Sputtering by particle bombardment: physical sputtering of single-element solids
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| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | Undetermined |
| Published: |
Berlin [u.a.]
Springer
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| Series: | Topics in applied physics
... |
| Subjects: |
Staff View
MARC
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Record in the Search Index
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| author2 | Behrisch, R. |
| author2_role | edt |
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| author_facet | Behrisch, R. |
| building | Verbundindex |
| bvnumber | BV025886718 |
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| discipline | Physik |
| format | Book |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-09T22:12:40Z |
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| series2 | Topics in applied physics |
| spelling | Sputtering by particle bombardment physical sputtering of single-element solids ed. by R. Behrisch ... Berlin [u.a.] Springer txt rdacontent n rdamedia nc rdacarrier Topics in applied physics ... Sputtern (DE-588)4182614-0 gnd rswk-swf Zerstäubung (DE-588)4067687-0 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Sputtern (DE-588)4182614-0 s DE-604 Zerstäubung (DE-588)4067687-0 s Behrisch, R. edt |
| spellingShingle | Sputtering by particle bombardment physical sputtering of single-element solids Sputtern (DE-588)4182614-0 gnd Zerstäubung (DE-588)4067687-0 gnd |
| subject_GND | (DE-588)4182614-0 (DE-588)4067687-0 (DE-588)4143413-4 |
| title | Sputtering by particle bombardment physical sputtering of single-element solids |
| title_auth | Sputtering by particle bombardment physical sputtering of single-element solids |
| title_exact_search | Sputtering by particle bombardment physical sputtering of single-element solids |
| title_full | Sputtering by particle bombardment physical sputtering of single-element solids ed. by R. Behrisch ... |
| title_fullStr | Sputtering by particle bombardment physical sputtering of single-element solids ed. by R. Behrisch ... |
| title_full_unstemmed | Sputtering by particle bombardment physical sputtering of single-element solids ed. by R. Behrisch ... |
| title_short | Sputtering by particle bombardment |
| title_sort | sputtering by particle bombardment physical sputtering of single element solids |
| title_sub | physical sputtering of single-element solids |
| topic | Sputtern (DE-588)4182614-0 gnd Zerstäubung (DE-588)4067687-0 gnd |
| topic_facet | Sputtern Zerstäubung Aufsatzsammlung |
| work_keys_str_mv | AT behrischr sputteringbyparticlebombardmentphysicalsputteringofsingleelementsolids |