Sputtering by particle bombardment: physical sputtering of single-element solids 1
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin [u.a.]
Springer
1981
|
| Series: | Topics in applied physics
47 |
| Physical Description: | 281 S. graph. Darst. |
Staff View
MARC
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Record in the Search Index
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| author2 | Behrisch, R. |
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| author_facet | Behrisch, R. |
| building | Verbundindex |
| bvnumber | BV025947906 |
| classification_rvk | UP 9350 |
| ctrlnum | (OCoLC)310856723 (DE-599)BVBBV025947906 |
| discipline | Physik |
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| id | DE-604.BV025947906 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:15:24Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019191253 |
| oclc_num | 310856723 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | 281 S. graph. Darst. |
| publishDate | 1981 |
| publishDateSearch | 1981 |
| publishDateSort | 1981 |
| publisher | Springer |
| record_format | marc |
| series | Topics in applied physics |
| series2 | Topics in applied physics |
| spelling | Sputtering by particle bombardment physical sputtering of single-element solids 1 ed. by R. Behrisch ... Berlin [u.a.] Springer 1981 281 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Topics in applied physics 47 Topics in applied physics ... Behrisch, R. edt (DE-604)BV025886718 1 Topics in applied physics 47 (DE-604)BV008007504 47 |
| spellingShingle | Sputtering by particle bombardment physical sputtering of single-element solids Topics in applied physics |
| title | Sputtering by particle bombardment physical sputtering of single-element solids |
| title_auth | Sputtering by particle bombardment physical sputtering of single-element solids |
| title_exact_search | Sputtering by particle bombardment physical sputtering of single-element solids |
| title_full | Sputtering by particle bombardment physical sputtering of single-element solids 1 ed. by R. Behrisch ... |
| title_fullStr | Sputtering by particle bombardment physical sputtering of single-element solids 1 ed. by R. Behrisch ... |
| title_full_unstemmed | Sputtering by particle bombardment physical sputtering of single-element solids 1 ed. by R. Behrisch ... |
| title_short | Sputtering by particle bombardment |
| title_sort | sputtering by particle bombardment physical sputtering of single element solids |
| title_sub | physical sputtering of single-element solids |
| volume_link | (DE-604)BV025886718 (DE-604)BV008007504 |
| work_keys_str_mv | AT behrischr sputteringbyparticlebombardmentphysicalsputteringofsingleelementsolids1 |