MEMS vibratory gyroscopes: structural approaches to improve robustness
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| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York, NY
Springer
2009
|
| Series: | MEMS reference shelf
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XII, 256 S. Ill., graph. Darst. |
| ISBN: | 9780387095356 |
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MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV035125716 | ||
| 003 | DE-604 | ||
| 005 | 20090408 | ||
| 007 | t | ||
| 008 | 081028s2009 gw ad|| |||| 00||| eng d | ||
| 015 | |a 08,N29,0821 |2 dnb | ||
| 016 | 7 | |a 989383687 |2 DE-101 | |
| 020 | |a 9780387095356 |c Gb. : ca. EUR 93.04 (freier Pr.), ca. sfr 144.50 (freier Pr.) |9 978-0-387-09535-6 | ||
| 024 | 3 | |a 9780387095356 | |
| 028 | 5 | 2 | |a 12199969 |
| 035 | |a (OCoLC)254636686 | ||
| 035 | |a (DE-599)DNB989383687 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c XA-DE-BE | ||
| 049 | |a DE-703 | ||
| 084 | |a ZN 3750 |0 (DE-625)157334: |2 rvk | ||
| 084 | |a 620 |2 sdnb | ||
| 100 | 1 | |a Acar, Cenk |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a MEMS vibratory gyroscopes |b structural approaches to improve robustness |c Cenk Acar and Andrei Shkel |
| 264 | 1 | |a New York, NY |b Springer |c 2009 | |
| 300 | |a XII, 256 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a MEMS reference shelf | |
| 650 | 0 | 7 | |a Mannigfaltigkeit |0 (DE-588)4037379-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Bordismengruppe |0 (DE-588)4146315-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Schwingungsverhalten |0 (DE-588)4180569-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Periodische Abbildung |0 (DE-588)4173777-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Differenzierbare Mannigfaltigkeit |0 (DE-588)4012269-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Differenzierbare periodische Abbildung |0 (DE-588)4149804-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Differenzierbare Abbildung |0 (DE-588)4149802-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Differenzierbarkeit |0 (DE-588)4149807-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Gyroskop |0 (DE-588)4158614-1 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a MEMS |0 (DE-588)4824724-8 |D s |
| 689 | 0 | 1 | |a Schwingungsverhalten |0 (DE-588)4180569-0 |D s |
| 689 | 0 | 2 | |a Gyroskop |0 (DE-588)4158614-1 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Periodische Abbildung |0 (DE-588)4173777-5 |D s |
| 689 | 1 | 1 | |a Differenzierbarkeit |0 (DE-588)4149807-0 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Differenzierbare Mannigfaltigkeit |0 (DE-588)4012269-4 |D s |
| 689 | 2 | 1 | |a Bordismengruppe |0 (DE-588)4146315-8 |D s |
| 689 | 2 | |5 DE-604 | |
| 689 | 3 | 0 | |a Periodische Abbildung |0 (DE-588)4173777-5 |D s |
| 689 | 3 | 1 | |a Mannigfaltigkeit |0 (DE-588)4037379-4 |D s |
| 689 | 3 | |5 DE-604 | |
| 689 | 4 | 0 | |a Differenzierbare Abbildung |0 (DE-588)4149802-1 |D s |
| 689 | 4 | |5 DE-604 | |
| 689 | 5 | 0 | |a Differenzierbare periodische Abbildung |0 (DE-588)4149804-5 |D s |
| 689 | 5 | |5 DE-604 | |
| 700 | 1 | |a Shkel, Andrei M. |e Verfasser |4 aut | |
| 856 | 4 | 2 | |m Digitalisierung UB Bayreuth |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016793304&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-016793304 | ||
Record in the Search Index
| _version_ | 1804138105710575616 |
|---|---|
| adam_text | Contents
Part I Fundamentals of Micromachined Vibratory Gyroscopes
1
Introduction
................................................... 3
1.1
The Coriolis Effect
......................................... 3
1.2
Gyroscopes
................................................ 4
1.3
The MEMS Technology
..................................... 5
.4
Micromachined Vibratory Rate Gyroscopes
..................... 6
.5
Applications of MEMS Gyroscopes
........................... 8
.6
Gyroscope Performance Specifications
......................... 8
.7
A Survey of Prior Work on MEMS Gyroscopes
................. 10
.8
The Robustness Challenge
