechnik (DE-588)4062270-8 gnd |
| topic_facet | Vakuumpumpe Vakuumtechnik Aufsatzsammlung Lehrbuch |
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