Scaling issues and design of MEMS:
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| Main Authors: | , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Chichester
Wiley
2007
|
| Subjects: | |
| Online Access: | Publisher description Table of contents only Contributor biographical information Inhaltsverzeichnis |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | XIII, 229 S. Ill., graph. Darst. |
| ISBN: | 9780470016992 047001699X |
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| 100 | 1 | |a Baglio, Salvatore |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Scaling issues and design of MEMS |c Salvatore Baglio ; Salvatore Castorina ; Nicolò Savalli |
| 264 | 1 | |a Chichester |b Wiley |c 2007 | |
| 300 | |a XIII, 229 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a Microelectromechanical systems |x Design and construction | |
| 700 | 1 | |a Castorina, Salvatore |e Verfasser |4 aut | |
| 700 | 1 | |a Savalli, Nicolò |e Verfasser |4 aut | |
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Record in the Search Index
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| adam_text | SCALING ISSUES AND DESIGN OF MEMS SALVATORE BAGLIO UNIVERSITY OF
CATANIA, ITALY SALVATORE CASTORINA SYNAPTO, CATANIA, ITALY NICOLOE
SAVALLI UNIVERSITY OF CATANIA, ITALY BICENTENNIAL B I C ENTEN N I A L
JOHN WILEY & SONS, LTD CONTENTS PREFACE IX INTRODUCTION XI 1 SCALING OF
MEMS 1 1.1 INTRODUCTION TO SCALING ISSUES 1 1.2 EXAMPLES OF DIMENSIONAL
SCALING POTENTIALS 4 1.2.1 SCALING EFFECTS ON A CANTILEVER BEAM 4 1.2.2
SCALING OF ELECTROSTATIC ACTUATORS 8 1.2.3 SCALING OF THERMAL ACTUATORS
11 1.3 MOTIVATION, FABRICATION AND SCALING OF MEMS 14 1.4 SCALING AS A
METHODOLOGICAL APPROACH 16 REFERENCES 17 2 SCALING OF MICROACTUATORS -
AN OVERVIEW 19 2.1 ELECTROSTATIC ACTUATORS 19 2.1.1 TRANSVERSE COMBS
MODELLING 20 2.1.2 LATERAL COMBS MODELLING 22 2.2 MAGNETIC TRANSDUCERS
23 2.2.1 MAGNETIC ACTUATORS 25 2.2.2 FERROMAGNETIC TRANSDUCERS 31 2.3
THERMAL ACTUATORS 36 2.3.1 THERMOMECHANICAL ACTUATORS 40
ACKNOWLEDGEMENTS 50 REFERENCES 50 3 SCALING OF THERMAL SENSORS 53 3.1
THERMOELECTRIC SENSORS 53 3.2 APPLICATION: DEW-POINT RELATIVE HUMIDITY
SENSORS 61 3.2.1 DEVICE STRUCTURES AND OPERATING PRINCIPLES 62 VI
CONTENTS 3.2.2 DEVICE MODELLING AND SIMULATIONS 64 3.2.3 DEVICE DESIGN
67 3.3 CONCLUSIONS 71 ACKNOWLEDGEMENTS 71 REFERENCES 72 4 INDUCTIVE
SENSORS FOR MAGNETIC FIELDS 73 4.1 INDUCTIVE MICROSENSORS FOR MAGNETIC
PARTICLES 77 4.1.1 INTEGRATED INDUCTIVE SENSORS 77 4.1.2 PLANAR
DIFFERENTIAL TRANSFORMER 79 4.1.3 SIGNAL-CONDITIONING CIRCUITS 84 4.1.4
SIMULATION OF THE PLANAR DIFFERENTIAL TRANSFORMER 85 4.1.5 EXPERIMENTAL
RESULTS 87 4.2 MAGNETIC IMMUNOASSAY SYSTEMS 97 ACKNOWLEDGEMENTS 100
