APA (7th ed.) Citation

Micro-process engineering: A comprehensive handbook. Wiley-VCH.

Chicago Style (17th ed.) Citation

Micro-process Engineering: A Comprehensive Handbook. Weinheim: Wiley-VCH.

MLA (9th ed.) Citation

Micro-process Engineering: A Comprehensive Handbook. Wiley-VCH.

Warning: These citations may not always be 100% accurate.