Ion implantation: science and technology
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Orlando [u.a.]
Acad. Pr.
1984
|
| Subjects: | |
| Physical Description: | XI, 635 S. |
Staff View
MARC
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Record in the Search Index
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| author2_role | edt |
| author2_variant | j f z jf jfz |
| author_facet | Ziegler, James F. |
| building | Verbundindex |
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| discipline | Physik |
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| genre_facet | Aufsatzsammlung |
| id | DE-604.BV025886087 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T22:14:24Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019132785 |
| oclc_num | 729578831 |
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| physical | XI, 635 S. |
| publishDate | 1984 |
| publishDateSearch | 1984 |
| publishDateSort | 1984 |
| publisher | Acad. Pr. |
| record_format | marc |
| spelling | Ion implantation science and technology ed. by J. F. Ziegler Orlando [u.a.] Acad. Pr. 1984 XI, 635 S. txt rdacontent n rdamedia nc rdacarrier Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Ionenimplantation (DE-588)4027606-5 s DE-604 Ziegler, James F. edt |
| spellingShingle | Ion implantation science and technology Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)4143413-4 |
| title | Ion implantation science and technology |
| title_auth | Ion implantation science and technology |
| title_exact_search | Ion implantation science and technology |
| title_full | Ion implantation science and technology ed. by J. F. Ziegler |
| title_fullStr | Ion implantation science and technology ed. by J. F. Ziegler |
| title_full_unstemmed | Ion implantation science and technology ed. by J. F. Ziegler |
| title_short | Ion implantation |
| title_sort | ion implantation science and technology |
| title_sub | science and technology |
| topic | Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Ionenimplantation Aufsatzsammlung |
| work_keys_str_mv | AT zieglerjamesf ionimplantationscienceandtechnology |