REFERENCES 100 5 SCALING OF MECHANICAL SENSORS 103 5.1 INTRODUCTION 103
5.2 DEVICE MODELLING AND FABRICATION PROCESSES 105 5.2.1 FABRICATION
PROCESSES 105 5.2.2 DEVICES MODELLING 107 5.2.3 ACCELEROMETERS 109 5.2.4
RESONANT MASS SENSORS 110 5.3 EXPERIMENTAL DEVICE PROTOTYPES 112 5.3.1
CMOSDEVICES 112 5.3.2 SOIDEVICES 116 5.3.3 FINITE DEMENT MODELLING 120
5.4 SCALING ISSUES ON MICROACCELEROMETERS AND MASS SENSORS 123 5.5 SOME
EXPERIMENTAL RESULTS 127 5.6 VIBRATING MICROGYROSCOPES 130 5.6.1 COUPLED
VIBRATORY GYROSCOPES 134 ACKNOWLEDGEMENTS 145 REFERENCES 145 6 SCALING
OF ENERGY SOURCES 149 6.1 INTRODUCTION 149 6.2 ENERGY SUPPLY STRATEGIES
FOR AUTONOMOUS MICROSYSTEMS 151 CONTENTS VN 6.2.1 USE OF MICROLENSES IN
PHOTOTHERMOMECHANICAL ACTUATION 152 6.2.2 TECHNOLOGIES, MATERIALS AND
DESIGN OF PHOTOTHERMOMECHANICAL ACTUATORS 157 6.3 PHOTOTHERMOMECHANICAL
AND PHOTOTHERMOELECTRIC STRATEGIES FOR HIGHLY EFFICIENT POWER SUPPLY OF
AUTONOMOUS MICROSYSTEMS 160 6.3.1 PHOTOTHERMOELECTRIC POWER GENERATION
161 6.4 EFFICIENCY OF THE COMBINED ENERGY SUPPLY STRATEGY 166 REFERENCES
167 7 TECHNOLOGIES AND AERCHITECTURES FOR AUTONOMOUS MEMS MICROROBOTS 169
7.1 DESIGN ISSUES IN MICROROBOTS 169 7.2 A MICROROBOT ARCHITECTURE BASED
ON PHOTOTHERMAI STRATEGY 171 7.3 A MICROROBOT AS A PARADIGM FOR THE
ANALYSIS OF SCALING IN MICROSYSTEMS 173 REFERENCES 178 8 MOVING TOWARDS
THE NANOSCALE 179 8.1 SEMICONDUCTOR-BASED NANO-ELECTROMECHANICAL SYSTEMS
179 8.2 NANOFABRICATION FACILITIES 180 8.3 OVERVIEW OF NANOSENSORS 181
8.3.1 USE OF AFM FOR MATERIALS AND NANODEVICES CHARACTERIZATION 182
8.3.2 SCANNING THERMAL MICROSCOPY (STHM) 182 8.3.3 SCANNING HALL PROBE
MICROSCOPY 183 8.3.4 MECHANICAL RESONANT IMMUNOSPECIFIC BIOLOGICAL
DETECTOR 183 8.3.5 MICROMECHANICAL SENSOR FOR DIFFERENTIAL DETECTION OF
NANOSCALE MOTIONS 184 8.3.6 NANOMAGNETIC SENSORS 184 8.3.7 NANO-WIRE
PIEZORESISTORS 185 8.3.8 NANOMETRE-SCALE MECHANICAL RESONATORS 185 8.3.9
ELECTRIC CHARGE MECHANICAL NANOSENSOR 186 8.4 CONCLUDING REMARKS 187
REFERENCES 187 VLLL CONTENTS 9 EXAMPLES OF SCALING EFFECTS ANALYSIS -
DIEES-MEMSLAB 189 9.1 INTRODUCTION 189 9.2 EXAMPLES OF SCALING
CANTILEVER BEAM DEVICES 191 9.3 DIEES-MEMSLAB-TUTORIAL 198 9.3.1
INTRODUCTION 198 9.3.2 DESCRIPTIONS OF THE MICROSTRUCTURES AND
ANALYTICAL METHODS 200 9.4 CONCLUSIONS 219 REFERENCES 220 10 CONCLUDING
REMARKS 221 INDEX 223
|
| adam_txt |
SCALING ISSUES AND DESIGN OF MEMS SALVATORE BAGLIO UNIVERSITY OF
CATANIA, ITALY SALVATORE CASTORINA SYNAPTO, CATANIA, ITALY NICOLOE
SAVALLI UNIVERSITY OF CATANIA, ITALY BICENTENNIAL B I C ENTEN N I A L
JOHN WILEY & SONS, LTD CONTENTS PREFACE IX INTRODUCTION XI 1 SCALING OF
MEMS 1 1.1 INTRODUCTION TO SCALING ISSUES 1 1.2 EXAMPLES OF DIMENSIONAL
SCALING POTENTIALS 4 1.2.1 SCALING EFFECTS ON A CANTILEVER BEAM 4 1.2.2