................................... 14
1.9
Inherently Robust Systems
................................... 15
1.10
Overview
................................................. 16
Fundamentals of Micromachined Gyroscopes
..................... 17
2.1
Dynamics of Vibratory Rate Gyroscopes
....................... 17
2.1.1
Linear Gyroscope Dynamics
........................... 17
2.1.2
Torsionai
Gyroscope Dynamics
........................ 22
2.2
Resonance Characteristics
................................... 25
2.3
Drive-Mode Operation
...................................... 28
2.4
The Coriolis Response
...................................... 29
2.4.1
Mode-Matching and A
ƒ .............................. 32
2.4.2
Phase Relations and Proof-Mass Trajectory
.............. 36
2.5
Summary
................................................. 42
Fabrication Technologies
........................................ 43
3.1
Microfabrication Techniques
................................. 43
3.1.1
Photolithography
.................................... 44
3.1.2
Deposition
.......................................... 46
3.1.3
Etching
............................................ 48
3.1.4
Wafer Bonding
...................................... 51
Contents
3.2
Bulk Micromachining Processes
.............................. 52
3.2.1 SOI-Based
Bulk
Micromachining ...................... 53
3.2.2 Silicon-on-Glass
Bulk
Micromachining.................. 56
3.3 Surface-Micromachining
Processes
........................... 59
3.4
Combined Surface-Bulk
Micromachining...................... 63
3.5 CMOS Integration.......................................... 64
3.5.1 Hybrid Integration................................... 64
3.5.2
Monolithic
Integration................................ 65
3.6
Packaging
................................................. 67
3.6.1
Wafer-Level Packaging
............................... 68
3.6.2
Vacuum Packaging
................................... 69
3.7
Summary
................................................. 71
Mechanical Design of MEMS Gyroscopes
......................... 73
4.1
Mechanical Structure Designs
................................ 73
4.2
Linear Vibratory Systems
.................................... 74
4.2.1
Linear Suspension Systems
............................ 75
4.2.2
Linear Flexure Elements
.............................. 83
4.3
Torsionai
Vibratory Systems
................................. 87
4.3.1
Torsionai
Suspension Systems
......................... 88
4.3.2
Torsionai
Flexure Elements
............................ 90
4.4
Anisoelasticity and Quadrature Error
.......................... 93
4.4.1
Quadrature Compensation
.............................100
4.5
Damping
..................................................102
4.5.1
Viscous Damping
....................................102
4.5.2
Viscous Anisodamping
...............................104
4.5.3
Intrinsic Structural Damping
...........................105
4.6
Material Properties of Silicon
................................107
4.7
Design for Robustness
......................................108
4.7.1
Yield
..............................................108
4.7.2
Vibration Immunity
..................................109
4.7.3
Shock Resistance
....................................109
4.7.4
Temperature Effects
..................................109
4.8
Summary
.................................................
ПО
Electrical Design of MEMS Gyroscopes
...........................111
5.1
Introduction
...............................................
Ill
5.2
Basics of
Capacitive
Electrodes
...............................
Ill
5.3
Electrostatic Actuation
......................................113
5.3.1
Variable-Gap Actuators
...............................113
5.3.2
Variable-Area Actuators
..............................114
5.3.3
Balanced Actuation
..................................
П6
5.4
Capacitive
Detection
........................................117
5.4.1
Variable-Gap Capacitors
..............................117
5.4.2
Variable-Area Capacitors
..............................118
Contents
Xl
5.4.3 Differential
Sensing..................................
