VLSI electronics - microstructure science: 8 Plasma processing for VLSI
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | Undetermined |
| Published: |
New York [u.a.]
Academic Press
1984
|
| Subjects: | |
| Physical Description: | XIV, 527 S. |
| ISBN: | 0122341082 |
Staff View
MARC
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| 245 | 1 | 0 | |a VLSI electronics - microstructure science |n 8 |p Plasma processing for VLSI |c ed. by Norman G. Einspruch |
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Record in the Search Index
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| author2 | Einspruch, Norman G. |
| author2_role | edt |
| author2_variant | n g e ng nge |
| author_facet | Einspruch, Norman G. |
| building | Verbundindex |
| bvnumber | BV025759874 |
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| format | Book |
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| id | DE-604.BV025759874 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T22:18:44Z |
| institution | BVB |
| isbn | 0122341082 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019364206 |
| oclc_num | 635329098 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | XIV, 527 S. |
| publishDate | 1984 |
| publishDateSearch | 1984 |
| publishDateSort | 1984 |
| publisher | Academic Press |
| record_format | marc |
| spelling | VLSI electronics - microstructure science 8 Plasma processing for VLSI ed. by Norman G. Einspruch New York [u.a.] Academic Press 1984 XIV, 527 S. txt rdacontent n rdamedia nc rdacarrier Plasmastrahlbearbeitung (DE-588)4136199-4 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Plasmaätzen (DE-588)4174821-9 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf VLSI (DE-588)4117388-0 s DE-604 Mikroelektronik (DE-588)4039207-7 s Plasmatechnik (DE-588)4140353-8 s Plasmaätzen (DE-588)4174821-9 s Plasmastrahlbearbeitung (DE-588)4136199-4 s Sputtern (DE-588)4182614-0 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s Einspruch, Norman G. edt (DE-604)BV025241632 8 |
| spellingShingle | VLSI electronics - microstructure science Plasmastrahlbearbeitung (DE-588)4136199-4 gnd VLSI (DE-588)4117388-0 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Sputtern (DE-588)4182614-0 gnd Mikroelektronik (DE-588)4039207-7 gnd Plasmaätzen (DE-588)4174821-9 gnd Plasmatechnik (DE-588)4140353-8 gnd |
| subject_GND | (DE-588)4136199-4 (DE-588)4117388-0 (DE-588)4191584-7 (DE-588)4182614-0 (DE-588)4039207-7 (DE-588)4174821-9 (DE-588)4140353-8 |
| title | VLSI electronics - microstructure science |
| title_auth | VLSI electronics - microstructure science |
| title_exact_search | VLSI electronics - microstructure science |
| title_full | VLSI electronics - microstructure science 8 Plasma processing for VLSI ed. by Norman G. Einspruch |
| title_fullStr | VLSI electronics - microstructure science 8 Plasma processing for VLSI ed. by Norman G. Einspruch |
| title_full_unstemmed | VLSI electronics - microstructure science 8 Plasma processing for VLSI ed. by Norman G. Einspruch |
| title_short | VLSI electronics - microstructure science |
| title_sort | vlsi electronics microstructure science plasma processing for vlsi |
| topic | Plasmastrahlbearbeitung (DE-588)4136199-4 gnd VLSI (DE-588)4117388-0 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Sputtern (DE-588)4182614-0 gnd Mikroelektronik (DE-588)4039207-7 gnd Plasmaätzen (DE-588)4174821-9 gnd Plasmatechnik (DE-588)4140353-8 gnd |
| topic_facet | Plasmastrahlbearbeitung VLSI Lithografie Halbleitertechnologie Sputtern Mikroelektronik Plasmaätzen Plasmatechnik |
| volume_link | (DE-604)BV025241632 |
| work_keys_str_mv | AT einspruchnormang vlsielectronicsmicrostructurescience8 |