Excimer laser lithography:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Bellingham
SPIE Optical Engineering Press
1990
|
| Schlagworte: | |
| Beschreibung: | X, 212 S. |
| ISBN: | 0819402710 0819402729 |
Internformat
MARC
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Jain, Kanti |
| author_facet | Jain, Kanti |
| author_role | aut |
| author_sort | Jain, Kanti |
| author_variant | k j kj |
| building | Verbundindex |
| bvnumber | BV025885505 |
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| ctrlnum | (OCoLC)916315804 (DE-599)BVBBV025885505 |
| discipline | Physik |
| format | Book |
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| id | DE-604.BV025885505 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T22:14:23Z |
| institution | BVB |
| isbn | 0819402710 0819402729 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019132220 |
| oclc_num | 916315804 |
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| owner | DE-11 |
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| physical | X, 212 S. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | SPIE Optical Engineering Press |
| record_format | marc |
| spelling | Jain, Kanti Verfasser aut Excimer laser lithography Kanti Jain Bellingham SPIE Optical Engineering Press 1990 X, 212 S. txt rdacontent n rdamedia nc rdacarrier Excimerlaser (DE-588)4153300-8 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Excimerlaser (DE-588)4153300-8 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 |
| spellingShingle | Jain, Kanti Excimer laser lithography Excimerlaser (DE-588)4153300-8 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4153300-8 (DE-588)4191584-7 |
| title | Excimer laser lithography |
| title_auth | Excimer laser lithography |
| title_exact_search | Excimer laser lithography |
| title_full | Excimer laser lithography Kanti Jain |
| title_fullStr | Excimer laser lithography Kanti Jain |
| title_full_unstemmed | Excimer laser lithography Kanti Jain |
| title_short | Excimer laser lithography |
| title_sort | excimer laser lithography |
| topic | Excimerlaser (DE-588)4153300-8 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Excimerlaser Lithografie Halbleitertechnologie |
| work_keys_str_mv | AT jainkanti excimerlaserlithography |