119
5.5
Capacitance
Enhancement...................................120
5.5.1
Gap Reduction by Fabrication
.........................121
5.5.2
Post-Fabrication Capacitance Enhancement
..............122
5.6
MEMS Gyroscope Testing and Characterization
.................124
5.6.1
Frequency Response Extraction
........................125
5.6.2
Capacitive
Sense-Mode Detection Circuits
...............133
5.6.3
Rate-Table Characterization
...........................138
5.7
Summary
.................................................139
Part II Structural Approaches to Improve Robustness
6
Linear Multi-DOF Architecture
.................................143
6.1
Introduction
...............................................143
6.2
Fundamentals of 2-DOF Oscillators
...........................144
6.3
The 2-DOF Sense-Mode Architecture
.........................149
6.3.1
Gyroscope Dynamics
.................................150
6.3.2
Coriolis Response
....................................151
6.3.3
Illustrative Example
..................................155
6.3.4
Conclusions on the 2-DOF Sense-Mode Architecture
......157
6.4
The 2-DOF Drive-Mode Architecture
..........................158
6.4.1
Gyroscope Dynamics
.................................159
6.4.2
Dynamical Amplification in the Drive-Mode
.............162
6.4.3
Illustrative Example
..................................163
6.4.4
Conclusions on the 2-DOF Drive-Mode Architecture
......165
6.5
The 4-DOF System Architecture
..............................166
6.5.1
The Coriolis Response
................................169
6.5.2
Dynamics of the 4-DOF Gyroscope
.....................170
6.5.3
Parameter Optimization
...............................172
6.5.4
Illustrative Example
..................................177
6.5.5
Conclusions on the 4-DOF System Architecture
..........179
6.6
Demonstration of 2-DOF Oscillator Robustness
.................180
6.7
Summary
.................................................185
7
Torsionai
Multi-DOF Architecture
...............................187
7.1
Introduction
...............................................187
7.2
Torsionai 3-DOF
Gyroscope Structure and Theory of Operation.
... 189
7.2.1
The Coriolis Response
................................191
7.2.2
Gyroscope Dynamics
.................................192
7.2.3
Cross-Axis Sensitivity
................................194
7.3
Illustration of a MEMS Implementation
........................195
7.3.1
Suspension Design
...................................195
7.3.2
Finite Element Analysis
...............................197
7.3.3
Electrostatic Actuation
................................198
7.3.4
Optimization of System Parameters
.....................199
xn
Contents
7.3.5
Sensitivity and Robustness Analyses
....................200
7.4
Experimental Characterization
................................201
7.5
Summary
.................................................206
8
Distributed-Mass Architecture
...................................207
8.1
Introduction
...............................................207
8.2
The Approach
.............................................207
8.2.1
The Coriolis Response
................................210
8.2.2
Wide-Bandwidth Operation for Improving Robustness
.....211
8.3
Theoretical Analysis of the Trade-offs
.........................213
8.4
Illustrative Example
........................................215
8.4.1
Prototype Design
....................................215
8.4.2
Experimental Characterization Results
..................217
8.5
Summary
.................................................224
9
Conclusions and Future Trends
..................................225
9.1
Introduction
...............................................225
9.2
Comparative Analysis of the Presented Concepts
................226
9.2.1
2-DOF Oscillator in the Sense-Mode
....................226
9.2.2
2-DOF Oscillator in the Drive-Mode
....................226
9.2.3
Multiple Drive-Mode Oscillators
.......................227
9.3
Demonstration of Improved Robustness
........................227
9.3.1
Temperature Dependence of Drive and Sense-Modes
......228
9.3.2
Rate-Table Characterization Results
.....................229
9.3.3
Comparison of Response with a Conventional Gyroscope
.. 231
9.4
Scale Factor Trade-off Analysis
...............................232
9.5
Future Trends
..............................................236
9.5.1
Anti-Phase 2-DOF Sense Mode Gyroscope
..............237
9.5.2
2-DOF Sense Mode Gyroscope with Scalable Peak Spacing
242
9.6
Conclusion
................................................245
References
.........................................................247
Index
.............................................................
