APA (7th ed.) Citation

Micro-process engineering: A comprehensive handbook (2009.). Wiley-VCH.

Chicago Style (17th ed.) Citation

Micro-process Engineering: A Comprehensive Handbook. 2009. Weinheim: Wiley-VCH.

MLA (9th ed.) Citation

Micro-process Engineering: A Comprehensive Handbook. 2009. Wiley-VCH.

Warning: These citations may not always be 100% accurate.