Gettering and defect engineering in semiconductor technology: proceedings of the 5th international autumn meeting held in Chossewitz, near Frankfurt (Oder), Germany, October 9 - 14, 1993
Saved in:
| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
Zürich
Trans Tech Publications
1993
|
| Series: | Diffusion and defect data
B, Solid state phenomena ; 32/33 |
| Subjects: | |
| Physical Description: | XVII, 630 S. Ill., graph. Darst. |
| ISBN: | 3908450004 |
Staff View
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| id | DE-604.BV026441342 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T23:12:39Z |
| institution | BVB |
| institution_GND | (DE-588)1400409-4 |
| isbn | 3908450004 |
| language | English |
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| physical | XVII, 630 S. Ill., graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| publisher | Trans Tech Publications |
| record_format | marc |
| series | Diffusion and defect data |
| series2 | Diffusion and defect data : B, Solid state phenomena |
| spelling | Gettering and defect engineering in semiconductor technology proceedings of the 5th international autumn meeting held in Chossewitz, near Frankfurt (Oder), Germany, October 9 - 14, 1993 GADEST '93. Ed. H. G. Grimmeiss ... Zürich Trans Tech Publications 1993 XVII, 630 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Diffusion and defect data : B, Solid state phenomena 32/33 Halbleiter (DE-588)4022993-2 gnd rswk-swf Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleiter (DE-588)4022993-2 s Gitterbaufehler (DE-588)4125030-8 s 1\p DE-604 Grimmeiss, Hermann G. Sonstige oth GADEST 5 1993 Chossewitz Sonstige (DE-588)1400409-4 oth Diffusion and defect data B, Solid state phenomena ; 32/33 (DE-604)BV021637351 32 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Gettering and defect engineering in semiconductor technology proceedings of the 5th international autumn meeting held in Chossewitz, near Frankfurt (Oder), Germany, October 9 - 14, 1993 Diffusion and defect data Halbleiter (DE-588)4022993-2 gnd Gitterbaufehler (DE-588)4125030-8 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4125030-8 (DE-588)1071861417 |
| title | Gettering and defect engineering in semiconductor technology proceedings of the 5th international autumn meeting held in Chossewitz, near Frankfurt (Oder), Germany, October 9 - 14, 1993 |
| title_auth | Gettering and defect engineering in semiconductor technology proceedings of the 5th international autumn meeting held in Chossewitz, near Frankfurt (Oder), Germany, October 9 - 14, 1993 |
| title_exact_search | Gettering and defect engineering in semiconductor technology proceedings of the 5th international autumn meeting held in Chossewitz, near Frankfurt (Oder), Germany, October 9 - 14, 1993 |
| title_full | Gettering and defect engineering in semiconductor technology proceedings of the 5th international autumn meeting held in Chossewitz, near Frankfurt (Oder), Germany, October 9 - 14, 1993 GADEST '93. Ed. H. G. Grimmeiss ... |
| title_fullStr | Gettering and defect engineering in semiconductor technology proceedings of the 5th international autumn meeting held in Chossewitz, near Frankfurt (Oder), Germany, October 9 - 14, 1993 GADEST '93. Ed. H. G. Grimmeiss ... |
| title_full_unstemmed | Gettering and defect engineering in semiconductor technology proceedings of the 5th international autumn meeting held in Chossewitz, near Frankfurt (Oder), Germany, October 9 - 14, 1993 GADEST '93. Ed. H. G. Grimmeiss ... |
| title_short | Gettering and defect engineering in semiconductor technology |
| title_sort | gettering and defect engineering in semiconductor technology proceedings of the 5th international autumn meeting held in chossewitz near frankfurt oder germany october 9 14 1993 |
| title_sub | proceedings of the 5th international autumn meeting held in Chossewitz, near Frankfurt (Oder), Germany, October 9 - 14, 1993 |
| topic | Halbleiter (DE-588)4022993-2 gnd Gitterbaufehler (DE-588)4125030-8 gnd |
| topic_facet | Halbleiter Gitterbaufehler Konferenzschrift |
| volume_link | (DE-604)BV021637351 |
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