255
|
| adam_txt |
Contents
Part I Fundamentals of Micromachined Vibratory Gyroscopes
1
Introduction
. 3
1.1
The Coriolis Effect
. 3
1.2
Gyroscopes
. 4
1.3
The MEMS Technology
. 5
.4
Micromachined Vibratory Rate Gyroscopes
. 6
.5
Applications of MEMS Gyroscopes
. 8
.6
Gyroscope Performance Specifications
. 8
.7
A Survey of Prior Work on MEMS Gyroscopes
. 10
.8
The Robustness Challenge
. 14
1.9
Inherently Robust Systems
. 15
1.10
Overview
. 16
Fundamentals of Micromachined Gyroscopes
. 17
2.1
Dynamics of Vibratory Rate Gyroscopes
. 17
2.1.1
Linear Gyroscope Dynamics
. 17
2.1.2
Torsionai
Gyroscope Dynamics
. 22
2.2
Resonance Characteristics
. 25
2.3
Drive-Mode Operation
. 28
2.4
The Coriolis Response
. 29
2.4.1
Mode-Matching and A
ƒ . 32
2.4.2
Phase Relations and Proof-Mass Trajectory
. 36
2.5
Summary
. 42
Fabrication Technologies
. 43
3.1
Microfabrication Techniques
. 43
3.1.1
Photolithography
. 44
3.1.2
Deposition
. 46
3.1.3
Etching
. 48
3.1.4
Wafer Bonding
. 51
Contents
3.2
Bulk Micromachining Processes
. 52
3.2.1 SOI-Based
Bulk
Micromachining . 53
3.2.2 Silicon-on-Glass
Bulk
Micromachining. 56
3.3 Surface-Micromachining
Processes
. 59
3.4
Combined Surface-Bulk
Micromachining. 63
3.5 CMOS Integration. 64
3.5.1 Hybrid Integration. 64
3.5.2
Monolithic
Integration. 65
3.6
Packaging
. 67
3.6.1
Wafer-Level Packaging
. 68
3.6.2
Vacuum Packaging
. 69
3.7
Summary
. 71
Mechanical Design of MEMS Gyroscopes
. 73
4.1
Mechanical Structure Designs
. 73
4.2
Linear Vibratory Systems
. 74
4.2.1
Linear Suspension Systems
. 75
4.2.2
Linear Flexure Elements
. 83
4.3
Torsionai
Vibratory Systems
. 87
4.3.1
Torsionai
Suspension Systems
. 88
4.3.2
Torsionai
Flexure Elements
. 90
4.4
Anisoelasticity and Quadrature Error
. 93
4.4.1
Quadrature Compensation
.100
4.5
Damping
.102
4.5.1
Viscous Damping
.102
4.5.2
Viscous Anisodamping
.104
4.5.3
Intrinsic Structural Damping
.105
4.6
Material Properties of Silicon
.107
4.7
Design for Robustness
.108
4.7.1
Yield
.108
4.7.2
Vibration Immunity
.109
4.7.3
Shock Resistance
.109
4.7.4
Temperature Effects
.109
4.8
Summary
.
ПО
Electrical Design of MEMS Gyroscopes
.111
5.1
Introduction
.
Ill
5.2
Basics of
Capacitive
Electrodes
.
Ill
5.3
Electrostatic Actuation
.113
5.3.1
Variable-Gap Actuators
.113
5.3.2
Variable-Area Actuators
.114
5.3.3
Balanced Actuation
.
П6
5.4
Capacitive
Detection
.117
5.4.1
Variable-Gap Capacitors
.117
5.4.2
Variable-Area Capacitors
.118
Contents
Xl
5.4.3 Differential
Sensing.