SCALING OF ELECTROSTATIC ACTUATORS 8 1.2.3 SCALING OF THERMAL ACTUATORS
11 1.3 MOTIVATION, FABRICATION AND SCALING OF MEMS 14 1.4 SCALING AS A
METHODOLOGICAL APPROACH 16 REFERENCES 17 2 SCALING OF MICROACTUATORS -
AN OVERVIEW 19 2.1 ELECTROSTATIC ACTUATORS 19 2.1.1 TRANSVERSE COMBS
MODELLING 20 2.1.2 LATERAL COMBS MODELLING 22 2.2 MAGNETIC TRANSDUCERS
23 2.2.1 MAGNETIC ACTUATORS 25 2.2.2 FERROMAGNETIC TRANSDUCERS 31 2.3
THERMAL ACTUATORS 36 2.3.1 THERMOMECHANICAL ACTUATORS 40
ACKNOWLEDGEMENTS 50 REFERENCES 50 3 SCALING OF THERMAL SENSORS 53 3.1
THERMOELECTRIC SENSORS 53 3.2 APPLICATION: DEW-POINT RELATIVE HUMIDITY
SENSORS 61 3.2.1 DEVICE STRUCTURES AND OPERATING PRINCIPLES 62 VI
CONTENTS 3.2.2 DEVICE MODELLING AND SIMULATIONS 64 3.2.3 DEVICE DESIGN
67 3.3 CONCLUSIONS 71 ACKNOWLEDGEMENTS 71 REFERENCES 72 4 INDUCTIVE
SENSORS FOR MAGNETIC FIELDS 73 4.1 INDUCTIVE MICROSENSORS FOR MAGNETIC
PARTICLES 77 4.1.1 INTEGRATED INDUCTIVE SENSORS 77 4.1.2 PLANAR
DIFFERENTIAL TRANSFORMER 79 4.1.3 SIGNAL-CONDITIONING CIRCUITS 84 4.1.4
SIMULATION OF THE PLANAR DIFFERENTIAL TRANSFORMER 85 4.1.5 EXPERIMENTAL
RESULTS 87 4.2 MAGNETIC IMMUNOASSAY SYSTEMS 97 ACKNOWLEDGEMENTS 100
REFERENCES 100 5 SCALING OF MECHANICAL SENSORS 103 5.1 INTRODUCTION 103
5.2 DEVICE MODELLING AND FABRICATION PROCESSES 105 5.2.1 FABRICATION
PROCESSES 105 5.2.2 DEVICES MODELLING 107 5.2.3 ACCELEROMETERS 109 5.2.4
RESONANT MASS SENSORS 110 5.3 EXPERIMENTAL DEVICE PROTOTYPES 112 5.3.1
CMOSDEVICES 112 5.3.2 SOIDEVICES 116 5.3.3 FINITE DEMENT MODELLING 120
5.4 SCALING ISSUES ON MICROACCELEROMETERS AND MASS SENSORS 123 5.5 SOME
EXPERIMENTAL RESULTS 127 5.6 VIBRATING MICROGYROSCOPES 130 5.6.1 COUPLED
VIBRATORY GYROSCOPES 134 ACKNOWLEDGEMENTS 145 REFERENCES 145 6 SCALING
OF ENERGY SOURCES 149 6.1 INTRODUCTION 149 6.2 ENERGY SUPPLY STRATEGIES
FOR AUTONOMOUS MICROSYSTEMS 151 CONTENTS VN 6.2.1 USE OF MICROLENSES IN
PHOTOTHERMOMECHANICAL ACTUATION 152 6.2.2 TECHNOLOGIES, MATERIALS AND
DESIGN OF PHOTOTHERMOMECHANICAL ACTUATORS 157 6.3 PHOTOTHERMOMECHANICAL
AND PHOTOTHERMOELECTRIC STRATEGIES FOR HIGHLY EFFICIENT POWER SUPPLY OF
AUTONOMOUS MICROSYSTEMS 160 6.3.1 PHOTOTHERMOELECTRIC POWER GENERATION
161 6.4 EFFICIENCY OF THE COMBINED ENERGY SUPPLY STRATEGY 166 REFERENCES
167 7 TECHNOLOGIES AND AERCHITECTURES FOR AUTONOMOUS MEMS MICROROBOTS 169
7.1 DESIGN ISSUES IN MICROROBOTS 169 7.2 A MICROROBOT ARCHITECTURE BASED
ON PHOTOTHERMAI STRATEGY 171 7.3 A MICROROBOT AS A PARADIGM FOR THE
ANALYSIS OF SCALING IN MICROSYSTEMS 173 REFERENCES 178 8 MOVING TOWARDS
THE NANOSCALE 179 8.1 SEMICONDUCTOR-BASED NANO-ELECTROMECHANICAL SYSTEMS
179 8.2 NANOFABRICATION FACILITIES 180 8.3 OVERVIEW OF NANOSENSORS 181
8.3.1 USE OF AFM FOR MATERIALS AND NANODEVICES CHARACTERIZATION 182
