Sputtering by particle bombardment: 3 Characteristics of sputtered particles, technical applications
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
1991
|
| Schriftenreihe: | Topics in applied physics
64 Topics in applied physics ... |
| Schlagworte: | |
| Beschreibung: | XIII, 410 S. |
| ISBN: | 3540534288 0387534288 |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-09T22:15:29Z |
| institution | BVB |
| isbn | 3540534288 0387534288 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019197253 |
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| physical | XIII, 410 S. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | Springer |
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| series | Topics in applied physics |
| series2 | Topics in applied physics |
| spelling | Sputtering by particle bombardment 3 Characteristics of sputtered particles, technical applications ed. by R. Behrisch Berlin [u.a.] Springer 1991 XIII, 410 S. txt rdacontent n rdamedia nc rdacarrier Topics in applied physics 64 Topics in applied physics ... Zerstäubung (DE-588)4067687-0 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Sputtern (DE-588)4182614-0 s DE-604 Zerstäubung (DE-588)4067687-0 s Behrisch, Rainer edt (DE-604)BV025936903 3 Topics in applied physics 64 (DE-604)BV008007504 64 Topics in applied physics ... (DE-604)BV008007504 |
| spellingShingle | Sputtering by particle bombardment Topics in applied physics Zerstäubung (DE-588)4067687-0 gnd Sputtern (DE-588)4182614-0 gnd |
| subject_GND | (DE-588)4067687-0 (DE-588)4182614-0 (DE-588)4143413-4 |
| title | Sputtering by particle bombardment |
| title_auth | Sputtering by particle bombardment |
| title_exact_search | Sputtering by particle bombardment |
| title_full | Sputtering by particle bombardment 3 Characteristics of sputtered particles, technical applications ed. by R. Behrisch |
| title_fullStr | Sputtering by particle bombardment 3 Characteristics of sputtered particles, technical applications ed. by R. Behrisch |
| title_full_unstemmed | Sputtering by particle bombardment 3 Characteristics of sputtered particles, technical applications ed. by R. Behrisch |
| title_short | Sputtering by particle bombardment |
| title_sort | sputtering by particle bombardment characteristics of sputtered particles technical applications |
| topic | Zerstäubung (DE-588)4067687-0 gnd Sputtern (DE-588)4182614-0 gnd |
| topic_facet | Zerstäubung Sputtern Aufsatzsammlung |
| volume_link | (DE-604)BV025936903 (DE-604)BV008007504 |
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