119
5.5
Capacitance
Enhancement.120
5.5.1
Gap Reduction by Fabrication
.121
5.5.2
Post-Fabrication Capacitance Enhancement
.122
5.6
MEMS Gyroscope Testing and Characterization
.124
5.6.1
Frequency Response Extraction
.125
5.6.2
Capacitive
Sense-Mode Detection Circuits
.133
5.6.3
Rate-Table Characterization
.138
5.7
Summary
.139
Part II Structural Approaches to Improve Robustness
6
Linear Multi-DOF Architecture
.143
6.1
Introduction
.143
6.2
Fundamentals of 2-DOF Oscillators
.144
6.3
The 2-DOF Sense-Mode Architecture
.149
6.3.1
Gyroscope Dynamics
.150
6.3.2
Coriolis Response
.151
6.3.3
Illustrative Example
.155
6.3.4
Conclusions on the 2-DOF Sense-Mode Architecture
.157
6.4
The 2-DOF Drive-Mode Architecture
.158
6.4.1
Gyroscope Dynamics
.159
6.4.2
Dynamical Amplification in the Drive-Mode
.162
6.4.3
Illustrative Example
.163
6.4.4
Conclusions on the 2-DOF Drive-Mode Architecture
.165
6.5
The 4-DOF System Architecture
.166
6.5.1
The Coriolis Response
.169
6.5.2
Dynamics of the 4-DOF Gyroscope
.170
6.5.3
Parameter Optimization
.172
6.5.4
Illustrative Example
.177
6.5.5
Conclusions on the 4-DOF System Architecture
.179
6.6
Demonstration of 2-DOF Oscillator Robustness
.180
6.7
Summary
.185
7
Torsionai
Multi-DOF Architecture
.187
7.1
Introduction
.187
7.2
Torsionai 3-DOF
Gyroscope Structure and Theory of Operation.
. 189
7.2.1
The Coriolis Response
.191
7.2.2
Gyroscope Dynamics
.192
7.2.3
Cross-Axis Sensitivity
.194
7.3
Illustration of a MEMS Implementation
.195
7.3.1
Suspension Design
.195
7.3.2
Finite Element Analysis
.197
7.3.3
Electrostatic Actuation
.198
7.3.4
Optimization of System Parameters
.199
xn
Contents
7.3.5
Sensitivity and Robustness Analyses
.200
7.4
Experimental Characterization
.201
7.5
Summary
.206
8
Distributed-Mass Architecture
.207
8.1
Introduction
.207
8.2
The Approach
.207
8.2.1
The Coriolis Response
.210
8.2.2
Wide-Bandwidth Operation for Improving Robustness
.211
8.3
Theoretical Analysis of the Trade-offs
.213
8.4
Illustrative Example
.215
8.4.1
Prototype Design
.215
8.4.2
Experimental Characterization Results
.217
8.5
Summary
.224
9
Conclusions and Future Trends
.225
9.1
Introduction
.225
9.2
Comparative Analysis of the Presented Concepts
.226
9.2.1
2-DOF Oscillator in the Sense-Mode
.226
9.2.2
2-DOF Oscillator in the Drive-Mode
.226
9.2.3
Multiple Drive-Mode Oscillators
.227
9.3
Demonstration of Improved Robustness
.227
9.3.1
Temperature Dependence of Drive and Sense-Modes
.228
9.3.2
Rate-Table Characterization Results
.229
9.3.3
Comparison of Response with a Conventional Gyroscope
. 231
9.4
Scale Factor Trade-off Analysis
.232
9.5
Future Trends
.236
9.5.1
Anti-Phase 2-DOF Sense Mode Gyroscope
.237
9.5.2
2-DOF Sense Mode Gyroscope with Scalable Peak Spacing
242
9.6
Conclusion
.245
References
.247
Index
.