8.3.2 SCANNING THERMAL MICROSCOPY (STHM) 182 8.3.3 SCANNING HALL PROBE
MICROSCOPY 183 8.3.4 MECHANICAL RESONANT IMMUNOSPECIFIC BIOLOGICAL
DETECTOR 183 8.3.5 MICROMECHANICAL SENSOR FOR DIFFERENTIAL DETECTION OF
NANOSCALE MOTIONS 184 8.3.6 NANOMAGNETIC SENSORS 184 8.3.7 NANO-WIRE
PIEZORESISTORS 185 8.3.8 NANOMETRE-SCALE MECHANICAL RESONATORS 185 8.3.9
ELECTRIC CHARGE MECHANICAL NANOSENSOR 186 8.4 CONCLUDING REMARKS 187
REFERENCES 187 VLLL CONTENTS 9 EXAMPLES OF SCALING EFFECTS ANALYSIS -
DIEES-MEMSLAB 189 9.1 INTRODUCTION 189 9.2 EXAMPLES OF SCALING
CANTILEVER BEAM DEVICES 191 9.3 DIEES-MEMSLAB-TUTORIAL 198 9.3.1
INTRODUCTION 198 9.3.2 DESCRIPTIONS OF THE MICROSTRUCTURES AND
ANALYTICAL METHODS 200 9.4 CONCLUSIONS 219 REFERENCES 220 10 CONCLUDING
REMARKS 221 INDEX 223 |
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| index_date | 2024-07-02T21:44:15Z |
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| language | English |
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| spelling | Baglio, Salvatore Verfasser aut Scaling issues and design of MEMS Salvatore Baglio ; Salvatore Castorina ; Nicolò Savalli Chichester Wiley 2007 XIII, 229 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Includes bibliographical references and index Microelectromechanical systems Design and construction Castorina, Salvatore Verfasser aut Savalli, Nicolò Verfasser aut http://www.loc.gov/catdir/enhancements/fy0743/2007037324-d.html Publisher description http://www.loc.gov/catdir/enhancements/fy0810/2007037324-t.html Table of contents only http://www.loc.gov/catdir/enhancements/fy0834/2007037324-b.html Contributor biographical information GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016681525&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Baglio, Salvatore Castorina, Salvatore Savalli, Nicolò Scaling issues and design of MEMS Microelectromechanical systems Design and construction |
| title | Scaling issues and design of MEMS |
| title_auth | Scaling issues and design of MEMS |
| title_exact_search | Scaling issues and design of MEMS |
| title_exact_search_txtP | Scaling issues and design of MEMS |
| title_full | Scaling issues and design of MEMS Salvatore Baglio ; Salvatore Castorina ; Nicolò Savalli |
| title_fullStr | Scaling issues and design of MEMS Salvatore Baglio ; Salvatore Castorina ; Nicolò Savalli |
| title_full_unstemmed | Scaling issues and design of MEMS Salvatore Baglio ; Salvatore Castorina ; Nicolò Savalli |
| title_short | Scaling issues and design of MEMS |
| title_sort | scaling issues and design of mems |
| topic | Microelectromechanical systems Design and construction |
| topic_facet | Microelectromechanical systems Design and construction |
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