255 |
| any_adam_object | 1 |
| any_adam_object_boolean | 1 |
| author | Acar, Cenk Shkel, Andrei M. |
| author_facet | Acar, Cenk Shkel, Andrei M. |
| author_role | aut aut |
| author_sort | Acar, Cenk |
| author_variant | c a ca a m s am ams |
| building | Verbundindex |
| bvnumber | BV035125716 |
| classification_rvk | ZN 3750 |
| ctrlnum | (OCoLC)254636686 (DE-599)DNB989383687 |
| discipline | Maschinenbau / Maschinenwesen Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Maschinenbau / Maschinenwesen Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02883nam a2200697 cb4500</leader><controlfield tag="001">BV035125716</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20090408 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">081028s2009 gw ad|| |||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">08,N29,0821</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">989383687</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780387095356</subfield><subfield code="c">Gb. : ca. EUR 93.04 (freier Pr.), ca. sfr 144.50 (freier Pr.)</subfield><subfield code="9">978-0-387-09535-6</subfield></datafield><datafield tag="024" ind1="3" ind2=" "><subfield code="a">9780387095356</subfield></datafield><datafield tag="028" ind1="5" ind2="2"><subfield code="a">12199969</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)254636686</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB989383687</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">XA-DE-BE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3750</subfield><subfield code="0">(DE-625)157334:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">620</subfield><subfield code="2">sdnb</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Acar, Cenk</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">MEMS vibratory gyroscopes</subfield><subfield code="b">structural approaches to improve robustness</subfield><subfield code="c">Cenk Acar and Andrei Shkel</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York, NY</subfield><subfield code="b">Springer</subfield><subfield code="c">2009</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XII, 256 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">MEMS reference shelf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mannigfaltigkeit</subfield><subfield code="0">(DE-588)4037379-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Bordismengruppe</subfield><subfield code="0">(DE-588)4146315-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Schwingungsverhalten</subfield><subfield code="0">(DE-588)4180569-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Periodische Abbildung</subfield><subfield code="0">(DE-588)4173777-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Differenzierbare Mannigfaltigkeit</subfield><subfield code="0">(DE-588)4012269-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Differenzierbare periodische Abbildung</subfield><subfield code="0">(DE-588)4149804-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Differenzierbare Abbildung</subfield><subfield code="0">(DE-588)4149802-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Differenzierbarkeit</subfield><subfield code="0">(DE-588)4149807-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Gyroskop</subfield><subfield code="0">(DE-588)4158614-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Schwingungsverhalten</subfield><subfield code="0">(DE-588)4180569-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Gyroskop</subfield><subfield code="0">(DE-588)4158614-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Periodische Abbildung</subfield><subfield code="0">(DE-588)4173777-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Differenzierbarkeit</subfield><subfield code="0">(DE-588)4149807-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Differenzierbare Mannigfaltigkeit</subfield><subfield code="0">(DE-588)4012269-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="1"><subfield code="a">Bordismengruppe</subfield><subfield code="0">(DE-588)4146315-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="3" ind2="0"><subfield code="a">Periodische Abbildung</subfield><subfield code="0">(DE-588)4173777-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="3" ind2="1"><subfield code="a">Mannigfaltigkeit</subfield><subfield code="0">(DE-588)4037379-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="3" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="4" ind2="0"><subfield code="a">Differenzierbare Abbildung</subfield><subfield code="0">(DE-588)4149802-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="4" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="5" ind2="0"><subfield code="a">Differenzierbare periodische Abbildung</subfield><subfield code="0">(DE-588)4149804-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="5" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Shkel, Andrei M.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Digitalisierung UB Bayreuth</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016793304&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-016793304</subfield></datafield></record></collection> |
| id | DE-604.BV035125716 |
| illustrated | Illustrated |
| index_date | 2024-07-02T22:22:50Z |
| indexdate | 2024-07-09T21:22:54Z |
| institution | BVB |
| isbn | 9780387095356 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016793304 |
| oclc_num | 254636686 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | XII, 256 S. Ill., graph. Darst. |
| publishDate | 2009 |
| publishDateSearch | 2009 |
| publishDateSort | 2009 |
| publisher | Springer |
| record_format | marc |
| series2 | MEMS reference shelf |
| spelling | Acar, Cenk Verfasser aut MEMS vibratory gyroscopes structural approaches to improve robustness Cenk Acar and Andrei Shkel New York, NY Springer 2009 XII, 256 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier MEMS reference shelf Mannigfaltigkeit (DE-588)4037379-4 gnd rswk-swf Bordismengruppe (DE-588)4146315-8 gnd rswk-swf Schwingungsverhalten (DE-588)4180569-0 gnd rswk-swf Periodische Abbildung (DE-588)4173777-5 gnd rswk-swf Differenzierbare Mannigfaltigkeit (DE-588)4012269-4 gnd rswk-swf Differenzierbare periodische Abbildung (DE-588)4149804-5 gnd rswk-swf Differenzierbare Abbildung (DE-588)4149802-1 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Differenzierbarkeit (DE-588)4149807-0 gnd rswk-swf Gyroskop (DE-588)4158614-1 gnd rswk-swf MEMS (DE-588)4824724-8 s Schwingungsverhalten (DE-588)4180569-0 s Gyroskop (DE-588)4158614-1 s DE-604 Periodische Abbildung (DE-588)4173777-5 s Differenzierbarkeit (DE-588)4149807-0 s Differenzierbare Mannigfaltigkeit (DE-588)4012269-4 s Bordismengruppe (DE-588)4146315-8 s Mannigfaltigkeit (DE-588)4037379-4 s Differenzierbare Abbildung (DE-588)4149802-1 s Differenzierbare periodische Abbildung (DE-588)4149804-5 s Shkel, Andrei M. Verfasser aut Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016793304&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Acar, Cenk Shkel, Andrei M. MEMS vibratory gyroscopes structural approaches to improve robustness Mannigfaltigkeit (DE-588)4037379-4 gnd Bordismengruppe (DE-588)4146315-8 gnd Schwingungsverhalten (DE-588)4180569-0 gnd Periodische Abbildung (DE-588)4173777-5 gnd Differenzierbare Mannigfaltigkeit (DE-588)4012269-4 gnd Differenzierbare periodische Abbildung (DE-588)4149804-5 gnd Differenzierbare Abbildung (DE-588)4149802-1 gnd MEMS (DE-588)4824724-8 gnd Differenzierbarkeit (DE-588)4149807-0 gnd Gyroskop (DE-588)4158614-1 gnd |
| subject_GND | (DE-588)4037379-4 (DE-588)4146315-8 (DE-588)4180569-0 (DE-588)4173777-5 (DE-588)4012269-4 (DE-588)4149804-5 (DE-588)4149802-1 (DE-588)4824724-8 (DE-588)4149807-0 (DE-588)4158614-1 |
| title | MEMS vibratory gyroscopes structural approaches to improve robustness |
| title_auth | MEMS vibratory gyroscopes structural approaches to improve robustness |
| title_exact_search | MEMS vibratory gyroscopes structural approaches to improve robustness |
| title_exact_search_txtP | MEMS vibratory gyroscopes structural approaches to improve robustness |
| title_full | MEMS vibratory gyroscopes structural approaches to improve robustness Cenk Acar and Andrei Shkel |
| title_fullStr | MEMS vibratory gyroscopes structural approaches to improve robustness Cenk Acar and Andrei Shkel |
| title_full_unstemmed | MEMS vibratory gyroscopes structural approaches to improve robustness Cenk Acar and Andrei Shkel |
| title_short | MEMS vibratory gyroscopes |
| title_sort | mems vibratory gyroscopes structural approaches to improve robustness |
| title_sub | structural approaches to improve robustness |
| topic | Mannigfaltigkeit (DE-588)4037379-4 gnd Bordismengruppe (DE-588)4146315-8 gnd Schwingungsverhalten (DE-588)4180569-0 gnd Periodische Abbildung (DE-588)4173777-5 gnd Differenzierbare Mannigfaltigkeit (DE-588)4012269-4 gnd Differenzierbare periodische Abbildung (DE-588)4149804-5 gnd Differenzierbare Abbildung (DE-588)4149802-1 gnd MEMS (DE-588)4824724-8 gnd Differenzierbarkeit (DE-588)4149807-0 gnd Gyroskop (DE-588)4158614-1 gnd |
| topic_facet | Mannigfaltigkeit Bordismengruppe Schwingungsverhalten Periodische Abbildung Differenzierbare Mannigfaltigkeit Differenzierbare periodische Abbildung Differenzierbare Abbildung MEMS Differenzierbarkeit Gyroskop |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016793304&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT acarcenk memsvibratorygyroscopesstructuralapproachestoimproverobustness AT shkelandreim memsvibratorygyroscopesstructuralapproachestoimproverobustness |